TW200604489A - Ellipsometer device with a resonance platform - Google Patents

Ellipsometer device with a resonance platform

Info

Publication number
TW200604489A
TW200604489A TW094124675A TW94124675A TW200604489A TW 200604489 A TW200604489 A TW 200604489A TW 094124675 A TW094124675 A TW 094124675A TW 94124675 A TW94124675 A TW 94124675A TW 200604489 A TW200604489 A TW 200604489A
Authority
TW
Taiwan
Prior art keywords
modes
resonance
resonance platform
platform
excited
Prior art date
Application number
TW094124675A
Other languages
English (en)
Inventor
Wax Wiki
Johannes Edlinger
Matthias Vaupel
Andreas Eing
Original Assignee
Unaxis Balzers Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unaxis Balzers Ag filed Critical Unaxis Balzers Ag
Publication of TW200604489A publication Critical patent/TW200604489A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW094124675A 2004-07-21 2005-07-21 Ellipsometer device with a resonance platform TW200604489A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59028204P 2004-07-21 2004-07-21

Publications (1)

Publication Number Publication Date
TW200604489A true TW200604489A (en) 2006-02-01

Family

ID=34982390

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094124675A TW200604489A (en) 2004-07-21 2005-07-21 Ellipsometer device with a resonance platform

Country Status (5)

Country Link
US (1) US20070216901A1 (zh)
EP (1) EP1769229A1 (zh)
CN (1) CN101023337A (zh)
TW (1) TW200604489A (zh)
WO (1) WO2006008112A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0721482D0 (en) 2007-11-01 2007-12-12 Univ Exeter Plasmon resonance based sensor
CN112285065A (zh) * 2020-11-26 2021-01-29 深圳瀚光科技有限公司 一种基于双椭圆反射镜的spr传感器及应用

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5120131A (en) * 1988-02-14 1992-06-09 Walter Lukosz Method and apparatus for selecting detection of changes in samples by integrated optical interference
DE59109246D1 (de) * 1990-05-03 2003-04-03 Hoffmann La Roche Mikrooptischer Sensor
GB2248497B (en) * 1990-09-26 1994-05-25 Marconi Gec Ltd An optical sensor
ATE226320T1 (de) * 1993-03-26 2002-11-15 Hoffmann La Roche Optisches verfahren und vorrichtung zur analyse von substanzen an sensoroberflächen
DE4343663C1 (de) * 1993-12-21 1995-04-20 Fraunhofer Ges Forschung Vorrichtung zur polarisationsempfindlichen Spektroskopie
GB9803704D0 (en) * 1998-02-24 1998-04-15 Univ Manchester Waveguide structure
AU2003300433A1 (en) * 2003-01-08 2004-08-10 Maven Technologies, Llc Strong-absorber-mediated array ellipsometer

Also Published As

Publication number Publication date
WO2006008112A1 (de) 2006-01-26
CN101023337A (zh) 2007-08-22
EP1769229A1 (de) 2007-04-04
US20070216901A1 (en) 2007-09-20

Similar Documents

Publication Publication Date Title
ATE541320T1 (de) Beleuchter und verfahren zur herstellung eines derartigen beleuchters
WO2007078686A3 (en) Method of polishing a semiconductor-on-insulator structure
WO2008005469A3 (en) Igfbp2 biomarker
WO2005087951A3 (en) Reagents, methods and kits for use in deactivating nucleic acids
WO2005098446A3 (en) Biomarkers for ovarian cancer
WO2005012337A3 (en) Antigenic peptides of sars coronavirus and uses thereof
TW200644101A (en) Novel method to implement stress free polishing
TW200741978A (en) Stressor integration and method thereof
ATE463722T1 (de) Konfokale flüssigkeitsstandmessung
TW200801445A (en) Method of measuring warpage of rear surface of substrate
WO2005073722A3 (en) Luminogenic and nonluminogenic multiplex assay
TW200617369A (en) Method to inspect a wafer
EP1672984A4 (en) METHODS FOR REDUCING THE DEPARTURE OF CONCENTRATIONS BETWEEN SPECIES OF ANALYTES IN A SAMPLE
AR055391A1 (es) Metodo para manipular un componente adaptado para ser usado en un vehiculo o en un motor
DE602005021449D1 (de) Verfahren zur modifizierung der Oberfläche von Halbleiter-Nanopartikeln
WO2005084369A3 (en) Arrays of colloidal crystals
TW200519378A (en) Device manufacturing method and device
EP2099625A4 (en) METHOD FOR DETERMINING THE STATUS OF A ROAD SURFACE, AND METHOD FOR GENERATING A LOG ON THE USE OF A VEHICLE
WO2007149809A3 (en) Tacrolimus standard and methods of using same
TW200604489A (en) Ellipsometer device with a resonance platform
ATE502133T1 (de) Verfahren zum ausbessern von fehlstellen in gussteilen
WO2008042392A3 (en) Brilliant white cauliflower
TW200719874A (en) A test sensor with a fluid chamber opening
TW200730136A (en) Dual transdermal analyte sensor assembly and methods of using the same
WO2006020770A3 (en) Thermally compensated fluorescence decay rate temperature sensor and method of use