TW200508576A - A quartz crystal microbalance apparatus - Google Patents

A quartz crystal microbalance apparatus

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Publication number
TW200508576A
TW200508576A TW092123999A TW92123999A TW200508576A TW 200508576 A TW200508576 A TW 200508576A TW 092123999 A TW092123999 A TW 092123999A TW 92123999 A TW92123999 A TW 92123999A TW 200508576 A TW200508576 A TW 200508576A
Authority
TW
Taiwan
Prior art keywords
quartz crystal
crystal microbalance
test cell
sensor
testing
Prior art date
Application number
TW092123999A
Other languages
Chinese (zh)
Other versions
TWI220687B (en
Inventor
Yi-Lu Sun
Ren-Jang Wu
Horn-Haw Chen
Pi-Guey Su
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW92123999A priority Critical patent/TWI220687B/en
Application granted granted Critical
Publication of TWI220687B publication Critical patent/TWI220687B/en
Publication of TW200508576A publication Critical patent/TW200508576A/en

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Abstract

A quartz crystal microbalance apparatus adapted for measuring tiny change of mass is disclosed, which includes one quartz crystal sensor, one oscillator circuit, one test cell, at least one sample inlet, one sample outlet, one vacuum pump, and one temperature controller. This multi-purposed apparatus could be repeatedly used by automatically regenerate the detecting sensor molecules on the surface of quartz crystal sensor through desorption of the testing gas. The apparatus also can be applied for dynamic and static measurement and adjust the testing temperature in the test cell. The apparatus can be widely used in detecting contamination source in environment.
TW92123999A 2003-08-29 2003-08-29 A quartz crystal microbalance apparatus TWI220687B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92123999A TWI220687B (en) 2003-08-29 2003-08-29 A quartz crystal microbalance apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92123999A TWI220687B (en) 2003-08-29 2003-08-29 A quartz crystal microbalance apparatus

Publications (2)

Publication Number Publication Date
TWI220687B TWI220687B (en) 2004-09-01
TW200508576A true TW200508576A (en) 2005-03-01

Family

ID=34114733

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92123999A TWI220687B (en) 2003-08-29 2003-08-29 A quartz crystal microbalance apparatus

Country Status (1)

Country Link
TW (1) TWI220687B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102478475A (en) * 2010-11-30 2012-05-30 中国科学院大连化学物理研究所 Quartz crystal microbalance analyzing device with self-cleaning internally circulating gas circuit
CN106441524A (en) * 2016-09-05 2017-02-22 清华大学深圳研究生院 Wafer clamping device based on quartz crystal microbalance

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101949813B (en) * 2010-07-27 2012-01-11 中国科学院苏州纳米技术与纳米仿生研究所 Method and device for detecting water oxygen infiltration index in device packaging
CN111999383B (en) * 2020-09-08 2024-02-13 崔学晨 Quartz crystal microbalance and in-situ regeneration method of sensing chip thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102478475A (en) * 2010-11-30 2012-05-30 中国科学院大连化学物理研究所 Quartz crystal microbalance analyzing device with self-cleaning internally circulating gas circuit
CN102478475B (en) * 2010-11-30 2014-04-16 中国科学院大连化学物理研究所 Quartz crystal microbalance analyzing device with self-cleaning internally circulating gas circuit
CN106441524A (en) * 2016-09-05 2017-02-22 清华大学深圳研究生院 Wafer clamping device based on quartz crystal microbalance

Also Published As

Publication number Publication date
TWI220687B (en) 2004-09-01

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