TW200604491A - Transparent film measurements - Google Patents
Transparent film measurementsInfo
- Publication number
- TW200604491A TW200604491A TW094123905A TW94123905A TW200604491A TW 200604491 A TW200604491 A TW 200604491A TW 094123905 A TW094123905 A TW 094123905A TW 94123905 A TW94123905 A TW 94123905A TW 200604491 A TW200604491 A TW 200604491A
- Authority
- TW
- Taiwan
- Prior art keywords
- transparent film
- interface
- determining
- film measurements
- profile
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Transparent film measurement techniques are disclosed. A method, comprising: determining a height profile of a first interface of an object based on measurement data of the object; determining a height profile of a second interface of the object based on the measurement data and a model of a shape of the second interface; and determining a profile of a distance between the first and second interfaces based on the height profiles of the first and second interfaces.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US58813804P | 2004-07-15 | 2004-07-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200604491A true TW200604491A (en) | 2006-02-01 |
Family
ID=57807123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094123905A TW200604491A (en) | 2004-07-15 | 2005-07-14 | Transparent film measurements |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200604491A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408332B (en) * | 2007-01-15 | 2013-09-11 | Disco Corp | A measuring device and a laser processing machine which are held in the workpiece |
TWI417509B (en) * | 2007-02-27 | 2013-12-01 | Disco Corp | A measuring device and a laser processing machine which are held at the chuck table |
TWI734761B (en) * | 2016-03-28 | 2021-08-01 | 美商克萊譚克公司 | System and method for all surface film metrology |
-
2005
- 2005-07-14 TW TW094123905A patent/TW200604491A/en unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408332B (en) * | 2007-01-15 | 2013-09-11 | Disco Corp | A measuring device and a laser processing machine which are held in the workpiece |
TWI417509B (en) * | 2007-02-27 | 2013-12-01 | Disco Corp | A measuring device and a laser processing machine which are held at the chuck table |
TWI734761B (en) * | 2016-03-28 | 2021-08-01 | 美商克萊譚克公司 | System and method for all surface film metrology |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009070676A3 (en) | Determining postural stability | |
AU2003287803A1 (en) | Fast 3d height measurement method and system | |
EP2527860A3 (en) | Wireless position determination using adjusted round trip time measurements | |
WO2009142840A3 (en) | Methods and apparatus to form a well | |
WO2007126444A3 (en) | Analyte monitoring | |
WO2007087485A3 (en) | Method and apparatus for photographic measurement | |
SG118425A1 (en) | A method of preventing reuse in an analyte measuring system | |
TW201215879A (en) | Method and system for optimizing optical inspection of patterned structures | |
AU2003244342A1 (en) | Biosensor, magnetic molecule measurement method, and measurement object measuring method | |
WO2009007822A3 (en) | Methods and systems for processing microseismic data | |
WO2009146174A3 (en) | Location determination using formula | |
EP1528355A3 (en) | Dynamic artefact comparison | |
WO2006017837A3 (en) | Process, system and software arrangement for determining at least one location in a sample using an optical coherence tomography | |
AU2003260932A1 (en) | Symmetrical multiple-slice computed tomography data measurement system | |
WO2002103618A8 (en) | Statistical model | |
WO2006107322A3 (en) | Method for compensating errors in interferometric surface metrology | |
AU2003287627A1 (en) | Method for measuring force-dependent gyroscope sensitivity | |
WO2010093824A3 (en) | Registration and comparison of three dimensional objects | |
TWI263911B (en) | System and method of generating simulated diffraction signals for two-dimensional structures, and computer-readable medium thereof | |
MY138198A (en) | Stage predicting system | |
TW200604491A (en) | Transparent film measurements | |
NO20031465D0 (en) | Displacement measurement system and method | |
DK1630527T3 (en) | Optical displacement transducer, displacement measurement system and method | |
WO2007032867A3 (en) | Data representation relating to a non-sampled workpiece | |
WO2004061419A3 (en) | Systems and methods for estimating properties of a sample |