TW200517882A - Data handling method for fabricating a phase shift mask - Google Patents
Data handling method for fabricating a phase shift maskInfo
- Publication number
- TW200517882A TW200517882A TW092132945A TW92132945A TW200517882A TW 200517882 A TW200517882 A TW 200517882A TW 092132945 A TW092132945 A TW 092132945A TW 92132945 A TW92132945 A TW 92132945A TW 200517882 A TW200517882 A TW 200517882A
- Authority
- TW
- Taiwan
- Prior art keywords
- database
- pattern database
- modified
- fabricating
- phase pattern
- Prior art date
Links
Abstract
A data handling method for fabricating a phase shift mask in a micro-processing unit is disclosed. The method comprises following steps: (a) providing a chrome pattern database and a first-phase pattern database; (b) generating a second-phase pattern database by reversing the union of the chrome pattern database and the first-phase pattern database; (c) modifying the first-phase pattern database and the second-phase pattern database by adding biases; (d) establishing an modified union database by combining the modified first-phase pattern database with the modified second-phase pattern, database; and (e) reversing the modified union database to get modified chrome pattern database.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92132945A TWI240185B (en) | 2003-11-24 | 2003-11-24 | Data handling method for fabricating a phase shift mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92132945A TWI240185B (en) | 2003-11-24 | 2003-11-24 | Data handling method for fabricating a phase shift mask |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200517882A true TW200517882A (en) | 2005-06-01 |
TWI240185B TWI240185B (en) | 2005-09-21 |
Family
ID=37007684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92132945A TWI240185B (en) | 2003-11-24 | 2003-11-24 | Data handling method for fabricating a phase shift mask |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI240185B (en) |
-
2003
- 2003-11-24 TW TW92132945A patent/TWI240185B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI240185B (en) | 2005-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |