TW200614405A - Inspecting method for killer defect size - Google Patents

Inspecting method for killer defect size

Info

Publication number
TW200614405A
TW200614405A TW093131940A TW93131940A TW200614405A TW 200614405 A TW200614405 A TW 200614405A TW 093131940 A TW093131940 A TW 093131940A TW 93131940 A TW93131940 A TW 93131940A TW 200614405 A TW200614405 A TW 200614405A
Authority
TW
Taiwan
Prior art keywords
defect
defect size
killer
size
inspecting method
Prior art date
Application number
TW093131940A
Other languages
English (en)
Other versions
TWI240346B (en
Inventor
Ferris Liu
Chung-I Chang
Original Assignee
Promos Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Promos Technologies Inc filed Critical Promos Technologies Inc
Priority to TW93131940A priority Critical patent/TWI240346B/zh
Application granted granted Critical
Publication of TWI240346B publication Critical patent/TWI240346B/zh
Publication of TW200614405A publication Critical patent/TW200614405A/zh

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW93131940A 2004-10-21 2004-10-21 Inspecting method for killer defect size TWI240346B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93131940A TWI240346B (en) 2004-10-21 2004-10-21 Inspecting method for killer defect size

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93131940A TWI240346B (en) 2004-10-21 2004-10-21 Inspecting method for killer defect size

Publications (2)

Publication Number Publication Date
TWI240346B TWI240346B (en) 2005-09-21
TW200614405A true TW200614405A (en) 2006-05-01

Family

ID=37007729

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93131940A TWI240346B (en) 2004-10-21 2004-10-21 Inspecting method for killer defect size

Country Status (1)

Country Link
TW (1) TWI240346B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108133900A (zh) * 2017-12-21 2018-06-08 上海华力微电子有限公司 一种缺陷扫描机台及其缺陷自动分类方法
TWI787781B (zh) * 2021-04-09 2022-12-21 住華科技股份有限公司 監控自動光學檢測裝置的方法及系統

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9347862B2 (en) * 2013-08-06 2016-05-24 Kla-Tencor Corp. Setting up a wafer inspection process using programmed defects

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108133900A (zh) * 2017-12-21 2018-06-08 上海华力微电子有限公司 一种缺陷扫描机台及其缺陷自动分类方法
TWI787781B (zh) * 2021-04-09 2022-12-21 住華科技股份有限公司 監控自動光學檢測裝置的方法及系統

Also Published As

Publication number Publication date
TWI240346B (en) 2005-09-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees