200539984 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種利用雷射及位置感測器所建立之鑽 孔、攻牙量測裝置，特別是指一種可量測鑽孔或攻牙加工之 誤差及提供誤差補償訊號的量測裝置。 【先前技術】 速、容易架 方向。 近年來隨著工具機、各種產業機器、量測儀器的高精密 化’加上超精密加工機、半導體製程設備等高精密加工技術 需求’不論在精密機械、半導體產業、微（奈）米科技皆朝 微小化、精密化與奈米級的方向前進，而於鑽孔或攻牙之加 工應用範圍更是廣大，且大至用於造船工業之鑽孔，而小； 應用於電腦主機板之鑽孔、半導體產業之運用，因此，在快 設'高精密度的量測裝置是目前業界的主要研究 一然而，鑽孔或攻牙時之加卫運動屬於多自由度運動，令 於貫際運動時，會產生一個線性位移誤差（愈 a (搖擺）；再者，由於錯孔機或攻牙機是經由線性元件 ^轉^及其他元件精設計組裝而具有多自由度運動， ，機器的加工精度與加工品質將受此影響。 所以，對於上述的鑽孔或攻牙加工之檢測以高規格， -測機器镄孔或攻牙時所產生之誤差，實有做進一步之方 200539984 法來改善誤差 由此可見 没計者’而亟待加以改良。 使其誤差減少進而提高其精密度。 上述習用物品仍有諸多缺失，實非一良善之 本案發明人4監於上述習用鑽 各項缺點，乃亟思加以改良創新 究後，終於成功研發完成本件一 建立之鑽孔、攻牙量測裝置。 【發明目的】 孔、攻牙量測裝置所衍生的 ，並經多年苦心孤詣潛心研 種利用雷射及位置感測器所 本發明之目的即在於提供一種利用雷射及位置感測器所 ^建立之鑽孔、攻牙量測裝置’係為於—鑽孔機或攻牙機中， 设置—雷射光源及-供接收該雷射光源所射出之雷射光的 二維感應ϋ可將雷射㈣訊號分解成X軸及γ軸的分 析’且另設有—雷射干涉儀，係可測量得魏或攻牙時ζ軸 移動的距離（即鑽孔或攻牙的深度），進而使鑽孔加工業的 精度校正提供莫大的助益。 “本^月之久一目的係在於提供-種利用雷射及位置感測 杰所建立之鑽孔、攻牙量測裝置，提供鑽孔或攻牙加工誤差 補仏訊號，以達到精確控制的目的。 【發明内容】 可達成上述發明目的之 立之鑽孔、攻牙量測裝置， 一種利用雷射及位置感測器所建 其係為於一攻牙機或鑽孔機之一 200539984 π # @ 77 ϋ夾置—雷射光源，而該雷射光源係可射出 同波長的雷射光束，且該攻牙機或鑽孔機另設有一個二維 位置感測器夹治具’該二維位置感測器夾治具上係設置一個 -維位置感測器，作為接收該雷射光源所射出之雷射光，以 谓測旋轉軸之X軸和"由的旋轉訊號及偏擺誤差訊號，且該 攻牙機或鑽孔機之二維位置感測器夹治具的一側設有—個 可發雷射光及接收ir射光的雷射干涉儀，而於該攻牙機或鑽 機的从體5又之外緣有—反射鏡，且該反射鏡之位置係與 雷射干涉儀成相對的形態，使該雷射干涉儀所射出的雷射： 經由該反射鏡之導引而反射至雷射干涉儀中，而量測出4 之方向的鑽孔或攻牙的高度變化。 【實施方式】 請參閱圖-至圖八所示，本發明所提供之一種利用雷射 置感心所建立之鑽孔、攻牙量測裝置，其係為於—攻 牙機1八或鑽孔機1B之一旋轉轴11的-刀夾Hi上 夹置一雷射光源2，且該光源係可為採用可見光、微波、红 :紫外ΓΧ射線等，但於本發明中係以雷射光源2為 而°玄雷射光源2係可射出-同波長的雷射光束，且該 攻牙機1 Α或鑽孔機1 Β另設有—個 呈 個—維位置感測器失治 二維位置感測器爽治具12設置-個二維位置残 該二維位置感測器3係可為電伽器(CCD; 200539984 或可以里測二維訊號之感測儀器 , 代之，但以該二維位置感 測㈠較佳’故以該二維位置感測器3作為接收該雷射光源 2所射出之雷射光’進而㈣旋轉軸i 軸和γ轴的旋 轉訊號及偏擺誤差訊號，且該 不钱1A或鑽孔機1b之二 維位置感測器夾治具丄2的一側 ^ 又有一個可發射雷射光及 接收雷射光的雷射干涉儀4^ 卞"儀4而於该攻牙機1A或鑽孔機1 B的一设體；[3設之外緣有一反射镑1 ^ 久耵蛻1 3 1，且該反射鏡1 3 1之位置係與雷射干涉儀4成相對的形態，使該雷射干涉 儀4所射出的雷射光經由該反射鏡"丄之導引而反射至 雷射干涉儀4中’而量測出z軸之方向的鑽孔或攻牙的高度 變化。 該一種利用雷射及位置感測器所建立之鑽孔、攻牙量測 裝置，其量測裝置的動作流程如圖二所示，係透過攻牙機工 A或鑽孔機1 B之旋轉軸1 1的刀夾1 1 1上夾置一雷射 光源2，且於固定該雷射光源2後，再將一個二維位置感測 器3架設於雷射光源2下方的二維位置感測器夾治具1 2 上，接著將該雷射干涉儀4及反射鏡1 3 1，分別架設於二 維位置感測器夾治具1 2之一側及殼體1 3外緣，再將該雷 射干涉儀4及二維位置感測器3的線路連接至一放大器中 (圖中未示），而該放大器知其放大之訊號輸出到類比/數位 轉換器（圖中未示），啟動電腦及攻牙機1 A或鑽孔機1 b 200539984 執行鑽孔程式，然後透過二維位置感測器3擷取旋轉轴的誤 差訊號，理論上該二維位置感測器3所擷取到的訊號會，如 圖三所示’但是由於該雷射光源2架設於旋轉軸丄^上並無 法調整到完全無偏擺’所以，會造成所得到的訊號有一偏擺 角度α ’如圖四所示此種現象並不妨礙此裝置量測鑽孔或 攻牙時旋轉軸誤差，只要將所量到的訊號透過補償放大即可 消除此部分之誤差；而透過雷射干涉儀4纟量得鑽孔時ζ轴 移動之距離（即鑽孔深度）。 此利用雷射及位置感測器所建立之鑽孔、攻牙量測裝置 係分為二部分來說明； (一）旋轉軸 此部分之裝置架構，如圖三所示，其裝置之架構是採用 一維位置感測器3作為訊號感測與訊號轉換傳輸元件；因 此，當鑽孔或攻牙之加工作業完成時，將該雷射光源2架設 於旋轉軸1 1上’而當雷射光源2之雷射光射入二維位置感 測器3時，其隨之將所接受到的雷射光分解成χ、γ二個軸 向訊號。 因此’可以透過分析單一軸的訊號可分析鑽孔時旋轉軸 1 1的轉速、角加速度，而在攻牙時更能分析攻牙的節距 (pitch)如圖二所示；而其裝置並且可以透過計算訊號的 週期數及記錄量測時間計算出旋轉軸1 1的轉速，進而可觀 200539984 察鑽孔時旋轉軸的角加速度，如圖六所示，而預期所彳曰之圖 形為一開始為加速度之波形，而加速至所設定速度則為—速 波形，當鑽孔至底部則轉為減速波形，停留一個延遲時間則 重複其波形，停留時間之前的波形為旋轉軸丄丄之轉速下降 的波形，而停留時間之後的波形則為旋轉軸〗 丄丄上升之波形 如圖七之a、b所示為攻牙時旋轉軸工的χ、γ · 平田t波形； 如圖八之a、b所示為攻牙時旋轉軸1 1的χ、 I平由之波形。 (二）Z軸高度： 而Z軸高度則是利用該雷射干涉儀4來進行量測且其 量測所得之訊號，即可分析鑽孔或攻牙時旋轉軸丄1在z軸 之定位誤i。其理論訊號參閱圖七及圖八所#，係利用該 雷射干涉儀4所得之訊號，即可進行誤差分析，進而提出^ 善方法來進行鑽孔誤差之改善。 【特點及功效】 本發明所提供係為一種利用雷射及位置感測器所建立之 鑽孔、攻牙量測裝置’與前述引述之先前技術及其他習用技 術相互比較時，更具有下列之優點： 1 ·該雷射光源所射出之雷射光的二維成 Λ ^ ^，而可將雷射 光的訊號分解成X軸及γ軸的分析， 、 力δ又有一雷射干 涉儀，係可測量得鑽孔或攻牙時ζ軸 π初的距離（即鑽 孔或攻牙的深度），進而使鑽孔加工 杲的精度校正提供 200539984 莫大的助益。 2 · δ亥裝置係可進一步的提 幻扠仏鑽孔或攻牙時整合，並於鑽孔 或攻牙時可作為線上加工之量 _ J挺供鑽孔或攻牙加工 誤差補償訊號，以達到精確控制的目的。 上列洋細說明係針對本發明 个〜a之可仃實施例之具體說 明’惟該實施例並非用以限制本發明之專利範圍，凡未脫離 本發明技藝精神所為之等效實施或變更，均應包含於本案之 專利範圍中。200539984 发明 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a drilling and tapping measuring device established by using a laser and a position sensor, and particularly to a measurable drilling or tapping device. Processing errors and measurement devices that provide error compensation signals. [Prior art] Speed and easy orientation. In recent years, with the high precision of machine tools, various industrial machines, and measuring instruments, coupled with the need for high-precision processing technologies such as ultra-precision processing machines and semiconductor process equipment, no matter in the precision machinery, semiconductor industry, and micro (nano) technology All are moving towards the direction of miniaturization, precision and nanometer, and the application scope of drilling or tapping is more extensive, and it is as large as that used in the shipbuilding industry, but small; it is used in computer motherboards. The drilling and semiconductor industries are used. Therefore, the fast setting of a high-precision measurement device is currently the main research in the industry. However, the defense movement when drilling or tapping is a multi-degree-of-freedom movement, making During the movement, a linear displacement error (more a (sway); moreover, because the staggered hole machine or tapping machine is designed and assembled through linear elements ^ rotation ^ and other components, the machine has multiple degrees of freedom, Machining accuracy and machining quality will be affected by this. Therefore, the above-mentioned testing of drilling or tapping processing is of high specifications,-the error generated when measuring the machine's countersinking or tapping is really further improved. The method of 200539984 to improve the error can be seen from the countless ones, and it is urgent to improve it. To reduce the error and improve its precision. There are still many shortcomings in the above-mentioned conventional articles, which is not a good inventor of this case. After drilling all the shortcomings, it was eager to improve and innovate, and finally successfully developed the drilling and tapping measuring device established in this article. [Objective of the invention] Derived from the hole and tapping measuring device, and after years of hard work and loneliness The purpose of the present invention is to provide a drilling and tapping measuring device 'created by using laser and position sensors', which is a drilling machine or tapping device. In the dental machine, a laser light source and a two-dimensional induction for receiving the laser light emitted by the laser light source are provided. The laser signal can be decomposed into an analysis of the X-axis and the γ-axis. The interferometer can measure the distance that the ζ axis moves during Wei or tapping (ie, the depth of the drilling or tapping), so that the precision correction of the drilling processing industry can greatly help. The purpose is Provide a kind of drilling and tapping measurement device established by laser and position sensing, to provide drilling or tapping processing error compensation signal to achieve the purpose of precise control. [Summary of the Invention] The above invention can be achieved Purpose of the measuring device for drilling and tapping, a laser and position sensor, which is built in a tapping machine or drilling machine 200539984 π # @ 77 And the laser light source can emit a laser beam of the same wavelength, and the tapping machine or drilling machine is also provided with a two-dimensional position sensor clamp. The two-dimensional position sensor clamp A -dimensional position sensor is provided to receive the laser light emitted by the laser light source, so as to measure the X-axis of the rotation axis and the rotation signal and yaw error signal, and the tapping machine or drill One side of the two-dimensional position sensor clamp of the hole machine is provided with a laser interferometer that can emit laser light and receive ir light, and the slave 5 and the outer edge of the tapping machine or drill have -A mirror, and the position of the mirror is opposite to that of the laser interferometer, so that the Exit emitted laser interferometer: the guide is reflected by the mirror to the laser interferometer, and the amount of change in the measured height direction drilling or tapping of 4. [Embodiment] Please refer to FIG. 8 to FIG. 8, a drilling and tap measuring device provided by the present invention is provided by the laser sensor, which is a tapping machine 18 or drilling A laser light source 2 is clamped on the knife holder Hi of one of the rotating shafts 11 of the machine 1B. The light source may be visible light, microwave, red: ultraviolet Γ ray, etc., but the laser light source 2 is used in the present invention. Because of this, the Xuan laser light source 2 can emit laser beams of the same wavelength, and the tapping machine 1 Α or drilling machine 1 Β is additionally provided with a two-dimensional position sensor. The sensor cool fixture 12 is set up-a two-dimensional position. The two-dimensional position sensor 3 series can be an electronic gamma sensor (CCD; 200539984 or a sensing instrument that can measure two-dimensional signals, instead, but using the two The two-dimensional position sensing is preferably 'so that the two-dimensional position sensor 3 is used to receive the laser light emitted by the laser light source 2', and further the rotation signals of the i-axis and γ-axis of the rotation axis and the yaw error signal, and One side of the two-dimensional position sensor clamp 丄 2 of the unused 1A or drilling machine 1b ^ There is another laser light that can emit and receive laser light Laser interferometer 4 ^ 卞 " 仪 4 and a set of the tapping machine 1A or drilling machine 1 B; [3 suppose that there is a reflection on the outer edge of the pound 1 ^ Jiu 耵 1 3 1 and the The position of the reflecting mirror 1 31 is opposite to that of the laser interferometer 4, so that the laser light emitted by the laser interferometer 4 is reflected by the mirror " 丄 to the laser interferometer 4 'And measure the height change of the drilling or tapping in the direction of the z-axis. This is a drilling and tapping measuring device created using laser and position sensors. The operation flow of the measuring device is shown in Figure As shown in FIG. 2, a laser light source 2 is clamped on the tool holder 1 1 1 of the rotating shaft 11 of the tapping machine worker A or the drilling machine 1 B, and after fixing the laser light source 2, a second The two-dimensional position sensor 3 is mounted on the two-dimensional position sensor clamp 1 2 below the laser light source 2, and then the laser interferometer 4 and the mirror 1 3 1 are respectively mounted on the two-dimensional position sensor. One of the two sides of the clamp fixture 12 and the outer edge of the housing 1 3, and then the lines of the laser interferometer 4 and the two-dimensional position sensor 3 are connected to an amplifier (not shown), and the amplifier know The amplified signal is output to an analog / digital converter (not shown), start the computer and tapping machine 1 A or drilling machine 1 b 200539984 to execute the drilling program, and then capture the rotation axis through the 2D position sensor 3 The error signal is theoretically the signal captured by the two-dimensional position sensor 3, as shown in Figure 3. 'However, since the laser light source 2 is mounted on the rotation axis 并 ^, it cannot be adjusted to be completely unbiased. 'So, the resulting signal will have a deflection angle α' As shown in Figure 4, this phenomenon does not prevent this device from measuring the rotation axis error during drilling or tapping, as long as the measured signal is amplified by compensation The error in this part can be eliminated; and the distance the z axis moves when drilling is measured through the laser interferometer 4 纟 (ie the depth of the hole). The drilling and tapping measuring device created by using laser and position sensor is divided into two parts to explain; (1) The device structure of this part of the rotating shaft is shown in Figure 3. The device structure is One-dimensional position sensor 3 is used as the signal sensing and signal conversion and transmission element; therefore, when the drilling or tapping processing operation is completed, the laser light source 2 is mounted on the rotating shaft 11 and the laser When the laser light from the light source 2 enters the two-dimensional position sensor 3, it decomposes the received laser light into two axial signals of χ and γ. Therefore, by analyzing the signal of a single axis, the rotation speed and angular acceleration of the rotating shaft 11 can be analyzed during drilling, and the pitch of the tapping can be more analyzed during tapping, as shown in Figure 2. The device and You can calculate the rotation speed of the rotating shaft 11 by calculating the number of signal cycles and recording the measurement time, and then you can observe the angular acceleration of the rotating shaft 200539984 when drilling, as shown in Figure 6, and the expected figure is the beginning It is the acceleration waveform, and the acceleration to the set speed is the -speed waveform. When drilling to the bottom, it turns into the deceleration waveform. After a delay time, the waveform is repeated. The waveform before the retention time is the rotation speed of the rotary shaft 丄 丄. The waveform after the dwell time is the rotation axis. 丄 丄 The rising waveform is shown in Figure 7a and b. It is the χ, γ · Hirata t waveform of the rotation shaft during tapping; as shown in Figure 8a, b shows the waveforms of χ and I of the rotation axis 11 during tapping. (2) Z-axis height: The Z-axis height is measured by the laser interferometer 4 and the measured signal can analyze the positioning of the rotation axis 丄 1 on the z-axis when drilling or tapping. False i. The theoretical signals are shown in Figure 7 and Figure 8 #, which are based on the signals obtained by the laser interferometer 4 to perform error analysis, and then propose effective methods to improve the drilling error. [Features and effects] The present invention provides a drilling and tapping measurement device built using a laser and a position sensor, and when compared with the previous technology and other conventional technologies cited above, it has the following features: Advantages: 1 The two-dimensional laser light emitted by the laser light source is Λ ^ ^, and the signal of the laser light can be decomposed into X-axis and γ-axis analysis. The force δ has a laser interferometer. The measured initial distance of the ζ axis during drilling or tapping (ie, the depth of the drilling or tapping), and then the accuracy correction of the drilling process provides a great benefit of 200539984. 2 · The δH device can be further integrated during drilling or tapping, and can be used as the amount of online processing when drilling or tapping. _ J for drilling or tapping processing error compensation signal, To achieve the purpose of precise control. The above detailed description is a specific description of the alternative embodiments of the present invention, 'but this embodiment is not intended to limit the scope of the patent of the present invention, and any equivalent implementation or change without departing from the technical spirit of the present invention, All should be included in the patent scope of this case.
綜上所述，本案不但在技術思想上確屬創新，並能較習 用：品增進上述多項功效’應已充分符合新賴性及進步性之 法定發明專利要件，爰依法提出中請，懇tf貴局核准本件 發明專利申請案，以勵發明，至感德便。 【圖式簡單說明】 明參閱以下有關本發明一較佳實施例之詳細說明及其附 圖，將可進一步瞭解本發明之技術内容及其目的功效；有關 該實施例之附圖為： 圖一為本發明之一種利用雷射及位置感測器所建立之鑽 孔、攻牙量測裝置之外觀立體圖； 圖二為本發明之一種利用雷射及位置感測器所建立之鑽 孔、攻牙量測裝置之鑽孔量測裝置動作示意圖； 圖三為本發明之一種利用雷射及位置感測器所建立之鑽 12 200539984 不意 子L 、 孔、 訊號 孔、 I 孔、 【主 攻牙量測裝置之二維位置感應器所擷取到的旋轉軸訊號 圖； 圖四為本發明之一種利用雷射及位置感測器所建立之鑽 攻牙量測裝置之雷射光源偏擺角度示意圖； 圖五為本發明之一種利用雷射及位置感測器所建立之鑽 攻牙I測裝置之旋轉軸量測裝置架構圖； 圖/、為本發明之一種利用雷射及位置感測器所建立之鑽 攻牙量測裝置之經由二維位置感測器所擷取的旋轉軸之 _ 示意圖； 七為本發明之一種利用雷射及位置感測器所建立之鑽 攻牙量測裝置之攻牙# 呈 文牙時x軸、y軸、z軸之訊號圖；及 §為本t明之-種利用雷射及位置感測器所建立之鑽 攻牙量測裝置之鑽孔時X轴、Y轴、Z軸之訊號圖。 要部分代表符號】 A攻牙機 B鑽孔機 1 1 旋轉轴 1 1刀夾 丄」二維位置感測器夾治具 1 3殼體 13 200539984 131 反射鏡 2 雷射光源 3 二維位置感測器 4 雷射干涉儀 α 偏擺角度To sum up, this case is not only technically innovative, but also comparatively customary: the product enhances the above-mentioned multiple effects' should have fully met the new and progressive statutory invention patent requirements, and filed a request in accordance with the law, sincerely tf Your office approves this patent application for invention to encourage invention and it is a matter of virtue. [Brief description of the drawings] By referring to the following detailed description of a preferred embodiment of the present invention and the accompanying drawings, the technical content of the present invention and its purpose and effect can be further understood; the drawings related to this embodiment are: Figure 1 This is an external perspective view of a drilling and tapping measuring device established using a laser and position sensor according to the present invention; FIG. 2 is a drilling and tapping measuring device established using a laser and position sensor according to the present invention The schematic diagram of the drilling measuring device of the tooth measuring device; Figure 3 is a drill 12 of the present invention using a laser and a position sensor 12 200539984 Unintentional L, hole, signal hole, I hole, [main tapping amount Figure of the rotation axis signal captured by the two-dimensional position sensor of the measuring device; Figure 4 is a schematic diagram of the deviation angle of the laser light source of the drilling and tapping measuring device established by using the laser and the position sensor of the present invention ; Figure 5 is a schematic diagram of a rotary axis measuring device of a drilling and tapping I measuring device established by using a laser and a position sensor according to the present invention; FIG. / Is a diagram using a laser and a position sensor according to the present invention All _ Schematic diagram of the rotating axis captured by the vertical drilling and tapping measuring device through the two-dimensional position sensor; Seven is a drilling and tapping measuring device established by using a laser and a position sensor of the present invention攻牙 # Presents the signal diagrams of the x-axis, y-axis, and z-axis when the tooth is presented; and § This is the X-axis when drilling, which is a drilling and tapping measurement device created using laser and position sensors. Signal diagram of Y axis and Z axis. The main part of the symbol] A tapping machine B Drilling machine 1 1 Rotary shaft 1 1 Tool holder 2 "2D position sensor fixture 1 3 housing 13 200539984 131 Reflector 2 Laser light source 3 2D position sense Detector 4 Laser Interferometer α Yaw Angle
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