TW200605965A - Base plate coating device - Google Patents

Base plate coating device

Info

Publication number
TW200605965A
TW200605965A TW094122172A TW94122172A TW200605965A TW 200605965 A TW200605965 A TW 200605965A TW 094122172 A TW094122172 A TW 094122172A TW 94122172 A TW94122172 A TW 94122172A TW 200605965 A TW200605965 A TW 200605965A
Authority
TW
Taiwan
Prior art keywords
base plate
coating
execution region
coating device
coating liquid
Prior art date
Application number
TW094122172A
Other languages
Chinese (zh)
Inventor
Eijirou Sakamoto
Yamato Iwamori
Shinichi Matsunari
Original Assignee
Hirata Spinning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Spinning filed Critical Hirata Spinning
Publication of TW200605965A publication Critical patent/TW200605965A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

A base plate coating device which is capable of stably holding the level of a base plate in a coating execution region and uniformly applying a coating liquid onto the base plate. The base plate coating device for coating a base plate with a coating liquid while transferring the base plate is characterized in that the device comprises a transfer means for transferring the base plate, a base plate supporting means for holding the base plate in the coating execution region for coating the base plate with the coating liquid, a propelling means for imparting a thrust force to the base plate in the coating execution region, and a coating head for coating the base plate with the coating liquid in the coating execution region, and the base plate supporting means includes a float-up table which effects gas blowing and drawing from below the base plate.
TW094122172A 2004-06-30 2005-06-30 Base plate coating device TW200605965A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004193986 2004-06-30

Publications (1)

Publication Number Publication Date
TW200605965A true TW200605965A (en) 2006-02-16

Family

ID=35782684

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094122172A TW200605965A (en) 2004-06-30 2005-06-30 Base plate coating device

Country Status (2)

Country Link
TW (1) TW200605965A (en)
WO (1) WO2006003876A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395067B (en) * 2008-09-19 2013-05-01 Dms Co Ltd Coater

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008289966A (en) * 2007-05-22 2008-12-04 Watanabe Shoko:Kk Slit coater
CN103828085B (en) * 2011-08-09 2016-08-17 科迪华公司 Prone printing device and method
JP5851295B2 (en) * 2012-03-16 2016-02-03 東レエンジニアリング株式会社 Heat treatment equipment
JPWO2022130902A1 (en) * 2020-12-17 2022-06-23

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10270349A (en) * 1997-03-26 1998-10-09 Canon Inc Substrate transferring device and exposure device
JP3868223B2 (en) * 2001-04-27 2007-01-17 東京エレクトロン株式会社 Transport device
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP2003290697A (en) * 2002-04-02 2003-10-14 Toppan Printing Co Ltd Device for continuously coating single sheet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395067B (en) * 2008-09-19 2013-05-01 Dms Co Ltd Coater

Also Published As

Publication number Publication date
WO2006003876A1 (en) 2006-01-12

Similar Documents

Publication Publication Date Title
TW200605965A (en) Base plate coating device
TW200624224A (en) Polishing apparatus and polishing method
SG115836A1 (en) Controls of ambient environment during wafer drying using proximity head
UA94993C2 (en) Device for preparing liquid beverage from cartridge, unit for preparing liquid beverage from cartridge, cartridge holder for insertion into supply unit for preparing liquid from cartridge and method for reducing leakage of liquid or gas-liquid mixture
TW200733193A (en) Coating apparatus and coating method
TW200634438A (en) Solvent removal apparatus and method
TW200738543A (en) Method and apparatus for transporting a substrate using non-newtonian fluid
TW200627079A (en) Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck
TW200624357A (en) Gas bearing substrate-loading mechanism for vacuum process systems
WO2008129989A1 (en) Substrate holding mechanism and substrate assembling apparatus provided with the same
GB2471645A (en) Notebook computer docking stations
TW200619115A (en) Substrate transferring apparatus
TW200607732A (en) Methods and apparatus for repositioning support for a substrate carrier
TW200943454A (en) Apparatus for treating substrate
TW200610898A (en) A process and means for stably fixing anchoring organs to surfaces
TW200610582A (en) Inkjet spray method and display device manufacturing method
TW200625508A (en) Treating apparatus
TW200700930A (en) Separation apparatus and method
TW200420483A (en) Overhead transfer flange and support for suspending a substrate carrier
EP1598202A3 (en) System and method for supplying media to a device
TW200629398A (en) Wafer treating apparatus and method
TW201129876A (en) A shutter member, a lithographic apparatus and device manufacturing method
PL1973668T3 (en) Apparatus and method for the uniform coating of substrates
TW200643517A (en) Photoresist coating method and apparatus
TW200610583A (en) Turntable device for spin-coating