TW200502541A - Method and apparatus for monitoring of slurry consistency - Google Patents

Method and apparatus for monitoring of slurry consistency

Info

Publication number
TW200502541A
TW200502541A TW093102902A TW93102902A TW200502541A TW 200502541 A TW200502541 A TW 200502541A TW 093102902 A TW093102902 A TW 093102902A TW 93102902 A TW93102902 A TW 93102902A TW 200502541 A TW200502541 A TW 200502541A
Authority
TW
Taiwan
Prior art keywords
slurry
monitoring
physical characteristic
online monitoring
request
Prior art date
Application number
TW093102902A
Other languages
Chinese (zh)
Other versions
TWI235234B (en
Inventor
Ashutosh Misra
Matthew L Fisher
Original Assignee
L Air Liquide Sa A Directoireet Conseil De Surveillance Pour L Etude Et L Expl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/734,092 external-priority patent/US20040159399A1/en
Priority claimed from US10/733,865 external-priority patent/US20040166584A1/en
Priority claimed from PCT/IB2004/000234 external-priority patent/WO2004068127A1/en
Application filed by L Air Liquide Sa A Directoireet Conseil De Surveillance Pour L Etude Et L Expl filed Critical L Air Liquide Sa A Directoireet Conseil De Surveillance Pour L Etude Et L Expl
Publication of TW200502541A publication Critical patent/TW200502541A/en
Application granted granted Critical
Publication of TWI235234B publication Critical patent/TWI235234B/en

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A method and apparatus for performing online monitoring of a physical characteristic of a process material. A request to provide a slurry to a processing tool is received. The slurry is transported through a slurry transport unit, based upon the request, to the processing tool. An online monitoring of a physical characteristic of the slurry is performed. The online monitoring of the slurry includes analyzing an optical signal sent through the slurry to determine whether the physical characteristic of the slurry is within a predetermined level of tolerance.
TW093102902A 2003-07-11 2004-02-09 Method and apparatus for monitoring of slurry consistency TWI235234B (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US48638703P 2003-07-11 2003-07-11
US10/734,092 US20040159399A1 (en) 2003-01-31 2003-12-11 Method and apparatus for monitoring of slurry consistency
US10/733,865 US20040166584A1 (en) 2000-12-21 2003-12-11 Method and apparatus for monitoring of a chemical characteristic of a process chemical
PCT/IB2004/000234 WO2004068127A1 (en) 2003-01-31 2004-01-30 Method and apparatus for monitoring of slurry consistency

Publications (2)

Publication Number Publication Date
TW200502541A true TW200502541A (en) 2005-01-16
TWI235234B TWI235234B (en) 2005-07-01

Family

ID=36637602

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093102902A TWI235234B (en) 2003-07-11 2004-02-09 Method and apparatus for monitoring of slurry consistency

Country Status (1)

Country Link
TW (1) TWI235234B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465314B (en) * 2011-04-21 2014-12-21 Applied Materials Inc Construction of reference spectra with variations in environmental effects

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465314B (en) * 2011-04-21 2014-12-21 Applied Materials Inc Construction of reference spectra with variations in environmental effects

Also Published As

Publication number Publication date
TWI235234B (en) 2005-07-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees