TW200533069A - Combination field programmable gate array allowing dynamic reprogrammability - Google Patents

Combination field programmable gate array allowing dynamic reprogrammability Download PDF

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TW200533069A
TW200533069A TW094102305A TW94102305A TW200533069A TW 200533069 A TW200533069 A TW 200533069A TW 094102305 A TW094102305 A TW 094102305A TW 94102305 A TW94102305 A TW 94102305A TW 200533069 A TW200533069 A TW 200533069A
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Taiwan
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unit cell
gate
control node
voltage
switch control
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TW094102305A
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Chinese (zh)
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TWI316789B (en
Inventor
Jack Zezhong Peng
Zhong-Shan Liu
Fei Ye
Michael David Fliesler
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Kilopass Technologies Inc
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Priority claimed from US10/857,667 external-priority patent/US7064973B2/en
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Publication of TW200533069A publication Critical patent/TW200533069A/en
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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/405Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with three charge-transfer gates, e.g. MOS transistors, per cell
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/406Management or control of the refreshing or charge-regeneration cycles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/0203Particular design considerations for integrated circuits
    • H01L27/0207Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
    • H01L27/10Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • H01L27/118Masterslice integrated circuits
    • H01L27/11803Masterslice integrated circuits using field effect technology
    • H01L27/11807CMOS gate arrays
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03KPULSE TECHNIQUE
    • H03K19/00Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/02Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components
    • H03K19/173Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using elementary logic circuits as components
    • H03K19/177Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits using specified components using elementary logic circuits as components arranged in matrix form
    • H03K19/17724Structural details of logic blocks
    • H03K19/17728Reconfigurable logic blocks, e.g. lookup tables
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B12/00Dynamic random access memory [DRAM] devices
    • H10B12/01Manufacture or treatment
    • H10B12/09Manufacture or treatment with simultaneous manufacture of the peripheral circuit region and memory cells

Abstract

A cell that can be used as a dynamic memory cell for storing data used in programming a field ogrammable gate array(FPGA) is disclosed. The cell comprises a select transistor having a gate, a source, and a drain, the gate connected to said write bitline, the source connected to a floating point node, and the drain connected to a row wordline. A sense device determines the data stored on the floating point node. Finally, switch that is controlled by the floating point node is provided.

Description

200533069_ 五、發明說明(1) 【發明所屬之技術領域】 本發明係關於一種場可編程閘陣列(FPGA),特別是關於 一種能夠藉由充電電荷來動態地重新編程,以及基於電晶 體之閘極氧化層(g a t e ο X i d e s)的崩潰來非揮發地一次編 程的可編程閘陣列。 【先前技術】 場可編程閘陣列(FPGA)正不斷產生更多之應用,例如邏 .輯(logic)及 / 或處理元件(processing elements)。一 種利用靜態隨機存取記憶體(SRAM)晶胞之場可編程閘陣 型態需要六個電晶體,此一靜態隨機存取記憶體係用以 提供可設定(configurable)或可編程之開關,而上述程 式碼通常以一點陣圖(b i t map)儲存於晶片的非揮發性記 憶體之中。以靜態隨機存取記憶體為基底之場可編程閘陣 列首先係藉由將上述非揮發記憶體程式化而進行編程,並 且來自上述非揮發性記憶體之位元流(b i t s t r a m)接著將 從上述非揮發記憶體載入至上述靜態隨機存取記憶體之 中,而上述靜態隨機存取記憶體係用以控制上述場可編程 閘陣列。此複數晶片(m u 1 t i - c h i p)之解決方案便導致魔 |的形成係數(f 〇 r m f a c t 〇 r)與相對較高的成本。 •另一種場可編程閘陣列之型態係基於反熔絲(a n t l - f u s e) 技術,雖然被廣泛地接受,反熔絲技術仍需要專門的熔絲 製程。此外,基於反熔絲技術之場可編程閘陣列僅能編程200533069_ V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a field programmable gate array (FPGA), and in particular to a gate capable of being dynamically reprogrammed by charging a charge, and a gate based on a transistor The breakdown of the gate oxide layer (gate ο X ides) comes to a non-volatile programmable one-time programmable gate array. [Previous Technology] Field programmable gate arrays (FPGAs) are constantly producing more applications, such as logic and / or processing elements. A field programmable gate array using a static random access memory (SRAM) cell type requires six transistors. This static random access memory system is used to provide configurable or programmable switches, and The above code is usually stored in a chip's non-volatile memory in a bit map. A field programmable gate array based on static random access memory is first programmed by programming the non-volatile memory, and the bit stream from the non-volatile memory is The non-volatile memory is loaded into the static random access memory, and the static random access memory system is used to control the field programmable gate array. This solution for multiple wafers (mu 1 t i-c h i p) leads to the formation coefficient (f 0 r m f a c t 0 r) of magic | and relatively high cost. • Another type of field programmable gate array is based on anti-fuse (an t l-f u s e) technology. Although widely accepted, anti-fuse technology still requires a special fuse process. In addition, field-programmable gate arrays based on anti-fuse technology can only be programmed

第6頁 200533069 ________________________ 五、發明說明(2) 一次。 又一種場可編程閘陣列之型態係基於快閃記憶體(f 1 a s h memory)技術,然而快閃記憶體技術需要更加複雜的半導 體製程,因此會增加成本。再者,快閃記憶體技術通常落 後先進互補式金氧半場效電晶體(CMOS)邏輯製程一至二 代。 •【發明内容】 本發明係提供一種晶胞,可作為用於儲存資料之動態記憶 書晶胞或用於編程之場可編程閘陣列(FPGA)晶胞,其中 上述晶胞係用於具有行位元線、讀取位元線-以及列字語線 之一陣列之中,上述晶胞包含:一電容,具有一第一端與 一第二端,上述第一端連接至一行位元線,而上述第二端 連接至一開關控制節點;一選擇電晶體,具有一閘極、一 源極以及一汲極,其中上述閘極連接至一寫入位元線,上 述源極連接至上述開關控制節點,而上述汲極連接至上述 列字語線;以及,一開關,藉由上述開關控制節點控制, 其中上述開關控制節點以表示0或1之電壓來儲存資料。 ·· 本發明提供一種連接至一列字語線、一行寫入線以及一讀 取位元線之雙模式晶胞之操作方法,其中上述晶胞包含: 一電容,具有一第一端與一第二端,上述第一端連接至上 述行寫入位元線,而上述第二端連接至一開關控制節點;Page 6 200533069 ________________________ V. Description of Invention (2) Once. Another type of field-programmable gate array is based on flash memory (f 1 a s h memory) technology. However, flash memory technology requires more complex semiconductor processes, which will increase costs. In addition, flash memory technology typically lags the first to second generation of advanced complementary metal-oxide-semiconductor field-effect transistor (CMOS) logic processes. • [Abstract] The present invention provides a unit cell, which can be used as a dynamic memory book unit for storing data or a field programmable gate array (FPGA) unit cell for programming. In an array of bit lines, read bit lines, and column word lines, the unit cell includes a capacitor having a first end and a second end, and the first end is connected to a row of bit lines. And the second terminal is connected to a switch control node; a selection transistor has a gate, a source, and a drain, wherein the gate is connected to a write bit line, and the source is connected to the above A switch control node, and the drain is connected to the column word line; and a switch is controlled by the switch control node, wherein the switch control node stores data with a voltage of 0 or 1. The present invention provides a method for operating a dual-mode cell connected to a column of word lines, a row of write lines, and a read bit line, wherein the unit cell includes: a capacitor having a first terminal and a first terminal; Two terminals, the first terminal is connected to the row write bit line, and the second terminal is connected to a switch control node;

第7頁 200533069 五、發明說明(3) 一選擇電晶體,具有一閘極、一源極以及一汲極,上述閘 極連接至上述讀取位元線,上述源極連接至上述開關控制 節點,以及上述汲極連接至一列字語線;以及一開關,藉 由上述開關控制節點控制;上述方法之步驟包括:當上述 晶胞作為一場可編程閘陣列(FPGA)晶胞並且被編程時: (1 )提供一第一電壓至上述行位元線;(2 )開啟上述選擇電 晶體;以及,(3 )提供一第二電壓至一所選擇之上述列字語 線,其中上述第一電壓與上述第二電壓形成一電位差穿過 上述電容使得用以將上述電容轉換成為一電阻元件之一介 電質崩潰;當上述晶胞作為儲存資料之一動態記憶體晶胞 • : ( 1 )開啟上述選擇電晶體;(2 )通過上述列字語線將上 述資料提供至上述開關控制節點,其中上述開關控制節點 以表示0或1之電壓來儲存資料。 本發明提供一種晶胞,可作為用於儲存資料之動態記憶體 晶胞或用於編程之場可編程閘陣列晶胞,其中上述晶胞係 用於具有行位元線、讀取位元線以及列字語線之一陣列之 中,上述晶胞包括:一電容,具有一第一端與一第二端, 上述第一端連接至一行位元線(B p ),而上述第二端連接 |一開關控制節點;一選擇電晶體,具有一閘極、.一源極 以及一汲極,其中上述閘極連接至上述寫入位元線(Bw ·),上述源極連接至上述開關控制節點,以及上述汲極連 接至一列字語線(WL); —開關,藉由上述開關控制節點 所控制,其中上述開關控制節點以表示0或1之電壓來儲存Page 7 200533069 V. Description of the invention (3) A selection transistor having a gate, a source and a drain, the gate is connected to the read bit line, and the source is connected to the switch control node And the drain is connected to a row of word lines; and a switch is controlled by the switch control node; the steps of the method include: when the cell is used as a field programmable gate array (FPGA) cell and is programmed: (1) providing a first voltage to the row bit line; (2) turning on the selection transistor; and (3) providing a second voltage to a selected word line of the column, wherein the first voltage is Forming a potential difference with the second voltage through the capacitor makes the dielectric used to convert the capacitor into a resistive element collapse; when the unit cell is used as a dynamic memory unit to store data •: (1) On The above selection transistor; (2) The above data is provided to the above-mentioned switch control node through the above-mentioned word line, wherein the above-mentioned switch control node stores the data with a voltage of 0 or 1. The invention provides a unit cell, which can be used as a dynamic memory unit cell for storing data or a field programmable gate array unit cell for programming. The unit cell is used to have row bit lines and read bit lines. In an array of word lines, the unit cell includes: a capacitor having a first end and a second end, the first end being connected to a row of bit lines (B p), and the second end Connection | a switch control node; a selection transistor having a gate, a source, and a drain, wherein the gate is connected to the write bit line (Bw ·), and the source is connected to the switch A control node and the drain connected to a line of word lines (WL); a switch controlled by the switch control node, wherein the switch control node is stored with a voltage of 0 or 1

第8頁 200533069__ 五、發明說明(4) 資料;以及,一感測元件,用於決定上述開關控制節點上 之上述電壓。 本發明係提供一種晶胞,可作為用於儲存資料之動態記憶 體晶胞,其中上述晶胞係用於具有行位元線、讀取位元線 以及列字語線之一陣列,上述晶胞包括:一電容,具有一 第一端與一第二端,其中上述第一端連接至一行位元線 (Bp),上述第二端連接至一開關控制節點,而上述開關 控制節點則儲存上述資料;一選擇電晶體(Tw),具有一 閘極、一源極以及一汲極,其中上述閘極連接至上述寫入 ♦元線(Bw)、上述源極連接至上述開關控制節點,而上 述汲極連接至一列字語線;以及,-一感測元件,用於決定 位於上述開關控制節點上之資料。 【實施方式】 本發明在此揭露一種具有超薄介電層且基於電晶體之場可 編程閘陣列(FPGA; Field Programmable Gate Array), 其可受壓迫而崩潰(軟性或硬性崩潰)以設定漏電電流之 值。適當之超薄介電層係為厚度約略或少於5 0 A且使用於電 體中的高品質閘極氧化層(g a t e〇X i d e),一般可由目 前先進的互補式金氧半場效電晶體(CMOS)邏輯製程得 到。此氧化層通常乃藉由沉積、使氧化物從矽主動區域成 長、或是其某種組合所形成。其他適當介電值包括氧化物-氮化物-氧化物合成物或者氧化物複合物等。Page 8 200533069__ 5. Description of the invention (4) Materials; and a sensing element for determining the above voltage on the above-mentioned switch control node. The invention provides a unit cell, which can be used as a dynamic memory unit cell for storing data. The unit cell is used for an array having a row bit line, a read bit line, and a column word line. The cell includes: a capacitor having a first end and a second end, wherein the first end is connected to a row of bit lines (Bp), the second end is connected to a switch control node, and the switch control node is stored The above data; a selection transistor (Tw) having a gate, a source, and a drain, wherein the gate is connected to the write element line (Bw) and the source is connected to the switch control node, The drain is connected to a series of word lines; and, a sensing element is used to determine data located on the switch control node. [Embodiment] The present invention discloses a transistor-based Field Programmable Gate Array (FPGA) with an ultra-thin dielectric layer, which can be crushed (soft or hard) under pressure to set leakage The value of the current. A suitable ultra-thin dielectric layer is a high-quality gate oxide layer (gate OX ide) with a thickness of about 50 A or less and used in the electrical body. Generally, it can be made by the current advanced complementary metal-oxide-semiconductor field-effect transistor. (CMOS) logic process. This oxide layer is usually formed by depositing, growing oxide from the active area of silicon, or some combination thereof. Other suitable dielectric values include oxide-nitride-oxide composites or oxide composites.

第9頁 200533069 五、發明說明(5) 在此,本發明將詳細地敘述一些實施例,然而應注意者為 除了這些明確之敘述外,本發明亦可實施在各式各樣的其 他實施例中,並且本發明之範圍不限於任何實施例,其當 視隨附之申請專利範圍而定。此外,不同元件之部份並未 依照實際比例顯示,且放大相關部件之尺寸,並省略無不 重要之部份’以提供本發明更清楚之敘述與理解。 •本說明書中之參考「一個實施例」或「一實施例」係指一 特定特徵、結構或描述於與此實施例中有關之特性乃包含 參本發明之至少一個實施例中。因此,遍及本說明書各處 之「一個實施例」-或「一實施例」並非全部意指相同之實 施例。此外,特定之特徵、結構或特性可能以一個或以上 之實施例中之任何適當之方式來加以組合。 本發明有關基於閘極氧化層崩潰之快閃記憶體設計,係由 本案之發明人所發展,並由本案之申請人所提出申請。相 關之專利包含:申請於2 0 0 1年8月1 8日之美國第0 9 / 9 5 5,6 4 1 號專利申請案,其標題為「Semiconductor Memory Cell _d Memory Array Using a Breakdown Phenomena in an Ultra-Thin Dielectric」、申請於2001年12月17日之美國 、第10/0 2 4, 3 2 7號專利中請案,其標題為「Senu conductor Memory Cell and Memory Array Using a Breakdown Phenomena in an Ultra-Thin Dielectric」、中請於 2001 200533069_;_ 五、發明說明(6) 年1 0月1 7日之美國第0 9 / 9 8 2, 0 3 4號專利申請案,其標題為 「 Smart Card Having Non一Volatile Memory Formed FromPage 9 200533069 V. Description of the invention (5) Here, the present invention will describe some embodiments in detail. However, it should be noted that in addition to these explicit descriptions, the present invention can also be implemented in various other embodiments. In addition, the scope of the present invention is not limited to any embodiment, and it depends on the scope of the accompanying patent application. In addition, the parts of different components are not shown according to the actual scale, and the dimensions of related parts are enlarged, and the insignificant part is omitted 'to provide a clearer description and understanding of the present invention. • Reference in this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in this embodiment is included in at least one embodiment of the invention. Therefore, "an embodiment"-or "an embodiment" throughout this specification does not all mean the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. The design of the flash memory based on the breakdown of the gate oxide layer of the present invention was developed by the inventor of the present case and applied by the applicant of the present case. Related patents include: US Patent Application No. 0 9/9 5 5, 6 4 1 filed on August 18, 2001, entitled "Semiconductor Memory Cell _d Memory Array Using a Breakdown Phenomena in "An Ultra-Thin Dielectric", filed in the United States on December 17, 2001, and filed under the patent number 10/0 2 4, 3 2 7 and entitled "Senu conductor Memory Cell and Memory Array Using a Breakdown Phenomena in an Ultra-Thin Dielectric ", please request in 2001 200533069_; _ V. Description of the invention (U.S. Patent Application No. 0 9/9 8 2, 0 3 4 of October 17, 2007), the title of which is" Smart Card Having Non-Volatile Memory Formed From

Logic Process」、申請於2001年10月17日之美國第 \ 09/982,31 4號專利申請案,其標題為「Reprogrammable !"Logic Process", U.S. Patent Application No. \ 09 / 982,31 4 of October 17, 2001, entitled "Reprogrammable!

Non-Volatile Oxide Memory」、申請於 2002年 4月 26日之 丨 美國第1 0 / 1 3 3,6 0 4號專利申請案,其標題為「H i gh . !"Non-Volatile Oxide Memory", filed on April 26, 2002 丨 U.S. Patent Application No. 10/1 3 3,604, entitled "H i gh.!

Density Semiconductor Memory Cell and Memory ArrayDensity Semiconductor Memory Cell and Memory Array

Using a Single Transistor」。 第一圖為本發明之F PGA 1 00之示意圖。陣列1 00為一 2乘2 #陣列,然而此陣列可以為任意大小之陣列。陣列1 0 0包括 I 四個-記憶體晶胞102,每一晶胞均包含一個選擇電晶體 | 1 0 4、一個電容1 0 6以及一個開關1 0 8。 : 即 1 亦胞 C晶 C體 行憶 一 記 第視 與檢 R來 •ϋ. 占 歹黑 一 交 第之於} , J 如線 例元 或 J 線 元 位 胞 晶 體 憶 記 線即 元亦 位C 取R 讀線 至列 接至 連接 乃連 極乃 閘極 的汲 4 ο 之 1—14 體10 晶體 電晶 擇電 選擇Using a Single Transistor. " The first figure is a schematic diagram of F PGA 100 in the present invention. Array 100 is a 2 by 2 # array, however, this array can be an array of any size. The array 1 0 0 includes I four-memory cell 102, and each cell includes a selection transistor | 104, a capacitor 106, and a switch 108. : That is, 1 cell C crystal C body line recalls the first observation and inspection R come • ϋ. Accounted for the first intersection of black and black}, J such as line instance element or J line element cell crystal memory line is element also Bit C take R read line to the column connected to the connection of the poles and gates 4 ο of 1-14 body 10 crystal transistor selection

L B 厂 線 R語 字 線 語 字 列 體 晶 電 擇 選 外 此 端 端 1 另 之 容 電 述 上 而 接線 連.元 係位 極行 源至 之接 4 ο 連 「行位 10 2之 ,且選 」或 丨 至電容I (BL : 開關1 0 8之閘極亦連接至選擇電晶體1 〇 4之源極,因此便位 於上述源極與電容1 0 6的一端之間。此連接點係稱為開關控 200533069_____________________ 五、發明說明(7) 制節點,而開關1 0 8之源極與汲極則以「雛菊鏈(d a i s y chain)」的方式連接至同一行之其他開關。 在程式化(編程)步驟之中,相對較大之電壓將穿過所選 擇之行與所選擇之列的電容1 0 6,使得電容1 0 6之閘極氧化 層崩潰。在本發明一個實施例中,第一圖中之其他記憶體 晶胞1 0 2係從位於行位元線C X與列位元線R y之交點上的相同 晶胞1 0 2所形成,其中y之值為1至N,N為列之總數,而X之 .值為1至Μ,Μ為行之總數。 ♦用記憶體晶胞1 0 2作為第一圖中的FPGA 1 0 0之已編程(已 程式化)元件具有許多優點,因為此元件可以使-用許多常 見之互補式金氧半場效電晶體(CMOS)製程來製造,此製 程僅需使用單一多晶石夕(ρ ο 1 y s i 1 i c ο η)沉積步驟,而不需 要增加任何光罩步驟。此與「懸浮閘極」型態之FPGA快閃 | 記憶體不同,其通常需要至少二層多晶矽層。此亦不同於 1 ! 反熔絲型態之FPGA,其需要特別之製程步驟。此外,隨著 丨 現代技術之進步,電容與電晶體之尺寸可以非常微小,例 丨 如0 . 1 8微米、0 . 1 3微米甚至更小線寬製程,如此一來將大 丨LB plant line R word line word line body crystal elective select this end 1 and connect the connection on the other side. The element system is connected to the line source 4 ο "the line position 10 2 and "Select" or 丨 to capacitor I (BL: the gate of switch 108 is also connected to the source of selection transistor 104, so it is located between the above source and one end of capacitor 106. This connection point is It is called switch control 200533069_____________________ V. Description of the invention (7) The control node, and the source and drain of the switch 108 are connected to other switches in the same row in a "daisy chain" manner. In the (program) step, a relatively large voltage will pass through the selected row and the selected column of capacitors 106, causing the gate oxide layer of capacitor 106 to collapse. In one embodiment of the present invention, the The other memory cell 1 0 2 in the figure is formed from the same cell 1 0 2 at the intersection of the row bit line CX and the column bit line R y, where the value of y is 1 to N, N Is the total number of columns, and the value of X is from 1 to M, and M is the total number of rows. ♦ Use the memory cell 10 2 for The programmed (programmed) component of FPGA 100 in the first figure has many advantages because this component can be made using many common complementary metal-oxide-semiconductor field-effect transistor (CMOS) processes. This process Only a single polycrystalline stone (ρ ο 1 ysi 1 ic ο η) deposition step is used, without adding any mask steps. This is different from the FPGA floating flash of the “floating gate” type | Usually requires at least two layers of polycrystalline silicon. This is also different from 1! Anti-fuse type FPGA, which requires special process steps. In addition, with the advancement of modern technology, the size of capacitors and transistors can be very small, for example丨 Such as 0.18 micron, 0.1 13 micron or even smaller line width processes, so that will be large 丨

I 巾k增加FPGA之密度。 丨 •響 雜然僅顯示2乘2個FPGA 1 0 0,但是實際上當使用如先進 : 0 . 1 3微米互補式金氧半場效電晶體邏輯製程製造時,此 FPGA將可包含幾萬個晶胞,或甚至百萬個晶胞,而隨著互 丨I increases the density of the FPGA.丨 • Ranzhan only shows 2 by 2 FPGA 1 0 0, but in fact when using such as advanced: 0. 13 micron complementary metal oxide half field effect transistor logic manufacturing process, this FPGA will contain tens of thousands of crystals Cells, or even millions of unit cells,

第12頁 200533069_____ 五、發明說明(8) 補式金氧半場效電晶體邏輯製程之進步,將可實現更大之 陣歹1J 。 第二圖顯示FPGA 1 00之部分配置圖2 0 0,其配置圖乃適用於 先進互補式金氧半場效電晶體邏輯製程。在此所述及之金 氧半場效電晶體’通常係指任何閘極材料^包括已沉積之 多矽與其他良好導體,以及各種不同型態之閘極介電層, 但不限於氧化石夕。舉例而言,上述介電層可以為任何型態 之介電層,例如氧化物或氮化物,在施予一段時間之電壓 後會造成硬性或軟性崩潰。在一實施例中,本發明係使用 •度約略為5 0 A (於0 . 2 5微米製程時為5 0 A、於0 . 1 8微米製 程時為3 0 A以及於0 . 1 3微米製程時為2 0 A)之熱成長閘極 丨 氧化矽。 ; FPGA 1 0 0之較佳配置為格狀(gr id),其中如C1與C2之行Page 12 200533069_____ V. Description of the invention (8) The progress of the complementary metal-oxide-semiconductor half-field effect transistor logic process will enable a larger array of 1J. The second figure shows a partial configuration of FPGA 100, which is suitable for advanced complementary metal-oxide-semiconductor half-field-effect transistor logic process. The term “metal oxide half field effect transistor” referred to here generally refers to any gate material ^ including deposited polysilicon and other good conductors, and various types of gate dielectric layers, but it is not limited to stone oxide . For example, the above-mentioned dielectric layer may be any type of dielectric layer, such as an oxide or a nitride, which may cause a hard or soft collapse after a voltage is applied for a period of time. In one embodiment, the present invention uses a degree of approximately 50 A (50 A in a 0.5 micron process, 30 A in a 0.8 micron process, and 0.1 3 micron During the process, it is 20 A) thermally grown gate 丨 silicon oxide. ; The preferred configuration of FPGA 1 0 0 is grid (gr id), such as the line of C1 and C2

I 線乃垂直於如R 1與R 2之列線。第二圖顯示二個晶胞1 0 2,以 1乘2之陣列方式排列。如第二圖所示,一號金屬線(Μ 1) 係用以將上述開關(SW)之閘極連接至電容1 0 6之一端,此 外選擇電晶體(ST與1 04)之汲極則連接至穿過η+擴散接觸 〇n t a c t)、一號金屬、一號金屬孑L ( ν i a)以及二號金 屬(Μ 2)之字語線。再者,所有元件(選擇電晶體1 0 4、電 容1 0 6以及開關1 0 8)係形成自低電壓(LV)氧化物上之多 石夕層。The I line is perpendicular to the alignment lines such as R 1 and R 2. The second figure shows two unit cells 102, arranged in an array of 1 by 2. As shown in the second figure, the first metal wire (M 1) is used to connect the gate of the above-mentioned switch (SW) to one end of the capacitor 106. In addition, the drain of the transistor (ST and 104) is selected. Connected to the zigzag line through the η + diffusion contact, metal No. 1, metal No. L (ν ia), and metal No. 2 (Μ 2). In addition, all components (selective transistor 104, capacitor 106, and switch 108) are formed from many layers of low-voltage (LV) oxide.

第13頁 200533069___ 五、發明說明(9) 接著將配合第三圖,並參照範例電壓來描述FPG A 1 0 0之操 作方式,而在不同應用中或是使用不同製程技術時均可能 會使用不同電壓。在程式化(編程)期間,FPGA 1 00中之 各種晶胞乃暴露於四個可能程式化電壓組合之一,如第三 圖中之線3 0 1、3 0 3、3 0 5、3 0 7,且讀取電壓係顯示於線 3 0 9、3 1 1、3 1 3以及3 1 5之上。假設一個FPGA晶胞1 02 (第二 圖中之晶胞1 02係為與FPGA 1 00中之所有晶胞有關之一般晶 胞)被選擇來進行程式化,並位於R 1與C 1之交點,亦即此 .被選擇之記憶體晶胞1 0 2乃位於與被選擇列以及被選擇行 (SR/SC)之上。如線301所示,被選擇字語線R1上之電壓 (標不為Vwl或「字語線上之電壓」)為0’並且位元線 C1上的電壓(標示為Vbl或「位元線上之電壓」)為8伏 特。此外,被選擇之讀出位元線上的電壓(標示為Vblr或 i 「讀出位元線上之電壓」)為3. 3伏特。 此組電壓使得選擇電晶體1 0 4之「開啟」,其從上述字語線 i 施加0伏特至電容10 6之一端,而電容10 6之另一端則連接至 丨 電壓值為8伏特之位元線(V b 1 ),因此通過電容1 0 6之電壓 丨 為8伏特。電容1 0 6之氧化閘極係設計為於此電位差下崩 ,因而將FPGA晶胞程式化,其細節將敘述於下文之中。 當電容1 0 6之氧化層崩潰,將使電容1 0 6將轉換為電阻器。 , | 應可理解者為所施加之電壓精確強度與閘極氧化之厚度及 其他係數無關。例如,對於0. 1 3微米之互補式金氧半場效Page 13 200533069___ 5. Description of the invention (9) The operation of FPG A 1 0 0 will be described with reference to the third figure and reference voltages. Different applications or different process technologies may be used. Voltage. During programming (programming), various cells in FPGA 100 are exposed to one of four possible programmed voltage combinations, such as lines 3 0 1, 3 0 3, 3 0 5, 3 0 7, and the read voltage is displayed on lines 3 0 9, 3 1 1, 3 1 3, and 3 1 5. Suppose an FPGA cell 1 02 (cell 2 02 in the second figure is a general cell related to all the cells in FPGA 100) is selected to be stylized and located at the intersection of R 1 and C 1 That is, the selected memory cell 10 2 is located above the selected column and the selected row (SR / SC). As shown by line 301, the voltage on the selected word line R1 (not labeled Vwl or "voltage on word line") is 0 'and the voltage on bit line C1 (labeled as Vbl or "bit line" Voltage ") is 8 volts. In addition, the voltage on the selected readout bit line (labeled Vblr or i "Voltage on the readout bit line") is 3.3 volts. This set of voltages makes the “on” of the transistor 104 to be applied. It applies 0 volts from the word line i to one end of the capacitor 106, and the other end of the capacitor 106 is connected to a voltage value of 8 volts. Element line (V b 1), so the voltage through capacitor 106 is 8 volts. The oxidized gate of capacitor 106 is designed to collapse at this potential difference, so the FPGA cell is programmed. The details will be described below. When the oxide layer of capacitor 106 collapses, capacitor 106 will be converted into a resistor. It should be understood that the precise strength of the applied voltage is independent of the thickness and other factors of the gate oxidation. For example, for a complementary metal-oxygen half field effect of 0.1 3 microns

第14頁 200533069 五、發明說明(ίο) 電晶體製程,上述閘極氧化層通常較薄,所以需要一較低Page 14 200533069 V. Description of the invention (ίο) In the transistor process, the above gate oxide layer is usually thin, so a lower one is required.

之電位差通過電容106。 I j | 在R1與Cl分別為所選擇之列與行的情況下,考量在FPGA晶 | 胞1 0 2中所選擇之列與未選擇之行的交點(S R / U C,例如R 1 與C2)之衝擊(impact)。如線30 5所示,字語線R1之電壓 : 值為0伏特、未選擇之讀取位元線(Vbl)之電壓值為0、以 丨 及未選擇位元線C 2上之電壓值為0。由於選擇電晶體1 〇 4之 : .閘極上的電壓為0伏特,所以FPG A晶胞10 2於這些狀況下並 I 未程式化。 在R1與C1分別為所選擇之列與行的情況下,考量在FPGA晶The potential difference passes through the capacitor 106. I j | In the case where R1 and Cl are the selected columns and rows, consider the intersection of the selected column and the unselected row in the FPGA crystal | Cell 1 0 2 (SR / UC, such as R 1 and C2 ) 'S impact. As shown by line 30 5, the voltage of the word line R1: the value is 0 volts, the voltage value of the unselected read bit line (Vbl) is 0, and the voltage value on the unselected bit line C 2 Is 0. Since the transistor 104 is selected: The voltage on the gate is 0 volts, so the FPG A unit cell 102 is not programmed under these conditions. In the case where R1 and C1 are the selected columns and rows respectively, consider the

I 胞102中所選擇之列與未選擇之行的交點(UR/SC,例如: i R 2與C 1)之衝擊。如線3 0 3所示,未選擇字語線R 2上之電壓 丨 ί 值為3. 3伏特、上述所選擇讀取位元線(Vbl r)上之電壓值 \ 為3 . 3伏特以及位元線C 1上之電壓為8伏特。由於上述讀取 I 位元線之電壓值為3 . 3伏特,因此造成選擇電晶體1 〇 4之 「開啟」,並將上述字語線上的3. 3伏特施加於電容1 0 6之 一端,而上述電容之另一端則固定至上述位元線上,或為 |情形下的8伏特,因此使得4. 7伏特的電位差通過電容106丨 f閘極氧化層。記憶體晶胞1 0 2並非設計於這些狀況之下程 -式化。 在R1與C1分別為所選擇之列與行的情況下,考量在FPGA晶The impact of the intersection point (UR / SC, for example: i R 2 and C 1) of the selected row and the unselected row in cell 102. As shown by line 3 0 3, the voltage on the unselected word line R 2 is a value of 3.3 volts, the voltage value on the selected read bit line (Vbl r) above is 3.3 volts, and The voltage on the bit line C 1 is 8 volts. Because the voltage value of the read I bit line is 3.3 volts, the "on" of the transistor 104 is selected, and 3.3 volts on the word line is applied to one end of the capacitor 106. The other end of the capacitor is fixed to the above-mentioned bit line, or 8 volts in the case of |, so that the potential difference of 4.7 volts passes through the capacitor 106 丨 f gate oxide layer. The memory cell 1 0 2 is not designed for these situations. In the case where R1 and C1 are the selected columns and rows respectively, consider the

第15頁 200533069 五、發明說明(11) 胞1 02中未選擇之行與未選擇之列的交點(UR/UC,例如: R 2與C 2)之衝擊。如線3 0 7所示,未選擇字語線R 2上之電壓 值為3 . 3伏特、上述未選擇讀取位元線(Vb 1 r)之電壓值為 0伏特以及上述未選擇位元線C 2之電壓值為0伏特。由於選 擇電晶體1 0 4之閘極上的電壓值為0伏特,因此上述選擇電 晶體處於「關閉」之位置,使得電容1 0 6之一端為浮動之狀 態。電容1 0 6的另一端由於連接至上述位元線,所以其電壓 值為0伏特,而FPGA晶胞10 2並未於這些狀況之下程式化。 |Page 15 200533069 V. Description of the invention (11) The impact of the intersection (UR / UC, for example: R 2 and C 2) of the unselected row and the unselected row in Cell 102. As shown by line 3 07, the voltage value on the unselected word line R 2 is 3.3 volts, the voltage value on the unselected read bit line (Vb 1 r) is 0 volts, and the above unselected bits The voltage value of line C 2 is 0 volts. Since the voltage on the gate of the selection transistor 104 is 0 volts, the above selection transistor is in the "off" position, so that one end of the capacitor 106 is in a floating state. Since the other end of the capacitor 106 is connected to the above-mentioned bit line, its voltage value is 0 volts, and the FPGA cell 102 is not programmed under these conditions. |

I 在FPGA晶胞1 02藉由電容1 06之閘極氧化層的崩潰而程式化 ; •後,晶胞1 0 2的物理特性已經改變,特別是電容1 0 6將成 為一電阻元件。應注意者為於程式化期間,雖然通過上述I is programmed in FPGA cell 102 by the breakdown of the gate oxide layer of capacitor 106; • Later, the physical characteristics of cell 102 have changed, especially capacitor 106 will become a resistive element. It should be noted that during stylization, although through the above

I 選擇電晶體氧化物之電壓值(即位於選擇電晶體10 4的閘極 | 上之3. 3伏特)大於一般電壓(對於0 · 1 8微米互補式金氧半 | 場效電晶體製程而言為1. 8伏特),但由於程式化時間(通 常約略或少於幾秒鐘)甚為短暫,所以此較高之電壓將不 會使得選擇電晶體1 0 4之閘極氧化層崩潰。 讀取FPGA 1 0 0之讀取係經由以下之方式實施。首先施加1 . 8 . 3伏特之讀取選擇電壓於所選擇行位元線(SC)之上、 並施加1 . 8伏特之讀取選擇電壓於上述讀取選擇位元線 ·( Vb 1 r)之上以及施加0伏特之電壓於上述所選擇列字語線 (S R)之上。應注意者為,這些電壓係針對典型0 . 1 8微米 丨 互補式金氧半場效電晶體製程,而在較小型且更先進之互 丨I The voltage value of the selected transistor oxide (ie, 3.3 volts on the gate of the selected transistor 10 4) is greater than the normal voltage (for 0 · 1 8 μm complementary metal-oxygen half | field effect transistor process and 1.8 volts), but because the programming time (usually about or less than a few seconds) is very short, this higher voltage will not cause the gate oxide layer of the selected transistor 104 to collapse. The reading of FPGA 100 is implemented in the following manner. Firstly, a read selection voltage of 1.8 volts is applied to the selected row bit line (SC), and a read selection voltage of 1.8 volts is applied to the above read selection bit line. (Vb 1 r ) And a voltage of 0 volts is applied to the selected column word line (SR). It should be noted that these voltages are for a typical 0.18 micron 丨 complementary metal-oxide-semiconductor half-field-effect transistor process, but in smaller and more advanced 丨

第16頁 200533069______ 五、發明說明(12) 補式金氧半場效電晶體製程中,通常使用較低之電壓值。 例如,在0. 1 3微米互補式金氧半場效電晶體製程中,上述 選擇行位元線與上述被選擇讀取線位元線上之讀取選擇電 壓值通常約略為1. 2伏特。 假設R1與C1為所選擇之列與行(SC/SR),並且位於交點上 之F PG A 1 0 2係已程式化,如線3 0 9所示,將透過位元線C 1將 1 · 8至3 · 3伏特(讀取選擇電壓)施加於電容1 0 6之一端。應 .注意者為,較高之位元線電壓將使得上述位元線感應出較 高之讀取電流,此外亦透過上述讀取位元線施加1 . 8伏特於 •擇電晶體1 0 4之閘極,並且透過字語線R 1施加0伏特至選 擇電晶體1 0 4之汲極。如此將使得選擇-電晶體1 0 4為「開 啟」之狀態。然而,即使上述選擇電晶體為「開啟」之狀 態,上述選擇電晶體中仍然存在一些阻抗(r e s i s t a n c e )。再者,亦存在1 . 8至3 . 3伏特的電壓穿過電容1 0 6,若此 電容已程式化,將使漏電流(通常超過1 0微安培)從上述 所選擇之行位元線流向上述所選擇列之字語線。實際上, 已程式化電容1 0 6與選擇電晶體1 0 4將形成一分壓器,而此 一分壓器之中節點則連接至開關1 0 8之閘極,此分壓器之效 i為施加在開關1 0 8之閘極上的電壓將足以開啟開關1 0 8。 f未預先程式化晶胞1 0 2,電容1 0 6會具有較選擇電晶體1 0 4 更高之阻抗。此外,由於選擇電晶體1 0 4之開啟,將使得上 述字語線之0伏特電壓施加於開關1 0 8之上,而導致開關1 0 8 關閉。Page 16 200533069______ V. Description of the invention (12) In the process of complementary metal-oxide-semiconductor half field effect transistor, a lower voltage value is usually used. For example, in a 0.13 micron complementary metal-oxide-semiconductor field-effect transistor process, the read selection voltage value of the selected row bit line and the selected read line bit line is generally approximately 1.2 volts. Assume that R1 and C1 are the selected column and row (SC / SR), and F PG A 1 0 2 located at the intersection is stylized, as shown by line 3 0 9 and will be transmitted through bit line C 1 and 1 8 to 3 · 3 volts (read selection voltage) is applied to one end of capacitor 106. It should be noted that a higher bit line voltage will cause the bit line to induce a higher read current, and in addition, 1.8 volts will be applied to the select transistor through the read bit line 1 0 4 And a voltage of 0 volts through the word line R 1 to the drain of the selection transistor 104. This will make the selection-transistor 104 to the "on" state. However, even if the above-mentioned selection transistor is “on”, some resistance (r e s i s t a n c e) still exists in the above-mentioned selection transistor. In addition, there is also a voltage of 1.8 to 3.3 volts through the capacitor 106. If this capacitor is programmed, the leakage current (usually more than 10 microamperes) will be removed from the selected bit line. The word line flowing to the selected column above. In fact, the programmed capacitor 106 and the selection transistor 104 will form a voltage divider, and the node in this voltage divider is connected to the gate of the switch 108. The effect of this voltage divider i is that the voltage applied to the gate of the switch 108 will be sufficient to turn on the switch 108. f. The cell 102 is not pre-programmed, and the capacitor 106 will have a higher impedance than the selected transistor 104. In addition, because the selection transistor 104 is turned on, the 0 volt voltage of the word line is applied to the switch 108, which causes the switch 108 to be turned off.

第17頁 200533069 五、發明說明(13) 在R 1與C 1分別為用於讀取操作的所選擇之列與行之情況 下,考量在FPGA晶胞1 02中所選擇之行與未選擇之列的交點 (U R / U C,例如:R 2與C 1)上之衝擊。如線3 1 1所示,透過 位元線C 1施加1 . 8至3. 3伏特(讀取選擇電壓)之電壓於電 容1 0 6之一端。此外,亦透過上述讀取位元線施加1 . 8伏特 於選擇電晶體1 0 4之閘極,並且透過字語線R 1施加1 . 8伏特 於選擇電晶體1 0 4之源極,如此一來將導致選擇電晶體之 .「關閉」。 • R 1與C 1分別為用於讀取操作的所選擇之列與行之情況 下,考量在FPGA晶胞1 02中未選擇之行與所選擇之列的交點 (S R / U C,例如:R 1與C 2)上之衝擊。如線3 1 3所示,0伏特 (讀取選擇電壓)乃透過位元線C 2來施加於電容1 0 6之一 端。此外,亦透過讀取位元線將0伏特施加於選擇電晶體 1 0 4之閘極,並且透過字語線R 1將0伏特施加於選擇電晶體 1 0 4之汲極/源極。在這些情況之下,將不會有電流從上述 字語線流至上述位元線。 jjR 1與C 1分別為用於讀取操作的所選擇之列與行之情況 f,考量在FPGA晶胞1 02中未選擇之行與未選擇之列的交點 • ( U R / U C,例如:R 2與C 2)上之衝擊。如線3 1 5所示,0伏特 (讀取選擇電壓)乃透過位元線C 2來施加於電容1 0 6之一 端。此外,亦透過讀取位元線將0伏特施加於選擇電晶體Page 17 200533069 V. Description of the invention (13) In the case where R 1 and C 1 are the selected columns and rows for read operation, consider the selected row and unselected in FPGA cell 1 02 The impact at the intersection of the columns (UR / UC, for example: R 2 and C 1). As shown by line 3 1 1, a voltage of 1.8 to 3.3 volts (read selection voltage) is applied through bit line C 1 to one end of capacitor 106. In addition, 1.8 volts is applied to the gate of the selection transistor 104 through the read bit line, and 1.8 volts is applied to the source of the selection transistor 104 through the word line R 1, so This will lead to the selection of the transistor "off". • In the case where R 1 and C 1 are the selected columns and rows for read operations, consider the intersection of the unselected rows and selected columns in the FPGA cell 1 02 (SR / UC, for example: R 1 and C 2). As shown by line 3 1 3, 0 volts (read selection voltage) is applied to one terminal of capacitor 106 through bit line C 2. In addition, 0 volts are also applied to the gate of the selection transistor 104 through the read bit line, and 0 volts are applied to the drain / source of the selection transistor 104 through the word line R1. Under these circumstances, no current will flow from the word line to the bit line. jjR 1 and C 1 are the selected columns and rows for read operation f, considering the intersection of unselected rows and unselected columns in FPGA cell 1 02 • (UR / UC, for example: R 2 and C 2). As shown by line 3 15, 0 volts (read selection voltage) is applied to one terminal of capacitor 106 through bit line C 2. In addition, 0 volts are also applied to the selection transistor through the read bit line

第18頁 200533069 五、發明說明(14) ; 10 4之閘極,並且透過字語線R 2將1.8伏特施加於選擇電晶 \ 體10 4之汲極/源極。在這些情況下,由於所選擇元件10 4為Page 18 200533069 V. Description of the invention (14); the gate of 104, and 1.8 volts is applied to the drain / source of the selection transistor \ 10 through the word line R2. In these cases, since the selected element 104 is

I 關閉狀態,將不會有電流從字語線流至位元線。 i j 1In the off state, no current will flow from the word line to the bit line. i j 1

I 於操作期間中,將採用下列之電壓。首先施加0伏特之字語 線電壓,接著施加1. 8伏特之位元線電壓,並且施加0至0. 8 伏特之位元線讀取電壓。0至0. 8伏特之未選擇讀取電壓 (Vb 1 r)係用以於虛弱開啟狀態下操作選擇電晶體1 04,因| .此僅產生極少之漏電流(約略為nA等級)。 i # 一圖至第三圖所描述之實施例中,開關1 0 8之閘極電壓將 通常等於或略少於Vcc (對於-0. 1 8微米互補式金氧半場效電 晶體製程為1 . 8伏特),因此開關1 08可以僅通過Vcc-Vt, 此將影響FPGA電路之速度表現。在另一實施例之中,開關 1 0 8與選擇電晶體1 0 4具有用於輸入/輸出元件之較厚的閘極 i 氧化層。例如,開關1 0 8與選擇電晶體1 0 4之閘極氧化層的 \ 厚度可能為60 A或更厚。電容10 6之閘極氧化層應維持於一 ί 般厚度,以用於特殊互補式金氧半場效電晶體製程,例如 對於0 . 1 8微米之互補式金氧半場效電晶體製程為3 0 Α。本 烏施 例之程式化與讀取電壓係顯示於第四圖之中。 :I During operation, the following voltages will be used. A zigzag line voltage of 0 volts is applied first, then a bit line voltage of 1.8 volts is applied, and a bit line read voltage of 0 to 0.8 volts is applied. The unselected read voltage (Vb 1 r) of 0 to 0.8 volts is used to operate the select transistor 1 04 in a weakly turned on state, because |. This only generates very little leakage current (approximately nA level). i # In the embodiment described in the first to third figures, the gate voltage of the switch 108 will usually be equal to or slightly less than Vcc (for the 0.8 micron complementary metal-oxide-semiconductor field-effect transistor with a manufacturing process of -1.1 8 volts), so the switch 108 can only pass Vcc-Vt, which will affect the speed performance of the FPGA circuit. In another embodiment, the switch 108 and the selection transistor 104 have a thicker gate oxide layer for the input / output element. For example, the thickness of the gate oxide layer of the switch 108 and the selection transistor 104 may be 60 A or more. The gate oxide layer of the capacitor 106 should be maintained at a general thickness for use in a special complementary metal-oxide-semiconductor field-effect transistor process. For example, a 0.8-micron complementary metal-oxide-semiconductor field-effect transistor process is 30. Α. The stylized and read voltage of this example is shown in the fourth figure. :

在另一實施例中,於讀取與程式化之操作期間,上述位元 | 線電壓可以偏壓至3. 3伏特(與在第一圖至第三圖的實施例 I i 之1 . 8伏特比較)。開關1 0 8將具有3 . 3伏特之閘極,因此可In another embodiment, during the read and stylized operations, the above-mentioned bit | line voltage may be biased to 3.3 volts (as in the first to third embodiments I i 1.8 Volt comparison). Switch 10 8 will have a 3.3 volt gate, so

第19頁 200533069 五、發明說明(15) 丨 以完全通過包含額外驅動閘極電壓之電壓V c c。因此,上述 | 已程式化之開關將具有非常低之阻抗以改善速度表現。 ί 雖然上述之FPGA已提供習知技術顯著之改進,第五圖至第 丨 十一圖中之實施例更可以提供包括動態可重複程式性之改 進。例如於第五圖中,F P G Α包括寫入電晶體(T w)、由薄 閘極氧化層上之多數閘極所產生之程式化電容 (programming capacitor; Cp)以及用於控制程式化邏輯 又控制開關元件(Tsw)。第五圖之結構係與第一圖類似,| 但是當上述記憶體陣列作為動態記憶體使用時,其操作方 ®並不不同,而用於非揮發性記憶體之操作則與上述相 同。使用於第五圖中的新增術語,其中Bw (與Blr相同)為 丨 用於寫入之位元線、Bp (與B 1相同)為用於非揮發性程式 化之位元線,WL為字語線,而Vg-sw為開關閘電壓。Page 19 200533069 V. Description of the invention (15) 丨 Pass the voltage V c c completely including the additional driving gate voltage. As a result, the above | programmed switches will have very low impedance to improve speed performance. Although the above FPGAs have provided significant improvements in conventional technologies, the embodiments in Figures 5 through 11 can provide improvements including dynamic repeatability. For example, in the fifth figure, FPG A includes a write transistor (T w), a programming capacitor (Cp) generated by a plurality of gates on a thin gate oxide layer, and a circuit for controlling the programming logic. Control switching element (Tsw). The structure of the fifth figure is similar to that of the first figure, but when the above memory array is used as dynamic memory, its operator ® is not different, and the operation for non-volatile memory is the same as above. A new term used in the fifth figure, where Bw (same as Blr) is a bit line for writing, Bp (same as B 1) is a bit line for non-volatile programming, WL Is the word line, and Vg-sw is the switching gate voltage.

' I 其中重要者為在「硬性」(hard)非揮發性程式化之前 (施加電壓於電容Cp以崩潰GoX),可藉由持續(constant丨 )寫入或充電儲存於上述開關閘極與電容Cp中之電荷,來 |'I The most important one is before “hard” non-volatile programming (apply voltage to capacitor Cp to crash GoX), which can be written or stored in the switch gate and capacitor by constant writing or charging The charge in Cp, come |

II

將晶胞作為動態記憶體使用。在此方法中,上述陣列也可 I i作為動態隨機存取記憶體(DRAM)形式之記憶體元件, —晶胞之操作細節乃呈現第六圖之中。 上述之寫入或充電(重新寫入;ref res h)係藉由選擇所有 WL (列字語線)線以及寫入行位元線(Bw)而一行接著一The unit cell is used as dynamic memory. In this method, the above array can also be used as a memory element in the form of dynamic random access memory (DRAM), the details of the operation of the unit cell are shown in the sixth figure. The above writing or charging (rewriting; ref res h) is performed by selecting all the WL (column word line) lines and writing the bit line (Bw) line by line.

第20頁Page 20

I 200533069I 200533069

五、發明說明(16) I 行來完成。「1」之寫入或清除係藉由設定Vwl為高電壓 \ (Vcc)來完成,而「0」之寫入或清除係藉由設定Vwl至低 丨 電壓(0V)來達成,上述未選擇之行電壓(Vbw)則一直為 丨 0伏特。因此,如第六圖所示,若欲將「1」寫入至晶胞, i 則位元線Bw為高電壓、位元線Bp為低電壓且字語線WL為高 電壓。若欲將「0」寫入至晶胞,則位元線Bw為高電壓、位 元線Bp為低電壓且字語線WL為低電壓。 在0.1 8微米半導體製程之中,電壓Vcc為1 . 8伏特。為了寫 i 入電晶體T w (通常作為N型金氧半場效電晶體電晶體)以元 ®通過「1」,在某些實施例之中,可於FPGA邏輯電路之 中,使用較低之電壓Vdd (例如1 · 8伏特至1 · 2伏特之間)’ \ 以達成較高之速率以及較低功率消耗。 例如,假設第五圖中之記憶體陣列係作為動態記憶體並且 寫入動態資料。例如,在此操作之中,用於特定行之「位 元流」(此位元流可為FPGA之開關控制資料)係從外部或 晶片上之可消除程式化唯讀記憶體(EPROM)或快閃記憶體 丨 (f 1 a s h)載入至W L移位暫存器(s h i f t r e g i s t e r ;未顯示 i圖中)。若有1 0 2 4條字語線WL s (列),則會有1 0 2 4位元 料被讀取進入1 0 2 4個位元移位暫存器之中。接著,所選5. Description of the invention (16) I line to complete. "1" is written or cleared by setting Vwl to a high voltage (Vcc), and "0" is written or cleared by setting Vwl to a low voltage (0V). The above is not selected. The trip voltage (Vbw) is always 0V. Therefore, as shown in the sixth figure, if "1" is to be written to the cell, bit line Bw is high voltage, bit line Bp is low voltage, and word line WL is high voltage. If "0" is to be written to the cell, the bit line Bw is a high voltage, the bit line Bp is a low voltage, and the word line WL is a low voltage. In a 0.1 8 micron semiconductor process, the voltage Vcc is 1.8 volts. In order to write the transistor T w (usually an N-type metal-oxide-semiconductor transistor), the element “1” is passed. In some embodiments, a lower voltage can be used in the FPGA logic circuit. Vdd (for example between 1. 8 volts and 1.2 volts) '\ to achieve higher rates and lower power consumption. For example, suppose the memory array in the fifth figure is used as dynamic memory and writes dynamic data. For example, in this operation, the "bit stream" for a specific row (this bit stream can be the FPGA's switch control data) is externally or on-chip erasable Programmable Read Only Memory (EPROM) or Flash memory (f 1 ash) is loaded into the WL shift register (shiftregister; not shown in the figure i). If there are 10 2 word lines WL s (column), then 10 2 4 bit data will be read into the 10 2 4 bit shift register. Then, select

I 擇之行Bw的電壓將為Vcc,並且上述行中的1 0 2 4位元同時寫 入至上述偏移暫存器(shift register),其中以電壓Vcc丨The voltage of Bw in the selected row will be Vcc, and the 104 bits in the above row will be written into the above shift register at the same time.

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寫入「1」並以0伏特寫入「0」。 I"1" is written and "0" is written at 0 volts. I

第21頁 200533069 五、發明說明(17) 在寫入(同時充電)第一行之後,用於第二行之位元流將 載入上述移位暫存器之中,而上述第二行(Bw)將被選擇 並且充電,並一行接著一行地重複此操作直到寫入或充電 最後一行為止。上述程序將再次從第一行、第二行· · · 等重複,因此上述行係以序列之方式持續地充電。 寫入或充電一行的時間約在數奈秒(nS)至數微秒(uS) .之間。若有1 0 2 4行,則充電週期時間將介於數微秒至數毫 秒之間。在一實施例中,儲存於開關閘極上之電荷於此時 癱範圍中將不會減少超過1 0 %。 於寫入或充電(refreshing)之程序中,波形乃具有一時間 丨 序歹1j ( sequence)位於字語線WL與寫入位元線Bw之上,並 丨 且上述時間序列係設計以避免清除儲存於控制開關T s w之閘 極上的資料。特別是具有「1」之字語線WL應該於寫入位元 線Bw( Vblr)成為Vc c之前成為Vcc,此Vc c電壓將開啟用於 充電之選擇N型金氧半場效電晶體(NM0S)開關(Tw)。此丨 外在字語線WL降至0伏特之前,位元線Bw ( Vblr)應已為0 | i特,以關閉上述之選擇N型金氧半場效電晶體,如第七圖 | 示。「0」之寫入或充電相類似於上述之方式,但電壓 -Vwl係為0伏特而非Vcc。再者,在依續充電行之間的期間 中,Vwl係設定為Vwb (低)之偏壓,以減少當使用深次微 米製程時,通常會從上述T w源極汲極洩漏(I d 〇 f f)所產生Page 21 200533069 V. Description of the invention (17) After writing (simultaneously charging) the first line, the bit stream used for the second line will be loaded into the above-mentioned shift register, and the above-mentioned second line ( Bw) will be selected and charged, and this operation is repeated line by line until the last line is written or charged. The above procedure will be repeated again from the first line, the second line, etc., so the above lines are continuously charged in a sequential manner. The time to write or charge a line is between a few nanoseconds (nS) to a few microseconds (uS). With 10 2 4 lines, the charging cycle time will be between a few microseconds and a few milliseconds. In one embodiment, the charge stored on the switching gate will not decrease by more than 10% in the paralysis range at this time. In the writing or refreshing process, the waveform has a time sequence 1j (sequence) above the word line WL and the write bit line Bw, and the time sequence is designed to avoid clearing. Data stored on the gate of the control switch T sw. In particular, the word line WL with "1" should become Vcc before the bit line Bw (Vblr) becomes Vc c. This Vc c voltage will turn on the N-type metal-oxide half field effect transistor (NM0S) for charging ) Switch (Tw). In addition, before the word line WL drops to 0 volts, the bit line Bw (Vblr) should already be 0 | i special, in order to turn off the above-mentioned selection of the N-type metal-oxygen half field effect transistor, as shown in the seventh figure | The writing or charging of "0" is similar to the above method, but the voltage -Vwl is 0 volts instead of Vcc. Moreover, during the period between successive charging lines, Vwl is set to a bias voltage of Vwb (low) to reduce leakage from the above-mentioned T w source drain (I d) when using a deep sub-micron process. 〇ff)

第22頁 200533069 五、發明說明(18) 之漏電流。 應注意者為由於寫入或充電過程(refreshing)乃一行接著 一行完成,所以並不需要用於此充電程序中之行(位元線 )的特殊解碼電路,反而可使用簡單之封閉迴圈移位暫存 器鍊。 本發明之動態記憶體所使用之充電或覆寫無須讀取,發明 .之動態記憶體的讀取通常會破壞儲存之資料或是干擾所控 制之開關的閘極電壓。這與一般動態隨機存取記憶體相 癱,一般動態隨機存取記憶體(DRAM)首先必須讀出資料 或儲存電荷,然後藉由充電操作以儲存資料。此將可避免 動態隨機存取記憶體(DRAM)晶胞直接被用於FPGA控制開 關,此須穩定之狀態來提供「關閉」或「開啟」之開關。 上述記憶體陣列之雙重特性可用於許多應用上。藉由具有 可作為動態記憶體與非揮發性記憶體之能力,將有助於原 型(prototyping)之應用。在上述應用中,使用者需要多 次程式化FPGA晶胞,並且在完成設計之後,使用者可如上 般永久程式化F P G A。 .如上所示,持續寫入以充電上述開關記憶體之使用需要不 斷地從非揮發性記憶體(外部或内部)中讀取上述設計點 陣圖(d e s i g n b i t m a p )。對於需要密度非常高之結構的非Page 22 200533069 V. Leakage current of invention description (18). It should be noted that because the writing or charging process (refreshing) is completed line by line, there is no need for a special decoding circuit for the line (bit line) in this charging process. Instead, a simple closed loop can be used. Bit register chain. The charging or overwriting used by the dynamic memory of the present invention does not require reading. The reading of the invention's dynamic memory usually destroys the stored data or interferes with the gate voltage of the controlled switch. This is paralyzed with general dynamic random access memory, which must first read out data or store a charge, and then charge it to store data. This will prevent the dynamic random access memory (DRAM) cell from being used directly in the FPGA control switch. This must be in a stable state to provide an "off" or "on" switch. The dual characteristics of the memory array described above can be used in many applications. The ability to serve as both dynamic and non-volatile memory will help prototyping applications. In the above application, the user needs to program the FPGA cell multiple times, and after completing the design, the user can permanently program F P G A as above. As shown above, the use of continuous writing to charge the above-mentioned switch memory requires the constant reading of the design bitmap (d e s i g n b i t m a p) from non-volatile memory (external or internal). For non-high density structures

第23頁 200533069___ 五、發明說明(19) 揮發性記憶體之大型FPGA晶片而言,存取速度、資料移入 速度、充電週期時間以及輸入/輸出錯誤等均會是限制的因 數。 為了解決這些問題,根據本發明之另一實施例,加入並聯 之小型感測元件(Ts)、二極體(Td)以及感測位元線 (Bs),如第八圖所示。此一實施例排除從非揮發性記憶 體持續充電之需要,而以自我充電(self-refreshing)取 •代。 眷述自我充電程序具有二個操作步驟:感測與充電。在感 測操作中,所有所選擇之字語線WLs將會預先充電至高,電壓 (〜V c c)、而所選擇之感測行(B s)將會降低為低電壓 (介於0伏特與V c c / 2之間)。此外,所有未選擇之位元線 B s將會保持為或預先充電至高電壓(介於V c c - V t至V c c)以 防止任何漏電流從WL線流至未選擇之BS線通過具有「1」之 晶胞(儲存正電荷並且T s為開啟)。在此情形下,將僅選 擇在一字語線WL上之一晶胞。若所選擇之FPGA晶胞位於 「1」之狀態,便開啟感測元件(Ts),使其可傳導感測電 Isn),並且將字語線WL降低為低電壓之狀態。若上述 _FPGA晶胞位於「0」(關閉)之狀態,便關閉上述感測元 •件,並且無電流通過,而字語線WL亦將保持於高電壓之狀 態。因此,感測與充電電路將可感測並且記憶(鎖上資料 )所選擇之行上的晶胞之狀態,並且充電之。用於感測、Page 23 200533069___ 5. Description of the invention (19) For large FPGA chips with volatile memory, access speed, data transfer speed, charging cycle time, and input / output errors will be limiting factors. In order to solve these problems, according to another embodiment of the present invention, a parallel small sensing element (Ts), a diode (Td), and a sensing bit line (Bs) are added, as shown in FIG. This embodiment eliminates the need for continuous charging from non-volatile memory and replaces it with self-refreshing. The self-charging procedure has two operating steps: sensing and charging. During the sensing operation, all selected zigzag lines WLs will be precharged to a high voltage (~ V cc) and the selected sensing line (B s) will be reduced to a low voltage (between 0 volts and 0 volts). V cc / 2). In addition, all unselected bit lines B s will be maintained or precharged to a high voltage (between V cc-V t to V cc) to prevent any leakage current from flowing from the WL line to the unselected BS line. 1 ”cell (positive charge is stored and T s is on). In this case, only one unit cell on one word line WL will be selected. If the selected FPGA cell is in the "1" state, the sensing element (Ts) is turned on so that it can conduct the sensing electric current (Isn), and the word line WL is reduced to a low voltage state. If the above _FPGA cell is in the "0" (off) state, the above sensing element is turned off, and no current is passed, and the word line WL will remain in a high voltage state. Therefore, the sensing and charging circuit can sense and memorize (lock data) the state of the unit cell on the selected row and charge it. For sensing,

第24頁 200533069____— 五、發明說明(20) 寫入與非揮發性程式化之偏壓狀態係如第八圖所示,而第 九圖為佈局之俯視圖。 應注意者為二極體(Td)可極性相同地置於感測元件(Ts )之任何一側,且此二極體亦能夠以適當的偏壓配置來置 於相對之電極上’以防止未選擇之行上的漏電流。 亦應該注意者為二極體Td可藉由使用閘極連接至源極或汲 極之金氧半場效電晶體元件的閘極二極體來製造,或是藉 由使用P-N界面而產生。此FPGA晶胞陣列亦可使用安置於N 參或是N形基板上之P型金氧半場效電晶體(PM0S)元件來 產生。 如第十至第十一圖所示,無開關元件之晶胞陣列亦可作為 基於標準互補式金氧半場效電晶體製程之動態隨機存取記 憶體(DRAM),但是此感測電路將大大地簡化。上述二極 體可連接於感測元件之任何一側,以防止來自未選擇之元 件之良漏電流’並且此二極體可由閘極金氧半场效電晶體 元件來產生,其亦可藉由P型金氧半場效電晶體(PM0S)元Page 24 200533069____ — V. Description of the invention (20) The bias state of writing and non-volatile programming is shown in Figure 8, and Figure 9 is a top view of the layout. It should be noted that the diode (Td) can be placed on either side of the sensing element (Ts) with the same polarity, and this diode can also be placed on the opposite electrode with a proper bias configuration 'to prevent Leakage current on unselected row. It should also be noted that the diode Td can be manufactured by using a gate diode of a metal-oxide-semiconductor field-effect transistor whose gate is connected to a source or a drain, or by using a P-N interface. This FPGA cell array can also be generated using P-type metal-oxide-semiconductor field-effect transistor (PM0S) elements placed on N-parameters or N-shaped substrates. As shown in the tenth to eleventh figures, the cell array without switching elements can also be used as a dynamic random access memory (DRAM) based on a standard complementary metal-oxide-semiconductor field-effect transistor process, but this sensing circuit will greatly To simplify. The above diode can be connected to any side of the sensing element to prevent a good leakage current from unselected elements. And this diode can be generated by a gate metal-oxide half field effect transistor element, which can also be borrowed. By P-type metal-oxide half field effect transistor (PM0S) element

上述實施例顯示用於雙模式記憶體的各種結構,亦即:非 揮發性以及動態記憶體,而在另一實施例中則可形成單一 (s ο 1 e 1 y)動態記憶體陣列。如第十二A圖所示,藉由移除The above embodiments show various structures for dual-mode memory, that is, non-volatile and dynamic memory. In another embodiment, a single (s ο 1 e 1 y) dynamic memory array can be formed. As shown in Figure 12A, by removing

第25頁 200533069_ 五、發明說明(21) : 上述電容器(Cp)與程式位元線(Bp),將可產生作為動 : 態記憶體之結構’此外錯由移除電谷為C p ’晶胞之尺寸便 可顯著地縮減。此處之操作仍然與上述之内容相同。第十 二B圖為第十二A圖之電路的俯視圖。 ί 如第十二Α圖所示,當Tw元件於關閉狀態時,上述浮點(FP )節點將動態地儲存電荷,此外此FP節點亦可連接至NM0S 或PM0S閘極,以產生使用於FPGA晶片之動態可程式化開 _關。上述FP節點可作為反向器之輸入控制,並可如使用於 I 大多數基於SRAM之FPGA中般來使用於查詢表(LUT)中’這 丨 ♦延伸之應用將詳述如下。Page 25, 200533069_ V. Description of the invention (21): The above capacitor (Cp) and program bit line (Bp) will be generated as dynamics: The structure of the state memory 'in addition, the electric valley is removed as Cp' crystal Cell size can be significantly reduced. The operation here is still the same as described above. Figure 12B is a top view of the circuit of Figure 12A. As shown in Figure 12A, when the Tw element is in the off state, the above-mentioned floating-point (FP) node will dynamically store the charge. In addition, this FP node can also be connected to the NM0S or PM0S gate to generate the FPGA for use. The dynamics of the chip can be programmed on and off. The above-mentioned FP node can be used as the input control of an inverter, and can be used in a look-up table (LUT) as it is used in most SRAM-based FPGAs. This extended application will be detailed below.

II

I NM0S或PM0S電晶體中由FP所控制之多晶矽閘極,或與Tsw (NM0S或PM0S或反向器)、Ts及FP之界面電容器所結合之 反向器,將作為動態記憶體之「電容器」。F P與電晶體 (NM0S或PM0S或Ts)的多晶矽閘極之組合通常足以維持電 荷(信號),因此僅需要於相對低之頻率下進行充電。 第十三A圖、十三B與十三C圖顯示分別連接至NM0S電晶體、 _0S電晶體以及反向器(即開關Tsw)之FP節點。標示 / — XDM」係代表超級動態記憶體,而「X」亦具有使用薄閘 ^ 屈氧化電容作為記憶體元件之意義,或者代表非揮發性記 \ 憶體或儲存動態電荷之崩潰。 iI NM0S or PM0S transistors are controlled by FP polysilicon gates, or inverters combined with Tsw (NM0S or PM0S or inverter), Ts and FP interface capacitors will be used as "capacitors" of dynamic memory ". The combination of F P and the polycrystalline silicon gate of the transistor (NM0S or PMOS or Ts) is usually sufficient to maintain the charge (signal), so it only needs to be charged at a relatively low frequency. Figures 13A, 13B, and 13C show the FP nodes connected to the NMOS transistor, the 0S transistor, and the inverter (ie, the switch Tsw). "XDM" stands for super dynamic memory, and "X" also has the meaning of using thin gate ^ flex oxide capacitor as a memory element, or represents the collapse of non-volatile memory or memory or storing dynamic charge. i

第26頁 200533069___ 五、發明說明(22) 在本發明之另一實施例中,程式化電容器C p可位於晶胞之 左邊,如第十四A至十四C圖所示,此電容器Cp與第五A圖中 於非揮發性操作所使用者相同。加入F P之可程式化閘電容 器C p的保留(r e t e n t i ο η)使得上述晶胞具有非揮發性。 第十二圖之記憶體陣列更可籍由移除上述FPGA開關Tsw來進 行變更,其結果係如第十五A與第十五B圖所示,其大致為 三電晶體動態RAM記憶體。 在另一應用中,如第十六圖所示,將加入專用之讀取選擇 #語線(WLs),使得寫入與讀取功能得以分開控制。此應 用係與早期3T DRAM晶胞相同,可參考:由D. A. Hodg-es與 H. Jackson 戶斤著之「Analysis and Design o f Digital integrated Circuits, Semiconductor Memories」 第二 版,由位於紐約之M c G r a w H i 1 1於1 9 8 8年出版,除了專用電 容器連接至節點以儲存電荷外内容均相似。Ts或Tsw之閘極 I 以及FP之界面係用以作為此專用電容器。 丨 此應用通常適合用於深次微米半導體製程技術(< 0 . 2 5微米 &,其中Ts之閘極電容可因閘極氧化物厚度(Go X為40-50 I 用於0 . 2 5微米製程、3 0 - 3 5埃用於0 . 1 8微米製程、2 0 - 2 3 .埃用於0 . 1 3微米製程、1 6 - 1 9埃用於9 0奈米製程等)之縮減 而足夠大地形成。再者,應注意者為電晶體T r亦可連接於 丁3與0〇之間。Page 26 200533069___ 5. Description of the invention (22) In another embodiment of the present invention, the stylized capacitor C p may be located on the left side of the unit cell. Figure 5A is the same for non-volatile operation. The retention (r e t e n t i ο η) of the programmable gate capacitor C p added with F P makes the above unit cell non-volatile. The memory array in Fig. 12 can be changed by removing the FPGA switch Tsw. The results are shown in Figs. 15A and 15B, which are roughly three-transistor dynamic RAM memory. In another application, as shown in Figure 16, a dedicated read option # 语 线 (WLs) will be added, so that the write and read functions can be controlled separately. This application is the same as the earlier 3T DRAM cell. For reference, please refer to the second edition of "Analysis and Design of Digital Integrated Circuits, Semiconductor Memories" by DA Hodg-es and H. Jackson. Raw H i 1 1 was published in 1988 and is similar except that a special capacitor is connected to the node to store the charge. Ts or Tsw's gate I and FP interface are used as this special capacitor.丨 This application is usually suitable for deep sub-micron semiconductor process technology (< 0.25 micron &, where the gate capacitance of Ts can be due to the gate oxide thickness (Go X is 40-50 I for 0.2 5 micron process, 30-3 5 angstroms for 0.1 8 micron process, 20-2 3. Angstroms for 0.1 3 micron process, 16-19 angstroms for 90 nanometer process, etc.) It is reduced enough to be formed sufficiently. Furthermore, it should be noted that the transistor T r can also be connected between D 3 and 0.

第27頁 200533069 五、發明說明(23) 第十六A圖之晶胞陣列將一列接著一列依序寫入與讀取,並 且從上述位元線輸入與輸出資料。應可理解者為W L與B L之 名稱可互相交換,在任一範例中,此資料線可輸入至T w之 汲極,並且從T r之汲極輸出。 可程式閘電容器Cp亦可加入至FP,使其具有非揮發性,此 乃基於使用動態記憶體以控制可程式化開關或反向器之相 .同想法,並可具有各式各樣之變化。 •發明之另一實施例係如第十七A至十七B圖所示,在本實 施例中,上述記憶體之晶胞結構以相對較小之尺寸產生。 此外,上述記憶體與FPGA開關可在不輸出感測資料之情形 下,藉由持續寫入結構資料至上述浮點而開啟。此結構可 來自各式各樣來源,例如嵌入於晶片上之記憶體、外部 SRAM、快閃記憶體或單次可程式化(OTP)記憶體。在第十 七A圖中,每一個記憶體晶胞僅需要二個電晶體。應注意者 為位於字語線上用以寫入「0」(V1 b)或待命之列電壓係 為一偏壓,此偏壓乃介於選擇元件(Tw)的臨界電壓(V t )▲之範圍内,以提供次臨界洩漏。 .對於先進製程技術而言,核心閘極氧化層之厚度非常薄 (用於0 · 1 3微米製程為2 0埃、用於9 0奈米製程為1 7埃)。 因此,上述閘極介電值之穿隧(tunnel 1 ing)電流可使得Page 27 200533069 V. Description of the invention (23) The cell array of Figure 16A writes and reads one column after another sequentially, and inputs and outputs data from the above bit line. It should be understood that the names of W L and B L are interchangeable. In any example, this data line can be input to the drain of T w and output from the drain of T r. Programmable gate capacitor Cp can also be added to the FP to make it non-volatile, which is based on the use of dynamic memory to control the phase of a programmable switch or inverter. Same idea, and can have various changes . • Another embodiment of the invention is shown in Figures 17A to 17B. In this embodiment, the unit cell structure of the above memory is generated in a relatively small size. In addition, the memory and the FPGA switch can be turned on by continuously writing the structure data to the floating point without outputting the sensing data. This structure can come from a variety of sources, such as on-chip memory, external SRAM, flash memory, or one-time programmable (OTP) memory. In Figure 17A, only two transistors are required for each memory cell. It should be noted that the voltage on the word line for writing "0" (V1 b) or standby is a bias voltage, and this bias voltage is within the range of the threshold voltage (V t) of the selection element (Tw) ▲ To provide subcritical leakage. For advanced process technology, the thickness of the core gate oxide layer is very thin (20 angstroms for a 0.13 micron process and 17 angstroms for a 90 nanometer process). Therefore, the tunneling current of the gate dielectric value described above can make

第28頁 200533069__— 五、發明說明(24) 電荷保持非常短之時間,此需要相對較高頻率之充電。另 一種實施方式乃於開關元件(T s w)中使用輸入/輸出形式 元件(對於1 . 8伏特為3 0埃、對於2 . 5伏特為5 0埃以及對於 3. 3伏特為7 0埃),以防止閘極穿隧之洩漏,此外亦可使用 丨 PM0S薄間極氧化元件以減少閘極之泡漏。 \ | 雖然於FPGA晶片之操作期間,無法感應出儲存於FP中之電 : 荷,其需要浮點具有相對穩定之電位,對於「開啟」為 : .「1」以及對於「關閉」為「0」,但仍可破壞性地讀出以 確認陣列之功能正常。 丨Page 28 200533069__ — V. Description of the invention (24) The charge is kept for a very short time, which requires relatively high frequency charging. Another embodiment uses input / output form elements in the switching element (T sw) (30 angstroms for 1.8 volts, 50 angstroms for 2.5 volts and 70 angstroms for 3.3 volts) In order to prevent leakage of the gate through the tunnel, in addition, PM0S thin inter-electrode oxidation elements can be used to reduce the gate leakage. \ | Although during the operation of the FPGA chip, the electricity stored in the FP cannot be sensed: it needs a floating point with a relatively stable potential. For "on":. "1" and for "off" it is "0" ", But it can still be read destructively to confirm that the array is functioning properly.丨

I 以下各點係基於本發明各個實施例觀察而得! !I The following points are based on observations of various embodiments of the present invention!!

1 .浮點(FP)可藉由關閉Tw來達成,並且亦可用以控制 I NM0S或PM0S之多晶石夕閘極,或者CMOS反向器之輸入端。 丨 2. 非零偏壓Vwb(〜Vt)係提供至T w之汲極(假設Ts之源極 丨 係連接至Ts之多晶矽閘極),以降低上述寫入電晶體(Tw 1 )之次臨界茂漏(s u b - t h r e s h ο 1 d 1 e a k a g e ),而增加電荷儲 存時間或延長上述充電週期。 3. 資料係從列字語線寫入以及讀出。 丨 & W L與B L s可以互相交換。 丨 5 .浮點(f 1 〇 a t i n g η 〇 d e )可用以控制開關元件閘極,而產生 .應用於FPGA之可程式開關。 6 .為了完全通過邏輯能階並且降低耦合自開關元件之電壓 的影響,浮動節點之電位(V f p)應高於開關源極或汲極電1. Floating point (FP) can be achieved by turning off Tw, and it can also be used to control the polysilicon gate of I NM0S or PM0S, or the input terminal of CMOS inverter.丨 2. Non-zero bias Vwb (~ Vt) is provided to the drain of Tw (assuming the source of Ts 丨 is connected to the polysilicon gate of Ts) to reduce the above-mentioned write transistor (Tw 1) times Critical drain leakage (sub-thresh ο 1 d 1 eakage), while increasing the charge storage time or extending the above charging cycle. 3. Data is written and read from the column word line.丨 & W L and B L s can be exchanged with each other.丨 5. Floating point (f 1 〇 a t i n g η 〇 d e) can be used to control the switching element gate to generate a programmable switch applied to FPGA. 6. In order to completely pass the logic level and reduce the influence of the voltage coupled from the switching element, the potential of the floating node (V f p) should be higher than the switching source or drain voltage.

第29頁 200533069 五、發明說明(25) 壓(通常為邏輯Vcc)。在一實施例中,V fp應該高於 (1 + C R ) * V c c + V t,其中「C R」為開關閘極至浮動節點之耦合 比例。 丨 7. 將行寫入位元線位能激發至高電壓,以完全通過字語線 電壓至浮動節點而達到所須之V f g。 8. NLDD之植入將被限制(block)於電晶體Td中,因此於多 晶矽閘極與n+ S/D擴散之間將無閘極重疊。在程式化Cp之 丨 後,將產生位於浮動節點以及程式位元線(Bp)至動態記 .憶體間之反向二極體,即使將晶胞程式化為非揮發性記憶 體之後,其仍然保持作用。 籲動態記憶體晶胞與陣列包括三個電晶體(T w、T s、T d | )、一條字語線(WL)以及二條位元線BL ( BW與BS),並 i 且移除電容器Cp與位元線Bp以減少晶胞之面積。 | 1 0. FPG A開關乃由FPG A晶胞中移除,使其成為基於純CMOS邏 輯製程之純動態記憶體與記憶體陣列。正常之薄閘極氧化 | 電容器係用以儲存動態資訊資料(電荷),而浮動節點則 控制電晶體,並且二極體乃用於在不破壞儲存資料之情況 下讀取資料。 11.動態記憶體晶胞包括Wlr、Wlw、B1以及GND,並且正常 : 薄閘極係作為一電容器以儲存動態電荷。 本發明以較佳實施例說明如上,然其並非用以限定本發明 所主張之專利權利範圍。其專利保護範圍當視後附之申請 專利範圍及其等同領域而定。凡熟悉此領域之技藝者,在Page 29 200533069 V. Description of the invention (25) Voltage (usually logic Vcc). In one embodiment, V fp should be higher than (1 + C R) * V c c + V t, where “C R” is the coupling ratio from the switch gate to the floating node.丨 7. Writing the row to the bit line bit can excite to a high voltage to completely pass the word line voltage to the floating node to reach the required V f g. 8. The implantation of NLDD will be blocked in the transistor Td, so there will be no gate overlap between the polysilicon gate and the n + S / D diffusion. After the Cp is programmed, an inverse diode between the floating node and the program bit line (Bp) to the dynamic memory will be generated, even after the unit cell is programmed into non-volatile memory. Still works. The dynamic memory cell and array include three transistors (T w, T s, T d |), a word line (WL), and two bit lines BL (BW and BS), and i and remove the capacitor Cp and bit line Bp to reduce the area of the unit cell. 1 0. The FPG A switch is removed from the FPG A cell, making it a pure dynamic memory and memory array based on a pure CMOS logic process. Normal thin gate oxidation | Capacitors are used to store dynamic information data (charges), while floating nodes control transistors, and diodes are used to read data without destroying the stored data. 11. The dynamic memory cell includes Wlr, Wlw, B1, and GND, and is normal: The thin gate is used as a capacitor to store dynamic charges. The present invention has been described above with reference to the preferred embodiments, but it is not intended to limit the scope of patent rights claimed by the present invention. The scope of patent protection shall depend on the scope of the attached patent application and its equivalent fields. Those who are familiar with the art in this field

第30頁 200533069__ 五、發明說明(26) 不脫離本專利精神或範圍内,所作之更動或潤飾,均屬於 本發明所揭示精神下所完成之等效改變或設計,且應包含 在下述之申請專利範圍内。Page 30 200533069__ V. Description of the invention (26) Changes or modifications made without departing from the spirit or scope of this patent are all equivalent changes or designs made in the spirit disclosed by the present invention and should be included in the following applications Within the scope of the patent.

第31頁 200533069 圖式簡單說明 【圖式簡單說明】 第一圖為本發明之場可編程閘陣列之一部分電路示意圖。 第二圖為第一圖之場可編程閘陣列之一部分配置圖。 第三圖顯示操作第一圖至第三圖之場可編程閘陣列電壓 表。 第四圖顯示操作場可編程閘陣列晶胞之另一實施例電壓 表。 第五圖為本發明之另一場可編程閘陣列之一部分電路圖。 ,第六圖顯示操作第五-c圖之場可編程閘陣列晶胞電壓表。 第七圖顯示第五-c圖在晶胞上儲存資料時序圖。 #八圖為本發明之另一場可編程閘陣列之一部分示意圖。 第九圖為第八圖妁電路俯視圖。 第十圖為本發明之動態記憶體陣列的一部分示意圖。 第十一圖為上述第十圖的電路俯視圖。 第十二A圖為本發明之形成一動態記憶體陣列示意圖。 第十二B圖為第十二A圖的電路俯視圖。 第十三A-十三C圖顯示使用一浮動點節點與電容器以分別控 制N型金氧半場效電晶體(NM0S) 、P型金氧半場效電晶體 (PM0S)以及反向器。 四A -十四C圖顯示使用浮動點節點與電容器以分別控制 氧半場效電晶體、P型金氧半場效電晶體以及反向 器。 第十五A圖為本發明之另一實施例之動態記憶體陣列示意 圖。Page 31 200533069 Brief description of the drawings [Simplified description of the drawings] The first diagram is a schematic circuit diagram of a part of a field programmable gate array of the present invention. The second figure is a partial configuration diagram of the field programmable gate array of the first figure. The third figure shows the field programmable gate array voltmeters operating the first to third figures. The fourth figure shows another embodiment of a field programmable gate array cell. The fifth figure is a partial circuit diagram of another field programmable gate array of the present invention. Figure 6 shows the field programmable gate array cell voltmeter operating Figure 5-c. The seventh diagram shows the timing chart of the fifth-c diagram storing data on the unit cell. # 八 图 is a partial schematic view of another field programmable gate array of the present invention. The ninth figure is a top view of the eighth figure and the circuit. The tenth figure is a schematic diagram of a part of the dynamic memory array of the present invention. The eleventh figure is a circuit top view of the tenth figure. Figure 12A is a schematic diagram of forming a dynamic memory array according to the present invention. Figure 12B is a top view of the circuit of Figure 12A. Figures 13A-13C show the use of a floating point node and a capacitor to control N-type metal-oxide-semiconductor field-effect transistor (NM0S), P-type metal-oxide-semiconductor field-effect transistor (PM0S), and inverter, respectively. The four A-fourteen C diagrams show the use of floating point nodes and capacitors to control oxygen half field effect transistors, P-type metal oxide half field effect transistors and inverters, respectively. Fig. 15A is a schematic diagram of a dynamic memory array according to another embodiment of the present invention.

第32頁 200533069 ~ j 圖式簡單說明 第十五B圖為第十五A圖之電路俯視圖。 第十六圖為本發明之另一實施例之動態記憶體陣列示意 圖。 第十七A圖為本發明之另一場可編程閘陣列示意圖,其為真 i 實動態之場可編程閘陣列開關。 第十七B圖為第十七A圖之場可編程閘陣列配置圖。 丨 【主要元件符號說明】 .場可編程閘陣列 100 記憶體晶胞 102 _ i _擇電晶體104 電容器 106 - | 開關1 0 8 部份配置圖 2 0 0 | 線 3 (Π、3 0 3、3 0 5、3 0 7、3 0 9、3 1 卜 3 1 3、3 1 5、3 1 7、 | 4(Π、4 0 3、4 0 5、4 0 7、4 0 9、41 卜 413、415、417 jPage 32 200533069 ~ j Schematic description Figure 15B is a top view of the circuit of Figure 15A. Fig. 16 is a schematic diagram of a dynamic memory array according to another embodiment of the present invention. Fig. 17A is a schematic diagram of another field programmable gate array of the present invention, which is a real field programmable gate array switch. Figure 17B is the layout of the field programmable gate array of Figure 17A.丨 [Description of main component symbols]. Field programmable gate array 100 Memory cell 102 _ i _ Selective transistor 104 Capacitor 106-| Switch 1 0 8 Partial configuration diagram 2 0 0 | Line 3 (Π, 3 0 3 , 3 0 5, 3 0 7, 3 0 9, 3 1 Bu 3 1 3, 3 1 5, 3 1 7, | 4 (Π, 4 0 3, 4 0 5, 4 0 7, 4 0 9, 41 413, 415, 417 j

Claims (1)

200533069_ 六、申請專利範圍 1 . 一種晶胞,可作為用於儲存資料之動態記憶體晶胞或用 於程式化之場可編程閘陣列(FPGA)晶胞,其中該晶胞係 用於具有行位元線、讀取位元線以及列字語線之一陣列之 中,該晶胞包含: 一電容器,具有一第一端與一第二端,該第一端連接至一 行位元線,而該第二端連接至一開關控制節點; 一選擇電晶體,具有一閘極、一源極以及一汲極,其中該 閘極連接至一寫入位元線,該源極連接至該開關控制節 .點,而該汲極連接至該列字語線;以及 : 一開關,藉由該開關控制節點控制,其中該開關控制節點 丨 _ ! ♦表示0或1之電壓來儲存資料。 2. 如申請專利範圍第1項之晶胞,其中該開關為一金氧半場 效電晶體場效電晶體(M0SFET) ’並且該金氧半場效電晶 體場效電晶體之一閘極連接至該開關控制節點。 1 3. 如申請專利範圍第1項之晶胞,其中係藉由開啟該選擇電 丨 晶體以及將資料置於該列字語線之上來使資料位於該開關 i I 控制節點之上。 I I j 如申請專利範圍第1項之晶胞,其中該電容器之該第一 .端、該選擇電晶體之該閘極以及該開關之一閘極係形成自 丨 相同之多晶矽層。200533069_ VI. Scope of patent application 1. A unit cell can be used as a dynamic memory unit cell for storing data or a field programmable gate array (FPGA) unit cell for programming. The unit cell is used to In an array of bit lines, read bit lines, and column word lines, the unit cell includes: a capacitor having a first end and a second end, the first end being connected to a row of bit lines, The second terminal is connected to a switch control node; a selection transistor has a gate, a source, and a drain, wherein the gate is connected to a write bit line, and the source is connected to the switch Control nodes, and the drain is connected to the word line; and: a switch controlled by the switch control node, wherein the switch control node 丨 _! ♦ represents a voltage of 0 or 1 to store data. 2. For example, the unit cell of the scope of the patent application, wherein the switch is a metal-oxide-semiconductor field-effect transistor (MOSFET), and one of the metal-oxide-semiconductor field-effect transistors is connected to This switch controls the node. 1 3. For example, the unit cell of the first scope of the patent application, wherein the data is located on the control node of the switch i I by turning on the selection transistor and placing the data on the word line of the column. I I j is the unit cell of item 1 of the patent application, wherein the first terminal of the capacitor, the gate of the selection transistor, and one of the switches are formed from the same polycrystalline silicon layer. 第34頁 200533069__ 六、申請專利範圍 5 . —種連接至一列字語線、一行寫入線以及一讀取位元線 之雙模式晶胞之操作方法,其中該晶胞包含:一電容器, 具有一第一端與一第二端,該第一端連接至該行寫入位元 線,而該第二端連接至一開關控制節點;一選擇電晶體, 具有一閘極、一源極以及一汲極,該問極連接至該讀取位 元線,該源極連接至該開關控制節點,以及該汲極連接至 一列字語線;以及一開關,藉由該開關控制節點控制;該 方法之步驟包括: .當該晶胞作為一場可編程閘陣列(FPGA)晶胞並且被程式 化時·· 像)提供一第一電壓至該行位元線; (2 )開啟該選擇電晶體;以及 (3 )提供一第二電壓至一所選擇之該列字語線,其中該第一 電壓與該第二電壓形成一電位差橫跨該電容器使得將該電 容器之介電層崩潰,轉換成為一電阻元件; 當該晶胞作為儲存資料之一動態記憶體晶胞時: (1 )開啟該選擇電晶體; (2 )通過該列字語線將該資料提供至該開關控制節點,其中 該開關控制節點以表示0或1之電壓來儲存資料。 如申請專利範圍第5項之方法,其步驟更包含當該晶胞作 „為一動態記憶體晶胞時^週期地充電該資料。 7.如申請專利範圍第5項之方法,其中在移除該列字語線上Page 34 200533069__ VI. Scope of patent application 5. —A method for operating a dual-mode cell connected to a column of word lines, a line of write lines, and a bit line that reads, wherein the cell includes: a capacitor having A first terminal and a second terminal, the first terminal is connected to the row of write bit lines, and the second terminal is connected to a switch control node; a selection transistor having a gate, a source and A drain connected to the read bit line, the source connected to the switch control node, and the drain connected to a column of word lines; and a switch controlled by the switch control node; the The steps of the method include: when the unit cell is a programmable gate array (FPGA) unit cell and is programmed ... the image provides a first voltage to the row of bit lines; (2) turning on the selection transistor ; And (3) providing a second voltage to a selected word line, wherein the first voltage and the second voltage form a potential difference across the capacitor so that the dielectric layer of the capacitor collapses and becomes A resistance element; when the When the unit cell is a dynamic memory unit cell that stores data: (1) Turn on the selection transistor; (2) Provide the data to the switch control node through the word line, where the switch control node is represented by 0 Or 1 voltage to store data. For example, the method of claiming the scope of patent application, the steps of which further include charging the data periodically when the unit cell acts as a dynamic memory unit. 7. The method of the scope of application claiming the domain, in which Except the column of words on the line 第35頁 200533069 -—. ..............1--- * — t 六、申請專利範圍 i 之資料之前關掉該選擇電晶體。 I 8. —種晶胞,可作為用於儲存資料之動態記憶體晶胞或用 i 於程式化之場可編程閘陣列晶胞,其中該晶胞係用於具有 行位元線、讀取位元線以及列字語線之一陣列之中,該晶 胞包括: 一電容器,具有一第一端與一第二端,該第一端連接至一 行位元線(Bp),而該第二端連接至一開關控制節點; I 一選擇電晶體,具有一閘極、一源極以及一汲極,其中該 | 閘極連接至該寫入位元線(Bw),該源極連接至該開關控 丨 籲節點,以及該汲極連接至一列字語線(WL) ; | 一開關·,藉由該開關控制節點所控制,其中該開關控制節 點以表示0或1之電壓來儲存資料;以及 一感測元件,用於決定該開關控制節點上之該電壓。 9. 如申請專利範圍第8項之晶胞,其中該開關為一金氧半場 丨 效電晶體場效電晶體(M0SFET),並且該金氧半場效電晶 i ! 體場效電晶體之一閘極連接至該開關控制節點。 i t ^.如申請專利範圍第8項之晶胞,其中係藉由開啟該選擇 i 晶體以及將資料置於該列字語線之上來使資料位於該開 i .關控制節點之上。 1 | 1 1 .如申請專利範圍第8項之晶胞,其中該電容器之該第一 :Page 35 200533069 -—.............. 1 --- * — t 6. Turn off the selection transistor before applying for the patent scope i. I 8. —The seed cell can be used as a dynamic memory cell for storing data or a field programmable gate array cell for programming. The cell system is used to have row bit lines, read In an array of bit lines and word lines, the unit cell includes: a capacitor having a first end and a second end, the first end being connected to a row of bit lines (Bp), and the first The two terminals are connected to a switching control node; I is a selection transistor having a gate, a source, and a drain, wherein the | gate is connected to the write bit line (Bw), and the source is connected to The switch control calls the node and the drain is connected to a row of word lines (WL); | A switch is controlled by the switch control node, wherein the switch control node stores data with a voltage of 0 or 1 And a sensing element for determining the voltage on the switch control node. 9. For example, the unit cell of the eighth patent application, wherein the switch is a metal-oxide half-field-effect transistor field-effect transistor (M0SFET), and the metal-oxide half-field-effect transistor i! The gate is connected to the switch control node. i t ^. The unit cell of item 8 in the scope of patent application, wherein the data is located on the on / off control node by turning on the selected i crystal and placing the data on the word line. 1 | 1 1. If the unit cell of item 8 of the scope of patent application, wherein the first of the capacitor: 第36頁 200533069__ 六、申請專利範圍 端、該選擇電晶體之該閘極以及該開關之一閘極係形 相同之多晶石夕層。 1 2 .如申請專利範圍第8項之晶胞,其中該感測元件為 晶體,具有連接至該開關控制節點之閘極、連接至一 位元線(Bs)之汲極以及連接至該字語線(WL)之源 1 3 .如申請專利範圍第1 2項之晶胞,其更包含一二極I ,聯至該感測元件並且位於該列字語線與該感測位元線 間。 « 1 4. 一種晶胞,可作為用於儲存資料之動態記憶體晶月 中該晶胞係用於具有行位元線、讀取位元線以及列字 之一陣列,該晶胞包括: 一電容,具有一第一端與一第二端,其中該第一端連 一行位元線(Bp),該第二端連接至一開關控制節點 該開關控制節點則儲存該資料; 一選擇電晶體(T w ),具有一閘極、一源極以及一沒 其中該閘極連接至該寫入位元線(Bw)、該源極連接 i關控制節點,而該汲極連接至一列字語線;以及 _•^感測元件,用於決定位於該開關控制節點上之資料 1 5 .如申請專利範圍第1 4項之晶胞,其中係藉由開啟I〗 電晶體以及將資料置於該列字語線之上來使資料位於 成自 一電 感測 極 ° | ,串 之 i , 苴 語線 接至 ,而 極, 至該 《選擇 該開P.36 200533069__ VI. Scope of patent application The polysilicon layer of the same terminal of the selection transistor and the gate of one of the switches is the same. 1 2. If the unit cell of item 8 of the scope of patent application, wherein the sensing element is a crystal, it has a gate connected to the switch control node, a drain connected to a bit line (Bs), and the word The source of the speech line (WL) 1 3. If the unit cell of item 12 of the patent application scope, it further includes a two-pole I connected to the sensing element and located between the word line of the word and the sensing bit line. . «1 4. A unit cell that can be used as a dynamic memory cell for storing data. The unit cell is used to have an array of row bit lines, read bit lines, and column words. The unit cell includes: A capacitor having a first terminal and a second terminal, wherein the first terminal is connected to a row of bit lines (Bp), the second terminal is connected to a switch control node, and the switch control node stores the data; The crystal (T w) has a gate, a source, and a gate, wherein the gate is connected to the write bit line (Bw), the source is connected to a control node, and the drain is connected to a column of words. Speech lines; and _ • ^ sensing elements, which are used to determine the data located on the switch control node 15. For example, the unit cell of item 14 in the scope of patent application, where the transistor I is turned on and the data is set. On the word line of the column, the data is located at an inductive pole, |, i of the string, the slang line is connected to, and the pole, to the "select the open 第37頁 200533069_ 六、申請專利範圍 關控制節點之上。 ! 16.如申請專利範圍第14項之晶胞,其中該電容器之該第一 i 端、該選擇電晶體之該閘極以及該開關之一閘極係形成自 i 相同之多晶矽層。 1 7 .如申請專利範圍第1 4項之晶胞,其中該感測元件為一電 晶體,具有連接至該開關控制節點之閘極與連接至一感測 ΐ .位元線之汲極。 ΐ •6.如申請專利範圍第1 7項之晶胞,其更包含一二極體,串 丨 聯至該感測元件並且位於該列字語線與菇感測位元線之 I 間。Page 37 200533069_ VI. Scope of Patent Application Above the control node. 16. According to the unit cell of claim 14, wherein the first i terminal of the capacitor, the gate of the selection transistor, and a gate of the switch are formed from a polycrystalline silicon layer with the same i. 17. The unit cell according to item 14 of the patent application scope, wherein the sensing element is a transistor having a gate connected to the switch control node and a drain connected to a sensing ΐ bit line. ΐ 6. If the unit cell of item 17 in the patent application scope further includes a diode, the string is connected to the sensing element and is located between the word line and the sensing bit line of the mushroom. 第38頁Page 38
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