200521324 大r、發明說明： 【發明所屬之技術領域】 本發明係關於一種薄膜泵。 【先前技術】 日本未經審查之實用新型公告案第7-1 4 179號中揭示 薄膜泵，如第3圖中所示，將薄膜92經由薄膜套9 1的固 定表面（接合表面）91a支持在其外周圍部分92a上，薄膜套 91和薄膜92界定一個泵室93在薄膜套91中，薄膜92配 合在其中央之一驅動器（桿）94，將它驅動以藉由一驅動源 例如電動機（圖中未示）往復移動，當驅動器94之往復移動 造成薄膜92的變形（位移）時，使泵室93的體積增加和減 少，藉此容許流體流入泵室93中及自其中被排出。 該薄膜泵中，當泵室93中之壓力在排氣衝程時上昇， 同時驅動器94接觸之一部分的薄膜92經由驅動器94予以 支持時，驅動器94未接觸之薄膜92的外部部分並未經由 驅動器94予以直接支持且通常，向著泵室93之相對面膨 脹，因爲甚至在排氣衝程的最後階段時，泵室93的體積並 未充分減少，流體並未自泵室93中排出且在泵室93中之 殘留增加，其結果是薄膜泵的泵效率劣化。 然而，該薄膜栗中，該驅動器9 4包括一個配件構件 9 5 (其配合薄膜9 2 )及形成在該配件構件9 5的外部部分上之 一凸緣9 6。當將薄膜9 2向著泵室9 3變形時，使凸緣9 6 與薄膜9 2接觸，藉此防止在排氣衝程時薄膜9 2的外部部 200521324 分向著泵室9 3之相對面膨脹。 * 然而，第3圖中所示之薄膜泵的驅動器9 4中’因爲接 觸薄膜9 2之配件構件9 5的表面9 5 a，並非與接觸薄膜9 2 之凸緣96的表面96a連續成形，所以表面95a與表面96a 間之界面形成角度，因此，在排氣衝程中所變形之薄膜92 以一偏轉角接觸成角之界面’因此減少薄膜9 2的耐久性。 【發明內容】 本發明係關於薄膜泵，其改進薄膜的耐久性同時維持 0 高泵效率。 本發明提供下列特徵，一種薄膜泵包括一薄膜、一薄 膜套及一驅動器，該薄膜具有一個中心點及一個外周圍部 分。薄膜套支持薄膜在其外周圍部分上，因此界定一個泵 室在薄膜套中’驅動器支持薄膜在其中心點上，當將驅動 器往復移動時使薄膜變形，因此實現流體流入泵室中及自 其中被排出，該驅動器包括一個配件構件及一凸緣。該配 件構件配合薄膜並具有第一表面便接觸薄膜，形成凸緣在 馨 配件構件外面’該凸緣具有第二表面以便：當將薄膜向著 泵室變形時’接觸薄膜，凸緣的第二表面具有第一凸表面 區域’將其與配件構件的第一表面連續成形。 本發明的其他觀點及優點，自連同附隨之圖式所理解 ’經由實例舉例說明本發明的原理之下列敘述將變得顯然 可見。 200521324 【賓施方式】 根據本發明的較佳鸟體實施例之薄膜栗現在參照第工 圖予以敘述，該較佳具鳗實施例中，薄膜泵適於進給氣體 〇 第1圖顯示舉例說明薄膜泵之截面圖，如第1圖中所 示’該薄膜泵具有一個薄膜套10其包括一個殻體（bl〇ck)11 ’一個圓形張力板12(將它固定連接至殻體n)及一個體殻 1 3 (其中容納殻體1 1和張力板丨2)。將體殻1 3成形爲圓筒 形室形狀具有其蓋部分定位在上部如第1圖中所見，將該 殼體1 1和張力板1 2容納在體殻1 3中以致使：將該殼體 1 1定位在蓋面上。 將一個凹形部分1 1 a形成在殻體1 1之終端表面中面對 張力板1 2 ’該凹形部分丨丨a係由經插置在殻體1 1與張力 板1 2間之薄膜丨4予以閉合，因此界定泵室1 5。該薄膜} 4 係由金屬材料造成並具有圓形形狀，第一殻體11和第第二 張力板1 2支持薄膜丨4以便經由支持薄膜1 4的外周圍部分 Ma之環狀區域在殻體μ和張力板12的接合處，或在殻 體11的固定表面31與張力板12的固定表面36其面對固 定表面3 1間而容許薄膜1 4的變形（位移）。 形成一個吸引通路1 7在體殼1 3中，將一個外部低壓 管系（圖中未示）連接至該吸引通路17上及形成一個放洩道 1 8將一個外部高壓管系（圖中未示）連接至其上在體殼1 3中 。將一個吸口 25(其連接至泵室1 5至吸引通路1 7)及一個 放出口 2 ό其連接泵室1 4至放洩道1 8形成在該殻體1 1之 200521324 中間。提供形式爲簧片閥之一個吸入閥21在第一殻體11 中之吸口 25與體殼13中之吸引通路17之間’將形式爲簧 片閥之一個放洩閥22提供在殼體1 1中之放出口 26與體彀 1 3中之放洩道1 8之間。 將驅動薄膜1 4之驅動單元2 4連接至該薄膜1 4，形成 該驅動單元2 4具有功能作爲驅動器之一支桿4 5，將其驅 動以便經由一個驅動源例如電動機（圖中未示）往復移動。 該桿4 5支持薄膜1 4在其中心點上，在配件構件4 6將它配 置在泵室1 5外面且配合薄膜1 4與固定構件4 7將它配置在 泵室1 5內部且固定至配件構件4 6之間。因此，當使桿4 5 往復移動時，將薄膜1 4變形（位移），因此增加和減少泵室 1 5的體積。 特定言之，當桿4 5以桿4 5離開泵室1 5之方向移動時 (第1圖向下），使薄膜1 4向著泵室1 5相對面而變形，而 增加泵室1 5的體積，在吸引過程期間，當將薄膜1 4向著 泵室1 5相對面而變形時，將氣體自吸引通路1 7引至泵室 1 5同時推開吸入閥2 1，反之，當將桿4 5向著泵室1 5移動 時（第1圖中向上），使薄膜1 4向著泵室1 5變形而減少泵 室1 5的體積，在排出過程期間，當將薄膜1 4向著泵室1 5 變形時，將泵室1 5中之氣體排出至放洩道1 8同時推開放 洩閥2 2。 該桿4 5包括配件構件4 6及在配件構件4 6外面之圓形 凸緣4 9，當將薄膜1 4向著泵室1 5變形時，使凸緣4 9與 薄膜1 5接觸，因此，在排氣衝程中防止薄膜1 4的外部部 200521324 分向著泵室1 5相對面膨脹。因爲甚至在排氣衝程的最後階 段中，將泵室1 5的體積充分減少’減少了並未自泵室1 5 中排出而依然在泵室1 5中之流體，其結果是’改進薄膜泵 的泵效率。 接觸薄膜14之凸緣49的表面49a具有一個凸表面區 域5 1，將它連續形成具有接觸薄膜1 4之配件構件4 6的表 面46a(平面）以便不形成角，因此，在將薄膜14向著泵室 1 5變形之情況中，即使當薄膜1 4接觸配件構件4 6之接觸 表面46a與凸緣49之接觸表面49a間之界面附近區域時， 凸表面區域5 1將不具有偏轉角，以致改進了薄膜1 4的耐 久性。 除去上述之凸表面區域51以外，凸緣49的接觸表面 49a具有一個凹表面區域52’該凸表面區域51接觸在接鄰 於呈環形區域之配件構件4 6之一部分的凸表面區域5 1上 之薄膜1 4 ’將凹表面區域5 2連續成形具有凸表面區域5 ! 並接觸在接鄰於呈環形區域之外周圍部分丨4 a之一部分的 凹表面區域5 2上之薄膜1 4。 如第2圖中所示，在凸緣4 9的接觸表面4 9 a僅經由凸 表面區域予以形成之情況，當使薄膜1 4以相當大曲率半徑 向著泵室1 5變形時，接鄰於外周圍部分〗4 a之一部分的薄 膜1 4以相當大曲率半徑彎曲在一部分的薄膜1 4上其並不 經由凸緣4 9的接觸表面4 9 a予以支持，以致使：將部分的 薄膜1 4插置在接觸表面4 9 a與固定表面3】間，在由第2 圖中之虛線所示之薄膜1 4中，該部分的薄膜1 4係由箭頭 200521324 "Μ "所指示。 然而，本具體實施例中，當將薄膜1 4以相當大曲率半 徑向著泵室1 5變形時’使接鄰於外周圍部分1 4 a之該部分 的薄膜14彎曲以便與凸緣49的接觸表面49a(或凹表面區 域5 2) —致，即，使該部分的薄膜1 4以如此一種狀態彎曲 以便該部分的薄膜1 4經由接觸表面49a予以支持’以致使 將該部分的薄膜1 4插置在接觸表面4 9 a與固定表面3 1間 。此種構造防止薄膜1 4以相當大曲率半徑予以彎曲在該部 分的薄膜1 4上其未經由凸緣4 9的接觸表面4 9 a予以支持’ 其結果改進了薄膜1 4的耐久性。 凸緣49的接觸表面49a的凸表面區域51及凹表面區 域5 2的曲率是相同，更特定言之’凸表面區域5 1之曲線 X 1的曲率半徑R 1及凹表面區域5 2之曲線X 2的曲率半徑 R2如在一平面上所見，其垂直伸展至呈其平面位置之薄膜 1 4且通經薄膜1 4的中心點（即：第1圖圖式的平面）是相同 〇 因此，當將薄膜1 4以相當大曲率半徑向著泵室1 5變 形時，防止接觸凸緣4 9的凸表面區域5 1和凹表面區域5 2 任一者的一部分之薄膜1 4以較其他部分的薄膜1 4較大曲 率半徑予以彎曲，因此防止經由彎曲移動所造成之應力不 均勻施加至薄膜14其係與凸緣49的接觸表面49a呈接觸 ’因此，更進一步改進了薄膜1 4的耐久性。 將一個保存凹進處4 8形成在殻體1 1之泵室1 5內面的 中央中，該保存凹進處4 8適應固定構件4 7，當將向著泵 -10- 200521324 室1 5予以變形以薄膜丨4定位在其頂死點上時，其固定桿 4 5，於此情況將泵室1 5的體積減至最小如經由第1圖中之 虛線所示，除去該保存凹進處4 8以外，殼體1 1的泵室1 5 之內面形成一個調整表面3 2其提供向著其頂死點之薄膜 1 4的變形極限，即，當將向著泵室1 5予以變形之薄膜1 4 定位在頂死點（top dead center)上時，使面對流體室15之 薄膜1 4的表面與調整表面3 2接觸，因此防止薄膜1 4更進 一步彈性變形。 將該調整表面32成形以便與凸緣49之接觸表面49a 一致，因此，在將薄膜1 4定位在其頂死點上之狀態中，將 薄膜14大體上夾在桿45 (該凸緣49)的接觸表面49a之整 體與殼體1 1的調整表面3 2之整體間，因此，泵室1 5的體 積上變成大體上零，因此更進一步改進薄膜泵的泵效率。 特定言之，該調整表面3 2包括予以成形之一個凸表面 區域3 3便與凸緣4 9的接觸表·面49a之凹表面區域52 —致 及予以成形之一個凹表面區域3 4以便與接觸表面4 9 a的凸 表面區域5 1 —致，將凸表面區域3 3連續平滑成形具有固 定表面3 1以致使其中間之界面不形成角，該凸表面區域 3 3支持將其定位在向著其頂死點變形的極限之薄膜1 4，在 接鄰於呈環狀區域之外周圍部分1 4 a之一部分的凸表面區 域3 3上，將凹表面區域3 4連續平滑成形具有凸表面區域 3 3以致使其中間之界面不形成角，該凹表面區域3 4支持 將其定位在向著其頂死點變形的極限之薄膜i 4，在接鄰於 呈環狀區域之薄膜1 4的中心點P之一部分的凹表面區域 -11- 200521324 3 4上。 因此，即使當將薄膜1 4定位在向著其頂死點之其變形 的極限並予以成形與調整表面3 2 —致，固定表面3 1與調 整表面3 2間及凸表面區域3 3與凹表面區域3 4間界面的附 近地區將不具有偏轉角，以致防止經由偏轉所造成之薄膜 1 4的塑性變形及因此，防止減少薄膜1 4的耐久性。 凸表面區域3 3和凹表面區域3 4的曲率相同，另外， 凸表面區域33和凹表面區域34的曲率與凸表面區域51和 凹表面區域52者相同，更特定言之，曲率半徑R1、曲率 半徑R2、凸表面區域33之曲線X3之曲率半徑R3及凹表 面區域34之曲線X4之曲率半徑R4，如在一平面上所見， 其垂直伸展至呈其平面位置之薄膜14並通經薄膜14的中 心點P(即：第1圖圖式之平面）係相同。 因此，當將薄膜1 4定位在向著其頂死點其變形之極限 時，防止經插置在調整表面3 2之凸表面區域3 3與凸緣4 9 之凹表面區域52間及在調整表面32之凹表面區域34與凸 緣4 9之凸表面區域5 1間之薄膜1 4各部分的曲率不同，因 此防止將經由彎曲移動所造成之應力不均勻施加至薄膜1 4 ，將它定位在向著其頂死點之其變形的極限，因此，更進 一步改進薄膜1 4的耐久性。 特別述及，只要不脫離本發明的目的，下列具體實施 例亦切實可行。 如第2圖中所示，桿4 5的凸緣4 9之接觸表面4 9 a僅 由凸表面區域予以形成，另外，薄膜套1 0(或殻體1 1 )的調 200521324 整鑛面32僅由凹表面區域予以形成以便與凸緣49的接觸 表面4 9 a —致予以成形，其僅由凸表面區域予以形成。 在與本具體實施例不同之另一具體實施例中，凸緣4 9 之接觸表面49a的凸表面區域51和凹表面區域52的曲率 係相互有差別，在與本具體實施例另外不同之具體實施例 中，調整表面32的凸表面區域33和凹表面區域34的曲率 係相互有差別，在聯合前者和後者不同具體實施例之情況 中，如果調整表面32的凹表面區域34之曲率與凸緣49之 凸表面區域51者相同，及如果調整表面32的凸表面區域 3 3之曲率與凸緣4 9之凹表面區域5 2者相同，則將該調整 表面32成形以便與凸緣49的接觸表面49a —致。 雖然，上述之具體實施例中，將本發明的薄膜泵施加 至用於處理氣體之薄膜泵，但是本發明的薄膜泵並非受限 於此種薄膜泵，而是它可應用於處理液體之薄膜泵。 因此，將本發明實例及具體實施例視爲舉例說明而非 限制，且本發明並不受限爲本文中所示之細節而是可能予 以變更。 【圖式簡單說明】 將咸信係新穎之本發明特徵特別舉出於附隨之申請專 利範圍中，本發明’連同其目的和優點經由參照較佳具體 實施例的下列敘述連同附隨之圖式可最佳了解，其中： 第1圖是截面Η ’說明根據本發明的較佳具體實施例 之薄膜泵； 第2圖是截面圖，說明根據本發明的另外較佳具體實 -13- 200521324 施例之薄膜泵；及 第3圖是截面圖， 【主要元件符號說明】 1 0,9 1 薄 11 殼 11a 凹 1 2 圓 13 體 14,92 薄 1 4a，92a 外 15,93 泵 17 吸 18 被 2 1 吸 22 放 24 驅 25 吸 26 放 3 l，36,91a 固 3 2 調 33,5 1 凸 34,52 凹 45 桿 46,95 配 說明一先前技藝薄膜泵； 膜套 體 部分 形張力板 殻 膜 周圍部分 室 引通路 洩通 入閥 洩閥 動單元 □ 出口 定表面 整表面 表面區域 表面區域 件構件200521324 R. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a membrane pump. [Prior Art] Japanese Unexamined Utility Model Publication No. 7-1 4 179 discloses a membrane pump, and as shown in FIG. 3, the membrane 92 is supported by the fixed surface (joining surface) 91a of the membrane sleeve 91 On its outer peripheral portion 92a, the diaphragm casing 91 and the diaphragm 92 define a pump chamber 93. In the diaphragm casing 91, the diaphragm 92 is fitted with a central driver (rod) 94 to drive it by a driving source such as a motor (Not shown) reciprocating movement, when the reciprocating movement of the actuator 94 causes deformation (displacement) of the film 92, the volume of the pump chamber 93 is increased and decreased, thereby allowing fluid to flow into the pump chamber 93 and be discharged therefrom. In this membrane pump, when the pressure in the pump chamber 93 rises during the exhaust stroke and at the same time the actuator 94 contacts a portion of the membrane 92 to be supported by the actuator 94, the outer portion of the membrane 92 that the actuator 94 does not contact does not pass through the actuator 94. It is directly supported and usually expands toward the opposite side of the pump chamber 93, because even at the last stage of the exhaust stroke, the volume of the pump chamber 93 is not sufficiently reduced, the fluid is not discharged from the pump chamber 93, and the pump chamber 93 Residues in the medium are increased, and as a result, the pump efficiency of the membrane pump is deteriorated. However, in the film pump, the driver 94 includes a fitting member 9 5 (which fits the film 9 2) and a flange 96 formed on an outer portion of the fitting member 95. When the membrane 92 is deformed toward the pump chamber 93, the flange 96 is brought into contact with the membrane 92, thereby preventing the outer portion of the membrane 92 from expanding toward the opposite side of the pump chamber 93 during the exhaust stroke. * However, in the driver 9 4 of the thin film pump shown in FIG. 3 ′, because the surface 9 5 a of the accessory member 9 5 of the contact film 9 2 is not continuously formed with the surface 96 a of the flange 96 of the contact film 9 2, Therefore, the interface between the surface 95a and the surface 96a forms an angle. Therefore, the film 92 deformed during the exhaust stroke contacts the angled interface at a deflection angle, thereby reducing the durability of the film 92. SUMMARY OF THE INVENTION The present invention relates to a membrane pump, which improves the durability of the membrane while maintaining a high pump efficiency. The present invention provides the following features. A thin film pump includes a thin film, a thin film sleeve, and an actuator. The thin film has a center point and an outer peripheral portion. The membrane sleeve supports the membrane on its outer peripheral portion, so a pump chamber is defined in the membrane casing. The driver supports the membrane at its center point, which deforms the membrane when the actuator is reciprocated, so that the fluid flows into and from the pump chamber. Being ejected, the drive includes a fitting member and a flange. The fitting member cooperates with the film and has a first surface to contact the film, forming a flange outside the Xin fitting member. The flange has a second surface so as to: when the film is deformed toward the pump chamber, contact the film, the second surface of the flange Having a first convex surface region 'forms it continuously with the first surface of the fitting member. Other aspects and advantages of the present invention will become apparent from the following description, which is understood through the accompanying drawings, to illustrate the principles of the present invention by way of example. 200521324 [Binsch mode] The film chestnut according to the preferred bird body embodiment of the present invention will now be described with reference to the drawing. In the preferred eel embodiment, the film pump is suitable for feeding gas. Figure 1 shows an example A cross-sectional view of the membrane pump, as shown in FIG. 1 'The membrane pump has a membrane sleeve 10 which includes a casing (bloc) 11' a circular tension plate 12 (fixedly connected to the casing n) And a body shell 1 3 (which houses the housing 11 and the tension plate 2). Forming the body case 1 3 into a cylindrical chamber shape with its lid portion positioned at the upper portion as seen in FIG. 1, the case 11 and the tension plate 12 are housed in the body case 13 so that: the case The body 11 is positioned on the cover surface. A concave portion 1 1 a is formed in the terminal surface of the housing 11 to face the tension plate 1 2 ′ The concave portion 丨 a is a film inserted between the housing 11 and the tension plate 12丨 4 is closed, so the pump chamber 15 is defined. This film} 4 is made of a metal material and has a circular shape. The first casing 11 and the second tension plate 12 support the film 丨 4 so as to pass through the annular region Ma of the supporting film 14 in the casing. The joint between μ and the tension plate 12 or between the fixed surface 31 of the housing 11 and the fixed surface 36 of the tension plate 12 faces the fixed surface 31 to allow deformation (displacement) of the film 14. Forming a suction passage 17 In the body shell 13, an external low-pressure pipe system (not shown) is connected to the suction passage 17 and a drain channel 18 is formed. 8 An external high-pressure pipe system (not shown in the figure) (Shown) connected to it in the body shell 1 3. A suction port 25 (which is connected to the pump chamber 15 to the suction passage 17) and a discharge port 2 which connects the pump chamber 14 to the discharge channel 18 are formed in the middle of the casing 11 1 200521324. A suction valve 21 in the form of a reed valve is provided between the suction port 25 in the first housing 11 and the suction passage 17 in the body housing 13 'a relief valve 22 in the form of a reed valve is provided in the housing 1 Between the vent 26 in 1 and the vent channel 18 in body 13. The driving unit 24 of the driving film 14 is connected to the film 14 to form the driving unit 24 having a support rod 4 5 which functions as a driver, and is driven to pass a driving source such as a motor (not shown) Move back and forth. The rod 4 5 supports the membrane 1 4 at its center point, and it is arranged outside the pump chamber 15 at the fitting member 4 6 and is matched with the membrane 14 and the fixing member 4 7 to be arranged inside the pump chamber 15 and fixed to Accessory members 4 to 6. Therefore, when the rod 4 5 is caused to reciprocate, the film 14 is deformed (displaced), thereby increasing and decreasing the volume of the pump chamber 15. In particular, when the rod 4 5 moves in a direction in which the rod 4 5 leaves the pump chamber 15 (downward in FIG. 1), the film 14 is deformed toward the opposite side of the pump chamber 15, and the pump chamber 15 is increased. Volume, during the suction process, when the film 14 is deformed toward the opposite side of the pump chamber 15, the gas is introduced from the suction passage 17 to the pump chamber 15 and the suction valve 21 is pushed open at the same time, and vice versa, when the rod 4 When 5 moves toward the pump chamber 15 (upward in the first figure), the membrane 14 is deformed toward the pump chamber 15 to reduce the volume of the pump chamber 15. During the discharge process, when the membrane 14 is moved toward the pump chamber 15 When deformed, the gas in the pump chamber 15 is exhausted to the drain channel 18 and the drain valve 22 is pushed open at the same time. The rod 4 5 includes a fitting member 46 and a circular flange 4 9 outside the fitting member 4 6. When the film 14 is deformed toward the pump chamber 15, the flange 4 9 is brought into contact with the film 15. During the exhaust stroke, the outer portion 200521324 of the membrane 14 is prevented from expanding toward the opposite side of the pump chamber 15. Because even in the last stage of the exhaust stroke, the volume of the pump chamber 15 is sufficiently reduced 'reduces the fluid that is not discharged from the pump chamber 15 but is still in the pump chamber 15 and the result is' improved membrane pump Pump efficiency. The surface 49a of the flange 49 of the contact film 14 has a convex surface area 51, which is continuously formed into a surface 46a (planar) with the fitting member 46 of the contact film 14, so as not to form an angle. In the case where the pump chamber 15 is deformed, even when the film 14 contacts the area near the interface between the contact surface 46a of the fitting member 46 and the contact surface 49a of the flange 49, the convex surface area 51 will not have a deflection angle, so that The durability of the film 14 is improved. Except for the above-mentioned convex surface area 51, the contact surface 49a of the flange 49 has a concave surface area 52 'which is in contact with the convex surface area 51 which is adjacent to a part of the fitting member 46 which is an annular area. The thin film 1 4 ′ continuously forms the concave surface area 5 2 with the convex surface area 5! And contacts the thin film 14 on the concave surface area 5 2 which is adjacent to a part of the peripheral portion outside the annular area 4 a. As shown in FIG. 2, in the case where the contact surface 4 9 a of the flange 49 is formed only through the convex surface area, when the film 14 is deformed toward the pump chamber 15 with a relatively large curvature radius, it is adjacent to Outer peripheral part 4 A part of the film 1 4 is bent on a part of the film 14 with a considerable radius of curvature which is not supported by the contact surface 4 9 a of the flange 4 9 so that: part of the film 1 4 is interposed between the contact surface 4 9 a and the fixed surface 3]. Among the films 14 indicated by the dotted line in FIG. 2, the film 14 of this part is indicated by the arrow 200521324 " M ". However, in this specific embodiment, when the film 14 is deformed toward the pump chamber 15 with a relatively large radius of curvature, the film 14 of the portion adjacent to the outer peripheral portion 1 4 a is bent so as to contact the flange 49 The surface 49a (or concave surface area 5 2) is the same, that is, the film 14 of the portion is bent in such a state that the film 14 of the portion is supported via the contact surface 49a so as to cause the film 1 4 of the portion Interposed between the contact surface 4 9 a and the fixed surface 31. This configuration prevents the film 14 from being bent with a relatively large radius of curvature on the portion of the film 14 which is not supported by the contact surface 4 9 a of the flange 4 9 '. As a result, the durability of the film 14 is improved. The curvatures of the convex surface area 51 and the concave surface area 52 of the contact surface 49a of the flange 49 are the same, more specifically, the curve of the convex surface area 5 1 curve X 1 and the curvature of the concave surface area 52 2 The radius of curvature R2 of X 2 is the same as seen on a plane, which extends vertically to the film 14 at its planar position and passes through the center point of the film 14 (ie, the plane of the figure in Figure 1). Therefore, When the film 1 4 is deformed toward the pump chamber 15 with a relatively large radius of curvature, the film 14 is prevented from contacting one of the convex surface area 5 1 and the concave surface area 5 2 of the flange 4 9 more than the other portion. The film 14 is bent with a large radius of curvature, so that unevenness of the stress caused by the bending movement is prevented from being applied to the film 14 and it is in contact with the contact surface 49a of the flange 49. Therefore, the durability of the film 14 is further improved . A storage recess 4 8 is formed in the center of the inner surface of the pump chamber 15 of the housing 11, and the storage recess 4 8 is adapted to the fixing member 4 7, and will be directed toward the pump-10- 200521324 chamber 15 When the deformation is located on the top dead point of the film 丨 4, its fixing rod 4 5 is used. In this case, the volume of the pump chamber 15 is minimized as shown by the dashed line in FIG. 1, and the storage recess is removed. In addition to 48, the inner surface of the pump chamber 15 of the housing 11 forms an adjustment surface 3 2 which provides the deformation limit of the film 14 toward its top dead center, that is, when the film is to be deformed toward the pump chamber 15 When positioned at the top dead center, the surface of the film 14 facing the fluid chamber 15 is brought into contact with the adjustment surface 32, thereby preventing the film 14 from being further elastically deformed. The adjustment surface 32 is shaped so as to coincide with the contact surface 49a of the flange 49, and therefore, in a state where the film 14 is positioned on its top dead center, the film 14 is substantially sandwiched by the rod 45 (the flange 49) Between the entirety of the contact surface 49a and the entirety of the adjustment surface 32 of the housing 11, the volume of the pump chamber 15 becomes substantially zero, thereby further improving the pump efficiency of the membrane pump. In particular, the adjustment surface 3 2 includes a convex surface area 3 3 which is formed, and a contact surface of the flange 49 9 with a concave surface area 52 of the surface 49a, and a concave surface area 3 4 which is formed to communicate with The convex surface area 5 1 of the contact surface 4 9 a is uniform, and the convex surface area 3 3 is continuously and smoothly formed to have a fixed surface 3 1 so that the interface in the middle does not form an angle. The convex surface area 3 3 supports positioning it toward the The thin film 14 whose top dead center is deformed at a limit is continuously and smoothly formed on the convex surface area 3 3 adjacent to a part of the surrounding area 1 4 a outside the annular area with a convex surface area. 3 3 so that the interface in the middle does not form a corner, the concave surface area 34 supports the film i 4 which is positioned at the limit of deformation towards its top dead center, at the center of the film 1 4 adjacent to the annular area The concave surface area of a part of the point P is 11-200521324 3 4. Therefore, even when the film 14 is positioned at the limit of its deformation toward its top dead center and is shaped and adjusted to the surface 3 2, the fixed surface 31 and the adjustment surface 32 and the convex surface area 33 and the concave surface The area near the interface between areas 3 and 4 will not have a deflection angle, so that the plastic deformation of the film 14 caused by the deflection is prevented and thus the durability of the film 14 is prevented from being reduced. The convex surface area 33 and concave surface area 34 have the same curvature. In addition, the convex surface area 33 and the concave surface area 34 have the same curvature as those of the convex surface area 51 and the concave surface area 52. More specifically, the radius of curvature R1, The radius of curvature R2, the radius of curvature R3 of the curve X3 of the convex surface area 33 and the radius of curvature R4 of the curve X4 of the concave surface area 34, as seen in a plane, extend vertically to the film 14 in its plane position and pass through the film The center point P of 14 (that is, the plane of the drawing in FIG. 1) is the same. Therefore, when the film 14 is positioned at the limit of its deformation toward its top dead point, it is prevented from being interposed between the convex surface area 33 of the adjustment surface 32 and the concave surface area 52 of the flange 49 and at the adjustment surface. The curvature of each part of the film 14 between the concave surface area 34 of the 32 and the convex surface area 51 of the flange 4 9 is different, so that the stress unevenness caused by the bending movement is prevented from being applied to the film 1 4 and positioned at To the limit of its deformation at its top dead center, the durability of the film 14 is further improved. Specifically, as long as the object of the present invention is not deviated, the following specific embodiments are also feasible. As shown in FIG. 2, the contact surface 4 9 a of the flange 4 9 of the rod 4 5 is formed only by the convex surface area. In addition, the adjustment of the film sleeve 10 (or the housing 1 1) 200521324 entire ore surface 32 It is formed only by the concave surface area so as to be in contact with the contact surface 49a of the flange 49, which is formed only by the convex surface area. In another embodiment different from the present embodiment, the curvatures of the convex surface area 51 and the concave surface area 52 of the contact surface 49a of the flange 49 are different from each other. In the embodiment, the curvatures of the convex surface area 33 and the concave surface area 34 of the adjustment surface 32 are different from each other. In the case of combining the former and the latter specific embodiments, if the curvature and convexity of the concave surface area 34 of the adjustment surface 32 are adjusted, The convex surface area 51 of the edge 49 is the same, and if the convex surface area 33 of the adjustment surface 32 has the same curvature as the concave surface area 52 of the flange 49, the adjustment surface 32 is shaped so as to be the same as that of the flange 49. Contact surface 49a is consistent. Although the membrane pump of the present invention is applied to a membrane pump for processing a gas in the above specific embodiment, the membrane pump of the present invention is not limited to such a membrane pump, but it can be applied to a membrane for processing a liquid Pump. Therefore, the examples and specific embodiments of the present invention are to be regarded as illustrative rather than restrictive, and the present invention is not limited to the details shown herein but may be changed. [Brief description of the drawings] The characteristics of the invention of the Xianxin system are specifically listed in the scope of the accompanying patent application. The invention, together with its purpose and advantages, is referred to the following description of the preferred embodiment with the accompanying drawings The formula can be best understood, in which: Fig. 1 is a cross section Η 'illustrates a membrane pump according to a preferred embodiment of the present invention; Fig. 2 is a cross-sectional view illustrating another preferred embodiment according to the present invention-13- The membrane pump of the embodiment; and FIG. 3 is a cross-sectional view, [the description of the symbols of the main components] 1 0,9 1 thin 11 shell 11a concave 1 2 round 13 body 14,92 thin 1 4a, 92a outside 15,93 pump 17 suction 18 sucked by 2 1 22 put by 24 drive 25 sucked 26 put 3 l, 36,91a solid 3 2 tune 33,5 1 convex 34,52 concave 45 rod 46,95 with instructions of a prior art film pump; part of the shape of the membrane casing Tension plate, shell membrane, part of the chamber, the channel, the drain, the valve, the valve, the valve unit, the outlet, the fixed surface, the entire surface, the surface area, the surface area, the component
-14- 200521324 47 固定構件 48 保存凹進處 49 圓形凸緣 49a，95a，96a 表面 94 驅動器 96 凸緣 M 箭頭 P 中心點 R1，R2，R3，R4 曲率半徑 XI，X2，X3，X4 彎曲線-14- 200521324 47 Fixing member 48 Storage recess 49 Round flange 49a, 95a, 96a Surface 94 Driver 96 Flange M Arrow P Center point R1, R2, R3, R4 Curvature radius XI, X2, X3, X4 Bend line