TW200506711A - Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system - Google Patents
Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication systemInfo
- Publication number
- TW200506711A TW200506711A TW093106731A TW93106731A TW200506711A TW 200506711 A TW200506711 A TW 200506711A TW 093106731 A TW093106731 A TW 093106731A TW 93106731 A TW93106731 A TW 93106731A TW 200506711 A TW200506711 A TW 200506711A
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor wafer
- wafer fabrication
- scanner
- deviations
- compensate
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 title 1
- 230000001934 delay Effects 0.000 abstract 1
- 230000003068 static effect Effects 0.000 abstract 1
Abstract
A semiconductor wafer fabrication system that includes at least a track system and a scanner system compensates for deviations from nominal periodicity in the scanner system by dynamically introducing time delays when such deviations are detected. Preferably prior art static wait states are also introduced into the wafer recipe to reduce probability of resource conflicts. The resultant semiconductor wafer fabrication system can enjoy enhanced wafer throughput in that synchronization of wafer flow is maintained, despite such deviations.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US45438603P | 2003-03-12 | 2003-03-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200506711A true TW200506711A (en) | 2005-02-16 |
TWI324743B TWI324743B (en) | 2010-05-11 |
Family
ID=45074198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93106731A TWI324743B (en) | 2003-03-12 | 2004-03-12 | Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI324743B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI755177B (en) * | 2020-11-27 | 2022-02-11 | 大陸商北京集創北方科技股份有限公司 | Synchronous activation method of cascaded chips, sensing device and information processing device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8582183B2 (en) * | 2011-04-26 | 2013-11-12 | Kodak Alaris Inc. | Forward facing scanner |
-
2004
- 2004-03-12 TW TW93106731A patent/TWI324743B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI755177B (en) * | 2020-11-27 | 2022-02-11 | 大陸商北京集創北方科技股份有限公司 | Synchronous activation method of cascaded chips, sensing device and information processing device |
Also Published As
Publication number | Publication date |
---|---|
TWI324743B (en) | 2010-05-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |