TW200519031A - Resonator for micro-electro-mechanical system, (MEMS), its driving method and frequency filter - Google Patents

Resonator for micro-electro-mechanical system, (MEMS), its driving method and frequency filter

Info

Publication number
TW200519031A
TW200519031A TW093128108A TW93128108A TW200519031A TW 200519031 A TW200519031 A TW 200519031A TW 093128108 A TW093128108 A TW 093128108A TW 93128108 A TW93128108 A TW 93128108A TW 200519031 A TW200519031 A TW 200519031A
Authority
TW
Taiwan
Prior art keywords
output
electrode
resonator
phase
input
Prior art date
Application number
TW093128108A
Other languages
English (en)
Other versions
TWI291450B (en
Inventor
Koji Naniwada
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003327496A external-priority patent/JP4254445B2/ja
Priority claimed from JP2004049133A external-priority patent/JP4155209B2/ja
Application filed by Sony Corp filed Critical Sony Corp
Publication of TW200519031A publication Critical patent/TW200519031A/zh
Application granted granted Critical
Publication of TWI291450B publication Critical patent/TWI291450B/zh

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023—Balance-unbalance or balance-balance networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
TW093128108A 2003-09-19 2004-09-17 Resonator for micro-electro-mechanical system, (MEMS), its driving method and frequency filter TWI291450B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003327496A JP4254445B2 (ja) 2003-09-19 2003-09-19 マイクロ電気機械システムの共振器およびその駆動方法
JP2004049133A JP4155209B2 (ja) 2004-02-25 2004-02-25 マイクロ電気機械システムの共振器およびその製造方法および周波数フィルタ

Publications (2)

Publication Number Publication Date
TW200519031A true TW200519031A (en) 2005-06-16
TWI291450B TWI291450B (en) 2007-12-21

Family

ID=34380333

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093128108A TWI291450B (en) 2003-09-19 2004-09-17 Resonator for micro-electro-mechanical system, (MEMS), its driving method and frequency filter

Country Status (5)

Country Link
US (1) US20070010227A1 (zh)
EP (1) EP1667323A1 (zh)
KR (1) KR20060065720A (zh)
TW (1) TWI291450B (zh)
WO (1) WO2005029700A1 (zh)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006083482A2 (en) 2005-01-07 2006-08-10 Trustees Of Boston University Nanomechanical oscillator
WO2007056277A2 (en) * 2005-11-04 2007-05-18 Cornell Research Foundation, Inc. Dielectrically transduced single-ended to differential mems filter
US8044737B2 (en) 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8044736B2 (en) 2008-04-29 2011-10-25 Sand9, Inc. Timing oscillators and related methods
US8476809B2 (en) 2008-04-29 2013-07-02 Sand 9, Inc. Microelectromechanical systems (MEMS) resonators and related apparatus and methods
US8410868B2 (en) 2009-06-04 2013-04-02 Sand 9, Inc. Methods and apparatus for temperature control of devices and mechanical resonating structures
US8443137B2 (en) * 2008-08-21 2013-05-14 Infinidat Ltd. Grid storage system and method of operating thereof
US8687731B2 (en) 2009-02-02 2014-04-01 Qualcomm Incorporated Uplink open-loop spatial multiplexing in wireless communications
US8395456B2 (en) 2009-02-04 2013-03-12 Sand 9, Inc. Variable phase amplifier circuit and method of use
US8456250B2 (en) 2009-02-04 2013-06-04 Sand 9, Inc. Methods and apparatus for tuning devices having resonators
US8319566B2 (en) 2009-02-04 2012-11-27 Sand 9, Inc. Methods and apparatus for tuning devices having mechanical resonators
US9048811B2 (en) 2009-03-31 2015-06-02 Sand 9, Inc. Integration of piezoelectric materials with substrates
US8664836B1 (en) 2009-09-18 2014-03-04 Sand 9, Inc. Passivated micromechanical resonators and related methods
US8704604B2 (en) 2009-12-23 2014-04-22 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8604888B2 (en) 2009-12-23 2013-12-10 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
US8736388B2 (en) 2009-12-23 2014-05-27 Sand 9, Inc. Oscillators having arbitrary frequencies and related systems and methods
JP5519326B2 (ja) 2010-02-25 2014-06-11 太陽誘電株式会社 フィルタ、デュープレクサ、通信モジュール、通信装置
GB201213402D0 (en) * 2012-07-27 2012-09-12 E2V Tech Uk Ltd High frequency energy generator systems

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6249073B1 (en) * 1999-01-14 2001-06-19 The Regents Of The University Of Michigan Device including a micromechanical resonator having an operating frequency and method of extending same
AU2001261036A1 (en) * 2000-04-20 2001-11-07 The Regents Of The University Of Michigan Method and apparatus for upconverting and filtering an information signal utilizing a vibrating micromechanical device

Also Published As

Publication number Publication date
KR20060065720A (ko) 2006-06-14
EP1667323A1 (en) 2006-06-07
WO2005029700A1 (ja) 2005-03-31
US20070010227A1 (en) 2007-01-11
TWI291450B (en) 2007-12-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees