TW200516352A - Method for increasing the resolution of photo mask - Google Patents

Method for increasing the resolution of photo mask

Info

Publication number
TW200516352A
TW200516352A TW092132049A TW92132049A TW200516352A TW 200516352 A TW200516352 A TW 200516352A TW 092132049 A TW092132049 A TW 092132049A TW 92132049 A TW92132049 A TW 92132049A TW 200516352 A TW200516352 A TW 200516352A
Authority
TW
Taiwan
Prior art keywords
resolution
photo mask
light beam
polarized
increasing
Prior art date
Application number
TW092132049A
Other languages
English (en)
Inventor
Hiromasa Unno
Yen-Wu Hsieh
Original Assignee
Toppan Chunghwa Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Chunghwa Electronics Co Ltd filed Critical Toppan Chunghwa Electronics Co Ltd
Priority to TW092132049A priority Critical patent/TW200516352A/zh
Publication of TW200516352A publication Critical patent/TW200516352A/zh

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW092132049A 2003-11-14 2003-11-14 Method for increasing the resolution of photo mask TW200516352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW092132049A TW200516352A (en) 2003-11-14 2003-11-14 Method for increasing the resolution of photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW092132049A TW200516352A (en) 2003-11-14 2003-11-14 Method for increasing the resolution of photo mask

Publications (1)

Publication Number Publication Date
TW200516352A true TW200516352A (en) 2005-05-16

Family

ID=57798958

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092132049A TW200516352A (en) 2003-11-14 2003-11-14 Method for increasing the resolution of photo mask

Country Status (1)

Country Link
TW (1) TW200516352A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112286005A (zh) * 2020-09-23 2021-01-29 山东师范大学 一种提高芯片光刻工艺分辨率的方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112286005A (zh) * 2020-09-23 2021-01-29 山东师范大学 一种提高芯片光刻工艺分辨率的方法
CN112286005B (zh) * 2020-09-23 2022-11-22 山东师范大学 一种提高芯片光刻工艺分辨率的方法

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