200525105 玖、發明說明： 【明 ^=f 屬 】 技術領域 本發明係有關於-種使用於流體輸送配管的使用膜片 的閥’更詳而言之’係有關於_種可使膜片的密封功能提 高的闊。 c先前技術:j 背景技術 10 15 20 過去’被使用於各種化學藥液管路或純水管路等之使 用嫉片的膜片閥，如第6圖所示，具備有—設置有環狀溝51 之本體部47、蓋體48、具有環狀嵌合部洲膜片49，把膜 片49的環狀嵌合部56嵌合於本體部以環狀溝仙，使環 狀嵌合部56與其周緣部55被挾持固定於本體部似蓋體48 之間，將本體和與蓋⑽之間㈣，可防止流體朝間外 漏出。但是’這樣的贿方法，於長時_處於液體壓力 隻動或m·度4化下’上述構造的密封部份將發生潛變，而 有流體外漏的問題。特別是經常被使用作為膜片材料的聚 四氟乙稀（以下稱為PTFE)或四氟乙稀—全氟姐基乙稀 醚共水。體（以下稱為PFA)等氟樹脂，上述潛變的傾向特 別顯著。200525105 发明. Description of the invention: [明 ^ = f 属] TECHNICAL FIELD The present invention relates to a type of valve using a diaphragm used for fluid conveying pipes. Improved sealing function. c Prior art: j Background technology 10 15 20 In the past, diaphragm valves using jealous diaphragms used in various chemical liquid pipelines, pure water pipelines, etc. have, as shown in FIG. 6, an annular groove. The main body portion 47, the cover body 48 of the 51, and the annular fitting portion 54 have a diaphragm 49, and the annular fitting portion 56 of the diaphragm 49 is fitted to the body portion to form a ring groove, so that the annular fitting portion 56 The peripheral edge portion 55 is clamped and fixed between the main body-like cover body 48 and the main body and the cover body ㈣ to prevent fluid from leaking to the outside. However, such a method of bribery will cause latent changes in the sealed portion of the above-mentioned structure due to the long-term fluid pressure or movement of m · degree, and the problem of leakage of fluid will occur. In particular, polytetrafluoroethylene (hereinafter referred to as PTFE) or tetrafluoroethylene-perfluoroethyl ether co-water is often used as a diaphragm material. Fluorine resins such as polymers (hereinafter referred to as PFA), the above-mentioned tendency of creep is particularly significant.
為了解決上述問題，本發明人改良過去的膜片後，發 明-種構造極為簡單，且即使密封部份發生潛變，亦不會 發生外漏之安全性高的膜片㈤，並已經提出申請（參日本 特開平6_2775號公報）。以第7圖說明其構造，該膜片闕具 5 200525105 備有設置有環狀溝62之本體部57、蓋體58、及於周緣部66 設置環狀嵌合部67的膜片59，將膜片59的環狀嵌合部67與 設置於本體部57的環狀溝62相嵌合，並讓膜片59的周緣部 66經由彈性體60 (Ο型環）挾持於本體部57與蓋體58之間。 5 但是，於前述膜片閥中，由於使用氟樹脂作為本體部 與膜片的材料，故可知一旦長時間地被置於密封部份非常 容易潛變的條件下時，例如液體的壓力或溫度的變化相當 大時，仍有液體外漏之危險性。 【明内^^】 10 發明之揭示 因此’為了解決上述過去技術的問題，本發明之目的 係提供一種閥，該閥具有即使密封部份因流體的壓力變動 或溫度變化等而引起潛變時，亦不會發生液體外漏的經過 改良後的密封構造。 15 本發明係提供-朗，闕具備有㈣彡成閱座部的本 體部、蓋體及與前述閥座部接觸或_之膜片，且藉著將 前述膜片的周緣部挾_定於前述本體部與前述蓋體之 二:::體内部的流體密封者，其特徵在於:前述閥進 設心彈性體’且於前述本體部㈣述閥座的周圍In order to solve the above problems, the present inventors improved the past diaphragm, and invented a kind of structure with extremely simple structure, and even if the sealing part is latently changed, a highly safe diaphragm 外 that does not leak, and has already filed an application. (See Japanese Patent Application Laid-Open No. 6_2775). The structure is described with reference to FIG. 7. This diaphragm holder 5 200525105 is provided with a main body portion 57 provided with an annular groove 62, a cover 58, and a diaphragm 59 provided with an annular fitting portion 67 at a peripheral portion 66. The annular fitting portion 67 of the diaphragm 59 is fitted into the annular groove 62 provided in the main body portion 57, and the peripheral portion 66 of the diaphragm 59 is held between the main body portion 57 and the cover via an elastic body 60 (0-ring). Body 58. 5 However, in the aforementioned diaphragm valve, since the fluororesin is used as the material of the body portion and the diaphragm, it can be known that if it is placed under a condition where the sealing portion is prone to creep for a long time, such as the pressure or temperature of a liquid When the change is quite large, there is still the danger of liquid leakage. [明 内 ^^] 10 Disclosure of the Invention Therefore, in order to solve the above-mentioned problems of the prior art, the object of the present invention is to provide a valve that has a latent change even if a sealed portion is caused by a change in pressure of a fluid or a change in temperature, etc. Improved sealing structure without leakage of liquid. 15 The present invention provides a lang, which includes a main body portion having a seat reading portion, a cover body, and a diaphragm that is in contact with the valve seat portion or _, and the peripheral portion __ of the diaphragm is set at The second part of the body part and the cover body :: The fluid sealer inside the body is characterized in that the valve is provided with a central elastic body and is described around the valve seat of the body part.
字形之環狀時於Γ述膜片的周緣部設有截面為略L 四 Iσ邛，藉著配置於前述蓋體與 述環狀嵌合部之間的前述彈性體，可將〜、’則 密接於嵌合部以 长狀溝的狀怨嵌插於前述環狀溝。 於上述間中，前述環狀溝的内側側面宜朝外侧下方傾 20 200525105 斜，前述彈性體宜具有對應於前述環狀溝的前述傾斜面傾 斜的内周面。 又，前述彈性體宜為〇型環。 進而’於前述環狀溝的底面設置與前述膜片表面相接 5 觸之環狀突起亦可，於前述本體部的表面，即用以與前述 蓋體一同挾持前述膜片的部份設置與前述膜片表面相接觸 之環狀突起亦可。 具有本發明構造的閥，適合作為膜片閥、調節器、流 量控制閥等。In the shape of a ring shape, a cross-section of slightly L and four Iσ 邛 is provided on the peripheral edge portion of the diaphragm. By using the elastic body disposed between the cover body and the ring-shaped fitting portion, it is possible to use ~, '则The long grooves are in close contact with the fitting portions and are inserted into the annular grooves. In the above, it is preferable that the inner side surface of the annular groove is inclined downward and outward 20 200525105, and the elastic body preferably has an inner peripheral surface inclined corresponding to the inclined surface of the annular groove. The elastic body is preferably an O-ring. Furthermore, it is also possible to provide a ring-shaped protrusion on the bottom surface of the annular groove in contact with the surface of the diaphragm. The surface of the body portion, that is, a portion for holding the diaphragm together with the cover is provided. A ring-shaped protrusion may be in contact with the surface of the diaphragm. The valve having the structure of the present invention is suitable as a diaphragm valve, a regulator, a flow control valve, and the like.
10 於本發明中，本體及蓋體等的材料宜使用PTFE或PFA 等氟樹脂，因其等耐藥品性優良，不純物的溶出亦少，但 使用聚氣化乙烯、聚丙烯等其他塑膠或金屬亦可，並沒有 特別限定。又，膜片的材料宜使用PTFE或PFA等氟樹脂， 並沒有特別限定。 15【實施冷式】 本發明之最佳實施形態 以下’參照圖示，說明本發明之實施態樣，但不能將 本發明限定於本實施態樣。 以下’說明顯示本發明實施態樣之第丨圖及第2圖。 20 閥100具備有閥本體部1 (以下稱為本體部）、蓋體2、 膜片3。 本體部1係具有流體流入口 6及流體流出口 7之ptfe製 之停止閥型閥本體部，藉著設置於内部的隔板8將流體流入 口 6與流體流出口 7隔離。於本體部丨，進而設置有用以連通 200525105 流體流入口 6與閥室11的開口部9 ’開口部9的周緣部形成環 狀的閥座部10。於本體部1的上部的周緣設有環狀溝13，於 環狀溝13的内側設有平坦部12，該平坦部12的上面比閥座 部10高，但比環狀溝13的外側壁的上面低。因此，於環狀 5 溝13的上部形成有段差部14。 蓋體2被以螺栓及螺帽等（圖中未示）嵌合固定於本體 部1的上部，於其底部的周緣部設有環狀的突部15，該環狀 的突部15係用以嵌插入設於本體部1之段差部14。於蓋體2 的下面中央設有貫通孔16,將壓縮件4以上下移動自在的狀 10 態支持。於貫通孔16的下側設有較貫通孔16的直徑大的圓 形凹部17，用以將該凹部17的外緣與前述突部15的内側緣 連接起來的底面為朝外側向下傾斜的傾斜面。 膜片3為PTFE製，於其中央下面設有用以收容於蓋體2 的凹部17之閥體18。於閥體18的中央部上面突出設有外螺 15紋部22，藉著螺合固定於壓縮件4的端部。因此，閥體18可 隨著壓縮件4的上下移動而上下移動，與本體部丨的閥座部 10接觸或離開，進行流體的關閉或開放。於閥體18的周緣， 一體成形有膜部19及由其周緣部20朝下方彎曲之略L·字形 的壞狀嵌合部21。周緣部20被挾持固定於本體部1的平垣部 20 12”蓋體2的突部15之間，環狀嵌合部洲被欲合固定於本10 In the present invention, fluororesin such as PTFE or PFA should be used as the material of the body and the cover. Because of its excellent chemical resistance and less elution of impurities, other plastics or metals such as polygasified ethylene and polypropylene are used. It is also not particularly limited. The material of the diaphragm is preferably a fluororesin such as PTFE or PFA, and is not particularly limited. 15 [Implementing the cold type] The best embodiment of the present invention The following embodiment will be described with reference to the drawings, but the present invention cannot be limited to this embodiment. The following descriptions are the first and second views showing the embodiment of the present invention. 20 The valve 100 includes a valve body portion 1 (hereinafter referred to as a body portion), a cover body 2, and a diaphragm 3. The body portion 1 is a stop valve type valve body portion made of ptfe having a fluid inlet 6 and a fluid outlet 7, and the fluid inlet 6 is separated from the fluid outlet 7 by a partition plate 8 provided therein. A valve seat portion 10 is further provided on the main body portion 丨 to communicate with the 200525105 fluid inlet 6 and the opening portion 9 ′ of the valve chamber 11 at the periphery of the opening portion 9. An annular groove 13 is provided on the peripheral edge of the upper portion of the body portion 1, and a flat portion 12 is provided on the inner side of the annular groove 13. The upper surface of the flat portion 12 is higher than the valve seat portion 10, but is higher than the outer side wall of the annular groove 13. The top is low. Therefore, a step portion 14 is formed on the upper portion of the annular groove 5. The cover 2 is fitted and fixed to the upper portion of the main body portion 1 with bolts, nuts, etc. (not shown), and a ring-shaped protrusion 15 is provided on a peripheral portion of the bottom portion. The ring-shaped protrusion 15 is used for The step portion 14 provided in the main body portion 1 is inserted by insert. A through hole 16 is provided in the center of the lower surface of the cover 2 to support the compression member 4 in a freely moving state. A circular concave portion 17 having a larger diameter than the through hole 16 is provided on the lower side of the through hole 16, and a bottom surface connecting the outer edge of the concave portion 17 and the inner edge of the protrusion 15 is inclined downward toward the outside. Inclined surface. The diaphragm 3 is made of PTFE, and a valve body 18 for accommodating the concave portion 17 of the lid body 2 is provided below the center. An outer screw 15 pattern portion 22 is provided on the upper surface of the central portion of the valve body 18, and is fixed to the end of the compression member 4 by screwing. Therefore, the valve body 18 can move up and down as the compression member 4 moves up and down, contact or leave the valve seat portion 10 of the body portion 丨, and close or open the fluid. On the peripheral edge of the valve body 18, a membrane portion 19 and a slightly L-shaped bad-shaped fitting portion 21 bent downward from the peripheral edge portion 20 are integrally formed. The peripheral edge portion 20 is clamped and fixed between the flat wall portion 20 of the main body portion 1 and the 12 ”cover 2 and the protruding portion 15 of the cover body 2.
F的％狀，冓13。又，環狀嵌合部21的外側側面藉著為彈 f體之的氣橡膠製的〇型環5壓制於環狀溝13的内側側 、氐面則藉著蓋體2的突部15，以Ο型環5為中介壓制於埽 和溝13的底面。於此，環狀嵌合部21的形狀設成傾斜的L 200525105 字形（參第3圖）或底面不是水平而為曲面狀亦可，只要可 以符合環狀溝13的形狀，並沒有特別限定。 由上述構造所構成的本實施態樣之閥100,如下所述地 作動。 5 於第1圖中，流體一流入閥100内，該流體會由流體流 入口 6流入，通過開口部9、與形成於本體部1的上部與膜片 3之間的閥室11，朝流體流出口 7流出。此時，到達閥室11 的流體，因其壓力的作用，會欲通過膜片3的周緣部20及環 狀嵌合部21與本體部1的間隙，朝閥1〇〇外流出。 10 但是，由於周緣部20及環狀嵌合部21藉著蓋體2被挾持 固定且密接於本體部1的平坦部12及環狀溝13，故可阻止流 體朝閥100外流出。 又，即使因長時間地流體壓力或溫度的變動，膜片3 的周緣部20及環狀嵌合部21產生潛變，或者本體部丨的平坦 15部丨2及環狀溝13發生變形等’亦由於環狀礙合部21經常藉 著蓋體2的突部15與Ο型環5的彈性作用被壓迫於環狀溝 13，故環狀溝13與環狀嵌合部21之間的間隙不會擴大，可 阻止流體朝閥1〇〇外流出。 又’如本實施態樣所示，藉著使用〇型環5作為彈性體， 2〇可最有效地達成將膜片3的環狀嵌合部21的側面及底面同 時地分別集中壓迫於本體部1的環狀溝13的内側側面及底 面之目的，同時由於可將彈性體本身的潛變限制於最小限 度，故亦具有讓前述彈性作用長期保持之效果。又，萬一 因昆入異物等原因，產生膜片3的密封部份受損的問題時， 200525105 亦由於0型環5同時亦壓迫於切部丄的環狀_的外側側 面，故最後可將流體封止於〇型環5與環狀溝13之間，即， 不會讓流體漏出至閥100的外部。於此，〇型環5的材料宜使 用具有優良的耐藥品性能的氟橡膠，但只要具有適合於使 5用條件的性能，為任何材料皆可，又，以片狀的填 橡膠狀塑膠等彈性體取代〇型環5亦可，並無特別限定/ 然後，由外部給予驅動力使壓縮件4朝下方移動時，膜 片3的閥體18亦會連動而朝下方移動，而與本體部i的間座 部1〇接觸。然後，藉著使閥體18壓迫於閥座部10，可將開 1〇 口部9完全封閉，閥1〇〇成為關閉狀態。又，相反地，使壓 縮件4朝上方移動，閥體18亦會朝上方移動而離開閥座部 1〇,閥體18會被收容於蓋體2的凹部17内，其上面與該凹部 17的上面相接觸，同時，因膜部19與蓋體2的傾斜面相接觸 而阻止其繼續朝上方移動，閥1〇〇成為全開狀態（第1圖的 15 狀態）。 第3圖係顯示本發明之閥之第二實施態樣之重要部份 放大縱截面圖。閥與第一實施態樣相同，具備有本體部23、 蓋體24、膜片25，本體部23具有平坦部27、環狀溝28及段 差部29 ’蓋體24具有突部30，膜片25具有膜部31、周緣部 20 32及環狀嵌合部33。於本實施態樣的構造中，與第一實施 態樣的不同點為：環狀溝28的内側側面為傾斜狀，且膜片 25的環狀嵌合部％亦與環狀溝28的内側側面的傾斜面傾斜 相同角度，又，使用内周面與該傾斜面傾斜相同角度的填 充物26作為彈性元件。其他構造由於與第一實施態樣相 200525105 同，故省略其說明。 依本貝知怨樣的密封構造，由於於環狀溝28的内側側 面具有傾斜面，且平坦部27的厚度變大強度提高，故可 防止於長時間地流體壓力及溫度變動下平坦部27朝内側 5倒塌變形之情形，可長時間地保持於最初的密封效果。 第4圖係顯示本發明之閥之第三實施態樣之重要部份 ^大縱截面圖。閥與第—實施態樣相同，具備有本體部34、 蓋體35、膜片36、〇型環37，本體部34具有平坦部％、環狀 溝39及段差部40，蓋體35具有突部4卜膜片娜有膜部42、 周緣部43及環狀嵌合部44。於本實施態樣的構造中，與第 一實施態樣的不同點為：本體部34的平坦部38的上面及環 狀溝3 9的底部分別設置有截面三角形狀的環狀突起* 5、 46。其他構造由於與第一實施態樣相同，故省略其說明。 依本貫施態樣的密封構造，由於膜片36的周緣部幻的 15下面及環狀嵌合部44的底面分別被壓迫於環狀突起45、 46，故可將流體朝閥外的流入阻擋於此。又，這些環狀突 起45、46與膜片36的接觸面積極小，加壓力集中，故其密 封效果相當大。 第5圖係顯示本發明之閥之第四實施態樣之縱載面 20圖。於圖中，闊2〇0係具有閥本體部68 (以下稱為本體部）、 蓋體69、膜片7〇之氯化乙細樹脂製的膜片閥。本體部68耳 有入口流路71及出口流路72，進而，於兩流路之間具有使 流路彎曲之具有乎緩圓弧狀的曲面之隔壁73。於本體部仙 的上部的周緣與第一實施態樣相同，設有環狀溝74。壓縮 200525105 件75被固定於柱狀體76的下端部。膜片7〇係以氟樹脂製的 薄膜EPDM等的橡膠彈性體77做底，被固定於壓縮件乃的下 端部，藉著與隔壁73的上面接觸或離開可開閉流路。於膜 片70的周緣部與第-實施態樣相同，形成有朝下彎曲之略^ 5字形的環狀嵌合部78，此環狀嵌合部78嵌合於本體部68之 環狀溝74内，即，膜片7〇被挾持固定於本體部沾與蓋體的 之間。又’與第一貫施態樣相同，環狀嵌合部78的外側側 面被作為彈性體之-的氣橡膠製的〇型環⑽朝環狀溝_ 内側側面壓迫，底面則藉著蓋體69的下面，以〇型環8〇為中 10介壓迫於環狀溝74的底面。於此，環狀嵌合部78及環狀溝 74的構k與第二、第三實施態樣相同亦可。 ^本發明依上述構造，即使長時間地因流體壓力及溫度 文動等因素使密封部份發生潛變，亦不會發生流體外漏， 即’可進行極高安全性的流體控制。 15【圖式簡單説明】 第1圖係顯示本發明的閥之第一實施態樣之重要部份 縱載面圖。 第2圖係顯示第丨圖中膜片外周部的密封部份之重要部 份放大縱載面圖。 2〇 第3圖係顯示本發明的閥之第二實施態樣之重要部份 放大截面圖。 第4圖係顯示本發明的閥之第三實施態樣之重要部份 放大截面圖。 第5圖係顯示本發明的閥之第四實施態樣之縱截面圖。 12 200525105 第6圖係過去技術之重要部份放大縱截面圖。 第7圖係另一過去技術之重要部份放大縱截面圖。 【圖式之主要元件代表符號表】 100…閥 21...環狀嵌合部 1...本體部 22…外螺紋部 2...蓋體 23...本體部 3...膜片 24...蓋體 4...壓縮件 25…膜片 5...0型環 26...填充件 6...流體流入口 27···平坦部 7...流體流出口 28...環狀溝 8...隔板 29...段差部 9...開口部 30…突部 10...閥座部 31…膜部 11…閥室 32...周緣部 12.··平坦部 33...環狀嵌合部 13...環狀溝 34...本體部 14...段差部 35...蓋體 15...環狀突部 36…膜片 16...貫通孔 37...0型環 17...凹部 38...平坦部 18…閥體 39...環狀溝 19...膜部 40...段差部 20...周緣部 41...突部%% of F, 冓 13. In addition, the outer side surface of the annular fitting portion 21 is pressed against the inner side of the annular groove 13 by an o-ring 5 made of gas rubber, which is an elastic body, and the crotch surface is by the protrusion 15 of the cover body 2, The O-ring 5 is used as an intermediary to press on the bottom surface of the ridge and groove 13. Here, the shape of the annular fitting portion 21 is an inclined L 200525105 shape (refer to FIG. 3) or the bottom surface is not horizontal but curved. The shape is not particularly limited as long as it can conform to the shape of the annular groove 13. The valve 100 according to this embodiment, which is constituted as described above, operates as described below. 5 In the first figure, as soon as the fluid flows into the valve 100, the fluid flows in through the fluid inlet 6 and passes through the opening portion 9 and the valve chamber 11 formed between the upper portion of the body portion 1 and the diaphragm 3 toward the fluid. The outflow port 7 flows out. At this time, the fluid reaching the valve chamber 11 will flow out of the valve 100 through the gap between the peripheral edge portion 20 of the diaphragm 3 and the annular fitting portion 21 and the main body portion 1 due to the pressure. 10 However, since the peripheral portion 20 and the annular fitting portion 21 are held and fixed by the cover 2 and are in close contact with the flat portion 12 and the annular groove 13 of the body portion 1, the fluid can be prevented from flowing out of the valve 100. In addition, even if the fluid pressure or temperature changes over a long period of time, the peripheral edge portion 20 and the annular fitting portion 21 of the diaphragm 3 are latent, or the flat portion 15 of the body portion 丨 2 and the annular groove 13 are deformed, etc. 'Also, the annular interference portion 21 is often pressed against the annular groove 13 by the elastic effect of the protrusion 15 of the cover body 2 and the O-ring 5. Therefore, the gap between the annular groove 13 and the annular fitting portion 21 The gap does not widen, which prevents fluid from flowing out of the valve 100. Also as shown in this embodiment, by using the O-ring 5 as an elastic body, 20 can most effectively achieve that the side and bottom surfaces of the annular fitting portion 21 of the diaphragm 3 are simultaneously pressed on the body at the same time. The purpose of the inner side surface and the bottom surface of the annular groove 13 of the part 1 is also to have the effect of keeping the aforementioned elastic effect for a long time because the elasticity of the elastic body itself can be minimized. In addition, if there is a problem that the sealing part of the diaphragm 3 is damaged due to foreign matter or other reasons, 200525105 is also because the 0-ring 5 is also pressed on the outer side of the annular ring of the incision, so it may be finally The fluid is sealed between the O-ring 5 and the annular groove 13, that is, the fluid does not leak to the outside of the valve 100. Here, the material of the O-ring 5 is preferably a fluororubber with excellent chemical resistance, but any material may be used as long as it has properties suitable for the conditions of use in five, and a sheet-shaped rubber-filled plastic is used. The elastic body may be substituted for the O-ring 5 and is not particularly limited. Then, when the compression member 4 is moved downward by a driving force given from the outside, the valve body 18 of the diaphragm 3 is also moved downward and interlocks with the body portion. The intermediate portion 10 of i is in contact. Then, by pressing the valve body 18 against the valve seat portion 10, the opening portion 9 can be completely closed, and the valve 100 is closed. On the contrary, when the compression member 4 is moved upward, the valve body 18 is also moved upward and away from the valve seat portion 10, and the valve body 18 is housed in the recess 17 of the cover body 2. The upper surface of the valve body 18 and the recess 17 At the same time, the upper surface of the cover 2 is in contact with the film 2 and the cover 2 is prevented from moving upward, and the valve 100 is fully opened (the 15 state in FIG. 1). Fig. 3 is an enlarged longitudinal sectional view showing an important part of a second embodiment of the valve of the present invention. The valve is the same as the first embodiment, and includes a main body portion 23, a cover body 24, and a diaphragm 25. The main body portion 23 has a flat portion 27, an annular groove 28, and a step portion 29. The cover body 24 has a protrusion 30 and a diaphragm. 25 includes a film portion 31, a peripheral portion 2032, and an annular fitting portion 33. In the structure of this embodiment, the difference from the first embodiment is that the inner side surface of the annular groove 28 is inclined, and the annular fitting portion% of the diaphragm 25 is also inside the annular groove 28. The inclined surface on the side is inclined at the same angle, and the filler 26 having the inner peripheral surface inclined at the same angle as the inclined surface is used as the elastic element. The other structures are the same as 200525105 in the first embodiment, so the description is omitted. According to this seal structure, the flat portion 27 has an inclined surface on the inner side surface of the annular groove 28, and the thickness of the flat portion 27 increases. The flat portion 27 can be prevented from prolonged fluid pressure and temperature fluctuations. When collapsed and deformed toward the inner side 5, the initial sealing effect can be maintained for a long time. FIG. 4 is a large longitudinal sectional view showing an important part of a third embodiment of the valve of the present invention. The valve is the same as the first embodiment, and includes a main body portion 34, a cover body 35, a diaphragm 36, and an O-ring 37. The main body portion 34 has a flat portion%, an annular groove 39, and a step portion 40. The cover body 35 has a protruding portion. The diaphragm 4 includes a membrane portion 42, a peripheral edge portion 43, and an annular fitting portion 44. In the structure of this embodiment, the difference from the first embodiment is that the upper surface of the flat portion 38 of the main body portion 34 and the bottom of the annular groove 39 are provided with annular protrusions having a triangular cross-section in the cross section * 5, 46. Since the other structures are the same as those of the first embodiment, descriptions thereof are omitted. According to the seal structure of the present embodiment, the lower surface of the peripheral portion 15 of the diaphragm 36 and the bottom surface of the annular fitting portion 44 are respectively pressed against the annular protrusions 45 and 46, so that the fluid can flow into the outside of the valve. Stop here. In addition, since the contact surfaces of these annular protrusions 45 and 46 and the diaphragm 36 are positively small and the pressing force is concentrated, the sealing effect is quite large. Fig. 5 is a longitudinal loading surface 20 showing a fourth embodiment of the valve of the present invention. In the figure, the wide 200 series is a diaphragm valve made of ethyl chloride resin having a valve body portion 68 (hereinafter referred to as a body portion), a lid body 69, and a diaphragm 70. The main body portion 68 has an inlet flow path 71 and an outlet flow path 72, and further, a partition wall 73 having a curved surface having a substantially circular arc shape is formed between the two flow paths. The periphery of the upper part of the body part fairy is the same as that of the first embodiment, and an annular groove 74 is provided. The compression 200525105 piece 75 is fixed to the lower end portion of the columnar body 76. The diaphragm 70 is made of a rubber elastic body 77 such as a fluororesin thin film EPDM, and is fixed to the lower end of the compression member. The flow path can be opened or closed by contacting or leaving the upper surface of the partition 73. The peripheral edge portion of the diaphragm 70 is the same as the first embodiment, and a slightly ^ -shaped annular fitting portion 78 bent downward is formed. This annular fitting portion 78 is fitted into the annular groove of the main body portion 68. Inside 74, that is, the diaphragm 70 is held between the main body and the cover. Also like the first embodiment, the outer side surface of the ring-shaped fitting portion 78 is pressed toward the annular groove by an air-shaped O-ring made of rubber, which is an elastomer. The inner side is pressed by the cover. The lower surface of 69 is pressed against the bottom surface of the annular groove 74 with an O-ring 80 as a medium. Here, the configuration k of the annular fitting portion 78 and the annular groove 74 may be the same as that of the second and third embodiments. ^ According to the above structure of the present invention, even if the seal part undergoes latent change due to factors such as fluid pressure, temperature and movement for a long time, fluid leakage will not occur, that is, fluid control with extremely high safety can be performed. 15 [Brief Description of the Drawings] Fig. 1 is a longitudinal sectional view showing an important part of the first embodiment of the valve of the present invention. Fig. 2 is an enlarged longitudinal sectional view showing an important part of the sealing portion of the outer periphery of the diaphragm in Fig. 丨. 20. FIG. 3 is an enlarged sectional view showing an important part of a second embodiment of the valve of the present invention. Fig. 4 is an enlarged sectional view showing an important part of a third embodiment of the valve of the present invention. Fig. 5 is a longitudinal sectional view showing a fourth embodiment of the valve of the present invention. 12 200525105 Figure 6 is an enlarged longitudinal sectional view of an important part of the past technology. FIG. 7 is an enlarged longitudinal sectional view of another important part of the prior art. [Representative symbols for main components of the figure] 100 ... valve 21 ... ring-shaped fitting portion 1 ... body portion 22 ... external thread portion 2 ... cover body 23 ... body portion 3 ... membrane Sheet 24 ... Lid 4 ... Compression member 25 ... Diaphragm 5 ... 0 ring 26 ... Filler 6 ... Fluid inlet 27 ... Flat portion 7 ... Fluid outlet 28 ... annular groove 8 ... partition 29 ... step 9 ... opening 30 ... projection 10 ... valve seat 31 ... membrane 11 ... valve chamber 32 ... peripheral portion 12. ·· flat portion 33 ... annular fitting portion 13 ... annular groove 34 ... main body portion 14 ... segment portion 35 ... lid body 15 ... annular projection portion 36 ... Diaphragm 16 ... through hole 37 ... 0 ring 17 ... recessed part 38 ... flat part 18 ... valve body 39 ... annular groove 19 ... membrane part 40 ... step difference part 20 ... peripheral part 41 ... protrusion
13 200525105 42…膜部 43.. .周緣部 44.. .環狀嵌合部 45.. .環狀突起 46.. .環狀突起 47.. .本體部 48.. .蓋體 49.. .膜片 51.. .環狀溝 55.. .周緣部 56.. .環狀嵌合部 57.. .本體部 58…蓋體 59.. .膜片 60.. .彈性體 62.. .環狀溝 66.. .周緣部 67.. .環狀嵌合部 200···閥 68.··閥本體部 69.. .蓋體 70…膜片 71.. .入口流路 72.. .出口流路 73…隔壁 74.. .環狀溝 75.. .壓縮件 76.. .柱狀體 77.. .彈性體 78.. .環狀嵌合部 80.. .0.環13 200525105 42… Membrane portion 43 .. Peripheral portion 44 .. Ring-shaped fitting portion 45 .. Ring-shaped protrusion 46 .. Ring-shaped protrusion 47 .. Body portion 48 .. Cover 49 .. Diaphragm 51 .. Annular groove 55 .. Peripheral edge portion 56 .. Annular fitting portion 57 .. Body portion 58. Lid 59 .. Diaphragm 60 .. Elastic body 62 .. Annular groove 66 .. Peripheral portion 67 .. Annular fitting portion 200 .. Valve 68 .. Valve body 69 .. Cover 70. Diaphragm 71 .. Inlet flow path 72. ... Outlet flow path 73 .. Next wall 74 ... Ring groove 75 .. Compression piece 76 ... Columnar body 77 ... Elastic body 78 ... Ring-shaped fitting portion 80 ... 0 ring
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