TW200522383A - Active matrix type organic light emitting diode device and thin film transistor thereof - Google Patents
Active matrix type organic light emitting diode device and thin film transistor thereof Download PDFInfo
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- TW200522383A TW200522383A TW092136337A TW92136337A TW200522383A TW 200522383 A TW200522383 A TW 200522383A TW 092136337 A TW092136337 A TW 092136337A TW 92136337 A TW92136337 A TW 92136337A TW 200522383 A TW200522383 A TW 200522383A
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- 239000010409 thin film Substances 0.000 title claims abstract description 50
- 239000011159 matrix material Substances 0.000 title claims abstract description 18
- 239000004065 semiconductor Substances 0.000 claims abstract description 39
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 229920001621 AMOLED Polymers 0.000 claims description 41
- 238000002161 passivation Methods 0.000 claims description 20
- 239000003990 capacitor Substances 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 238000009413 insulation Methods 0.000 claims description 9
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 238000000746 purification Methods 0.000 claims description 3
- 239000011149 active material Substances 0.000 claims 1
- 239000000779 smoke Substances 0.000 claims 1
- 239000000344 soap Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 82
- 230000003071 parasitic effect Effects 0.000 description 14
- 239000004973 liquid crystal related substance Substances 0.000 description 8
- 230000005611 electricity Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 210000004508 polar body Anatomy 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/19—Tandem OLEDs
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Geometry (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
200522383 五、發明說明(1) 【發明所屬之技術領域】 本發明係關於一種有機發光二極體(organic 1 ight emitting diode, OLED),特別是關於一種主動矩陣式有 機發光二極體(active matrix type organic light emitting diode,AMOLED)裝置及其薄膜電晶體。 【先前技術】 由於液晶顯示裝置(liquid crystal display devices, LCD devices )之重量輕與能源消耗低,而被廣 泛地使用於平面顯示裝置之領域。然而,液晶顯示裝置不 是一種發光元件(light emitting element),而是一種· 光接收元件(light receiving element),需要額外的 光源以顯示影像。因此於增進亮度、對比度(C 〇 n t r a S t ratio)、視角、與擴大液晶顯示面板尺寸方面存在一些 技術上的限制。因為這些原因,此領域已有許多研究致力 於主動製程,以發展可以克服前述問題的新的平面顯示元 件。有機發光二極體(organic light emitting diode, OLED )裝置即為新的平面顯示元件之一。由於有機發光二 極體褒置不需要額外的光源就能發光,其視角與對=度皆 優於液晶顯示裝置。此外,由於它並不需要來用來作為光 源之背光源(backlight ),因此具有如重量輕、尺寸 小、能源消耗低等優點。而且,有機發光二極體裝置可以 以低直流電(direct current,DC)驅動並具有^速的反 應時間(response time)。與液晶顯示裝置相、,有機 發光二極體裝置係以固體材料代替流體材料200522383 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to an organic light emitting diode (OLED), and particularly to an active matrix organic light emitting diode (active matrix). type organic light emitting diode (AMOLED) device and its thin film transistor. [Previous technology] Liquid crystal display devices (liquid crystal display devices, LCD devices) are widely used in the field of flat display devices due to their light weight and low energy consumption. However, the liquid crystal display device is not a light emitting element, but a light receiving element, which requires an additional light source to display an image. Therefore, there are some technical limitations in terms of improving brightness, contrast ratio, viewing angle, and expanding the size of the liquid crystal display panel. For these reasons, much research in this area has been devoted to active processes to develop new flat display elements that can overcome the aforementioned problems. Organic light emitting diode (OLED) devices are one of the new flat display elements. Since the organic light emitting diode arrangement can emit light without an additional light source, its viewing angle and contrast are better than those of a liquid crystal display device. In addition, since it does not need to be used as a backlight for the light source, it has advantages such as light weight, small size, and low energy consumption. Moreover, the organic light emitting diode device can be driven with a low direct current (DC) and has a fast response time. In contrast to liquid crystal display devices, organic light-emitting diode devices use solid materials instead of fluid materials.
200522383 五、發明說明(2) 晶丄,因此,外部的衝擊下,有機發光二極體裳置合較 穩疋,並且其可運作的溫度範圍較廣。特別是_ ^ ϋ 極體於低生產成本方面具有優勢。具體而言,不同ς液晶 顯不裝置或電漿顯示面板(plasma display 曰 PDPs )需要許多其他的設備,製造有機發光二極體茫置的 設備只t S沉積設備與封裝言史備,因此有機 置非常簡易。若此有機發光二極體裝ΐ為主^ 矩^式有機發光二極體(actlvematrix…咖動 音二:g。〇心,AM〇LED)裝置,並具有可作為每 個U開關元件的薄膜電晶體’則可使 丨 :=二月亮” luminance)。因此,此有機發光二極 體装置八有低旎源消耗、高解析力(res〇luti〇n )、及大 尺:的:。凊參照第1圖’主動矩陣式有機發光二極體 裝置之基本結構與運作特徵將描述於下。 =1圖5兒明先前技術之一種典型的主動矩陣式有機發 光二極體裝置之畫素結構。 取孓弟一方位,且第二方位垂直於第一方 位二a查知描線1、訊號線2與電源供應線3彼此交叉以定 義ί二二素區_。而作為定位元件之切換薄膜電晶體4則· ^ 私線1與訊號線2交又區域之鄰近部位。電容儲存 器6Λ杜生連接於切換薄膜電晶體4與電源供應線3。作為 電source element)之驅動薄膜電晶體 5貝 > —連接於電容儲存器6與電源供應線3。此外,電 200522383 五、發明說明(3) 致發光二極體(electro luminescent diode) 7則電性連 接於驅動薄膜電晶體5。具體而言,主動矩陣式有機發光 二極體裝置中,一個晝素具有一個切換薄膜電晶體4與一 個驅動薄膜電晶體5。其中,切換薄膜電晶體4是用以定位 晝素電壓(pixel voltage),畫素電壓即是閘極驅動電 壓(gate driving voltage),而驅動薄膜電晶體5是用 以控制主動矩陣式有機發光二極體裝置的驅動電流。另 外,主動矩陣式有機發光二極體裝置需以電容儲存器6來 維持晝素電壓的穩定。 _ 第2A圖說明先前技術之一種典型的逆向交錯式 (inverted staggered type)的主動矩陣式有機發光二 極體裝置之薄膜電晶體之平面圖。 參照第2 A圖,閘極電極1 2形成於某一個方位上,而 型圖案的半導體層Μ形成並覆蓋於閘極電極12上。源極電 極1 6與汲,電極丨8形成於半導體層丨4上並分別與閘極電極 12邛分重豐。其中,源極電極16是由電源供應線延 出並形成於閘極電極12的相同方位。雖未顯示於第以 汲極電極1 8以電性連接於主動矩陣式有機發光二極體筮 一電極(圖中未示),而閘極電極12 = 膜電;體之汲極電極(圖中未示卜雖】= 用以電性連接電源供應線並維持-段時間2 素驅動電壓的穩定。 了间的畫 先前技術之主動矩陣式有機發光二極體裝置中,閘極200522383 V. Description of the invention (2) Crystal maggots. Therefore, under the external impact, the organic light-emitting diodes are more stablely assembled and have a wide operating temperature range. In particular, _ ^ 极 polar bodies have advantages in terms of low production costs. Specifically, different liquid crystal display devices or plasma display panels (PDPs) require many other equipment. The equipment for manufacturing organic light-emitting diodes is only t S deposition equipment and packaging, so it is organic. Setting is very easy. If this organic light-emitting diode device is mainly a ^ rectangular ^ type organic light-emitting diode (actlvematrix ... g.2, g.〇 心, AM〇LED) device, and has a thin film that can be used as each U switching element The transistor 'can make 丨: = two moons' luminance). Therefore, this organic light-emitting diode device has low power consumption, high resolving power (resoloutin), and large-scale ::. 凊With reference to Figure 1 ', the basic structure and operating characteristics of an active matrix organic light emitting diode device will be described below. = 1 Figure 5 shows the pixel structure of a typical active matrix organic light emitting diode device of the prior art. Take the first position of the brother, and the second position is perpendicular to the first position 2a. Find out that the trace line 1, the signal line 2 and the power supply line 3 cross each other to define the two-second prime area. The crystal 4 is connected to the adjacent part of the area where the private line 1 and the signal line 2 intersect. The capacitor storage 6 Λ is connected to the switching thin film transistor 4 and the power supply line 3. As a source element), the driving thin film transistor is 5 meters. >-Connected to capacitor storage 6 and power supply Line 3. In addition, electricity 200522383 V. Description of the invention (3) Electro-luminescent diode 7 is electrically connected to the driving thin-film transistor 5. Specifically, in an active matrix organic light-emitting diode device A day pixel has a switching thin film transistor 4 and a driving thin film transistor 5. Among them, the switching thin film transistor 4 is used to locate the pixel voltage, and the pixel voltage is the gate driving voltage (gate driving voltage). voltage), and the driving thin film transistor 5 is used to control the driving current of the active matrix organic light emitting diode device. In addition, the active matrix organic light emitting diode device needs a capacitor storage 6 to maintain the stability of the day voltage. _ FIG. 2A illustrates a plan view of a thin film transistor of a typical inverted staggered type active matrix organic light emitting diode device of the prior art. Referring to FIG. 2A, the gate electrode 12 is formed on In a certain orientation, the semiconductor layer M of the pattern pattern is formed and covered on the gate electrode 12. The source electrode 16 and the drain electrode 8 are formed on the semiconductor layer.丨 4 and the gate electrode 12 respectively are divided into two. The source electrode 16 is extended from the power supply line and formed in the same orientation of the gate electrode 12. Although it is not shown in the first drain electrode 1 8 It is electrically connected to the first electrode of the active matrix organic light-emitting diode (not shown), and the gate electrode 12 = membrane electricity; the body's drain electrode (not shown in the figure) = for electrical Connect the power supply line and maintain the stability of the pixel drive voltage for a period of time. In the prior art active matrix organic light emitting diode device, the gate
200522383 五、發明說明(4) 電極1 2和源極電極1 6、汲極電極1 8部分重疊,並於源極電 極16與汲極電極18之間保有一間距。。閘極電極12與源極 電極1 6間的第一重疊部分a和閘極電極丨2與汲極電極丨8間 的第二重疊部分b相對於閘極電極1 2之中線而互相對稱。 第2B圖說明沿著第2A圖之剖面線ΠΒ-I IB之剖面圖。 參照第2 B圖,閘極電極1 2形成於基板1 〇上,而閘極絕 緣層1 3形成於已經形成閘極電極丨2的整個基板丨〇上。半導 體層14形成於絕緣層13上而覆蓋住閘極電極12。然後源極 ,極16,汲極電極18形成於半導體層14上且彼此分隔。、而 寄生電容(parasitic capacitances)(^與寄生電容C 分別產生於第一重疊部分a與第二重疊部分b,寄生電 :寄生電容Cgd具有相同的電容值。於先前技術之: 式有機發光二極體裝置中,會將第一重叠部分第二陣 疊部分b最小化以縮小寄生電容Cgs與寄生電容◦。另一東 ::,前技術之液晶顯示裝置之薄臈電二-方 關几件,ϋ且資料電壓是由共同電壓控制,因 f開 電晶體會產生寄生電容’而寄生電容會引起閃變”專祺 (flicker )現象與串音(cr〇ss_t l 影像的品質。 )現象而降低顯示 然而,於主動矩陣式有機發光二極體 由控制驅動薄膜電晶體之電流流量來顯示灰 必項藉 :ί Ξ ” ΐ:ΐ得i好品質的顯示影像是非;重要:以 呈現極大的波動,目而無法顯示良好 ::會200522383 V. Description of the invention (4) The electrode 12 is partially overlapped with the source electrode 16, and the drain electrode 18 is partially overlapped, and a gap is maintained between the source electrode 16 and the drain electrode 18. . The first overlapping portion a between the gate electrode 12 and the source electrode 16 and the second overlapping portion b between the gate electrode 12 and the drain electrode 8 are symmetrical to each other with respect to the center line of the gate electrode 12. FIG. 2B illustrates a cross-sectional view taken along the section line IIB-I IB of FIG. 2A. Referring to FIG. 2B, the gate electrode 12 is formed on the substrate 10, and the gate insulating layer 13 is formed on the entire substrate 丨 0 on which the gate electrode 丨 2 has been formed. A semiconductor layer 14 is formed on the insulating layer 13 so as to cover the gate electrode 12. Then, the source electrode, the electrode 16 and the drain electrode 18 are formed on the semiconductor layer 14 and separated from each other. Parasitic capacitances (^ and parasitic capacitance C are generated in the first overlapping portion a and the second overlapping portion b, respectively. Parasitic electricity: the parasitic capacitance Cgd has the same capacitance value. In the prior art: In the polar device, the first overlapping portion and the second array overlapping portion b are minimized to reduce the parasitic capacitance Cgs and parasitic capacitance. In addition, the data voltage is controlled by a common voltage, and the parasitic capacitance will cause flicker due to the f-switching transistor. The "flicker" phenomenon and crosstalk (cr0ss_t l image quality.) Phenomenon However, the display is reduced. However, in the active matrix organic light-emitting diode, the gray current of the thin film transistor is controlled by driving the current flow of the thin film. It must be borrowed: Ξ ”ΐ: Good quality display images are important; important: in order to show great Fluctuates, but cannot be displayed well :: Yes
200522383 五、發明說明(5) =主動矩陣式有機發光二極體裝置中,電容儲存器扮演非 吊重要的角色。主動矩陣式有機發光二極體裝置是一種電 調制(current modulatl〇n)元件,其晝素電壓之源極 電極方位與汲極電極方位p妯 — ^ 〇 ^ * 顯示裝置發生由正極轉為2;:二: 如同液晶 4得馬員極之極性反轉(polarity reversion )(反之亦然)。 裝置ί::” =陣式有機發光二極體裝置與液晶顯示 衣置之差異如同閘極電極與汲極電極重聶 形成於切換薄膜極電極與源極電極之重疊區域會 容儲存器的尺寸有Μ :於曰因二$素電,值與額外的電 使鄰近金屬圄垒欲4 ^ 在電谷儲存器的區域可能會 近金屬圖案發生絕緣現象 :“匕曰 【發明内容】 …、傻蛉致產口口的失效。 因此’本發明係提供一 裝置,藉以解決並排:、 動矩陣式有機發光二極體 失。 以先所技術所呈現之眾多F艮制與缺 本發明之另一個目 二極體裝置之驅動薄膜電曰、供—種主動矩陣式有機發光 二極體裝置之結構中,;=啻於此主動矩陣式有機發光 於閘極電極與汲極電極^ #函與源極電極的重疊區域大 電極的重疊區域形用域,以致閉極電極與源極《 本發明之其4性素的電容儲存器。 透過實施例來學習。本^ 7點將於以下内容中提及,並可 容、專利範圍與附圖來;::】:與優點將可透過專利内 200522383 五、發明說明(6) 為了達到本發明的目的與優點,簡單描 主動矩陣式有機發光二極體裝置之驅 j下,一種 動矩陣式有機發光二極體裝置具有第—電極與=體,該主 第-電極與第二電極彼此分隔,且有機發光層電極, 電極與第二電極之間,&驅動薄膜電晶體包η ” -於基板上;半導體層於閘極電極 ,極電極 極於半導體層上,,中源極電極與汲電 別與閘極電極部分重疊,且#罨才彼此刀隔並分 口口或大於閘極電極與汲極電極間之重疊區域。 重且 此絕緣層沉積於閘極電極與半導 極與源極電極間之重疊區域合开:巧層之:,而間極電 =:且半導體層具有活性層與歐姆接觸層:其 形⑨’而歐姆接觸層由換質非晶石夕形成,此: 姆接觸層並具有-暴露出部分活性層之部位。此以 薄膜ί主動矩陣式有機發光二極體裝置之驅動 隔電極,第一電極與第二電極彼此分 丨用立有機發光層沉積於第一雷托命哲 ^ ^ 刀 造方法包含:#先,nU極與第二電極之間,此製 半導體層於閘極電極:.:r :極於基板上;'然後,形成 極電極部分重疊:、且= ; = :極彼此分隔並分別與閉 於閘極電極與汲極電極間之重疊區域。 战大 么月也提供一種主動矩陣式有機發光二極體裝置,200522383 V. Description of the invention (5) = In the active matrix organic light-emitting diode device, the capacitor storage device plays an important role. Active matrix organic light-emitting diode device is an electric modulation (current modulat10n) element, the source electrode orientation and the drain electrode orientation of the day voltage are p 妯 — ^ 〇 ^ * The display device changes from positive to 2 ;: 2: Polarity reversion of the horseman pole as in the LCD 4 (and vice versa). Device ί :: "= The difference between the array organic light emitting diode device and the liquid crystal display device is similar to that of the gate electrode and the drain electrode formed in the overlapping area of the switching thin film electrode and the source electrode, which will contain the size of the memory. There is M: Yu said that due to two dollars of electricity, the value and extra electricity make the adjacent metal stagnation 4 ^ In the area of the valley storage, insulation may occur near the metal pattern: "Dagger [Inventive Content] ..., silly Resulting in the failure of the stoma. Therefore, the present invention provides a device to solve the side-by-side :, dynamic matrix type organic light-emitting diode loss. In the structure presented by the previous technology and the driving thin film of another meshed diode device of the present invention, an active matrix organic light emitting diode device is provided in the structure; = 啻 here Active-matrix organic light-emitting at gate electrode and drain electrode ^ # overlapping area of function electrode and source electrode The overlapping area of the large electrode is shaped as a domain, so that the closed electrode and the source "capacitance storage of its four properties of the present invention Device. Learn through examples. The 7 points of this article will be mentioned in the following, and the content, patent scope and drawings will be included ::]: and advantages will be available in the patent 200522383 V. Description of the invention (6) In order to achieve the purpose and advantages of the present invention, A brief description of the driving of an active matrix organic light emitting diode device includes a first electrode and a second body, the main first electrode and the second electrode are separated from each other, and the organic light emitting layer Between the electrode, the electrode and the second electrode, & the driving thin film transistor η ″-on the substrate; the semiconductor layer is on the gate electrode, the electrode is on the semiconductor layer, the middle source electrode is connected to the drain and the gate The electrode electrodes are partially overlapped, and # 刀 is separated from each other and the opening is larger than the overlapping area between the gate electrode and the drain electrode. The insulation layer is deposited between the gate electrode, the semiconducting electrode, and the source electrode. The overlapping area is closed: the clever layer is :, and the interlayer electrode is: and the semiconductor layer has an active layer and an ohmic contact layer: its shape is formed, and the ohmic contact layer is formed of a metamorphic amorphous stone. This: Have-exposed part live This is a thin-film active matrix organic light-emitting diode device. The first electrode and the second electrode are separated from each other. A vertical organic light-emitting layer is deposited on the first reticle. Contains: #First, between the nU electrode and the second electrode, the semiconductor layer is formed on the gate electrode:.: R: on the substrate; 'then, the electrode electrodes are partially overlapped: and =; =: the poles are separated from each other And it is respectively closed with the overlapping area between the gate electrode and the drain electrode. Zhanda Moyue also provides an active matrix organic light emitting diode device,
200522383 五、發明說明(7) 包含.閘極電極於基板上;閘極絕緣層於包含閘極電極之 基板上,半導體層於閘極絕緣層上;源極電極與汲極電極 於半導體層上,其中源極電極與汲極電極彼此分隔並分 f閘極電極部分重4 ;鈍化層於基板上並覆蓋住源極電極 〃汲極電極,該鈍化層具有一汲極接觸孔而暴露出汲極電 ί Ϊ T部分;第一電極於鈍化層i ’第一鈍化層透過汲極 接觸孔而電性連接至汲極電極;有機發光層於第一電極 2 電極於有機發光層上,其中閘極電極與源極電 ° 噓區域大於閘極電極與汲極電極間之重疊區域。 蚩電極與源極電極間之重疊區域形成一用以驅動 =素$電谷儲存器。此主動矩陣式有機發光二 J =薄膜電晶體電性連接至閑極電極。此主動以 裝置為向上發光式之主動矩陣式有機發: =體Μ或是向下發光式之主動矩陣式有機發光二極體 本發明更提供一種主動矩 製造方法,包含:形成閘極電 層於包含閑極電極之基板上; 層上;再形成源極電極與汲極 極電極與汲極電極彼此分隔並 然後形成鈍化層於基板上並覆 化層具有一汲極接觸孔而暴露 電極於鈍化層上,第一鈍化層 至^及極電極;再形成有機發光 陣式有機發光二極體裝置之 極於基板上;形成閘極絕緣 並形成半導體層於閘極絕緣 電極於半導體層上,其中源 分別與閘極電極部分重疊 蓋源極電極與汲極電極,鈍 出部分汲極電極;形成第一 透過汲極接觸孔而電性連接 層於第一電極上;及形成第200522383 V. Description of the invention (7) Containing the gate electrode on the substrate; the gate insulating layer on the substrate including the gate electrode, the semiconductor layer on the gate insulating layer; the source electrode and the drain electrode on the semiconductor layer The source electrode and the drain electrode are separated from each other and divided into gate electrodes. The passivation layer is on the substrate and covers the source electrode and the drain electrode. The passivation layer has a drain contact hole to expose the drain electrode. The electrode is part T; the first electrode is on the passivation layer i; the first passivation layer is electrically connected to the drain electrode through the drain contact hole; the organic light-emitting layer is on the first electrode; the electrode is on the organic light-emitting layer; The area between the electrode electrode and the source electrode is larger than the overlapping area between the gate electrode and the drain electrode. The overlapping area between the ytterbium electrode and the source electrode forms a storage device for driving the electric valley. The active matrix organic light-emitting diode J = thin film transistor is electrically connected to the idler electrode. The active matrix organic light emitting device which uses the device as an upward light emitting type: a body M or an active matrix organic light emitting diode of a downward light emitting type. The present invention further provides an active moment manufacturing method, including forming a gate electrode layer. On a substrate including a free electrode; on a layer; then forming a source electrode and a drain electrode separated from the drain electrode and then forming a passivation layer on the substrate and the overlay layer having a drain contact hole to expose the electrode to passivation On the layer, the first passivation layer to the electrode and the electrode; and then forming the pole of the organic light emitting array organic light emitting diode device on the substrate; forming the gate insulation and forming a semiconductor layer on the gate insulating electrode on the semiconductor layer, wherein The source and the gate electrode partially overlap the source electrode and the drain electrode, respectively, and blunt the part of the drain electrode; forming a first through the drain contact hole to electrically connect the layer on the first electrode; and forming a first
200522383 五、發明說明(8) 二電極於有機發光層 疊區域大於閘極電極 於閘極電極與該 動晝素的電容儲存器 之製造方法更包含形 電極。而此主動矩陣 之主動矩陣式有機發 矩陣式有機發光二極 在具體實施例中 利範圍内容之更進一 【實施方式】 現在舉出具體實 示作為輔助。說明中 第3A圖說明本發 陣式有機發光二極體 單地說,第3A圖說明 汲極電極。 t,其中閘極電極與源極電 與沒極電極間之重疊區域。]之重 源極電極間之重疊區域形成一 。此主動矩陣式有機發光二極體裂ΐ ,二切換薄膜電晶體電性連接至閘極 式有機發光二極體裝置為向上發光式 光二極體裝置或是向下發光式之主; 體裝置。 動 將詳盡的描述,以提供如本發明 步的說明。 f例來對本發明作詳細說明,並以圖 提到之編號係參照圖示中之編號。 明之一種典型的逆向交錯式的主動矩 裝置之驅動薄膜電晶體之平面圖。簡 了閘極電極、半導體層、源極電極與 參照第3A圖,閘極電極ι12形成於某一個方位上,而 島型圖案的半導體層114形成於閘極電極112上並覆蓋住閘 極電極112。然後,源極電極116與汲極電極118形成於半儀丨 導體層114上並彼此分隔。電源供應線12〇與閘極電極112 形成於同個方位上。而源極電極丨丨6乃由電源供應線丨2 〇延 伸出來而形成。因此閘極電極丨丨2、半導體層丨丨4、源極電 極11 6與汲極電極1 1 8形成了主動矩陣式有機發光二極體裝200522383 V. Description of the invention (8) The manufacturing method of the two electrodes in the organic light-emitting layer is larger than the gate electrode, and the gate electrode and the capacitor storage device of the movable element include a shape electrode. And the active matrix organic light emitting diode of the active matrix is further enhanced in the specific embodiments. [Embodiment] Now, specific examples will be given as an aid. In the description, FIG. 3A illustrates the present array organic light emitting diode. In short, FIG. 3A illustrates the drain electrode. t, where the overlap between the gate electrode and the source and non-electrode electrodes. ] The overlap region between the source electrodes forms a. The active matrix organic light emitting diode is split, and the two switching thin film transistor is electrically connected to the gate type organic light emitting diode device, which is an upward light emitting light diode device or a downward light emitting device. Actions will be described in detail to provide a step-by-step description of the invention. The example f is used to describe the present invention in detail, and the numbers mentioned in the drawings refer to the numbers in the drawings. It is a plan view of a driving thin film transistor of a typical reverse staggered active moment device. The gate electrode, semiconductor layer, and source electrode are simplified. Referring to FIG. 3A, the gate electrode ι12 is formed in a certain orientation, and an island-shaped semiconductor layer 114 is formed on the gate electrode 112 and covers the gate electrode. 112. Then, the source electrode 116 and the drain electrode 118 are formed on the semi-conductor 丨 conductive layer 114 and separated from each other. The power supply line 120 and the gate electrode 112 are formed in the same orientation. The source electrode 6 is formed by extending the power supply line 20. Therefore, the gate electrode 丨 2, the semiconductor layer 丨 丨 4, the source electrode 11 16 and the drain electrode 1 1 8 form an active matrix organic light emitting diode device.
第15頁 200522383 五、發明說明(9) -- 置之驅動薄膜電晶體T。其中,絕緣層(第3 A圖中未示) 沉積於閘極電極112與半導體層Π4之間,而閘極電極112 以電性連接切換薄膜電晶體(圖中未示)中的汲極電極。 驅動薄膜電晶體T的沒極電極11 8以電性連接至此主動矩陣 式有機發光二極體裝置的第一電極。而閘極電極丨丨2與源 極電極11 6具有第一重疊部位a,閘極電極丨丨2與源極電極 118具有第二重疊部位b。於源極電極116與汲極電極118之 間的間距d2乃對應於第2A圖中之間距dl。且第一重疊部位 a的區域大於第二重疊部位b的區域。本發明中,藉由擴大 閘極電極11 2的寬度可以使第一重疊部位a的區域大於第二_ 重疊部位b的區域。 第3B圖說明沿著第3A圖之I I IB-I I IB剖面線之剖面 圖。 參照第3B圖,閘極電極112形成於基板110上,而閘極 絕緣層1 1 3形成於已形成閘極電極1 1 2的整個基板1 1 〇上。 然後’半導體層1 1 4形成於閘極絕緣層1丨3上並對應於閘極 電極11 2。源極電極11 6與汲極電極11 8形成於半導體層11 4 並彼此分隔。其中,半導體層114具有活性層ii4a與歐姆 接觸層114b,而活性層114a是由非晶矽形成,歐姆接觸層 11 4b是由摻質非晶矽形成。然後藉由移除部分源極電極❿ 11 6與部分汲極電極11 8,而使歐姆接觸層丨丨4b暴露出部分 活性層114a。活性層114a所暴露出的部分是介於源極電極 11 6與汲極電極11 8之間,並形成一通道區域ch。如前所 述,源極電極116與汲極電極118之間距d2對應於第2八圖之Page 15 200522383 V. Description of the invention (9)-The driving thin film transistor T is installed. Among them, an insulating layer (not shown in FIG. 3A) is deposited between the gate electrode 112 and the semiconductor layer Π4, and the gate electrode 112 is electrically connected to switch the drain electrode in the thin film transistor (not shown in the figure). . The non-electrode electrode 118 for driving the thin film transistor T is electrically connected to the first electrode of the active matrix organic light emitting diode device. The gate electrode 丨 2 and the source electrode 116 have a first overlapping portion a, and the gate electrode 丨 2 and the source electrode 118 have a second overlapping portion b. The distance d2 between the source electrode 116 and the drain electrode 118 corresponds to the distance dl in FIG. 2A. And the area of the first overlapping portion a is larger than the area of the second overlapping portion b. In the present invention, by increasing the width of the gate electrode 112, the area of the first overlapping portion a can be made larger than the area of the second overlapping portion b. FIG. 3B illustrates a cross-sectional view along the I I IB-I I IB section line of FIG. 3A. Referring to FIG. 3B, the gate electrode 112 is formed on the substrate 110, and the gate insulating layer 1 13 is formed on the entire substrate 1 10 where the gate electrode 1 12 has been formed. Then the 'semiconductor layer 1 1 4 is formed on the gate insulating layer 1 丨 3 and corresponds to the gate electrode 11 2. The source electrode 116 and the drain electrode 118 are formed on the semiconductor layer 11 4 and are separated from each other. The semiconductor layer 114 includes an active layer ii4a and an ohmic contact layer 114b. The active layer 114a is formed of amorphous silicon, and the ohmic contact layer 114b is formed of doped amorphous silicon. Then, by removing part of the source electrode ❿ 116 and part of the drain electrode 118, the ohmic contact layer 4b exposes part of the active layer 114a. The exposed portion of the active layer 114a is interposed between the source electrode 116 and the drain electrode 118, and forms a channel region ch. As described above, the distance d2 between the source electrode 116 and the drain electrode 118 corresponds to that in FIG. 28.
200522383 五、發明說明(10) ' 一· 間距dl 且第一重疊部位a的區域大於第二重疊部位b的 區域。如第3B圖所示,閘極電極丨丨2之一端會延伸至源極 電極116而形成第一重疊部位a使其大於第二重疊部位b。 本發明中’藉由形成第一重疊部位a使其大於第二重疊部 位13 ’於閘極電極11 2與源極電極11 6之間會產生寄生電容 並作為電容儲存器Q。另一方面,如同先前技術之主動矩 陣式有機發光二極體裝置,會將於閘極電極丨丨2與汲極電 極11 8之間產生之寄生電容L最小化處理。因此,若第一 重疊部位a與第二重疊部位b呈現不對稱的構造,則由電容 儲存器所佔據的區域可能會被縮小,或者是額外的電容儲鲁 存器會被排除掉。因此可提高開口率(aperture ratio) ’另外,並可避免電容儲存器區域的金屬導線之 絕緣(d i s c ο η n e c t i ο η )現象。 第4圖說明本發明之一種主動矩陣式有機發光二極體 裝置與驅動薄膜電晶體之剖面圖。 參照第4圖,閘極電極212形成於基板210上,而閘極 絕緣層2 1 3形成於已形成閘極電極2 1 2的整個基板2 1 〇上, 並覆蓋住閘極電極2 1 2。然後,半導體層2 1 4形成於閘極絕 緣層213上,並對應於閘極電極212。然後,形成源極電極 2 1 6與汲極電極2 1 8於半導體層2 1 4上並彼此分隔。且閘極儀1 電極2 1 2、半導體層2 1 4、源極電極2 1 6與汲極電極2 1 8形成 了驅動薄膜電晶體Τ。而第一鈍化層222形成於已形成驅動 薄膜電晶體Τ的整個基板2 1 0上,及形成汲極接觸孔2 2 〇穿 過第一鈍化層2 2 2,此汲極接觸孔2 2 0可暴露出部分汲極電200522383 V. Description of the invention (10) 'a. The interval dl and the area of the first overlapping portion a is larger than the area of the second overlapping portion b. As shown in FIG. 3B, one end of the gate electrode 2 extends to the source electrode 116 to form a first overlapping portion a larger than the second overlapping portion b. In the present invention, by forming the first overlapping portion a to be larger than the second overlapping portion 13 ', a parasitic capacitance is generated between the gate electrode 11 2 and the source electrode 116, and is used as a capacitor storage Q. On the other hand, as in the prior art active matrix organic light emitting diode device, the parasitic capacitance L generated between the gate electrode 丨 2 and the drain electrode 118 is minimized. Therefore, if the first overlapping part a and the second overlapping part b have an asymmetric structure, the area occupied by the capacitor memory may be reduced, or an additional capacitor memory may be excluded. Therefore, the aperture ratio can be improved. In addition, the metal wire insulation (d i s c ο η n e c t i ο η) phenomenon in the capacitor storage region can be avoided. FIG. 4 illustrates a cross-sectional view of an active matrix organic light emitting diode device and a driving thin film transistor according to the present invention. Referring to FIG. 4, a gate electrode 212 is formed on a substrate 210, and a gate insulating layer 2 1 3 is formed on the entire substrate 2 1 0 where the gate electrode 2 1 2 has been formed, and covers the gate electrode 2 1 2 . Then, a semiconductor layer 2 1 4 is formed on the gate insulating layer 213 and corresponds to the gate electrode 212. Then, a source electrode 2 1 6 and a drain electrode 2 1 8 are formed on the semiconductor layer 2 1 4 and separated from each other. The gate electrode 1 electrode 2 1 2, the semiconductor layer 2 1 4, the source electrode 2 1 6 and the drain electrode 2 1 8 form a driving thin film transistor T. The first passivation layer 222 is formed on the entire substrate 2 1 0 where the driving thin-film transistor T has been formed, and a drain contact hole 2 2 0 is formed to pass through the first passivation layer 2 2 2. The drain contact hole 2 2 0 Can expose part of the drain
第17頁 200522383 五、發明說明(11) 極218。再形成第一電極224於第一鈍化層222上,並透過 汲極接觸孔220電性連接至汲極電極218。並形成第二鈍化 層228於已形成第一電極224之整個基板21〇上。再形成開 口部位226穿過第二鈍化層228,此開口部位226可暴露出 部分第一電極224。而有機發光層2 30形成於第二鈍化層 2 2 8上’並透過第二鈍化層2 2 8之開口部位2 2 6以電性連接 至第一電極224。然後形成第二電極232於有機發光層230Page 17 200522383 V. Description of the invention (11) Pole 218. A first electrode 224 is formed on the first passivation layer 222 and is electrically connected to the drain electrode 218 through the drain contact hole 220. A second passivation layer 228 is formed on the entire substrate 21o where the first electrode 224 has been formed. Then, an opening portion 226 is formed to pass through the second passivation layer 228, and the opening portion 226 may expose a part of the first electrode 224. The organic light emitting layer 2 30 is formed on the second passivation layer 2 2 8 'and is electrically connected to the first electrode 224 through the opening portion 2 2 6 of the second passivation layer 2 2 8. A second electrode 232 is then formed on the organic light emitting layer 230
上。而第一電極224、第二電極232與有機發光層230即形 成有機發光二極體(organic light emitting diode, OLED )。於此有機發光二極體中,有機發光層23〇係選擇 性地由第一電極224或第二電極232來發出發射光。 本發明中,當第一電極224為下電極(i〇wer electrode),而第二電極為上電極(upperon. The first electrode 224, the second electrode 232, and the organic light emitting layer 230 form an organic light emitting diode (OLED). In the organic light emitting diode, the organic light emitting layer 23 is selectively emitted by the first electrode 224 or the second electrode 232. In the present invention, when the first electrode 224 is an iower electrode and the second electrode is an upper electrode
elejtrode),其第一電極224由透明材料形成,而使發射 光牙透第一電極224,因此,此主動矩陣式有機發光二極 體裝置即成為向下發光式的主動矩陣式有機發光二極體裝 置另一方面,當第二電極2 3 2由透明材料形成,使發射 光=透第二電極232,因此,此主動矩陣式有機發光二極 體裝置即成為向上發光式的主動矩陣式有機發光二極體裝 田如刖所述,於閘極電極2 1 2與源極電極2 1 6間的第一重 豐部位a比閘極電極212與汲極電極218之的第二重疊部位b $大。而在產生於閘極電極212與源極電極2i6間的寄生電 容與產生於閘極電極212與源極電極218間的寄生電容中,elejtrode), the first electrode 224 is formed of a transparent material, and the emitted light penetrates through the first electrode 224. Therefore, this active matrix organic light emitting diode device becomes a downward emitting active matrix organic light emitting diode On the other hand, when the second electrode 2 3 2 is formed of a transparent material so that the emitted light = transmits through the second electrode 232, the active matrix organic light emitting diode device becomes an upward emitting active matrix organic As described in 装, the light emitting diode mounting field has a first heavy portion a between the gate electrode 2 1 2 and the source electrode 2 1 6 than a second overlapping portion b between the gate electrode 212 and the drain electrode 218. $ Big. In the parasitic capacitance generated between the gate electrode 212 and the source electrode 2i6 and the parasitic capacitance generated between the gate electrode 212 and the source electrode 218,
第18頁 200522383 五、發明說明(12) 產生於閘極電極21 2與源極電極21 6之問 作為驅動晝素的電容儲存器電極此21 外6之2寄生電容是用來 薄膜電晶體的數量為二個,但一個蚩二=之—個畫素的 量可以改變,如三個或三個以上。旦素的薄膜電晶體的數 本發明具有下述優點: 器來改善顯示影像的品暂 9曰加晝素的電容儲存 貝,而且可丄、、 器之尺寸或藉由排除額外的電曰減少額外的電容 久金屬導線的絕緣現象子=曾加開口率’另 (short-circuit ),可π 、电合儲存器區域的短路 雖然本發明之較佳心被最4小化處理。 以限定本發明,任何孰露如上所4 ’然其並非用丨 :神和範圍内,當可做些,,在不脫離本發明之 利保護範圍需視本說明書之申請專^圍因此本發明之 月專利乾圍所界定為準。 第19頁 200522383 圖式簡單說明 第1圖說明先前技術之一種典型的主動矩陣式有機 極體裝置之晝素結構; 第2A圖說明先前技術之一種典型的逆向交錯式的主動矩陣 式有機發光二極體裝置之薄膜電晶體之平面圖; 第2B圖說明沿著第2 A圖之I I B- I I B剖面線之剖面圖; 第3A圖說明本發明之一種逆向交錯式(inverted staggered type )的主動矩陣式有機發光二極體裝置之驅 動薄膜電晶體之平面圖; I B剖面線之剖面圖;及 式有機發光二極體裝置Page 18, 200522383 V. Description of the invention (12) Generated between the gate electrode 21 2 and the source electrode 21 6 as a capacitor storage electrode for driving the day element. The parasitic capacitance of 6 and 2 is used for thin film transistors. The number is two, but one equals two = one—the amount of pixels can be changed, such as three or more. The number of thin film transistors of the present invention has the following advantages: The device can improve the quality of the displayed image. The capacitor storage capacity can be reduced by adding daylight, and the size of the device can be reduced or eliminated by eliminating additional electricity. Insulation phenomenon of additional capacitors and long metal wires = short-circuit has been added. It can be short-circuited in the π and electrical storage area. Although the best of the present invention is minimized. In order to limit the present invention, any disclosure is as above 4 ', but it is not useful: within the scope of God and God, when you can do something, without departing from the scope of protection of the present invention, the application of this specification should be considered. Therefore, the present invention The month of the patent patent encirclement shall prevail. Page 19 200522383 Brief description of the diagram. Figure 1 illustrates the daylight structure of a typical active matrix organic polar device of the prior art. Figure 2A illustrates a typical reverse-staggered active matrix organic light-emitting diode of the prior art. Plan view of a thin film transistor of a polar device; FIG. 2B illustrates a cross-sectional view taken along the II B-IIB section line of FIG. 2 A; FIG. 3A illustrates an active matrix of the inverted staggered type of the present invention Plan view of a driving thin film transistor of an organic light emitting diode device; cross-sectional view of an IB section line; and organic light emitting diode device of an organic light emitting diode device
第3B圖說明沿著第3A圖之I I IB-I I 第4圖說明本發明之一種主動矩陣 與驅動薄膜電晶體之剖面圖。 【圖式符號說明】 2 3 4 5 6 7 10 12 13 14 16 掃描線 訊號線 電源供應線 切換薄膜電晶體 驅動薄膜電晶體 電容儲存器 電致發光二極體 基板 閘極電極 閘極絕緣層 半導體層 源極電極Fig. 3B illustrates a cross-sectional view of I I IB-I I along Fig. 3A. Fig. 4 illustrates a cross-sectional view of an active matrix and driving thin film transistor of the present invention. [Illustration of Symbols] 2 3 4 5 6 7 10 12 13 14 16 Scanning line Signal line Power supply line Switching thin film transistor Driving thin film transistor Capacitor storage Electroluminescent diode substrate Gate electrode Gate Insulation layer semiconductor Layer source electrode
第20頁 200522383 圖式簡單說明 18 汲極電極 110 基板 112 閘極電極 113 閘極絕緣層 114 半導體層 114a 活性層 114b 歐姆接觸層 116 源極電極 118 汲極電極 120 電源供應線 210 基板 212 閘極電極 213 閘極絕緣層 214 半導體層 216 源極電極 218 汲極電極 220 汲極接觸孔 222 第一純化層 224 第一電極 226 開口部位 228 第二鈍化層 230 有機發光層 232 第二電極 dl 間距 #Page 20 200522383 Brief description of the drawing 18 Drain electrode 110 Substrate 112 Gate electrode 113 Gate insulation layer 114 Semiconductor layer 114a Active layer 114b Ohmic contact layer 116 Source electrode 118 Drain electrode 120 Power supply line 210 Substrate 212 Gate Electrode 213 Gate insulation layer 214 Semiconductor layer 216 Source electrode 218 Drain electrode 220 Drain contact hole 222 First purification layer 224 First electrode 226 Opening portion 228 Second passivation layer 230 Organic light-emitting layer 232 Second electrode dl Pitch #
第21頁 200522383 圖式簡單說明 d2 間距 a 第一重疊部分 b 第二重疊部分 Cgs 寄生電容 Cgd 寄生電容 C s t 電容儲存器 T 驅動薄膜電晶體 ch 通道區域 I IB-I IB 剖面線 I I IB-I I IB 剖面線Page 21 200522383 Schematic description of d2 Pitch a First overlapping part b Second overlapping part Cgs Parasitic capacitance Cgd Parasitic capacitance C st Capacitor storage T Drive film transistor ch Channel area I IB-I IB Profile II IB-I I IB section line
第22頁Page 22
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