TW200517882A - Data handling method for fabricating a phase shift mask - Google Patents

Data handling method for fabricating a phase shift mask

Info

Publication number
TW200517882A
TW200517882A TW092132945A TW92132945A TW200517882A TW 200517882 A TW200517882 A TW 200517882A TW 092132945 A TW092132945 A TW 092132945A TW 92132945 A TW92132945 A TW 92132945A TW 200517882 A TW200517882 A TW 200517882A
Authority
TW
Taiwan
Prior art keywords
database
pattern database
modified
fabricating
phase pattern
Prior art date
Application number
TW092132945A
Other languages
Chinese (zh)
Other versions
TWI240185B (en
Inventor
Hiromasa Unno
Yen-Wu Hsien
Original Assignee
Toppan Chuanghwa Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Chuanghwa Electronics Co Ltd filed Critical Toppan Chuanghwa Electronics Co Ltd
Priority to TW92132945A priority Critical patent/TWI240185B/en
Publication of TW200517882A publication Critical patent/TW200517882A/en
Application granted granted Critical
Publication of TWI240185B publication Critical patent/TWI240185B/en

Links

Abstract

A data handling method for fabricating a phase shift mask in a micro-processing unit is disclosed. The method comprises following steps: (a) providing a chrome pattern database and a first-phase pattern database; (b) generating a second-phase pattern database by reversing the union of the chrome pattern database and the first-phase pattern database; (c) modifying the first-phase pattern database and the second-phase pattern database by adding biases; (d) establishing an modified union database by combining the modified first-phase pattern database with the modified second-phase pattern, database; and (e) reversing the modified union database to get modified chrome pattern database.
TW92132945A 2003-11-24 2003-11-24 Data handling method for fabricating a phase shift mask TWI240185B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92132945A TWI240185B (en) 2003-11-24 2003-11-24 Data handling method for fabricating a phase shift mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92132945A TWI240185B (en) 2003-11-24 2003-11-24 Data handling method for fabricating a phase shift mask

Publications (2)

Publication Number Publication Date
TW200517882A true TW200517882A (en) 2005-06-01
TWI240185B TWI240185B (en) 2005-09-21

Family

ID=37007684

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92132945A TWI240185B (en) 2003-11-24 2003-11-24 Data handling method for fabricating a phase shift mask

Country Status (1)

Country Link
TW (1) TWI240185B (en)

Also Published As

Publication number Publication date
TWI240185B (en) 2005-09-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees