TW200508576A - A quartz crystal microbalance apparatus - Google Patents
A quartz crystal microbalance apparatusInfo
- Publication number
- TW200508576A TW200508576A TW092123999A TW92123999A TW200508576A TW 200508576 A TW200508576 A TW 200508576A TW 092123999 A TW092123999 A TW 092123999A TW 92123999 A TW92123999 A TW 92123999A TW 200508576 A TW200508576 A TW 200508576A
- Authority
- TW
- Taiwan
- Prior art keywords
- quartz crystal
- crystal microbalance
- test cell
- sensor
- testing
- Prior art date
Links
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
A quartz crystal microbalance apparatus adapted for measuring tiny change of mass is disclosed, which includes one quartz crystal sensor, one oscillator circuit, one test cell, at least one sample inlet, one sample outlet, one vacuum pump, and one temperature controller. This multi-purposed apparatus could be repeatedly used by automatically regenerate the detecting sensor molecules on the surface of quartz crystal sensor through desorption of the testing gas. The apparatus also can be applied for dynamic and static measurement and adjust the testing temperature in the test cell. The apparatus can be widely used in detecting contamination source in environment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92123999A TWI220687B (en) | 2003-08-29 | 2003-08-29 | A quartz crystal microbalance apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92123999A TWI220687B (en) | 2003-08-29 | 2003-08-29 | A quartz crystal microbalance apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI220687B TWI220687B (en) | 2004-09-01 |
TW200508576A true TW200508576A (en) | 2005-03-01 |
Family
ID=34114733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92123999A TWI220687B (en) | 2003-08-29 | 2003-08-29 | A quartz crystal microbalance apparatus |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI220687B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102478475A (en) * | 2010-11-30 | 2012-05-30 | 中国科学院大连化学物理研究所 | Quartz crystal microbalance analyzing device with self-cleaning internally circulating gas circuit |
CN106441524A (en) * | 2016-09-05 | 2017-02-22 | 清华大学深圳研究生院 | Wafer clamping device based on quartz crystal microbalance |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101949813B (en) * | 2010-07-27 | 2012-01-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | Method and device for detecting water oxygen infiltration index in device packaging |
CN111999383B (en) * | 2020-09-08 | 2024-02-13 | 崔学晨 | Quartz crystal microbalance and in-situ regeneration method of sensing chip thereof |
-
2003
- 2003-08-29 TW TW92123999A patent/TWI220687B/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102478475A (en) * | 2010-11-30 | 2012-05-30 | 中国科学院大连化学物理研究所 | Quartz crystal microbalance analyzing device with self-cleaning internally circulating gas circuit |
CN102478475B (en) * | 2010-11-30 | 2014-04-16 | 中国科学院大连化学物理研究所 | Quartz crystal microbalance analyzing device with self-cleaning internally circulating gas circuit |
CN106441524A (en) * | 2016-09-05 | 2017-02-22 | 清华大学深圳研究生院 | Wafer clamping device based on quartz crystal microbalance |
Also Published As
Publication number | Publication date |
---|---|
TWI220687B (en) | 2004-09-01 |
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