TW200509300A - Interconnect structure and method of forming the same - Google Patents
Interconnect structure and method of forming the sameInfo
- Publication number
- TW200509300A TW200509300A TW092123522A TW92123522A TW200509300A TW 200509300 A TW200509300 A TW 200509300A TW 092123522 A TW092123522 A TW 092123522A TW 92123522 A TW92123522 A TW 92123522A TW 200509300 A TW200509300 A TW 200509300A
- Authority
- TW
- Taiwan
- Prior art keywords
- plug
- dielectric layer
- forming
- interconnect structure
- same
- Prior art date
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
A method of forming a interconnect structure is described. A first dielectric layer having a plug therein is provided. Removing a portion of the first dielectric layer to expose the sidewalls of the top portion of the plug. Then, a portion of the exposed top portion of the plug is removed. A second dielectric layer is formed over the first dielectric layer covering the plug. Removing the second dielectric layer until the plug is exposed. A conductive line is formed on the second dielectric layer and is electrically connected to the plug. Since the top portion of the plug is reduced, short between the plug and other conductive line will not occur.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92123522A TWI240367B (en) | 2003-08-27 | 2003-08-27 | Interconnect structure and method of forming the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92123522A TWI240367B (en) | 2003-08-27 | 2003-08-27 | Interconnect structure and method of forming the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200509300A true TW200509300A (en) | 2005-03-01 |
TWI240367B TWI240367B (en) | 2005-09-21 |
Family
ID=37007737
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92123522A TWI240367B (en) | 2003-08-27 | 2003-08-27 | Interconnect structure and method of forming the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI240367B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11521894B2 (en) | 2020-07-18 | 2022-12-06 | International Business Machines Corporation | Partial wrap around top contact |
-
2003
- 2003-08-27 TW TW92123522A patent/TWI240367B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI240367B (en) | 2005-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4A | Expiration of patent term of an invention patent |