TW200426011A - Flexible mold, method of manufacturing same and method of manufacturing fine structures - Google Patents

Abstract

A flexible mold having a mold layer that is provided on the surface thereof with a groove pattern of specified shape and size, is constructed such that the mold layer contains a lithium salt of an organic fluorine compound as an antistatic agent.

Description

说明 、 Explanation of the invention: [Technical field to which the invention belongs] ^ The invention relates to a kind of mold and a method of manufacturing a mold. The system relates to a kind of flexible mold and a manufacturing method thereof. In terms of antistatic performance, there are two methods of using such a pull-mold manufacturing-precision structure.::::guan can be used to manufacture the ribs of the back panel of plasma displays with advantages. L previous technology], such as : Know 'With the advancement and development of television technology, display devices using cathode imaging have become more and more economical in mass production. In any case, in recent years, these display devices using cathode image tubes have been replaced by thin and light The flat display device has attracted increasing attention. The item of the two flat display device is represented by a liquid crystal display (L, widely used in notebook personal computers, mobile phones, personal 2 assistants, etc.), and other A compact display device for portable electronic information devices. On the other hand, the plasma display is a typical thin flat display device with a large screen size, which is actually beginning to be applied to Commercially, and in recent years, it has also been used as a wall-mounted TV screen for housing. A plasma display has the structure shown in the outline of Figure i. Although in the yoke example of the drawing, The plasma display 50 only includes a display discharge grid 56 which roughly includes multiple display micro discharge grids. More specifically, each display discharge grid 56 is defined as being surrounded by a pair of glass substrates (that is, The front glass substrate 6 丨 and the rear glass substrate 5 1) are spaced apart from each other and are opposed to each other, and a glass substrate is disposed between the glass substrates

O: \ 90 \ 90181.DOC 200426011 There are ribs 54 (barrier ribs, sometimes cut walls or broken glass substrates in front of the barrier) that have a precise structure of a specific shape. The transparent display electrode is included; A transparent dielectric layer consists of _ and a transparent protective layer 64. The rear glass substrate 51 includes an address electrode 5 angstroms and a lower rear dielectric layer 52. The display electrode 63 and the address electrode 53 are perpendicular to each other and are in a normal style. The corresponding intervals are as follows. # -Show 56 of the discharge grid has a positive-fluorescent layer 55 formed on the inner wall, and sealed inside: rare gases: (such as' neon-xenon gas), so there is It helps to emit light through the discharge of the electrodes described above.% One: In general, the ribs 54 made of ceramic precision structure are formed before the back panel of the electro-polymer display, and the address electrode 53 is usually set at On the rear glass substrate 51 (as shown in the schematic diagram of ® 2). Because the accuracy of the shape and size of the ribs significantly affects the performance of the plasma display, different improvements have been proposed for molds and manufacturing methods for manufacturing ribs. Has already applied for one A method for manufacturing a barrier rib, which is characterized in that a metal or glass is used as a molding material, and a coating liquid for forming a rib (dividing wall) is dispensed between the surface of the glass substrate and the molding material, and the coating material is After the liquid is hardened, the molding material is removed, and the substrate with the hardened coating liquid thereafter is baked immediately after the transfer (refer to Japanese Unexamined Patent Publication No. 9_12336). The coating liquid has a low melting point. Glass particles are the main component.-At the same time, a method for manufacturing a plasma display substrate has been proposed, which comprises filling ceramic or glass particles with an accompanying solvent and an organic agent. Jincheng = O: \ 90 \ 90l8l.DOC -6- 200426011 wall, and combined with this mixture to form a back plate formed of cymbal glass (Japanese Unexamined Patent Publication No. 9_134676). In addition In Japanese Unexamined Patent Publication No. 9-283〇17, a method for manufacturing a partition wall has also been applied. The method includes the steps of forming a substrate with a The soft partition wall member has a shape of a plate having a predetermined thickness, a partition wall member molded by a pressure provided with a stamper corresponding to the shape of the partition wall to be formed, a compression mold formed by the partition wall member, and The molded partition wall member was heat-treated at a predetermined temperature. In any case, there is still a problem of electrification caused by static electricity. Because the mold is usually made of a resin material, electrification caused by static electricity may occur during its use. The problem is that the mold tends to attract the dust or particles of the molding material or the fragments of ribs, which requires frequent cleaning or may have a negative impact on the quality of the finished backplane. In order to deal with the problem of static electricity, the solution is —To adopt—A kind of ion-conducting material is preferably a perchloric acid clock (Japanese Unexamined Patent Publication (Kokai) No. 2000H91345), a method of performing antistatic treatment on a mold for manufacturing a display substrate. Peroxyacids have a relatively low ionization energy (high solubility in solvents) compared to other bases, so that when mixed with organic materials such as resins, they increase the conductivity of the material. According to this method, the resistance of the mold surface is reduced as a result of the antistatic treatment, so that dust or the like can be prevented from withering. In particular, the ionic conductivity imparted to the mold in this way enables successful antistatic treatment regardless of the surrounding environment. [Summary of the Invention]

O: \ 90 \ 90l8l.DOC 200426011 In any case, from recent research and research, Jiu Ji were found that the problem of using lithium perchlorate to be solved in this corpse. The peroxy acid bell has oxidative properties. When you suffocate, enter, and enter five ", Shishi Tian 1 is incorporated into the material, not only when handling the salt itself, but also when handling the molding material, extreme care is required. Therefore, it is difficult to widely manufacture a molding material or a mold containing perchlorine. On the one hand, the present invention provides a flexible mold including a model layer, and a groove pattern of a specific shape and size is provided on the surface of the inner layer of the core, wherein the model layer includes-organic fluoride as an antistatic agent. Bell salt. This month, another aspect provides a method for manufacturing a transmutable mold including a model layer. The model layer is provided with a groove pattern of a specific shape and size. The method includes the steps of: ^ coating a layer containing an antistatic agent. The light-curing resin material of the lithium salt of the organic fluoride forms a light-curing resin material with a predetermined film thickness on the metal master pattern, and has a shape corresponding to the groove pattern of the mold on the surface of the metal master pattern. And a protruding pattern of different sizes; a transparent support composed of a plastic material film layer is laminated on the metal main control pattern, thereby forming the metal main control pattern, the layer of light-hardening resin material, and one of the supports Layer; the side of the support is illuminated with light to harden the photo-curable resin material layer; and the model layer formed by hardening the photo-curable resin material by the metal master pattern is peeled together with the support. In another aspect of the present invention, a method for manufacturing a precision structure is provided.

O: \ 90 \ 90181.DOC 200426011, the method includes the steps of providing-a flexible mold with a model layer, the mold has a thick spoon corresponding to the protruding figure The shape and size of the groove pattern, the more θ is the lithium of organic fluoride as an antistatic agent. Placement-hardenable molding material on the substrate and the mold layer of the mold and filled with the molding material. The groove pattern of the mold is solidified; the material is solidified and formed into a precision structure, the precision structure is composed of the basic structure, a protruding pattern integrally connected thereto, and the precision structure is peeled off by the mold. [Embodiment] (1) A flexible mold according to the present invention, a manufacturing method thereof, and a method for manufacturing a precision mold. The method of construction can be individually implemented in different specific examples with advantages. A specific example of the present invention will be described in detail below with reference to the manufacture of plasma display ribs as a typical example of precision structure. It should be understood that the invention is not limited to the fabrication of ribs for plasma displays. As just described with reference to Fig. 2, the ribs 54 of the plasma display are provided on the rear glass substrate 51 to form the back plate of the plasma display. The pitch C (lattice pitch) of the ribs 54 can vary with the size of the screen, and generally ranges from about 150 to 400 μχη. In general, ribs should satisfy two requirements, that is, '' should not have defects such as bubble inclusions, deformation, and the like 'and "the pitch of the ribs should have high accuracy". Regarding the accuracy of the pitch, the rib is set at a specified position and needs a slight deviation from the address electrode. In fact, the tolerance of this position is within tens of μm. If the position error exceeds tens of μιη, visible light emission conditions may have O: \ 90 \ 90181.DOC -9- 200426011 natural light emission display. Because the insufficient accuracy of the pitch can have a negative impact, and cannot be satisfied with the trend that the current screen size has become larger, the ribs can become more serious. "Considering that the ribs 54 are the same as a whole," the total pitch R of the ribs 54 (the distance between the _end ribs 54; although only 5 ribs are shown in the drawing, there are usually about 3000 ribs). The accuracy is roughly within dozens of degrees, and may vary with the size of the substrate or the shape of the ribs. Generally speaking, 'ribs can be best formed using flexible molds, which include— The support and the mold with a groove pattern supported by the support, said the king of nuclear equipment (the distance between the grooves at the two ends) also needs to be full like a rib. Ten ppm or less size accuracy, within. According to the present invention, satisfactory dimensional accuracy of rib pitch and full pitch can be achieved. The flexible mold of the present invention has a The structure and manufacturing method of the plasma display back panel shown in FIG. 2 will be described. The partial perspective view of FIG. 3 schematically shows a flexure tool according to a specific example of the present invention. The flexure shown in FIG. 3 Sex mold 10 is designed to make in-line ribs In the back panel of the plasma display, a plurality of ribs 54 are arranged parallel to each other as shown in Fig. 2. The flexible mold can be modified in design (though not shown in the figure), so that it can make The glass substrate of the manufactured plasma display has a “lunar plate” having a grid-shaped rib pattern, in which a plurality of ribs are configured to be substantially parallel, so as to cross each other at a fixed interval, or other types of plasma display back plates. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 3, although it is not accurate in this figure.

O: \ 90 \ 9018I.DOC -10- 200426011 Reshape the shape and size of the flexible mold in Figure 3. As shown in FIG. 4, the flexible tool 10 has a groove pattern of a predetermined shape and size on its surface. The groove pattern is an in-line rib pattern and is composed of a plurality of substantially parallel grooves 4 arranged at a fixed pitch. The groove 4 has a side (side wall) ', which is preferably inclined as shown in Fig. 4, so that the rib can be easily peeled off by the mold. At the same time, the end of the groove extending in the longitudinal direction has a better oblique end surface. The shape and size of the groove 4 can be changed in a wide range according to the shape and blade of the plasma display ribs manufactured by the mold. For example, in the h-shape of the molds shown in FIG. 4, the depth d of each groove 4 is generally in the range of about 100 to 100 ° when measured on the surface of the branch-shaped layer 11. Large range, 0 to 3 cents. 〇 Yang. The width w of each groove 4 is generally in the range of about $ to ⑽Qing, and the size of the car is about ⑼ to about μm in the perimeter. The length of each groove varies greatly with the shape of the groove, and cannot be defined as commonly. The width of the flat portion between the two grooves 4 is generally in the range of about 50 to 250 mm, and more preferably in the range of about 100 to 200 pm. It can be easily understood that the flexible mold 10 is formed with a groove 4 on the surface, and an opening is provided on the top surface of the groove (as shown in FIG. 4), so that it can be used for molding with a prominent pattern with 1 advantage. The ribs of the TV public display, for example, have always been = large picture,-grid-like protruding patterns. The punching mold ⑺ may be formed only by the model layer U 'or may include additional layers as necessary or the processing of options may be performed at different layers constituting the mold. The flexible mold is preferably formed by a support! And a mold layer Η, which has a groove 4 on it. Each support 1 and the model layer 11 are preferably transparent bodies. The flexible mold of the present invention is characterized in that the mold layer contains as an antistatic agent

O: \ 90 \ 90181.DOC -11-200426011 One lithium fluoride salt. When the organic fluoride bell salt used is mixed in the component material (molding material, preferably resin material) of the molding layer, the amount is sufficient to effectively act as an antistatic agent in the mixture or in the finished mold. Enough function 'and used to avoid unnecessary electrification due to static electricity. The organic gas rhenium which is mixed into the model layer used in the present invention is not particularly limited. The organic fluoride salt suitable for use in the present invention is preferably: (1) a compound having excellent moisture stability, that is, a compound that hardly decomposes when there is moisture; ( 2) — a compound with excellent thermal stability, that is, a compound that hardly decomposes when heated to an elevated temperature (for example, about 100.00), more particularly, a The compound remains in a stable state during the molding process using a mold and when heated to 200 t: or higher (preferably about 300 to 350.) does not cause thermal decomposition; (3) — A compound with excellent conductivity, that is, a component such as PC / DME (propylene carbonate / ethylene glycol dimethyl ether) at a concentration of one mole exhibits conductivity of about 5 to 15 mS / cm, preferably about] [0 to 12 mS / cm 〇 The lithium salt compound used in the present invention needs to satisfy at least one of these requirements, and best meet all the requirements. The inventors have found that it is applicable to the present invention. Invented organic fluoride lithium salts include, but are not limited to, C F3S03Li, (CnF2n + 1S02) 2NLi, where n is an integer of 1 or 2, LiS03C2F4S03Li, CF3C02Li, C4F9S03Li, (CF3CO) 2NLi, (CF3S02) 3CLi, and (CF3S02) 2CFLi. These lithium salts can be used alone O: \ 90 \ 90181.DOC -12- 200426011 or a mixture of two or more of them. These bell salts can be used advantageously in the present invention, and the reason will be described later. Such as CF3S03Li, ( CF3S〇2) 2NU, (C2F5S02) 2NU lithium salts are preferred. At the same time, the applicant has determined that lithium salts such as CF3S03Li, (CF3S02) 2NLi, (c2F5S02) 2NLi are%, 疋 at temperatures up to 350 ° C. In addition, 'these bell salts have low oxidation properties so that they can be easily mixed into the molding material without any difficulty in handling the finished mixture. Therefore, the entire process starts with preparing the molding material (making the mold) to the mold Storage, can be more widely used. The lithium salts of organic fluorides as described in 岫 have obviously excellent antistatic properties. These lithium salts have low ion energy similar to lithium peroxyacid, and can be used with Advantageously used as an antistatic agent. In terms of a lithium salt of a series of organic fluorides, for example, a lithium salt having a _S〇2 group in a molecule of (CnF2n + 1S〇2) 2NLi has a particularly high electrical conductivity. Especially such as (CnF2n + 1S02) 2NLi molecules have two -S02 groups of imine salts, which can be expected to have a particularly high conductivity in these salts. The above-mentioned organic lithium fluoride salts can be mixed directly with the molding material, Or it may be better to be dissolved in a lithium salt ionization solvent and then mixed in the branch material. Suitable ionizing solvents are polar solvents having a boiling point of about 20 ° C. or higher. One example of a polar solvent having a high boiling point suitable for the application of the present invention includes, but is not limited to, ethylene carbonate, ethylene glycol, lactone, And their derivatives. These ionizing solvents can be used singly or in combination of two or more of them. Different amounts of these ionizing solvents can be used to dissolve the lithium salt 'and generally relative to the molding material The best use of total weight

O: \ 90 \ 90I81.DOC -13- 200426011 is about 0.01 to 10% by weight, and more specifically about 0.1 to 1.0% by weight. : The effective mixing amount of the lithium salt of the bifurcated layer can vary with different factors, such as the type of bell salt and the type of molding material, and generally better than the total weight of the molding material. The weight ratio ranges from about ㈣ to 5%, and preferably the weight ratio ranges from about 1%. If the mixture of these lithium salts is less than the reset ratio of 0.01% ′, the expected antistatic effect cannot be achieved. Conversely, if the mixing amount is more than 5% by weight, the antistatic effect of saturation can be achieved. The mold layer is preferably a hardened sheet made of a light hardened resin material. The model layer that can be advantageously applied to the present invention is a thin film layer. After the coating layer is formed by forming a curable resin material, the thin film layer is formed by applying heat, resin, or other energy hardening resin material. Therefore, the curable resin material is preferably a heat-curable resin material or a photo-curable resin material. In particular, a light-hardening resin material can be used with advantage because it does not require a large and long heating furnace for forming the mold layer, and it can complete the hardening effect in a relatively short period of time. The light-hardening resin material is preferably a light-hardening mono- or oligomer, more preferably an acrylic mono- or oligomer, and most preferably a (meth) acrylic resin, that is, a single-matrix Or oligomer acrylic resin or methacrylate. More specifically, the acrylic monolith suitable for forming the model layer includes, but is not limited to, urethane acrylic resin, polyester acrylic resin, polyether acrylic resin, acrylic resin, acrylic acid, and acrylate. Acrylic oligomers suitable for forming the mold layer include, but are not limited to, urethane acrylic resins, O: \ 90 \ 90181.doc -14- 200426011 resin acrylic resin oligomers. In particular, the amino potassium acrylate acrylic resin and its oligomer can provide a flexible and strong hardened sheet of 5 sections after curing, and has a very high curing speed between ordinary acrylic resins, so that: Helps improve molding productivity. In addition, when these acrylic resin mono- or oligomers are used, the completed model layer becomes an optically transparent body. Therefore, a flexible mold having such a model layer enables the light-hardening molding material to be used for manufacturing ribs or other delicate structures of a plasma display. These acrylic mono- or oligomers may be used alone or in combination of two or more of them. Although the characteristics of the acrylic resin mono- or oligomer have been described above, similar characteristics can be obtained in the methacrylic acid mono- or oligomer. The curable resin material may include an optional additive. For example, when the curable resin material is a photo-curable resin material, a suitable additive may include a photosensitizer. The most appropriate compound for photosensitizers should be selected based on the type of curable tree material, and these examples may include 1-nitrooxymethyl-propane-one-ketone, bis (2,4,6_trimethyl Phenylphenylenesulfonium) -phenylphosphonium oxide. These photosensitizers can be used alone or in combination of two or more of them, so that photosensitivity can be used in a wide variety of quantities depending on the type of curable resin material, and is generally relative to the total amount of curable resin materials. The weight ratio used ranges from about W%, and the preferred weight ratio ranges from about 0.5 to 2%. ~ Spear, the organic fluoride Wei salt used in the present invention, and other antistatic agents such as peroxy acid oxalate can be used with a small amount of addition, there is no negative effect on the operation effect of the present invention, Or vice versa

O: \ 90 \ 90181.DOC • 15- 200426011 The effect can be improved. Other additives that can be used include, for example, amine surfactants, ionizing surfactants, and the like. Model layers can be used with varying thickness variations, such as rib shape and size factors. Generally, the thickness of the model layer is in the range of about 1000 μxη ', and the preferred range is in the range of about 100 to 500 gm. If the model layer is too thin, ribs of a certain height cannot be formed. The thickness of the model layer can be appropriately modified with or without a support. The model layer is preferably carried by a support. The support carrying the model layer may be composed of any material, and because the mold is required to have proper flexibility, the support is preferably composed of a material having an appropriate hardness or softness. After the shrinkage, the dimensional accuracy of the support itself can be maintained, and the dimensional accuracy of the groove and the distance can be maintained with high precision. At the same time, when the plastic film layer is rigid, a small pitch change can be maintained during the formation of the ribs. This is advantageous in terms of moldability and dimensional accuracy. Examples of hard plastic film layers suitable for the present invention include those listed below. Regarding the hardness of the support material, its preferred choice is that the material used for the support material is considerably harder than the molding material for forming the groove formed by the model layer (a light-hardening material such as a light-hardening resin is preferred) The hardness is preferably a plastic material with a high glass transition temperature. Because, in general, the hardening shrinkage of the light hardening resin is about a few percent. If a soft plastic film is used for the support, the hardening shrinkage of the formation may cause the size of the support itself to change. Within ten ppm. On the contrary, if the plastic film layer is hard,

O: \ 90 \ 90181.DOC -16- 200426011 If the plastic film layer is hard 'because the dimensional accuracy of the groove pitch of the mold is only changed by the size of the plastic film layer ^, it is expected to provide the mold The dimensional accuracy of the groove pitch is fully post-processed, so that the size of the plastic film layer is as desired, and there is no change in the mold after manufacturing. The hardness of the bearing material may be expressed as rigidity versus tension, or tensile strength. The tensile strength of the support material is generally at least about 5 kgW, preferably at least about 10 kg / mm2. If the tensile strength of the support material is h at 5 kg / mm, the operating ability of the jade will be reduced when the completed mold is peeled by the metal master pattern 5 or when the plasma shows that the H ribs are peeled from the mold, and This may cause breakage or cracking. The support for applying the present invention is preferably a film of plastic material, which has good processing ability and good hardness in terms of operation. Examples of plastic materials suitable for the support include, but are not limited to, polyethylene terephthalate (pE), polyethylene terephthalate (PEN), stretched polypropylene, polycarbonate, triacetic acid, etc. . Among them, a polyethylene terephthalate film layer is particularly useful for a support, and a polyester fiber film layer such as a butyl film layer such as a butyl oxide film can be favorably used for the support. These plastic film layers can be used alone as a single film layer or two or more of them can be used in combination such as the same composite film layer or laminated film layer. The aforementioned plastic film layer or other support can be used under different thicknesses according to the structure of the mold or the plasma display. The thickness is generally in the range of about 50 to 500 μm, and preferably in the range of about 100. To 300) 1111. If the thickness of the support exceeds the foregoing range, the processing capacity may be reduced. O: \ 90 \ 9018i.DOC -17- 200426011 The thicker the support, the more advantages it has in terms of strength. According to the present invention, there is also a method for manufacturing a flexible mold as described above. The method for manufacturing a flexible mold according to the present invention includes specific steps: coating-light-curing resin material containing a bell salt of organic fluoride as an antistatic agent A light-hardening resin material with a predetermined film thickness is formed on the metal master pattern. On the surface of the metal master pattern, there is a protruding pattern corresponding to the shape and size of the groove pattern of the mold. A transparent support composed of a plastic material film layer is laminated on the control pattern, thereby forming the metal main control pattern, the layer of light-hardening resin material, and an overlay layer of the support; the side of the support is illuminated by light Irradiating the paste layer to harden the photo-hardening resin material layer; and peeling the model layer formed by hardening the photo-hardening resin material by the metal master pattern together with the support. The method for manufacturing a flexible mold according to the present invention can be applied to various improvements within the scope of the present invention. For example, a flexible mold is used to manufacture a plasma display substrate as shown in FIG. 2, which has the structure shown in the schematic diagrams of FIGS. 3 and 4 and can be manufactured with advantages according to the sequence shown in FIG. 5. First, as shown in FIG. 5 (A), a metal main control pattern 5 corresponding to the shape and size of the plasma display substrate is manufactured, and a support 1 (hereinafter referred to as a support) composed of a transparent plastic film layer is provided. Seat film layer) and a laminated roller 23. The metal master pattern 5 has a dividing wall 14 on its surface, which has the same shape and size as the ribs on the back panel of the plasma display. Therefore, the space (inner recess) defined by the adjacent partition wall 14 is used to display a grid like a discharge in a plasma display O: \ 90N90181.DOC -18- 200426011. A tapered surface may be provided at the end of the upper layer of the partition wall 14 to prevent the inclusion of bubbles. An inclined surface can be provided at the terminal part of the individual partition wall to assist the removal of the completed mold from the metal master pattern. No matter how to provide a metal master pattern with exactly the same shape as the ribs formed at the end, the tail end portions of the ribs need to be processed after manufacturing, and the lack of debris can be avoided when the tail end portions are processed. In this manufacturing method, the entire material used to form the ribs is hardened so that a very small residue is left on the metal master pattern, so it is easy to reuse the metal master pattern. The lamination roller 23 is composed of a rubber roller and is used to push the supporting film layer i on the metal master pattern 5. Other existing or custom lamination devices can be used instead of lamination rollers. The supporting film layer is composed of a polyacetate film layer or other transparent plastic film layers as described above. Then use an existing or customized coating device such as a blade coater or a round bar coater (not shown in the figure) to apply a specified amount of light-hardening molding material 11 to the end of the metal master pattern 5. End surface. When flexible and elastic materials are used as the supporting film layer 1, even if shrinkage of the light-hardened molding material n occurs, the close contact of the supporting film layer 1 can prevent dimensional changes of 10 ppm or more, as long as the supporting film layer itself Not deformed. Prior to the lamination process, in order to avoid changing the size of the supporting film layer due to moisture, it is preferable to perform an aging process in a manufacturing environment. Unless aging is performed, there may be no acceptable dimensional changes (such as changes in the 300 ppm order) in the finished mold. Next, the laminating roller slides on the metal master pattern 5 in the direction of the arrow. As a result of the lamination process, the molding material 11 can be under the specified thickness

O: \ 90 \ 9018l.DOC -19- 200426011 are evenly distributed, and the gap between the partition walls 14 is filled with the molding material n. After the lamination process is completed, the supporting film layer is laminated on the metal master pattern 5 'as shown in Fig. 5 (B), and the molding material is irradiated with light rays as shown by the arrows. If the branch membrane layer 1 does not include light-scattering components such as bubbles, and is uniformly formed with a transparent material ', the irradiated light can be uniformly applied to the molding material with a slight attenuation. As a result of the irradiation, the molding material is effectively hardened and forms a uniform pattern layer I! Adhered to the supporting film layer. Therefore, a flexible mold with a supporting film layer added is completed, and the model layer is combined. Becomes an integral component. Because ultraviolet light at wavelengths such as the range of 35G to 45 ° can be used, this process is extremely advantageous because it does not require the use of a light source that generates a large amount of heat, such as high-pressure mercury lamps that dissolve filament lamps. Since thermal deformation of the supporting film layer or the model layer during light hardening can be avoided, another advantage of the controllable life distance under high accuracy is brought about. Next, as shown in Fig. 5 (C), the flexible mold 1G is peeled off by the metal master pattern 5 without impairing its integrity. If necessary, the flexible mold can be placed in a stable temperature and humidity and air-conditioned according to a predetermined schedule. By this air conditioning treatment, unexpected dimensional changes can be suppressed, and a mold having the correct size can be completed. It is clear that the sex mold can be relatively simple without considering the size and size. 早 Use appropriate and well-known and traditional laminating equipment and coating equipment. Therefore, according to the present invention, different from the traditional manufacturing process using vacuum packing such as a vacuum press, a large-sized and agile mold can be simply and simply manufactured under the limitation. In addition, the flexible mold of the present invention has different precision structures for manufacturing.

O: \ 90 \ 90181.DOC -20- For example, the electric paddle molding of the present invention such as the lattice rib type has an in-line auxiliary strip type or a large screen size ~, two. Therefore, by using a winding die discharge grid ^ rib structure; two = ultraviolet radiation is replaced by the display vacuum equipment and / or complex procedures "in manufacturing-factory hard rollers to take. Therefore, the present invention is also directed to mining, "The manufacturing process of 冓. According to the present invention = a method that includes special steps to construct a structure, including a flexible mold I, ± the shape of the pattern M f has a surface corresponding to the anti-static agent of the precise structure, the model The layer contains-an organic fluoride lithium salt for anti-^^; interposing: a change pattern of the molding material on the substrate of the mold and the mold layer is full of the molding material into the groove pattern of the mold; Six: The molding material is formed into a precision structure consisting of the substrate and the body-connected dog output pattern; and the precision structure is stripped by the mold. 2 It can be understood that the precision structure may have different structures, and is generally exemplified by a glass substrate (back plate), which is provided with ribs on a glass plate. The manufacturing process of the β-pound substrate in the% slurry display state will be described with reference to FIG. 6. As shown in FIGS. 1 to 3, the manufacturing equipment of this unexamined patent publication (No. 2001-191345) can be provided. Advantageously applied to this manufacturing process. First, a glass plate provided with electrodes parallel to each other at a fixed pitch is provided and fixed on a flat plate. Next, as shown in FIG. 6 (A), this

O: \ 90 \ 90181.DOC -21-200426011 Kao Xing's flexible mold 1G is placed at the designated position of the glass plate 3 i, and the glass plate 31 and the mold 10 are properly aligned with each other. The flexible mold 10 is relatively large and is pre-marked in areas other than the rib-forming area, such as an alignment symbol of a cross mark. Since the mold 10 is an optically transparent body, the electrodes aligned with the glass plate sheet 31 can be easily performed. More specifically, the sensor can be aligned visually or with a sensor such as a light-sensing element camera, so that the grooves of the mold can be set parallel to the electrodes of the glass plate 31. If necessary, the temperature and humidity can be adjusted so that the grooves conform to the distance between the adjacent electrodes on the glass plate 31. This adjustment is required, because the mold 10 and the glass plate 31 will expand or contract to varying degrees depending on changes in temperature and humidity. Therefore, after the glass plate 31 is aligned with the mold ^, it needs to be controlled! J temperature and humidity keep it in a normal state. This control method is particularly effective in the manufacture of large-size plasma display substrates. Next, a laminating roller 23 is placed at the tail end of the mold 10. The laminated roller 23 is preferably a rubber roller. Here, a tail end portion of the mold 10 is preferably fixed to the glass plate 31 so that the displacement of the mold 10 relative to the glass plate 3 i can be avoided after the alignment is completed. Next, the other free end portion of the mold 10 is raised above the exposed glass plate 3 of the lamination roller 23 by a fixing frame (not shown). At this time, the mold 10 should not be under tension. This is to prevent wrinkling of the mold 10 and other components used to keep the mold 1G aligned with the glass plate, as long as the alignment can be maintained. In the manufacturing process of the present invention, because the mold 10 has elasticity, the mold 10 can be accurately returned to the aligned initial position after being lifted during the lamination process, as shown in the figure.

O: \ 90 \ 90181.DOC -22- 200426011 A specified number of rib precursors 33 for forming ribs are supplied to the glass plate 3 丨. The rib matrix can be supplied using, for example, a funnel attached with a nozzle for paste. As used herein, the term "rib matrix" means any molding material that can be used to form the final product of the desired rib mold, as long as it can form rib branches, the rib matrix can be thermoformed or light In particular, a light-hardened rib matrix can be very effectively used in combination with the above-mentioned transparent flexible mold. As mentioned earlier, the flexible mold includes very few bubbles or defects such as deformation, and can suppress uneven scattering of light. Therefore, the molding material is uniformly hardened to form a uniform and good quality rib. An example of a compound suitable for the rib matrix is basically including the following components: (1) A ceramic component for imparting a rib shape, such as Alumina; (2) — glass components, such as lead glass or phosphate glass, used to fill the gaps between ceramic components and increase rib density; and (3) adhesives used to hold and fix each other's ceramic components Binding and binding, and its curing agent or polymerization trigger. The hardening of the adhesive component is preferably not obtained by heating or heating but by light Irradiation, in which case thermal deformation of the glass sheet is no longer considered. If necessary, in order to reduce the temperature for removing the adhesive components, a compound made of oxide, salt or chromium, Oxidation catalysts consisting of cobalt, nickel, copper, zinc, indium or osmium, ruthenium, rhodium, palladium, silver, oxen, metal, gold, or osmium can be added to the composition. In the manufacturing process illustrated, the rib matrix 33 is no longer evenly supplied

O: \ 90 \ 90181 DOC -23- 200426011 Should be to the glass plate 31. As shown in FIG. 6 (a), the rib matrix M is supplied only to the portion of the glass plate M near the laminating roller 23, because in the following step, the laminating roller 23 is moved on the mold iq. The rib mother body 33 is uniformly coated on the entire panel sheet 31. In this case, it is desirable that the viscosity of the rib mother body 33 is generally about 20,000 cps or less, and is relatively large, and the spoon is 5,000 cps or less. If the viscosity of the rib matrix is higher than,, ', ⑻Cps, it is difficult to adequately coat the rib matrix by the laminating roller. As a result, air may be sucked into the groove portion of the mold, and it may become a cause of rib defects. In fact, if the viscosity of the rib matrix is about 20,000 cps or less, the lamination roller only needs to be moved once from one end of the glass sheet to the other end to evenly coat the rib matrix between the glass sheet and the fork. , And evenly filling all the grooves will not cause the inclusions of bubbles. The method of supplying the rib matrix is not limited to the method described above. For example, the rib matrix may be applied to the entire surface of the glass sheet, although it is not shown in the figure. In this case, the rib matrix for coating has the same viscosity as previously described. In particular, when the ribs are formed in a grid-like shape, the viscosity of the rib matrix is generally about 20,000 or less, and more than 5,000 cps or less. It is then driven by a rotary motor (not shown) to move the lamination roller 23 on the core 10, as shown by the arrow in Fig. 6 (A). The laminating roller 23 is thus moved on the mold 10, and the weight of the laminating roller 23 itself is continuously applied to the mold 10 from one end to the other end, so that the rib mother body 33 is on the glass plate 31 and the mold 1. 〇 is coated and filled into the groove of the mold 丨 〇. Therefore, the rib matrix continuously replaces the air in the groove and fills it.

O: \ 90 \ 90181.DOC -24- 200426011. The thickness range of the coated rib matrix can be controlled from a few μm to dozens of μm by appropriately controlling the viscosity of the rib matrix or the diameter, weight or moving speed of the laminating roller. Through the manufacturing process shown in the figure, the groove of the mold is also used as a channel for air, so that even if the air is caught in the groove, when the pressure as described above is applied, the air can be effectively discharged through this groove. Mold to the surrounding environment. As a result, the present manufacturing process can prevent the contents of remaining air bubbles even if the rib matrix fills the grooves under atmospheric pressure. In other words, there is no need to reduce the pressure applied when filling the rib matrix. It should be understood that pressure can be reduced to further help remove air bubbles. The rib matrix is then hardened. If the rib matrix 33 coated on the glass sheet 3 丨 is light-hardened, the laminated layer composed of the glass sheet 31 and the mold 10 is placed in an irradiation device (not shown in the figure), and the rib matrix M is irradiated with, for example, ultraviolet rays penetrating the glass plate 31 and the mold 1G, as shown in FIG. 6 (β). After hardening, the molding of the rib matrix is completed, that is, the rib itself. Finally, three completed ribs are placed on the glass plate 31, and the glass plate 31 and the mold 1G are removed from the irradiation device, and the mold Η) is separated and removed as shown in FIG. 6 (C). Because the mold 10 of the present invention is very easy to handle, this kind of low-adhesion material is like the coating layer of the mold. The mold is easily separated and removed without hurting the glass by the small force of the car.片 31 1 of ribs 34. It should be understood that larger devices are not required for mold release and removal. ~, Knife For those familiar with this example. The inventors of the eight-pi sub-item should easily understand that the present invention is not limited to 〇: \ 90 \ 9〇181 〇〇c -25-200426011 Examples Example 1: Manufacturing of flexible molds: for electrical display backplane To manufacture, prepare a rectangular metal master pattern with in-line ribs (dividing walls). More specifically, the ribs arranged at a fixed pitch in the metal master pattern have an isosceles trapezoidal section along the longitudinal axis. The space (recessed area) defined by the adjacent ribs is the discharge grid corresponding to the display of the electrical display. Each rib has a height of 135 arrays, a top width of 60, and a bottom width of 12 μm. The pitch (distance between the centers of adjacent ribs) was 300 μm, and the number of ribs was 3,000. The total pitch is (the distance between the centers of the ribs at the two ends is used to form the mold layer of the mold, and mixed with an aliphatic amine potassium acid acrylic acid oligomer (manufactured by Daicel_UCB)), Phenoxyethyl acrylate- and 2-hydroxy-2-methyl-1-phenyl-propane_1_one (photosensitizer: Registrar 払 Darocurell73 "; manufactured by Chiba Specialty Chemicals Company) It has a weight ratio of 100. 25: 1.25. Then, a (CF3S〇2) 2NU propylene stone anti-Swen salt is added to this mixture as an antistatic agent. The amount of the added antistatic agent is hardenable with respect to ultraviolet rays. The weight ratio of the resin is 0.5%. The weight ratio of the lithium salt concentration is 20%. Therefore, a UV-curable resin that can be used to form a mold layer is completed. For use as a support for a mold, a width of 13,000 mm and a thickness of 100 μm are provided. Polyethylene terephthalate film (registered name "ΗρΕ,"; manufactured by Teijin). Then, the ultraviolet curable resin as described above was applied in a linear shape to the prepared one.

O: \ 90 \ 90181.DOC -26- 200426011 The upstream end of the metal master pattern. Then the aforementioned polyethylene terephthalate film layer is covered by a layer on the surface of the metal master pattern. When a lamination rolls a blanket J. Using a pressure-resistant polyethylene terephthalate film layer, the UV-curable resin is filled into the recesses of the metal master pattern. In this case, the UV-curable resin is irradiated through the polyethylene terephthalate film through a fluorescent lamp (manufactured by Mitsubishi-Osram Mltsublshi_〇sram) with a wavelength of 3⑻ to 400nm. 30 seconds. The ultraviolet-curable resin is hardened, and thus a model layer is obtained. Then, the poly (ethylene terephthalate) film layer is peeled off from the metal master pattern along with the model layer, so the flexibility of the groove having multiples of the shape and size corresponding to the ribs on the metal master pattern is completed. Stencil. The thickness of the model layer is about 300 μm. Plasma display backplane manufacturing: After the flexible mold is manufactured as described above, the mold is aligned with the glass substrate of the electropolymer display. The mold is placed with the groove pattern facing the glass substrate. Next, a photosensitive ceramic paste is filled between the mold and the glass substrate. The ceramic paste used has the following components: Photo-curable oligomer: Diglycidyl bispropionate (manufactured by Kyoeisya Chemical Co., Ltd.) 21.0 g of photo-curable single matrix: triethylene glycol dimethyl Acrylic acid (manufactured by Wako Pure Chemical Industries) 9.0g thinner: 1,3-butanediol (manufactured by Wako Pure Chemical Industries) 30.0g O: \ 90 \ 90181.DOC -27- 200426011 Photosensitizer: double (2,4,6-trimethylbenzene) _Phenylphosphine oxide (registered name " Irgacure 819 '·; manufactured by Chiba Specialty Chemicals Co.) 0.3g of surfactant: Phosphate A 30 g of alkanepolyol Inorganic particles: Mixed abrasive grains of glass frit and ceramic particles (manufactured by Asahi Glass Co., Ltd.) 180.00 g After filling the ceramic lean, the mold was laminated to cover the surface of the glass substrate. When the lamination roller is used carefully to press against the mold on the substrate, the ceramic paste is completely filled in the cavity of the mold. In this state, the light from a fluorescent lamp (manufactured by Philips) having a wavelength of 400 to 450 nm was used to penetrate the mold and the glass substrate and irradiate the ceramic paste from both sides for 30 seconds. The ceramic paste is hardened to form ribs. Next, the glass substrate and the ribs formed thereon are separated by a mold, and the plasma display back plate composed of the glass substrate and the ribs attached thereto is completed as desired. Example 2 The procedure of Example 1 described above was repeated to make a flexible mold. In this example, in order to evaluate the effect of the concentration of the salt solution and the effect of the amount of solution added on the surface resistance of the mold relative to the amount of resin, Figure 7 shows different concentrations of lithium salt solutions, that is: C 1 .. .... 1% by weight propylene carbonate solution S 2 ... 2% by weight propylene carbonate solution C5 ... 5% by weight propylene carbonate solution O : \ 90 \ 90181.DOC -28-200426011 CIO ... 10% by weight propylene carbonate solution C20 ...... 20% by weight propylene carbonate solution is used 'and the amount of lithium salt solution relative to the amount of resin The blending amount also varies in the range of 1 to 5% by weight. The salt solution in the mother's bell is mixed in the resin at different mixing amounts to prepare ultraviolet curable resins, and each ultraviolet curable resin is applied to a polyethylene terephthalate film layer having a thickness of 100 μm, and The mold was irradiated with ultraviolet light to produce a mold layer having a thickness of 300 μm. The surface resistance (Ω / cm2) of the karyotype layer measured at a temperature of 22 ° C and a relative humidity (rh) of 55% for the completed mold, and the measurement results are plotted as shown in Figure 7. To measure the surface impedance, a commercially available measuring device (type 1272A; manufactured by Monroe Electronics) was used. As shown in Fig. 7, the surface resistance of the mold can be increased by decreasing the added lithium salt solution and the mixing amount of the solution relative to the total amount of the resin. In general, when the mixing amount of the lithium salt solution with respect to the resin is in the range of about 0.0 to 5% by weight, the surface resistance can be satisfactorily reduced. Example 3 The procedure of Example 1 described above was repeated to make a flexible mold. In this example, in order to evaluate the effect of the amount of lithium salt solution relative to the total amount of resin on the electrification voltage of the mold, the lithium salt solution used was propylene carbonate hydrazone / Central fluid (C20) 20% by weight. The mixing amount of the bell salt solution with respect to the total resin varies in a weight ratio ranging from 0.0 to 2.0%. After the lithium salt solution was mixed at different mixing amounts to prepare the UV-curable resin, each UV-curable resin was coated at a thickness of 10 () ^ to be coated on

O: \ 90 \ 90181.DOC -29- 200426011 Polyethylene terephthalate film and irradiated with ultraviolet light to form a pole having a gas-thickness: mold layer. Next, each mold was cut to form a test sample with a length of 85 mm and a width of 35 mm. In this test sample on the model layer, a polyethylene terephthalate film layer (registered name "HPPE": manufactured by Teijm) having the same size as the test sample and having a thickness of 100 µm was stuck. The test specimen was fixed to the cross member at its end and hung vertically like a short curtain. For the hanging test sample, the attached polyethylene terephthalate film was peeled off at a speed of about 300 mm / s', and immediately after peeling, the temperature was 2 C and the relative humidity (RH) was 55%. The electrification voltage (Kv) is measured below. The test result is drawn as shown in Figure 8. In order to measure the electrification voltage, a commercially available and affordable electric measurement device I (type FMX-GG2; manufactured by SIMCO) can be used as shown in Figure 8. The figure shows that the charging voltage of the mold can be reduced by adding lithium salt solution and the amount of lithium salt solution added to the total resin. [Brief description of the figure] FIG. 1 is a schematic view showing a conventional electric power to which the present invention can be applied. Sectional view of an example of a plasma display. Figure 2 is a view showing a plasma display back plate not shown in the plasma display of Figure 丨. Figure 3 is an elevation view showing a flexible mold according to a specific example of the present invention. Figure 4 is A cross-sectional view along the line IV-IV of the mold in Fig. 3. 5 a-5 c is a cross-sectional view of a method for manufacturing a flexible mold according to the present invention.

O: \ 90 \ 90I81.DOC -30- Figures 6a-6c are cross-sections of the method of displaying thousands, according to the present invention, a plasma display surface of a plasma display device, and the back plate. Figure 7 is a picture of the meeting " The relationship between the surface resistance and the amount of lithium salt added Figure 8 is the relationship between the edge of the figure. Description of electric voltage and added salt amount phase diagram representation of symbol representation 1 Support 4 Groove 5 Metal master pattern 10 Flexible mold 11 Molding material 14 Partition wall 23 Laminating roller 31 Glass plate 33 Rib body 34 Rib 50 Electricity Plasma display 51 Rear glass substrate 52 Lower edge dielectric layer 53 Address electrode 54 Rib 55 Fluorescent layer 56 Discharge grid

O: \ 90 \ 90181.DOC -31-200426011 61 The amount of resin material The amount of resin material -31-200426011 61 Front glass substrate 62 Transparent dielectric layer 63 Display electrode 64 Transparent protective layer at the bottom edge O: \ 90 \ 90181.DOC -32 -

Claims (1)

200426011 The scope of patent application: • A flexible mold containing a model layer, a groove pattern with a special shape and size is provided on the surface of the model layer, wherein the model layer contains an organic fluorine as an antistatic agent Compound lithium salt. The flexible mold claiming item No. 丨, wherein the organic fluoride lithium salt is made of CF3s〇3L1, (CnF2n + iS〇2) 2NLi, among which the integer of Fu ^ Ge2, LiS〇3C2F4S03L1, CF3C02L1 ^ At least one lithium salt is selected from the group consisting of C4F9S03Li ^ (CF3CO) 2NU ^ (CF3S02) 3CLi, and (CF3S〇2) 2CFU. The flexible mold of the 1st or 2nd patent of the "I patent", wherein the organic vapor Salt is mixed in a weight ratio of 0.01 to 50/0 relative to the amount of resin material to form the model layer. The flexible mold of the 1st or 2nd patent scope of Shenyue, wherein the model layer is a transparent body. The flexible mold of the scope item, wherein the model layer is composed of a hardened product of a curable resin material. 6. The flexible mold of the scope item 5 of the patent, wherein the curable resin material is composed of a It is selected from the group consisting of a photo-hardenable single matrix, a photo-hardenable oligomer, and a mixture thereof. 7. The flexible mold of item 6 of the patent application, wherein the curable resin is composed of -acrylic monolayer, Mono-acrylic oligomers and mixtures thereof 8. The flexible mold of item 7 is applied for patent, in which the curable resin is composed of a (meth) acrylic acid single matrix and (f-based) acrylic acid. Polymer, O: \ 90 \ 90181.DOC 200426011, and mixtures thereof. The flexible mold of the scope of patent claim No. 8 in which the (meth) acrylic monolayer and / or low The polymer is selected from the group consisting of urethane (meth) acrylic acid, (meth) acrylic acid, and polyether (meth) acrylic acid. 1 · As described in item 1 or 2 of the scope of patent application A flexible mold, wherein the model layer has a thickness of 5 to 1000. 11. The flexible mold according to item 1 or 2 of the patent application scope, wherein the mold further includes a support carrying the model layer. The flexible mold of the scope of patent application! Or item 2, wherein the mold is used to mold the ribs of the plasma display back panel. 13. The flexible mold of the scope of patent application item 丨 or 2, wherein the organic fluorination • When the salt is not used during the molding process using this mold, It will not be thermally decomposed at%. 14. For example, the flexible mold of item "Ge" in the scope of patent application, wherein the groove pattern of the model layer is a straight line pattern, and a plurality of grooves substantially parallel to each other are at a fixed distance. The configured composition. 15. The flexible mold according to item i or 2 of the scope of patent application, wherein the groove pattern of the model layer is a lattice pattern, and is composed of a plurality of grooves substantially parallel to each other so as to intersect at a fixed interval. 16. The flexible mold according to item 1 or 2 of the patent application scope, wherein the groove pattern in the model layer is determined by the platform portion and the groove, and wherein the 誃 groove has a depth of 100 to 400 μm and the The model layer has a width measured from 50 to 250 μm. O: \ 90 \ 90181.DOC 200426011 a The flexible mold according to the scope of patent application n, wherein the support is a film of a plastic material. 18. For example, the flexible mold of claim 17 wherein the plastic material is composed of polyethylene terephthalate, polyethylene terephthalate, stretched polypropylene, polycarbonate, and triacetic acid. At least one plastic material is selected from the group. 19. For example, the flexible mold of the scope of application for patent η, wherein the support has a thickness of 50 to 500 μm 〇20 .: A method of manufacturing a flexible mold, the mold layer on the surface of the flexible mold is provided with a specific shape and The method includes the steps of: coating a light-curing resin material containing a bell salt of organic fluoride as an antistatic agent on a metal master pattern to form a light-curing resin material of a predetermined film thickness, There is a corresponding pattern on the surface of the metal main control pattern; the shape and size of the groove pattern on the metal main control pattern; a transparent support composed of a plastic material film layer is laminated on the metal main control pattern. The seat 'thus forms the metal master pattern, the layer of light-hardening resin material, and an overlay layer of the support; the side of the support is illuminated with light to harden the light-curable resin material layer; and硪 The metal master pattern hardens the model layer formed by hardening the photo-hardening resin material together with the support.-21. The dense structure is on the substrate surface, and the method includes the steps: 'The model layer is on its surface A method for manufacturing a precise structure, the protrusion having a protruding pattern of a specific shape and size, providing a flexible mold with a model layer O: \ 90 \ 90181.DOC ^ UUHZOUl1 has a corresponding corresponding protruding pattern, The model layer contains a groove pattern, shape, and size. The material is a hardenable mold material: a lithium salt of an organic fluoride of an electro-chemical agent. The shirt material # is on the substrate of the mold and the model layer. And filling the groove pattern of the molding material into the mold; curing the molding material and forming a precision structure, the precision structure consisting of the substrate and a protruding pattern integrally connected thereto; and peeling off by the mold The precision structure. 22. The method for manufacturing a precision structure, such as the scope of patent application No. 21, wherein the precision structure is a back plate of a plasma display. O: \ 90 \ 90181.DOC 4-