TW200520059A - Method of epitaxial growth and substrate for epitaxial growth - Google Patents
Method of epitaxial growth and substrate for epitaxial growthInfo
- Publication number
- TW200520059A TW200520059A TW093127301A TW93127301A TW200520059A TW 200520059 A TW200520059 A TW 200520059A TW 093127301 A TW093127301 A TW 093127301A TW 93127301 A TW93127301 A TW 93127301A TW 200520059 A TW200520059 A TW 200520059A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- epitaxial growth
- semiconductor
- compound semiconductor
- semiconductor layer
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
When epitaxial growth of a compound semiconductor layer is performed on a semiconductor substrate, especially when epitaxial growth of a compound semiconductor layer proceeds on a semiconductor single-crystal substrate without occurrence of surface defects, such as hillock and orange peel, on the formed epitaxial layer, a substrate satisfies the following relationships: 0.05 ≤ θ < 0.10 and θ < 1X10-3 x D1/2 (D > 2500 cm-2) where θ is an off-angle ( DEG ) from the reference surface of effective utilization region on the substrate surface, D (cm2) is the defect density of semiconductor substrate.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003327220A JP2007019048A (en) | 2003-09-19 | 2003-09-19 | Epitaxial growth method and substrate for epitaxial growth |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200520059A true TW200520059A (en) | 2005-06-16 |
Family
ID=34372864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093127301A TW200520059A (en) | 2003-09-19 | 2004-09-09 | Method of epitaxial growth and substrate for epitaxial growth |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2007019048A (en) |
TW (1) | TW200520059A (en) |
WO (1) | WO2005029560A1 (en) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2750331B2 (en) * | 1992-04-23 | 1998-05-13 | 株式会社ジャパンエナジー | Substrate for epitaxial growth and epitaxial growth method |
JP2743348B2 (en) * | 1993-12-27 | 1998-04-22 | 関西日本電気株式会社 | Epitaxial growth method |
JP3129112B2 (en) * | 1994-09-08 | 2001-01-29 | 住友電気工業株式会社 | Compound semiconductor epitaxial growth method and InP substrate therefor |
-
2003
- 2003-09-19 JP JP2003327220A patent/JP2007019048A/en active Pending
-
2004
- 2004-07-07 WO PCT/JP2004/009638 patent/WO2005029560A1/en not_active Application Discontinuation
- 2004-09-09 TW TW093127301A patent/TW200520059A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2007019048A (en) | 2007-01-25 |
WO2005029560A1 (en) | 2005-03-31 |
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