TW200527453A - Symmetrical inductor - Google Patents

Abstract

A symmetrical inductor includes a first metal layer, the first metal layer having a first conductive segment disposed on a first side of a line, and a second conductive segment disposed on a second side of the line, the second conductive segment and the first conductive segment being symmetrical to the line; a second metal layer, the second metal layer having a third conductive segment disposed on the first side of the line, and a fourth conductive segment disposed on the second side of the line, the fourth conductive segment and the third conductive segment being symmetrical to the line; a first contact plug for connecting the first conductive segment with a first end of the third conductive segment; a second contact plug for connecting the first conductive segment with a second end of the third conductive segment; a third contact plug for connecting the second conductive segment with a first end of the fourth conductive segment, the third contact plug and the first contact plug being symmetrical to the line; and a fourth contact plug for connecting the second conductive segment with a second end of the fourth conductive segment, the fourth contact plug and the second contact plug being symmetrical to the line.

Description

200527453

[Technical Field to which the Invention belongs] The present invention relates generally to a sense structure. An inductive structure, especially a symmetrical type of electricity [Prior technology] An inductor is a passive component that uses a magnetic field type to resist changes in the magnitude of the current flowing through it. It is used in conjunction with various types of helmets ^ φ < Temple, common with capacitor phase flow, phase matching, filtering and various functions! Inductance consists of a wire loop or coil. The thunder plate 1:, ', the number of openings,? Factors such as thinness, length ^, radius, and kind of packing in the circle. : 1 body, Cheng Zhong ’In order to integrate the inductor structure on the integrated circuit chip, the former mostly uses a two-layer metal layout pattern design and a contact plug connected between the two gold to form a wire loop. g 凊 Refer to Figure 1 'Figure 1 is a schematic diagram of a conventional inductor structure. As shown in the figure, the conventional inductor 10 is a differential inductor, which includes a first metal layer. The first metal layer is composed of a first wire segment 12 and a second wire segment 14 that are intertwined. An approximately circular pattern, and the first lead segment 12 and the second lead segment 14 include two overlapping regions A and B. The inductor 10 further includes a second metal layer ′ and the first metal layer includes at least a third wire segment 20 provided below the overlapped area A of the first wire segment 12 and the second wire segment 14 200527453 5. Description of the invention (2), And a fourth wire segment 24 is disposed below the overlapping area B of the first wire segment 12 and the second wire segment 14. A dielectric layer (not shown) and a plurality of contact plugs 16, 18, 22, and 26 are interposed between the second metal layer and the first metal layer to connect the first metal layer. With a second metal layer. For example, the second wire segment 14 and the third wire segment 20 are connected at the overlapping area A by using contact plugs 16 and 18, and the first wire segment 12 and the fourth wire segment 24 overlap each other. Area B is connected by contact plugs 2 2, 2 6. ^ The known area is not available, the second guide section 20, and the second metal layer to plugs 22, 26 must use the contact signal (V +, resulting in a signal no (phase no i [Content of the invention] The complete line segment 14 needs a lead segment 12 and a fourth plug connected to V in the overlapping area.-) Will therefore be symmetrical, and se) in a special case the overlapping and symmetrical structure of the lead segment 12 and the second lead segment 14. For example, in the overlapping area A, the contact plugs 16 and 18 are used to connect to the third lead, and the contact plugs do not need to be connected; iBA, the first-conductor segment 12 needs to use the contact line 2 to 4 'and the second lead Segment 14 is not required

Sift, so the difference between the two ends of the inductor 10 it π 1 structure causes a difference in parasitic resistance, which in turn causes phase errors, ψ ^ difference /, and phase noise to heavily affect the circuit characteristics. Therefore, the object of the present invention is to solve the above problems. For a symmetrical inductor structure

$ 9 页 200527453 V. Description of the invention (3) In the preferred embodiment of the present invention, a metal layer, the first metal layer includes a first side, and a second wire segment and the first wire segment are symmetrical two metal layers. A wire segment including a third wire and a fourth wire segment disposed on the symmetry line is symmetrical to the symmetry line; one wire segment to one end of the third wire segment is symmetrical to the third wire segment to the third symmetry line One end of the four-wire section of the contact plug; and a fourth contact plug for connecting to the & end. "The symmetrical inductor includes a first first lead segment provided on a symmetrical line segment provided on the second side of the symmetrical line, and a second portion on the symmetrical line; a second metal layer, and the second segment provided on the first side of the symmetrical line , And the second side, and the fourth wire segment and the third first contact plug are used to connect the first; a second contact plug is used to connect the other end; To connect the second lead segment to the second contact plug is symmetrical to the first lead segment to the fourth lead segment of the symmetry line. The present invention uses a layout pattern design to form symmetry. The layers are formed on both sides of the straight line = the wire segment and the second wire segment, and the second metal layer is used for the straight 2 = the plurality of pours Ϊ the wire segment and the fourth wire segment, and 1 Ϊ Γ is also called the straight The contact between the two sides of the wire is inserted by S to connect $ — metal layer ^ flute: it belongs to s, so the present invention can effectively use the full symmetry ^ 2: low parasitic resistance difference * 'improve signal asymmetry, phase] J j bit Noise and other issues. Share everything

Page 10 200527453 V. Description of the invention (4) [Embodiment]

Please refer to Figure 2. As shown in FIG. 2, the first metal layer 32 and 32 are symmetrically provided with a four-conductor segment 34 for the first segment 44, the second conductor is a second conductor circular pattern, and the second metal layer is symmetrically disposed on the third conductor segment 44. It is set at about the average of the segment 34 and at least the symmetrical line segment 3 8. This is an inductive structure of the first embodiment of the present invention. The inductor 30 is a differential inductor, which includes a metal layer formed by a first wire segment 32 and two sides of a second-symmetric line L. The first wire segment includes at least one spiral pattern, and the first wire segment is slightly > formed into at least a circular pattern, and the symmetry line L has a diameter. The inductor 30 further includes a second metal layer, including a third wire segment 38 and a fourth wire L on both sides, wherein the first wire segment 32 is above the second line segment, and the second wire segment 34 is located outside the second line segment. In other embodiments of the present invention, the second metal layer may also be disposed above the first metal layer, so that the first lead segment 32 and the second lead segment are disposed under the third lead segment 38 and the second lead segment and the 34 lead segment are provided. It is disposed below the fourth lead segment 44. At least one dielectric layer (not shown) and a plurality of contact plugs 36, 40, 42, 46 are interposed between the second metal layer and the first metal layer to connect the first layer. A metal layer and a second metal layer. For example, the first lead segment 32 includes at least a first contact point, a second contact contact point and a third contact point and a fourth contact point of the second lead segment 34, respectively. And the first wire segment 32 is connected to the first contact point of one of the third wire segments 38 using the contact plug 36 and the second contact point is connected to the third wire using the contact plug 40. The other end of the segment, as for the second conductor segment 3 4 are used separately

200527453 V. Description of the invention (5) The contact plug 42 connects its second contact point to one end of the fourth wire segment 44 and the contact plug 46 connects its fourth contact point to the other end of the fourth wire segment. Because the patterns of the first metal layer, the second metal layer, and the contact plugs of the present invention are arranged symmetrically on both sides of the symmetrical line, the invention inductor can provide a differential signal (v +, v_ ) A completely symmetrical girl, to effectively improve the quality of the inductor and avoid problems such as phase noise. In addition, the ° i 11ΐ ΐ-shaped ϊ-shaped structure can further 'turn the corners of the Korean corners (the corners of the four-layer n-conductor segment and the second-conductor segment to form a rounded corner) when designing the layout pattern to avoid current The local resistance value increases to reduce the lightning g ^

-tor). It is worth noting that = W must have a circular pattern of inductor structure. ^ Inductor structure is not limited to a plurality of layers of metal layers, wires ^^ ^ various types of inductors formed symmetrically on both sides of the symmetrical line The contact plug u ^ of C ”is suitable for the present invention. Please refer to FIG. 3, which is a schematic diagram of the present invention. As shown in FIG. The first gold-differential inductor includes a wire segment 54 symmetrically provided in a pair of first wire segments—the first wire segment 5 2 and the second 5 2 and the second conductor 4 and the second set 4: package :; 52 and the first The two lead segments 54 are approximately formed in the shape of i-snail 2 and the-lead segment is one of the diameters of the circular pattern. The inductance pair = a first metal layer

200527453 V. Description of the invention (6) 58, and at least one dielectric layer (not shown) is disposed between the first gold eyebrow layers 52, 54 and the second metal layer 58, wherein the first lead segment 52 and the second lead segment The 54 series is partially covered above the second metal 58. In addition, in other embodiments of the present invention, the second metal layer 58 may also be disposed above the first metal layers 52 and 54 so that the first lead segment 52 and the second The lead segment 54 is partially disposed below the second metal layer 58. The first metal layers 52, 54 and the second metal layer 58 are connected by a plurality of contact plugs 56, 60 which penetrate through the dielectric layers. For example, the first wire segment 5 2 includes at least a first contact point and a second contact point of the second wire segment 54. The second contact point is symmetrical to the symmetry line [, and the first wire segment 5 2 is a contact plug 5 6 makes its first contact point connected to one end of the second metal layer 5 8, and the second wire segment 54 uses the contact plug 60 to connect its second contact point to the other end of the second metal layer 58. Since the patterns of the contact plugs of the metal layer of the present invention are symmetrical to the inductor of the invention, a differential structure at both ends can be provided to effectively improve the quality of the inductor and avoid the symmetrical inductor structure of the present invention to enter the first metal layer. One wire segment and the first turning angle to avoid the current from being concentrated in the turning and reducing the quality factor of the inductance. The value of the inductance structure is not limited to the formation of a structure with a circular diagram called a plurality of contact plugs arranged on both sides of the symmetry line, a second metal layer, and a connection between the two sides of the symmetry line. Therefore, this signal (V + , V_) A completely symmetrical junction free of phase noise and other problems. In addition,-when designing the layout pattern, the corners of the two wire segments are formed into rounded corners, causing local resistance values to increase. It should be noted that the symmetrical structure of the inductor structure of the present invention uses other metal layers, Wire segments and various inductance patterns connected are suitable for

13th I

200527453 V. Description of the invention (7) The present invention. Please see no intention. A first gold wire segment 74 72, a second 72 and a second are the circular 78, and in the embodiment of the second gold system, the metal layer 78 makes the metal layer 78 a plurality of segments. The second series uses one end and the contact connection is shown in Figure 4. Figure 4 is a third embodiment of the present invention. The inductor structure is shown in Figure 4. The inductor 70 is a differential inductor, which includes a metal layer and a first metal. The layer is formed by a first conductor segment 72 and a second symmetrical arrangement on both sides of a symmetrical line L. The first / conductor segment conductor segment 74 includes a plurality of spiral patterns, and the first conductor segment conductor segment 74 is approximately formed. At least one circular pattern, the symmetrical line dagger is always the pattern. The inductor 70 further includes a second metal layer and at least one dielectric layer (not shown) disposed on the first gold layer 72: 74! Layer 78 U. The first wire segment 72 and the second i-line segment 74 ί 于: 上 #, In addition, in other embodiments of the present invention, the second metal layer 78 may also be disposed under the first metal layer 72, the first wire segment 72 and the second wire segment 74 above. The first = metal layers 72, 74 and the second gold;; = using contact plugs 76,80 which penetrate between the dielectric layers. For example, the first lead segment 72 includes at least a first contact point and a second lead-second contact point symmetrical to the line of symmetry L, and the first lead segment contacts the plug 76 to connect the first contact point to the second The metal layer 78 and the second wire segment 74 are connected to the other end of the second metal layer 78 by using the contact plug 80. ,

Page 14 200527453 V. Description of the invention (8) The inventive inductor can provide differential signals (V +, V-) at both ends-a completely symmetrical structure 'to effectively improve the quality of the inductor and avoid problems such as phase noise. In addition, the symmetrical inductance structure of the present invention can further form a rounded corner at the corner of the first wire segment of the first metal layer and the second wire segment when designing the layout pattern, so as to prevent the current from being concentrated at the corner, causing localization. Increasing the resistance value reduces the quality factor of the inductor. It is worth noting that the symmetric inductor junction f of the present invention is not limited to an inductor structure having a circular pattern, and other structures using a plurality of metal layers, wire segments, and contact plugs connected between the two symmetrically arranged symmetrical lines. All kinds of formed inductor patterns are suitable for the present invention. Compared to the conventional design, two sides of the shape are formed, two metal layers are formed on the straight wire segment, and the plug is connected to the first using a completely symmetrical, asymmetric, and phased agricultural range. The difference in inductance between the two steps of the symmetrical 1 symmetrical line to the metal layer is only a symmetrical inductor structure such as the original one. The present invention is a profitable inductor, that is, the first wire segment and the second wire segment side of the first metal are used. The third conductive line forming a mutual symmetry uses a plurality of metal layers that are symmetrical on both sides of the straight line and the first metal layer. Therefore, the structure of the present invention can reduce the problems of parasitic resistance differences and phase noise. The preferred embodiment of the invention, all changes and modifications according to the present invention should belong to the present invention. The layout drawing is used to layer on a straight line, and the use of the contact plugs of the first and fourth paragraphs can effectively improve the meaning of the invention.

200527453 Brief description of the diagram Brief description of the diagram Figure 1 is a schematic diagram of a conventional inductor structure. FIG. 2 is a schematic diagram of an inductor structure according to a first embodiment of the present invention. FIG. 3 is a schematic diagram of an inductor structure according to a second embodiment of the present invention. FIG. 4 is a schematic diagram of an inductor structure according to a third embodiment of the present invention. Schematic symbol description

Page 16 10 30 ~ 50 ^ 70 Inductance 12 14, 32 > 34 > 52 54, Ί2 > 74 First metal layer 16 18, 22 > 26 ^ 36 40, 42, 46, 56 '60 > 76 '80 Contact plug 20 Λ 24, 38 '44 ^ 58 λ 78 Second metal layer A, Β overlap area L symmetry line

Claims (1)

200527453 6. Scope of patent application 1. A symmetrical inductor, comprising: a first metal layer, the first metal layer includes a first lead segment provided on a first side of a straight line, and a second lead segment provided on The second side of the straight line, the second wire segment and the first wire segment are symmetrical to the straight line; a second metal layer, the second metal layer includes a third wire segment provided on the first side of the straight line And a fourth wire segment is provided on the second side of the straight line, and the fourth wire segment and the third wire segment are symmetrical to the straight line; a first contact plug is used to connect the first wire segment To one end of the third wire segment; a second contact plug for connecting the first wire segment to the other end of the third wire segment; a third third of the line that is symmetric with the first contact plug A contact plug for connecting the second lead segment to one end of the fourth lead segment; and a fourth contact plug that is symmetric with the straight line for the second contact plug and is used for connecting the second lead segment To the other end of the fourth wire segment. 2. For the symmetric inductor according to item 1 of the patent application, wherein the first lead segment and the second lead segment approximately form at least a circular pattern. 3. For the symmetrical inductor of item 2 of the patent application, wherein the straight line is a diameter of the circular pattern. Page 17 200527453 VI. Application for patent scope 4. The symmetrical inductor according to item 1 of the patent application scope further includes at least one dielectric layer disposed between the first metal layer and the second metal layer, and the first The contact plug, the second contact plug, the third contact plug, and the fourth contact plug pass through the dielectric layer. 5. The symmetrical inductor according to item 1 of the patent application, wherein the first wire segment is partially disposed above the third wire segment of the second metal layer. 6. The symmetrical inductor according to item 1 of the patent application, wherein the second wire segment is partially disposed above the fourth wire segment of the second metal layer. 7. The symmetrical inductor according to item 1 of the patent application, wherein the first wire segment includes at least one rounded corner. 8. The symmetrical inductor according to item 1 of the patent application, wherein the second wire segment includes at least one rounded corner. 9. A symmetrical type inductor comprising: a first metal layer, the first metal layer including a first wire segment provided on a first side of a straight line, and a second wire segment provided on a second side of the straight line The second wire segment and the first wire segment are symmetrical to the line, and the first wire segment includes a first contact point and a second contact point of the second wire segment symmetric to the line; and A dielectric layer including at least one first contact plug to Page 18, 200527453 6. Scope of patent application and a second contact plug, the first contact plug is used to connect the first contact point to a second metal layer, and the second contact plug is used to connect The second contact point is to the second metal layer. 10. The symmetrical inductor according to item 9 of the application, wherein the first lead segment and the second lead segment approximately form at least a circular pattern. 11. The symmetrical inductor according to item 10 of the patent application, wherein the straight line is a diameter of the circular pattern. 12. The symmetrical inductor according to item 9 of the application, wherein the first lead segment is partially stacked with the second metal layer. 13. The symmetrical inductor according to item 9 of the application, wherein the second lead segment is partially stacked with the second metal layer. 14. The symmetrical inductor according to item 9 of the patent application, wherein the first lead segment includes at least one rounded corner. 15. The symmetrical inductor according to item 9 of the patent application, wherein the second lead segment includes at least one rounded corner. Page 19