TW200502541A - Method and apparatus for monitoring of slurry consistency - Google Patents
Method and apparatus for monitoring of slurry consistencyInfo
- Publication number
- TW200502541A TW200502541A TW093102902A TW93102902A TW200502541A TW 200502541 A TW200502541 A TW 200502541A TW 093102902 A TW093102902 A TW 093102902A TW 93102902 A TW93102902 A TW 93102902A TW 200502541 A TW200502541 A TW 200502541A
- Authority
- TW
- Taiwan
- Prior art keywords
- slurry
- monitoring
- physical characteristic
- online monitoring
- request
- Prior art date
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A method and apparatus for performing online monitoring of a physical characteristic of a process material. A request to provide a slurry to a processing tool is received. The slurry is transported through a slurry transport unit, based upon the request, to the processing tool. An online monitoring of a physical characteristic of the slurry is performed. The online monitoring of the slurry includes analyzing an optical signal sent through the slurry to determine whether the physical characteristic of the slurry is within a predetermined level of tolerance.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US48638703P | 2003-07-11 | 2003-07-11 | |
US10/734,092 US20040159399A1 (en) | 2003-01-31 | 2003-12-11 | Method and apparatus for monitoring of slurry consistency |
US10/733,865 US20040166584A1 (en) | 2000-12-21 | 2003-12-11 | Method and apparatus for monitoring of a chemical characteristic of a process chemical |
PCT/IB2004/000234 WO2004068127A1 (en) | 2003-01-31 | 2004-01-30 | Method and apparatus for monitoring of slurry consistency |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200502541A true TW200502541A (en) | 2005-01-16 |
TWI235234B TWI235234B (en) | 2005-07-01 |
Family
ID=36637602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093102902A TWI235234B (en) | 2003-07-11 | 2004-02-09 | Method and apparatus for monitoring of slurry consistency |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI235234B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI465314B (en) * | 2011-04-21 | 2014-12-21 | Applied Materials Inc | Construction of reference spectra with variations in environmental effects |
-
2004
- 2004-02-09 TW TW093102902A patent/TWI235234B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI465314B (en) * | 2011-04-21 | 2014-12-21 | Applied Materials Inc | Construction of reference spectra with variations in environmental effects |
Also Published As
Publication number | Publication date |
---|---|
TWI235234B (en) | 2005-07-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |