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Application filed by Chi Mei Optoelectronics CorpfiledCriticalChi Mei Optoelectronics Corp
Priority to TW92125050ApriorityCriticalpatent/TWI274147B/en
Publication of TW200510707ApublicationCriticalpatent/TW200510707A/en
Application grantedgrantedCritical
Publication of TWI274147BpublicationCriticalpatent/TWI274147B/en
Investigating Or Analysing Materials By Optical Means
(AREA)
Abstract
Disclosed is a movable particle measuring device for use in a clean room, comprising a movable device and a particle detector. The particle detector is mounted on the movable device to measure size and quantity of particles. The particle detector can be an optic particle detector or particle detector of other types.