TW200605207A - Structure of a blade assembly for forming an oblique cut edge - Google Patents

Structure of a blade assembly for forming an oblique cut edge

Info

Publication number
TW200605207A
TW200605207A TW093121625A TW93121625A TW200605207A TW 200605207 A TW200605207 A TW 200605207A TW 093121625 A TW093121625 A TW 093121625A TW 93121625 A TW93121625 A TW 93121625A TW 200605207 A TW200605207 A TW 200605207A
Authority
TW
Taiwan
Prior art keywords
base
blade
oblique
forming
polish pad
Prior art date
Application number
TW093121625A
Other languages
Chinese (zh)
Other versions
TWI269377B (en
Inventor
qing-hong Chen
zhi-kun Chen
Original Assignee
Nanya Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanya Technology Corp filed Critical Nanya Technology Corp
Priority to TW93121625A priority Critical patent/TWI269377B/en
Publication of TW200605207A publication Critical patent/TW200605207A/en
Application granted granted Critical
Publication of TWI269377B publication Critical patent/TWI269377B/en

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

A structure of a blade assembly for forming an oblique cut edge is disclosed. The assembly comprises a base and an oblique blade. The oblique blade is fixed on the base. With the base, the blade on the base can slide and prop a polish pad on a platform for polishing a wafer. The blade and the polish pad are intersected to form a fixed oblique angle. The base is thus moved to obliquely cut the edge of a polish pad with a fixed angle thereby trimming the protruded part of the polish pad to prevent the polish granules accumulated at the edge of the polish pad from scratching a wafer.
TW93121625A 2004-07-20 2004-07-20 Structure of a blade assembly for forming an oblique cut edge TWI269377B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93121625A TWI269377B (en) 2004-07-20 2004-07-20 Structure of a blade assembly for forming an oblique cut edge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93121625A TWI269377B (en) 2004-07-20 2004-07-20 Structure of a blade assembly for forming an oblique cut edge

Publications (2)

Publication Number Publication Date
TW200605207A true TW200605207A (en) 2006-02-01
TWI269377B TWI269377B (en) 2006-12-21

Family

ID=38291527

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93121625A TWI269377B (en) 2004-07-20 2004-07-20 Structure of a blade assembly for forming an oblique cut edge

Country Status (1)

Country Link
TW (1) TWI269377B (en)

Also Published As

Publication number Publication date
TWI269377B (en) 2006-12-21

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