TW200605372A - Substrate container with fluid-sealing flow passageway - Google Patents

Substrate container with fluid-sealing flow passageway

Info

Publication number
TW200605372A
TW200605372A TW094112228A TW94112228A TW200605372A TW 200605372 A TW200605372 A TW 200605372A TW 094112228 A TW094112228 A TW 094112228A TW 94112228 A TW94112228 A TW 94112228A TW 200605372 A TW200605372 A TW 200605372A
Authority
TW
Taiwan
Prior art keywords
substrate container
fluid
flow passageway
sealing flow
enclosure
Prior art date
Application number
TW094112228A
Other languages
English (en)
Other versions
TWI423451B (zh
Inventor
Anthony Mathius Tieben
John Lystad
David L Halbmaier
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200605372A publication Critical patent/TW200605372A/zh
Application granted granted Critical
Publication of TWI423451B publication Critical patent/TWI423451B/zh

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
TW94112228A 2004-04-18 2005-04-18 具有流體密封流動通道之基板容器 TWI423451B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US56352804P 2004-04-18 2004-04-18

Publications (2)

Publication Number Publication Date
TW200605372A true TW200605372A (en) 2006-02-01
TWI423451B TWI423451B (zh) 2014-01-11

Family

ID=38077099

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94112228A TWI423451B (zh) 2004-04-18 2005-04-18 具有流體密封流動通道之基板容器

Country Status (2)

Country Link
CN (1) CN100560443C (zh)
TW (1) TWI423451B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI698608B (zh) * 2018-01-11 2020-07-11 家登精密工業股份有限公司 快拆式氣閥及應用其之基板容器

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI469901B (zh) * 2008-01-13 2015-01-21 Entegris Inc 晶圓容置箱及其製造方法
JP5888288B2 (ja) * 2013-06-26 2016-03-16 株式会社ダイフク 物品保管設備の検査装置
CN104973349A (zh) * 2014-04-03 2015-10-14 四川虹视显示技术有限公司 玻璃基板储藏装置
CN109230317B (zh) * 2018-09-25 2020-12-25 义柏科技（深圳）有限公司 一种用于半导体基板储存运输的转运舱

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5363276A (en) * 1993-09-01 1994-11-08 Ncr Corporation Apparatus for containing and supporting electronic components
US6187182B1 (en) * 1998-07-31 2001-02-13 Semifab Incorporated Filter cartridge assembly for a gas purging system
TW511650U (en) * 2001-09-12 2002-11-21 Ind Tech Res Inst Ventilator device for cleaning container

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI698608B (zh) * 2018-01-11 2020-07-11 家登精密工業股份有限公司 快拆式氣閥及應用其之基板容器
TWI720881B (zh) * 2018-01-11 2021-03-01 家登精密工業股份有限公司 快拆式氣閥及應用其之基板容器

Also Published As

Publication number Publication date
TWI423451B (zh) 2014-01-11
CN100560443C (zh) 2009-11-18
CN1968872A (zh) 2007-05-23

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