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Application filed by Chien Hui ChuanfiledCriticalChien Hui Chuan
Priority to TW092119122ApriorityCriticalpatent/TW200503019A/en
Publication of TW200503019ApublicationCriticalpatent/TW200503019A/en
A touch mode varactor is disclosed in this invention. The said touch mode varactor consists of one voltage-control actuator and one capacitor. The movable electrode of the said capacitor and the said actuator is a beam-type diaphragm; the other electrode of said capacitor and the one of said actuator are separately formed on the stationary substrate of insulating material. The diaphragm will deform in response to applied electrostatic voltage and change the gap between the two actuator-electrodes; hence, the capacitor of the said capacitor will change accordingly. Even after the movable electrode begin to touch the stationary electrode of said capacitor the actuator can still increase its voltage until the movable electrode fully touch the stationary electrode of said capacitor. The touch mode varactor with a rectangular beam-type diaphragm can achieve good quality factor, large operating voltage range, and ultra-wide tuning range of capacitance.