TW200605499A - Surface acoustic wave device with electro-static discharge protection - Google Patents

Surface acoustic wave device with electro-static discharge protection

Info

Publication number
TW200605499A
TW200605499A TW093122631A TW93122631A TW200605499A TW 200605499 A TW200605499 A TW 200605499A TW 093122631 A TW093122631 A TW 093122631A TW 93122631 A TW93122631 A TW 93122631A TW 200605499 A TW200605499 A TW 200605499A
Authority
TW
Taiwan
Prior art keywords
electro
static discharge
acoustic wave
surface acoustic
discharge protection
Prior art date
Application number
TW093122631A
Other languages
Chinese (zh)
Other versions
TWI336560B (en
Inventor
Yu-Tung Huang
Chi-Yun Chen
Shih-Cheng Chiu
Ken-Huang Lin
Kuan-Yu Lin
Original Assignee
Tai Saw Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tai Saw Technology Co Ltd filed Critical Tai Saw Technology Co Ltd
Priority to TW93122631A priority Critical patent/TWI336560B/en
Publication of TW200605499A publication Critical patent/TW200605499A/en
Application granted granted Critical
Publication of TWI336560B publication Critical patent/TWI336560B/en

Links

Abstract

Sacrificial electrodes with fractal-shaped are formed on a SAW (surface acoustic wave) device. The sacrificial electrodes discharge electro-static charge in the SAW device for protecting the IDT (inter-digital transducer) from electrostatic break. Moreover, the sacrificial electrodes can control the path and the discharging degree of the electro-static discharge to avoid losing the electro-static discharge protection due to the sacrificial electrodes are broken.
TW93122631A 2004-07-28 2004-07-28 Surface acoustic wave device with electro-static discharge protection TWI336560B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93122631A TWI336560B (en) 2004-07-28 2004-07-28 Surface acoustic wave device with electro-static discharge protection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93122631A TWI336560B (en) 2004-07-28 2004-07-28 Surface acoustic wave device with electro-static discharge protection

Publications (2)

Publication Number Publication Date
TW200605499A true TW200605499A (en) 2006-02-01
TWI336560B TWI336560B (en) 2011-01-21

Family

ID=45075082

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93122631A TWI336560B (en) 2004-07-28 2004-07-28 Surface acoustic wave device with electro-static discharge protection

Country Status (1)

Country Link
TW (1) TWI336560B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109510607A (en) * 2017-09-15 2019-03-22 新加坡商格罗方德半导体私人有限公司 Sound wave MEMS resonator and filter and its manufacturing method with broken shape electrode

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109510607A (en) * 2017-09-15 2019-03-22 新加坡商格罗方德半导体私人有限公司 Sound wave MEMS resonator and filter and its manufacturing method with broken shape electrode
TWI655413B (en) * 2017-09-15 2019-04-01 新加坡商格羅方德半導體私人有限公司 Acoustic mems resonator and filter with fractal electrode and method for producing the same
US10277194B2 (en) 2017-09-15 2019-04-30 Globalfoundries Singapore Pte. Ltd. Acoustic MEMs resonator and filter with fractal electrode and method for producing the same
CN109510607B (en) * 2017-09-15 2022-11-25 新加坡商世界先进积体电路私人有限公司 Acoustic wave MEMS resonator and filter with fractal electrodes and manufacturing method thereof

Also Published As

Publication number Publication date
TWI336560B (en) 2011-01-21

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