TW200506711A - Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system - Google Patents

Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system

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Publication number
TW200506711A
TW200506711A TW093106731A TW93106731A TW200506711A TW 200506711 A TW200506711 A TW 200506711A TW 093106731 A TW093106731 A TW 093106731A TW 93106731 A TW93106731 A TW 93106731A TW 200506711 A TW200506711 A TW 200506711A
Authority
TW
Taiwan
Prior art keywords
semiconductor wafer
wafer fabrication
scanner
deviations
compensate
Prior art date
Application number
TW093106731A
Other languages
Chinese (zh)
Other versions
TWI324743B (en
Inventor
Hilario L Oh
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of TW200506711A publication Critical patent/TW200506711A/en
Application granted granted Critical
Publication of TWI324743B publication Critical patent/TWI324743B/en

Links

Abstract

A semiconductor wafer fabrication system that includes at least a track system and a scanner system compensates for deviations from nominal periodicity in the scanner system by dynamically introducing time delays when such deviations are detected. Preferably prior art static wait states are also introduced into the wafer recipe to reduce probability of resource conflicts. The resultant semiconductor wafer fabrication system can enjoy enhanced wafer throughput in that synchronization of wafer flow is maintained, despite such deviations.
TW93106731A 2003-03-12 2004-03-12 Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system TWI324743B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US45438603P 2003-03-12 2003-03-12

Publications (2)

Publication Number Publication Date
TW200506711A true TW200506711A (en) 2005-02-16
TWI324743B TWI324743B (en) 2010-05-11

Family

ID=45074198

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93106731A TWI324743B (en) 2003-03-12 2004-03-12 Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system

Country Status (1)

Country Link
TW (1) TWI324743B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI755177B (en) * 2020-11-27 2022-02-11 大陸商北京集創北方科技股份有限公司 Synchronous activation method of cascaded chips, sensing device and information processing device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8582183B2 (en) * 2011-04-26 2013-11-12 Kodak Alaris Inc. Forward facing scanner

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI755177B (en) * 2020-11-27 2022-02-11 大陸商北京集創北方科技股份有限公司 Synchronous activation method of cascaded chips, sensing device and information processing device

Also Published As

Publication number Publication date
TWI324743B (en) 2010-05-11

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MM4A Annulment or lapse of patent due to non-payment of fees