TW200605499A - Surface acoustic wave device with electro-static discharge protection - Google Patents
Surface acoustic wave device with electro-static discharge protectionInfo
- Publication number
- TW200605499A TW200605499A TW093122631A TW93122631A TW200605499A TW 200605499 A TW200605499 A TW 200605499A TW 093122631 A TW093122631 A TW 093122631A TW 93122631 A TW93122631 A TW 93122631A TW 200605499 A TW200605499 A TW 200605499A
- Authority
- TW
- Taiwan
- Prior art keywords
- electro
- static discharge
- acoustic wave
- surface acoustic
- discharge protection
- Prior art date
Links
Abstract
Sacrificial electrodes with fractal-shaped are formed on a SAW (surface acoustic wave) device. The sacrificial electrodes discharge electro-static charge in the SAW device for protecting the IDT (inter-digital transducer) from electrostatic break. Moreover, the sacrificial electrodes can control the path and the discharging degree of the electro-static discharge to avoid losing the electro-static discharge protection due to the sacrificial electrodes are broken.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93122631A TWI336560B (en) | 2004-07-28 | 2004-07-28 | Surface acoustic wave device with electro-static discharge protection |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93122631A TWI336560B (en) | 2004-07-28 | 2004-07-28 | Surface acoustic wave device with electro-static discharge protection |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200605499A true TW200605499A (en) | 2006-02-01 |
TWI336560B TWI336560B (en) | 2011-01-21 |
Family
ID=45075082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93122631A TWI336560B (en) | 2004-07-28 | 2004-07-28 | Surface acoustic wave device with electro-static discharge protection |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI336560B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109510607A (en) * | 2017-09-15 | 2019-03-22 | 新加坡商格罗方德半导体私人有限公司 | Sound wave MEMS resonator and filter and its manufacturing method with broken shape electrode |
-
2004
- 2004-07-28 TW TW93122631A patent/TWI336560B/en active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109510607A (en) * | 2017-09-15 | 2019-03-22 | 新加坡商格罗方德半导体私人有限公司 | Sound wave MEMS resonator and filter and its manufacturing method with broken shape electrode |
TWI655413B (en) * | 2017-09-15 | 2019-04-01 | 新加坡商格羅方德半導體私人有限公司 | Acoustic mems resonator and filter with fractal electrode and method for producing the same |
US10277194B2 (en) | 2017-09-15 | 2019-04-30 | Globalfoundries Singapore Pte. Ltd. | Acoustic MEMs resonator and filter with fractal electrode and method for producing the same |
CN109510607B (en) * | 2017-09-15 | 2022-11-25 | 新加坡商世界先进积体电路私人有限公司 | Acoustic wave MEMS resonator and filter with fractal electrodes and manufacturing method thereof |
Also Published As
Publication number | Publication date |
---|---|
TWI336560B (en) | 2011-01-21 |
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Legal Events
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GD4A | Issue of patent certificate for granted invention patent |