200415607 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種光學掃描裝置，其在第一操作模式下 ，掃描具第一 HD資訊層之第一型紀錄載體，並於第二操作 模式下，掃描具第二LD資訊層之第二型紀錄載體，該光學 掃描裝置包括一具雙波長二極體雷射，其於該第一模式下 產生第一 HD輻射光束，並於該第二模式下產生第二LD輻射 光束；一物鏡系統，其係設計以於第一組共軛下操作，俾 於該第一模式下將該HD光束聚焦於該第一資訊層上，並於 相異之第二組共軛下操作，俾於該第二模式下將該LD光束 聚焦於該第二資訊層上；以及配置於該雙波長二極體雷射 與該物鏡系統間之第一繞射構件，俾將該LD光束分光為一 主與兩衛星LD光束。 【先前技術】 已知此光學掃描裝置係出自公開之專利申請案US2002/ 0027844A1。所知HD與LD光束分別指用以掃描具較高與較 低資訊密度之資訊層。 概言之，在光學紀錄載體中之可透光層係用以保護資訊 層免於周遭影響，使得灰塵微粒、刮傷等與資訊層保持一 定距離，並提供對資訊層之應力支撐。換言之，可透光層 係充作資訊層之基板之用。可透光層厚度係欲賦予紀錄層 所欲硬度之厚度及欲與入射於可透光層上之掃描光束之數 值孔徑（NA)有關之厚度間之妥協產物。 在紀錄載體侧上之物鏡系統之NA係由掃描裝置為讀取或 88414 200415607 窝入具給定密度之資訊厣+、 解供户盥古1 ㈢而〈解析度決定。掃描裝置之 NA/J: 衣置形成之最小掃描點尺寸成反比，並盥 ―成^其巾“料光錢長。在m束中，而後 以咼密度（HD)掃描光束义 > 本 -便 光碟（_)等具較高資訊密度者之^掃ΓΛ數位多功能 而《小之掃描光束1、κ场載體’應為财較大， ，㈣低密度（LD)掃描光束者 _光束於ld4(=^200415607 (1) Description of the invention: [Technical field to which the invention belongs] The present invention relates to an optical scanning device that scans a first type record carrier with a first HD information layer in a first operation mode, and in a second operation mode Next, a second type record carrier having a second LD information layer is scanned. The optical scanning device includes a dual-wavelength diode laser, which generates a first HD radiation beam in the first mode, and the second HD A second LD radiation beam is generated in the mode; an objective lens system is designed to operate in the first group of conjugates, and the HD beam is focused on the first information layer in the first mode, and is different Operating under a second group of conjugates, focusing the LD beam on the second information layer in the second mode; and first diffraction arranged between the dual-wavelength diode laser and the objective lens system The component splits the LD beam into a main and two satellite LD beams. [Prior Art] This optical scanning device is known from the published patent application US2002 / 0027844A1. HD and LD beams are known to scan information layers with higher and lower information densities, respectively. In summary, the light-transmissive layer in the optical record carrier is used to protect the information layer from the surroundings, keep dust particles, scratches, etc. away from the information layer and provide stress support for the information layer. In other words, the light-transmissive layer serves as a substrate for the information layer. The thickness of the light-transmissive layer is a compromise product between the thickness of the desired hardness to the recording layer and the thickness related to the numerical aperture (NA) of the scanning beam incident on the light-transmissive layer. The NA of the objective lens system on the side of the record carrier is determined by the scanning device for reading or 88414 200415607 nesting with a given density of information (+, solution for households) and <resolution. NA / J of the scanning device: The minimum scanning spot size formed by the garment is inversely proportional, and the length of the material is reduced. In the m beam, the scanning beam is then scanned at a high density (HD). For compact discs (_) and other high-information density scans, ΛΛ is digitally multi-functional and "Small Scanning Beams 1 and κ Field Carriers" should be more expensive. ld4 (= ^
Rn^ ^ M ’、曰形成《掃描點，較HD掃描光束在 :::層口上形成之掃描點廣。對具較高資訊密度之紀錄載 月豆而吕，因而需要較高NA， 、 戰 低紀錄載體相對於掃插裝置二、们咸，貝訊層厚度，俾降 點之品質影#。 傾斜對焦點或掃描 可南資訊密度之新型紀錄載體之演進，具有不同 由厚度之各類紀錄載體將於市面流通。適用之掃描 农置須可掃描不同類刑 。對兩類、_體二::=置 用以掃描第-型紀錄載:：Γ:Γ 應具備可 =紀_:之第二組共輛。概言之，物鏡系統具二 表 $ /、輛係物件平面（在本裝置中為㈣源之發射 ί:)她竟系統之第-主平面之間距。第二共輛則為物： 、广弟-王平面與影像平面(在本裝置中為資訊層 面）間距。 曰、十 對万 =對紀錄載體之掃描係指由掃描光束構成之掃插點相 、貝訊層〈移動’俾達讀取、寫人及/或清除資訊之功。 88414 200415607 2由^個^輻射源產生具不同波長之HD與LD掃描光束 、α喬射相兴波長之雷射二極體。可於掃描光束進入 ^知系統則’以發射光束之—並於同方向反射其他光束之 光構件（例如稜鏡或半透光鏡）合併之，亦即使之同 軸。 為、ί§減適用之掃描裝置之尺寸與重量，可將所謂得雙波 長田射楱組與集光（beamc〇mbiningW.件併用，如所示，例 如上述專利申請案US2〇〇2/〇〇27844。雙波長雷射模組可為 八”毛光構件（發射相異波長且彼此間隔為例如1⑽微米數 里級早一雷射晶片。若所需雷射功率較高，諸如用以紀 錄頁Λ時，知用在一共用雷射封裝中之兩個別雷射晶片之 土式中之雙波長雷射模組較佳。集光構件係與雷射晶片相 鄰 < 閃燦繞射光柵，其將入射之LD光束之主要部分繞射於 第一級光束中。集合之繞射光柵之設計使得光束之主 要射線與非繞射HD光束同軸。 在US2002/0027844之裝置中，將第二繞射光柵配置於承 載第一繞射光柵之板之第二表面上。第二繞射光柵將主LD 光束分割為非繞射光束，形成在紀錄載體之資訊平面上用 以自紀錄載體讀取資訊之主光點，以及兩第一級光束或衛 星光束。術星光束在紀錄載體之資訊平面中形成兩衛星光 點’其中的光點係用以於磁軌伺服器系統中產生磁軌誤差 4吕號’俾維持主光點中心位於是時讀取之磁軌上。已知此 伺服态系統為三點系統。一種具有LD三點系統之裝置可用 於CD紀錄與DVD讀取組合裝置中，但不適用於cd紀錄與 88414 200415607 DVD紀錄組合裝置。 【發明内容】Rn ^ ^ M ', said "Scanning points," which is wider than the scanning points formed by the HD scanning beam on the ::: layer opening. Records with a higher information density carry Moon Bean, and therefore require a higher NA. Compared with the scanning device, the record carrier is low, the thickness of the layer, and the quality image of the drop point. Inclined focus or scanning The evolution of new record carriers with different information densities, various record carriers with different thicknesses will be on the market. Applicable scanning Farms must be able to scan different types of punishment. For two types, _body two :: = set is used to scan the type-type record :: Γ: Γ should have a second group of vehicles that can be used for the period of time. In summary, the objective lens system has two tables: $, the plane of the vehicle (in this device, the emission of Wuyuan ί :), the distance between the first and the main plane of the system. The second vehicle is the object: the distance between the Guangdi-Wang plane and the image plane (in this device, the information plane). Said, ten pairs = scanning of the record carrier refers to the scanning and scanning point structure composed of scanning beams, and the "moving" layer to read, write, and / or erase information. 88414 200415607 2Laser diodes with different wavelengths of HD and LD scanning beams and alpha lasers with different wavelengths are generated by ^ radiation sources. You can enter the scanning system when the scanning beam enters the ^ knowledge system 'to emit the light beam—and reflect the other light beams in the same direction (such as chirped or semi-transparent mirrors) to combine them, even if they are on the same axis. In order to reduce the size and weight of the applicable scanning device, the so-called dual-wavelength field emission unit can be used in combination with light beam (BeamcommbingW.), As shown, for example, the above-mentioned patent application US200 / 2 / 〇27844. The dual-wavelength laser module can be an eight-inch light-emitting component (emitting different wavelengths and being spaced apart from each other by, for example, a 1-micron-mile early laser chip. If the required laser power is high, such as for recording At the time of page Λ, it is better to use the dual-wavelength laser module in the earth type of two separate laser chips in a common laser package. The light collection member is adjacent to the laser chip < flash diffraction Grating, which diffracts the main part of the incident LD beam into the first-order beam. The design of the collective diffraction grating makes the main ray of the beam coaxial with the non-diffractive HD beam. In the device of US2002 / 0027844, the first The two diffraction gratings are arranged on the second surface of the plate carrying the first diffraction grating. The second diffraction grating divides the main LD beam into non-diffraction beams and is formed on the information plane of the record carrier for reading from the record carrier. The main light spot for information, and two first-level beams Or satellite beam. The satellite beam forms two satellite spots in the information plane of the record carrier. The spots are used to generate a magnetic track error in the magnetic track server system. It is known that the servo system is a three-point system. A device with an LD three-point system can be used in the combination of CD recording and DVD reading, but not for cd recording and 88414 200415607 DVD recording. Combination device. [Summary of the invention]
本發明之一目的在提供一種具雙記錄功能且適於組合CD 記錄與DVD記錄裝置之光學掃描裝置。此裝置之特徵1於 配置於雙波長二極體雷射與物鏡系統間之輻射路徑中，用 以將HD光束分為一主與兩衛星肋光束之第二繞射構件。 HD '、’己紅所需之HD衛星光點係由第二繞射構件產生，第二 、％射構件與僅繞射LD光束而不繞射HD光束之第一 LD繞射 構件類似，僅繞射HD光束而不繞wLD光束。第一與第二繞 射構件之軸可位置互換。 兀 ，掃描裝置中之繞射構件係相位光柵，並具有交替配置之 光柵槽與中間光栅帶，其進一步特徵在於第一與第二光柵 槽深相異。 使得兩相位光柵之槽深相異，係使這些光柵對不同波長 均有效之取間易方法。 光學掃描裝置之進一步特徵在於第一與第二繞射構件之 光柵帶方向夾角之數量級為1度較佳。 此方法得以維持檢測系統上之主光點與衛星光點間距對 HD與LD光束均同。 S农置之一較佳具體實施例之特徵在於第一與第二繞射 構件係由分別位於可透光主體之入口表面與出口表面之第 一與第二繞射結構組成。 將兩繞射構件整合於一構件中，即可縮減構件數，使得 掃描裝置簡單且其製造成本降低。此外，在裝置組裝期間 88414 200415607 更可減y對齊步驟。以熟知的壓縮或複製技術即可製、告 上述合成繞射構件。同時施用具有對應於第—繞射結構^ 内表：輪廓之第—模以及對應於第二繞射結構之内表面： 场^二模’即可^ —步驟内製造合成之繞射構件。亦: 以塑棱技術或具—蝕刻步驟之光微影製程 /裝置之—具體實施例中，該裝置包括用以將1^至資 甙先士而為之反射之光束分離之分光器，一方面該分 光m位万、第、第二光柵與物鏡系統間，其特徵在於隹光 構件位於分光器與輻射敏感性檢測系統間。 、木 此衣置 < 進—步特徵在於該分光器係僅繞射HD與LD井 束之一之閃爍繞射光柵較佳。 已知閃爍繞射光柵係指槽狀繞射光栅，其中槽之至"、一 ==光柵平面偏斜。可設計閃爍光柵使得人射輕射於 繞射級之繞射量最大，例如第-級，俾將損失 之輻射量降至最低。 力構件件以知用單一輻射敏感性檢測系統將HD盘 f束兩者之反射輻射轉換為電氣信號。 、 厂:取置《一替代具體實施例之特徵在於集光構件位於 二極體雷射與第一、第二光柵間。 " 该集光構件緊鄰於三極體雷射晶片， 二極體雷射發出後 D光束自 、路仫5併’使得光束經由裝置之 共同路徑傳播。在此位 衣置夂 例如僅繞射hmld光走 構件可為早一繞射光柵， LD先束<一之閃爍光柵。 該替代具體實施例之特徵在於集光構件包括僅對HD與 88414 200415607 LD光束之—具透鏡功能之兩相對繞射構件較佳。 ★此-集光構件得以於HDMD光束進入物鏡系統前即調 正欠其縮放，亦即會聚與發散。因而得以達成HD光束填滿整 個物鏡系統人π孔’而LD光束則僅為此孔之中央部。麦此 ，在資訊平面上，HD光束形成之掃描光點較]11)光束形成之 掃描光點小。在國際專利申請案w〇〇2/25646描述之此一集An object of the present invention is to provide an optical scanning device having a dual recording function and suitable for combining a CD recording and a DVD recording device. Feature 1 of this device is a second diffractive member that is arranged in a radiation path between a dual-wavelength diode laser and an objective lens system to divide the HD beam into a main and two satellite rib beams. The HD satellite light spots required by HD 'and' Jihong 'are generated by the second diffractive member. The second and% diffractive members are similar to the first LD diffractive member that only diffracts the LD beam and does not diffract the HD beam. Diffuses HD beams without wLD beams. The axes of the first and second diffractive members are position interchangeable. In particular, the diffractive member in the scanning device is a phase grating, and has grating grooves and intermediate grating strips arranged alternately, which is further characterized in that the depths of the first and second grating grooves are different. Making the groove depths of two-phase gratings different is an easy way to make these gratings effective for different wavelengths. The optical scanning device is further characterized in that the order of the included angle of the grating strip directions of the first and second diffractive members is preferably 1 degree. This method can maintain the same distance between the main spot and satellite spot on the detection system for HD and LD beams. A preferred embodiment of S Farm is characterized in that the first and second diffractive members are composed of first and second diffractive structures respectively located on the entrance surface and the exit surface of the light-transmissive body. Integrating two diffractive members into one member can reduce the number of members, making the scanning device simple and reducing its manufacturing cost. In addition, 88414 200415607 reduces the y-alignment step during device assembly. The well-known compression or duplication techniques can be used to produce and report the above-mentioned synthetic diffraction members. Simultaneously applying the first surface having the first diffraction structure corresponding to the diffractive structure ^: the contour and the inner surface corresponding to the second diffraction structure: the field ^ two modes' can be used to make a composite diffraction member in one step. Also: In a specific embodiment of the photolithography process / device with -etching step using plastic edge technology, the device includes a beam splitter for separating the light beam reflected by 1 ^ to the glycosides, In terms of the beam splitter, the first and second gratings, and the objective lens system, the chirping member is located between the beam splitter and the radiation sensitivity detection system. This setup is further characterized in that the spectroscope is preferably a scintillation diffraction grating that diffracts only one of the HD and LD well beams. The known scintillation diffraction grating refers to a groove-shaped diffraction grating, in which the grooves are ", a == grating plane is skewed. The scintillation grating can be designed to make the maximum amount of light emitted by the human at the diffraction level, such as the first level, to minimize the loss of radiation. The force component is known to convert the reflected radiation of both HD disk f beams into electrical signals using a single radiation sensitivity detection system. Factory: An alternative embodiment is characterized in that the light collecting member is located between the diode laser and the first and second gratings. " The light-concentrating member is next to the triode laser chip. After the diode laser is emitted, the D beam is self-propelled, and the beam is transmitted through the common path of the device. In this position, for example, only the diffractive hmld light-traveling member may be an earlier diffraction grating, and the LD first beam < a blinking grating. This alternative embodiment is characterized in that the light collecting member preferably includes two opposite diffractive members having a lens function only for the HD and 88414 200415607 LD beams. ★ This-light-collecting component can adjust the under-zoom, that is, convergence and divergence, before the HDMD beam enters the objective lens system. Therefore, it is achieved that the HD beam fills the entire π hole of the objective lens system ', and the LD beam is only the central portion of this hole. For this reason, on the information plane, the scanning light spot formed by the HD beam is smaller than the scanning light spot formed by the 11) beam. This episode described in International Patent Application WO00 / 25646
光構件原理及其所含之數個具體實施例，均將悉數為本發 明之掃描裝置所用。 X 掃描裝置之進一步特徵在於塑光器位於雙波長二極體雷 射幻方’且具光束縮放變化入口面及繞射出口面。 尤其適於雙光學掃描系統之塑光器之特徵在於其係具圓 柱形入口表面與超環面（toroidal)出口表面之透鏡構件。 具備此波長中性塑光器，使得具橢圓形剖面之HD與ld二 極體雷射可於無輻射損失下，轉換為具圓形剖面之單一光 束。已知超環面表面係指橫向平面與縱向平面之表面（二極 體雷射）之曲率半徑相異。透鏡型式之有效且小巧塑光器可 與二極體雷射相鄰，揭如US-A 5,467,335。由於雙掃描裝置 中具有塑光器，故可使雷射所發射之HD與LD光束最大，俾 分別形成掃描與衛星光點，故此裝置適於高密度資訊層之 寫入。 在雙掃描裝置中施行之進一步整合之特徵在於集光構件 之繞射結構係分別位於塑光器之圓柱形入口表面與超環面 出口表面上。 如此一來，即可進一步減少構件數，使得掃描裝置更為 88414 -10- 200415607 2早，並可降低其製造成本。合成之三點光柵及具有繞射 表面<塑光器均可由熟知壓縮或複製技術製造之。同時施 用具有對應於第-繞射結構之内表面輪靡之第一模以及對 =第二繞射結構之内表面輪廓之第二模，即可於一步驟 内製造這些構件。 【實施方式】 圖1顯示一兼用掃描裝置，其以短波長（HD)光束讀取第一 =錄載體’並以長波長（LD)光束讀取第二型紀錄載體。 弟-型紀錄載體可為數位多功能光碟（DVD)，且第—波長為 例如655奈米’而第二型紀錄載體可為光碟（⑶），且第二波 長為例如785奈米。該裝置之光學路徑包括雙波長二極體雷 射封衣』式疋輻射源！。雙波長二極體雷射係合成之半導體 杈組’其具有發射不同波長之輻射光束4、6之兩構件2、3 =組可包括配置於一封裝中，具有兩發射構件或兩二 射LI射晶片《單一二極體雷射晶片。雖然僅可能縮減發 間距’但兩輻射光束之主射線仍無法疊合。然而在 =及了列圖式中’為簡明之故，α單—輻射光束代表HD 束舁LD光束6。在裝置應僅讀取兩類紀錄載體之情況下 ’發射構件2發射低功率紅⑽）韓射，發射構件3則發射低 功率紅外線輻射。 - 雙波長雷射發射之光束4入射於分光器上，例如相對於光 =主射線呈45。角配置之平面可透光板8。板δ具有例如將 發散：^率直透鏡14之半透光之反射表面1〇。此透鏡將 又月 為準直光束16。此光束通過物鏡系統“，將 88414 200415607 t直光束16變成用以掃描紀錄載體3〇之會聚光束2〇。該物 $系統18可由單一光學構件組成，但亦可包括兩或多個光 予構件，詳如圖式。 以HD光束4掃描之紀錄載體係屬第一型高密度層，其包括 例如厚度0.6毫米之可透光層31，以及資訊層32，曰會聚光束 2〇在其上變成一焦點或掃描光點22。自資訊層义反射之輕 口光束20與16乏光學路徑返回，通過分光器8並為準直透 叙Η會聚為輕射敏感性檢測㈣26上之檢測器光點μ。此 系統將光束轉換為電檢測器信號。可自該檢測器信號推衍 代表儲存於資訊層32中之資訊之資訊信號，以及用以於垂 ^於資訊層3 2之方向（焦點控制）與垂直於磁軌方向之方向 (尋軌控制）定位焦點22之控制信號。 可以所謂的散光法產生焦點控制信號。由於分光器8位置 相對於反射且會聚之光束之主射線具一銳角，故此分光器 可於此光束中引入散光。檢測系統26包括可用以檢測在檢 測系統《平面中之散光光束之剖面外形之象限檢測器。此 外形係由焦點22與資訊層32之相對位置決定。如w〇 02/25646所述，可於分光器8與檢測系統％間配置透鏡，其 面向檢測系統侧具球形凹表面，並可充作設定光束焦點^ 負飼服器透鏡。面向分光器之透鏡表面可為圓柱形，俾使 此透鏡具圓柱透鏡功能。若傾斜分光器8引入之散光不足， 則可使用此功能。 用以掃描第二型紀錄载體36之乙〇光束6沿與hd光束4相 同路徑向此紀錄載體傳播’纟包括厚度為例如工.2毫米之基 88414 -12- 200415607 板34，以及資訊層35。 所不紀錄載體30與36為具半透光資訊層32之單一雙層紀 、彔載把，但其亦可為具相異厚度之可透光層之個別單層紀 錄載體。 g LD光束6應行至資訊層35上之焦點或掃描光點28處。設計 物鏡系統18使其在第一組共軛下於第一模式操作，藉此將 來自發射構件2之HD光束聚焦於資訊層22上。在第二模式下 ，物鏡系統係於第二組共軛下操作，藉此將來自發射構件3 、 光束來焦於貝訊層3 5上。自資訊層3 5反射之輕射沿l D 光束20與16之路徑返回，通過分光器8並為物鏡系統會聚為 輪射敏感性檢測系統26上之檢測器光點25。 在分光器8與檢測系統26間可配置集光構件40，其使HD 與LD光束之主射線同軸，造成光點24與25位置重疊。因此 ’可分別對不同模式下之HD與LD光束使用相同的檢測系統 26 °集光構件可為波長選擇性光柵，其僅繞射HD與LD光束 之 ’並讓另一光束通過。此光栅係閃燦相位光柵較佳， 例如與US 2002/0027844類似之光栅。 圖1之裝置在HD模式（開啟發射構件2時）與LD模式（開啟 發射構件3時）中切換下，適於讀取hd紀錄載體（DVD型碟 片）及讀取LD紀錄載體（CD型碟片）。 圖2顯示一種適於讀取LD紀錄載體且式於讀取與紀錄hd 紀錄載體之掃描裝置。此裝置異於圖1處在於雷射封裝包括 以高功率紅輻射發射構件2,取代低功率構件2。目前此一掃 描裝置包括位於分光器8後側，稱之為順向感應檢測器42之 88414 -13 - 200415607 附加檢測器42。此檢測器供應與來自構件2,之赃束強度 成比例且係用以控制紀錄光束之強度之輸出信號。稱之為 三點光柵之繞射光栅5G位Μ射源i與分光器8之間。此光 栅具有在其侧邊之—上之光柵結構“。光柵結構Μ具波長 k擇性巾即所建構之光柵結構僅允許具一定波長之輕射 通過，例如波長6 5 5臺夬> 叹u毛木IHD先束。對！^光束而言，構件 5 0係可透光板。 光柵52將入射之™光束4分為未偏折零級主光束，以及- 附加之人要第級侑星光束。為簡明之故，圖2僅顯示主光 束。主光束於資訊平面中被掃描之磁軌上形成主掃描點， 俾記錄或讀取此磁軌。衛星光束於資訊平面中形成相對於 王光點之相反方向偏移且偏斜於磁軌方向之兩衛星光點（未 圖示）。衛星光點於檢測系統26上映出附加檢測器光點（未圖 外而個別檢測器構件則位於此系統中供產生這政光點之 用二可推衍出來自個別檢測器構件之輸出信號之磁軌誤差 二：：即具:與主光點22中心和被掃描之磁軌中心線間 中Ί::《“虎。磁軌誤差信號可用於磁軌飼服器系統 ，俾、·㈣王総於磁軌上。磁軌誤差” 軌伺服器系統本身係此技藝中所熟知。 及磁 裝ΪΓ:二裝封置:”亦即在用以記錄肋與⑶型紀錄載體^ :二束？ 高功率紅外、物嶋構件3，^ 1 磁軌伺服器系統。依本發明，第二你善 選擇性二點光柵係位於輻射源丨與分哭 ' 射具LD光束波長之輕射，且細：二者光栅僅繞 兀果又可透光板。第二三 88414 -14- 200415607 點光柵可為個別構件，但以與第一三點光柵整合於單一構 件中較佳。 圖3顯示一具雙紀錄裝置之具體實施例，其包括在一侧上 之具HD三點光柵結構52之雙光柵構件55，以及在另一側上 之LD三點光柵54。因將光柵52與54整合於一部件中，故得 以降低材料、製造成本，及節省掃描裝置空間。此外，在 輻射路徑中之表面數得以減少，使得錯誤反射之機會降低 。且無需單一光柵之個別對齊，詳如後述。 各光柵結構應提供所繞射之光束之第一級與第零級輻射 中繞射之輻射之給定能量比，光柵應為不應被繞射之光束 “所見”。 圖4顯示極簡略之雙光栅55之部分剖面圖。其中包括可透 光基板，例如此類應用中熟知材料如聚甲基甲基丙烯酸酯 (PMMA)等塑膠。光柵包括位於第—主表面之第—光拇結構 5 2，攻結構中顯示槽5 6與主表面之中間帶5 7。槽5 6具第一 深度4且光柵節距為ρι。第二光柵結構M位於基板之其它主 表面上，該結構包括槽58及中間帶59。槽59具第二深度心 且光柵節距為p2。 若：深使得對第二光束而言’通過槽之部分光束與通過 中間π之4分光束之相位差等於2π弧度，則用以繞射波長入1 之第一光束之光栅，將不會繞射具波長、之第二光束。次相 位差對應於與λ2相等之光學長度差。亦即槽深應滿足下列條 d=^2/(n-i) 88414 -15- 200415607 其中η為光柵基板折射率。對位於㈣之空氣以外之介質中 之光柵而言，其條件將成為： 、 ^=λ2/(n-rti) 為使入射於光柵之能量集中於第零繞射級與兩第—繞射級 ’光柵應具50%責任週期。已知責任週期係指槽寬Wg與節距 之比’或槽結構之週期？。因此，5G%責任週期係指槽寬等 於半光柵節距，或是槽寬Wg等於中間帶寬％。自繞射光拇理 論可知，對於具50%責任週期之二進位光柵而言，亦即對雙 P白光柵而5，零級繞射光束之能量I ◦為： 10 = 72.( 1-ο〇8(2π.(ηλ-1).ά/λ)) 且第一級繞射光束之能量幻為： 1广 /2( 1 _cos(27i.(nA-1 )·(1/λ))· [sin(7i/2).(2/7r)]2 其中λ為被繞射之光束波長，n為基板材料折射率。 對n=l，489(PMMA)且波長λι = 655奈米、λ2 = 785奈米而言， 對下列深度可求得下列IG/ h比： d(微米）在655奈米之iq/Ii在785奈米之l/l 1,35 4042 ? ? 1，6 5.0 2812 對此具體實施例而言，可以槽深1，35微米之光栅做為乙〇光 束（λ=785奈米）之三點光柵，並以槽深丨，6微米之光柵做為hd 光束（λ=655奈米）之三點光柵。 除槽外，三點光柵尚可包括折射率異於中間帶之光栅帶。 若對HD與LD光束而言，相對於相關主檢測器光點之衛星 檢測器光點位置大致相同，則可以同一檢測系統26供兩光 88414 -16- 200415607 束使用。 ，示輕射敏感性㈣iation，nsitive)檢測系統26之頂 :、…其具有用以接收主光束之中央檢測器60,以及用以 接收衛星光點之兩外部檢測器65、7〇。分別以代號75及77 79標示在這些檢測器上形成之主檢測器光點與衛星檢叫 :光點。中央檢測器為四象限檢測器，並包含檢測器構件 」、、62、63及64。若分別以n s63M64標示這些構 又輸出信號，則自紀錄載體讀取之資訊信號\為： si= S61 + S62 + S63 + S64 散光焦點誤差信號Sr為： sr = ( s61+ S64)- (S62 + S63) 對二點磁軌伺服器系統而言，檢測器65及70並未分開，且 磁軌誤差信號Sfi為：The principle of the optical component and several specific embodiments contained therein will all be used in the scanning device of the present invention. The X-scanning device is further characterized in that the plasticizer is located on a dual-wavelength diode laser magic square 'and has an entrance surface and a diffraction exit surface for beam scaling changes. A plasticizer particularly suitable for a dual optical scanning system is characterized in that it is a lens member having a cylindrical entrance surface and a toroidal exit surface. With this wavelength neutral plasticizer, HD and ld diode lasers with elliptical cross sections can be converted into a single light beam with a circular cross section without radiation loss. It is known that the toric surface means that the curvature radius of the surface (diode laser) of the transverse plane and the longitudinal plane is different. The effective and compact lens shaper can be adjacent to the diode laser, as disclosed in US-A 5,467,335. Due to the plasticizer in the dual scanning device, the HD and LD beams emitted by the laser can be maximized, and the scanning and satellite spots are formed respectively. Therefore, this device is suitable for the writing of high-density information layers. The further integration performed in the dual scanning device is characterized in that the diffractive structures of the light collecting members are located on the cylindrical inlet surface and the toroidal outlet surface of the plasticizer, respectively. In this way, the number of components can be further reduced, making the scanning device 88414 -10- 200415607 earlier, and the manufacturing cost can be reduced. Synthetic three-point gratings and diffractors with diffractive surfaces can be made by well-known compression or reproduction techniques. These components can be manufactured in one step by simultaneously applying the first mold having the inner surface corresponding to the first diffraction structure and the second mold having the inner surface contour of the second diffraction structure. [Embodiment] Fig. 1 shows a dual-purpose scanning device that reads a first record carrier 'with a short-wavelength (HD) beam and a second type record carrier with a long-wavelength (LD) beam. The brother-type record carrier may be a digital versatile disc (DVD), and the first wavelength is, for example, 655 nm ', and the second type record carrier may be an optical disc (CD), and the second wavelength is, for example, 785 nm. The optical path of the device includes a dual-wavelength diode laser coat "type tritium radiation source! . A dual-wavelength diode laser system synthesized semiconductor branch group 'has two members that emit radiation beams 4, 6 of different wavelengths 2, 3 = The group may include a package configured with two emitting members or two two-emitting LI Laser chip "Single diode laser chip. Although it is only possible to reduce the firing interval ', the main rays of the two radiation beams cannot be superimposed. However, in = and the column diagrams, for the sake of simplicity, the α single-radiation beam represents the HD beam and the LD beam 6. In the case where the device should only read two types of record carriers, the 'transmitting member 2 emits low-power Hung Hom) and the transmitting member 3 emits low-power infrared radiation. -The light beam 4 emitted by the dual-wavelength laser is incident on the beam splitter, for example, it is 45 with respect to light = main ray. Angle-arranged planar light-transmissive plate 8. The plate δ has, for example, a semi-transmissive reflective surface 10 that will diverge: the straight lens 14. This lens will again be a collimated beam16. This beam passes through the objective lens system ", turning 88414 200415607 t straight beam 16 into a convergent beam 20 for scanning the record carrier 30. The object system 18 may consist of a single optical component, but may also include two or more light components The record carrier scanned with HD beam 4 is a first type of high-density layer, which includes, for example, a light-transmissive layer 31 with a thickness of 0.6 mm, and an information layer 32, on which the converging beam 20 becomes A focal point or scanning spot 22. The light beams 20 and 16 reflected from the information layer are reflected back from the optical path, pass through the beam splitter 8 and are collimated for condensing and converging into a light-sensitive detector spot 26. μ. This system converts the light beam into an electrical detector signal. From this detector signal, an information signal representing the information stored in the information layer 32 can be deduced, and used in the direction perpendicular to the information layer 32 (focus control) ) And the control signal for positioning the focus 22 in a direction perpendicular to the direction of the magnetic track (tracking control). The so-called astigmatism method can be used to generate the focus control signal. Since the position of the beam splitter 8 is relative to the main ray of the reflected and converged beam The beam splitter can introduce astigmatism into this beam. The detection system 26 includes a quadrant detector that can be used to detect the cross-sectional shape of the astigmatic beam in the plane of the detection system. This shape is determined by the relative position of the focus 22 and the information layer 32 Decided. As described in WO02 / 25646, a lens can be arranged between the beam splitter 8 and the detection system%, which has a spherical concave surface facing the detection system side, and can be used to set the focal point of the beam ^ negative feeder lens. The lens surface of the device can be cylindrical, so that this lens has the function of a cylindrical lens. If the astigmatism introduced by the tilted beam splitter 8 is insufficient, this function can be used. It is used to scan the 6th beam of the second type record carrier 36. The same path as the HD beam 4 propagates to this record carrier, including a base with a thickness of, for example, 2 mm, 88414-12-200415607, plate 34, and information layer 35. All record carriers 30 and 36 are semi-transparent information layers A single double-layered recorder with a single double-layer handle of 32, but it can also be an individual single-layer record carrier with light-transmitting layers of different thicknesses. G LD beam 6 should go to the focal point or scanning light spot 28 on the information layer 35 Design The lens system 18 causes it to operate in the first mode in the first group of conjugates, thereby focusing the HD beam from the emitting member 2 on the information layer 22. In the second mode, the objective lens system is tied to the second group of conjugates Then, the light beam from the emitting member 3 and the focusing layer 35 are focused. The light beam reflected from the information layer 35 is returned along the path of the ID beams 20 and 16, and passes through the beam splitter 8 and is an objective lens system. Convergence is the detector light spot 25 on the wheel-shot sensitivity detection system 26. A light collecting member 40 can be arranged between the beam splitter 8 and the detection system 26, which makes the main rays of the HD and LD beams coaxial, resulting in light spots 24 and 25 The positions overlap. Therefore, 'the same detection system can be used for HD and LD beams in different modes. The 26 ° light collecting member can be a wavelength selective grating, which only diffracts between the HD and LD beams' and let another beam pass. This grating is preferably a flash phase grating, such as a grating similar to US 2002/0027844. The device in FIG. 1 is switched between the HD mode (when the launching means 2 is turned on) and the LD mode (when the launching means 3 is turned on), and is suitable for reading an HD record carrier (DVD type disc) and an LD record carrier (CD type) Discs). FIG. 2 shows a scanning device suitable for reading an LD record carrier and reading and recording the hd record carrier. This device differs from FIG. 1 in that the laser package includes a high power red radiation emitting member 2 instead of the low power member 2. At present, this scanning device includes an additional detector 42 which is located at the rear side of the beam splitter 8 and is called a forward sensing detector 42 of 88414-13-200415607. This detector supplies an output signal that is proportional to the intensity of the beam from the component 2, and is used to control the intensity of the recording beam. This is called a three-point grating diffraction grating 5G-bit M radiation source i and the beam splitter 8. This grating has a grating structure on its side ". The grating structure M has a wavelength k selective towel, that is, the constructed grating structure allows only light beams with a certain wavelength to pass through, such as a wavelength of 6 5 5 units. uMahogany IHD first beam. For! ^ beam, member 50 is a light-transmissive plate. Grating 52 divides the incident beam 4 into the unbiased zero-order main beam, and-the additional person wants the first order 侑Star beam. For the sake of simplicity, Figure 2 only shows the main beam. The main beam forms the main scanning point on the magnetic track being scanned in the information plane, and then records or reads this magnetic track. The satellite beam forms in the information plane relative to Wang Guangdian's two satellite spots (not shown) that are offset in the opposite direction and deviated from the magnetic track direction. Satellite spots are reflected on the detection system 26 by additional detector spots (not shown in the figure but individual detector components are It is located in this system for the purpose of generating this political light spot. The magnetic track error of the output signal from the individual detector components can be deduced. 2: That is: between the center of the main light spot 22 and the center line of the scanned track. Ί :: "Tiger. Track error signal can be used for track feeder The system, 俾, ㈣ 王 総 are on the magnetic track. The magnetic track error "track server system itself is well-known in this technology. And the magnetic device ΪΓ: two equipment package:" is also used to record the rib and ⑶ type Record carrier ^: two beams? High-power infrared, object structure 3, ^ 1 magnetic track server system. According to the present invention, the second selective two-point grating system is located at the radiation source 丨 and the crying '' beam LD beam The wavelength is light and thin: the two gratings only wrap around the fruit and can transmit light. The second and third 88414 -14- 200415607 point gratings can be individual components, but they are integrated with the first three-point grating in a single component. Figure 3 shows a specific embodiment of a dual recording device, which includes a dual grating member 55 with an HD three-point grating structure 52 on one side, and an LD three-point grating 54 on the other side. The gratings 52 and 54 are integrated in one component, which can reduce material, manufacturing costs, and save space in the scanning device. In addition, the number of surfaces in the radiation path is reduced, reducing the chance of false reflections. And the individual alignment of a single grating is not required , As detailed below. Each grating structure should be mentioned For a given energy ratio of the diffracted radiation in the first order and the zeroth order of the diffracted beam, the grating should be "seen" by the beam that should not be diffracted. Figure 4 shows the extremely simple dual grating 55 Partial cross-sectional view. It includes a light-transmissive substrate, such as plastics well known in such applications such as polymethylmethacrylate (PMMA). The grating includes a first thumb structure on the first major surface. The middle band 5 7 of the middle display groove 5 6 and the main surface. The groove 5 6 has a first depth 4 and the grating pitch is ρ. The second grating structure M is located on the other main surface of the substrate. The structure includes the groove 58 and the middle band. 59. The slot 59 has a second depth center and the grating pitch is p2. If the depth is such that the phase difference between the portion of the beam passing through the slot and the beam passing through the middle π for the second beam is equal to 2π radians, then The grating of the first light beam with a diffraction wavelength of 1 will not diffract the second light beam with a wavelength. The secondary phase difference corresponds to an optical length difference equal to λ2. That is, the groove depth should satisfy the following conditions: d = ^ 2 / (n-i) 88414 -15- 200415607 where η is the refractive index of the grating substrate. For a grating located in a medium other than air of chirp, the conditions will be:, ^ = λ2 / (n-rti) so that the energy incident on the grating is concentrated at the zeroth diffraction order and the second-diffraction order 'Gratings should have a 50% duty cycle. Known duty cycle means the ratio of groove width Wg to pitch 'or the cycle of the groove structure? . Therefore, the 5G% duty cycle means that the slot width is equal to the half grating pitch, or the slot width Wg is equal to the middle bandwidth%. From the theory of self-diffracting light, it can be known that for a binary grating with a 50% duty cycle, that is, for a double-P white grating, the energy of the zero-order diffraction beam I ◦ is: 10 = 72. (1-ο〇 8 (2π. (Ηλ-1) .ά / λ)) and the energy of the first-order diffracted beam is: 1 2/2 (1 _cos (27i. (NA-1) · (1 / λ)) · [sin (7i / 2). (2 / 7r)] 2 where λ is the wavelength of the diffracted beam and n is the refractive index of the substrate material. For n = 1, 489 (PMMA) and the wavelength λι = 655 nm, λ2 For 785 nanometers, the following IG / h ratios can be obtained for the following depths: d (micron) iq / Ii at 655 nanometers l / l at 785 nanometers 1,35 4042?? 1,6 5.0 2812 For this specific embodiment, a grating with a groove depth of 1,35 microns can be used as a three-point grating with a beam size of 0 (λ = 785 nm), and a grating with a groove depth of 6 microns can be used as a hd beam (λ = 655nm) three-point grating. In addition to the groove, the three-point grating can also include a grating band with a refractive index different from the intermediate band. For HD and LD beams, satellite detection relative to the relevant main detector light spot Position of the light spot of the device is approximately the same, two light can be supplied by the same detection system 26 88414 -16- 200415607 Use, illustrating the sensitivity of the light emitted ㈣iation, nsitive) the top 26 of the detection system:., ... having to receive the main beam of the central detector 60, and to receive two satellite light spot 65,7〇 external detector. The main detector light spots and satellite detections formed on these detectors are coded 75 and 77 79 respectively: light spots. The central detector is a four-quadrant detector and includes detector components '', 62, 63, and 64. If these structures are labeled with n s63M64 and output signals, the information signal read from the record carrier is: si = S61 + S62 + S63 + S64 astigmatism focus error signal Sr is: sr = (s61 + S64)-(S62 + S63) For the two-point magnetic track servo system, the detectors 65 and 70 are not separated, and the track error signal Sfi is:
Srl= S65 — S7〇 右分別將檢測器65與70劃分為檢測器構件66、67與71、72 ，則可採用三點推挽磁軌伺服器系統。磁軌誤差信號心2則Srl = S65 — S7〇 The detectors 65 and 70 are divided into detector members 66, 67, 71, and 72 respectively. A three-point push-pull magnetic track servo system can be used. Track error signal core 2
Sr2=(S61+ s63)- (S62+S64)- y/2.[(S66- S67)+ (SV1 - S72)]? 其中γ為主光點與衛星光點之強度比。 基本要件在於對HD與LD光束而言，主光點與衛星光點間 距D大致相同。此距離與繞射光柵之繞射角有關，亦即與第 零級及第一級光束之主射線間夾角有關。繞射角^與λ/ρ成比 例。爰此，若對波長Μ及λ2而言，該距離應相等，第一級需 88414 -17- 200415607 Ρΐ/ρ2 = (λιΈι)/(λ2^2) 其中g 1及g2为別為一極體雷射與光柵1 (節距Ρ i)及光栅2(節 距P2)間之光學路徑長。但由於在HD紀錄載體上之資訊磁軌 節距q 1較在LD紀錄磁軌上之資訊磁軌節距心小，故在HD磁 碟上連結兩衛星光點之線與局部磁軌方向之夾角應較在LD 紀錄載體上連結兩衛星光點之線與局部磁軌方向之夾角小 。亦及光柵方位應具些微差異，或者方位角θ(亦即光柵帶與 貝Λ磁軌之虛擬局邵方向間夾角）之差異不大。已知虛擬局 部方向係指投射於相關光柵上之局部方向。兩光柵之方位 角Θ係由檢測系統上之主光點與衛星光點間距d ;在自紀錄 載體至檢測系統方向中之物鏡系統放大率m;以及紀錄載體 上之資訊磁執節距q決定。對三點推挽伺服器磁軌系統而言 ，其中在紀錄載體之資訊平面中之主光點與衛星光點間距 大致等於半資訊磁軌節距，方位角為： Θ吻m)/(2D) 放大率m=6且間距D=15〇微米之雙掃描裝置適於紀錄與讀取 磁軌節距q1 = 0.74微米iHD紀錄載體，以及磁軌節距七=1.6微 米之LD紀錄載體，兩光栅之方位角差Δθ等於〇5。。 圖6顯示可施行本發明之雙紀錄/讀取裝置之另一具體膏 她例。此具體實施例異於圖3在於輻射源ί與檢測系統26位 置互換；摺疊鏡80位於分光器82與準直透鏡間；附加透鏡 84位於分光器82與檢測系統26間；以及集光構件9〇位於雙 光柵55與輻射源1間。 、又 在檢測系統侧之透鏡84可具凹球表面85，並可做為用以 88414 -18- 200415607 設足光束焦點之負储器透鏡。沿光學㈣動此透鏡可達 成上揭情況。位於分光器82側之透鏡84表面86可為圓柱形 ，俾使此透鏡亦具圓柱透鏡功能。若以偏斜分光器82引入 之散光過小時，即可使用此功能。透鏡84僅為負球形透鏡 或僅為圓柱形透鏡亦可。可視需要外加用以修正分光器82 所引入之慧形相差之構件，或以之取代透鏡。 集光構件90可為單一繞射光柵，例如與US 2002/0027844 所示閃爍光柵類似之閃爍光柵，其可讓入射光束之零級光 束及其E入射光束之第一級光束通過。在構件90中整合集 光功能及預準直功能較佳。 採用預準直功能之因在於用以掃描HD資訊層35之光點22 較用以掃描LD資訊層32之掃描光點28小。若以整個物鏡系 統18孔徑形成較小光點22，則應僅有孔徑之中央部分可供 形成較大光點28之用。就此言之，物鏡系統18可具有在中 央部周圍之雙色環，該環僅可讓HD光束通過，並將LD光束 外部擋住。可於僅有LD光束之路徑中，將可記綠資訊於ld 資訊層之雙掃描裝置之較佳替代品配置正透鏡於準直透鏡 16前。該正透鏡將來自源丨之發散!^0光束會聚為發散程度較 準直透鏡14將發散 統之孔徑之中央部 置中，可將繞射預 低之光束，因而被稱之為預準直透鏡。 程度較低之LD光束會聚為僅填滿物鏡系 之光束。但在具雙波長雷射之雙掃描裝 準直透鏡配置於僅有LD光束之路徑中。 如同採用預準直透鏡之環形繞射結構之國際專利申請案 第WO 02/25646號中所述，其中繞射結構僅對光束有效， 88414 -19- 200415607 故可解決此問題。此繞射結構可與集光繞射結構整合於一 構件中。. 、 旧顯示此-合成繞射構件90之原理，以及分別自雙波長 雷射之發射構件2’與3’至圖3之分光器8並通過繞射構件卯 之HD光束4與LD光束6之路徑。圖7中所示輻射路徑部之光 學轴與HD光束4之主射線99疊合。合成繞射構件包括可為兩 種波長之光束4與光束6穿透之基板91。在發射構件2，與3, 側之基板具繞射結構93，例如具大致圓形槽與平台之 鏡結構，可充作LD光束6之正透鏡之用/此繞:結 構將發散光束6轉換為會聚光束95。在已通過基板91後，LD 光束95即較HD光束4之剖面小。在遠離發射構件2,、3，側， 基板9 1具有將會聚光束95轉換為發散光束％之第二繞射結 構94,其邊緣射線大致與HD光束4之對應邊緣射線平行。繞 射結構94係充作LD光束之負透鏡之用，並可為Fresnei透鏡 型結構。選擇兩繞射結構63與64之槽深使得這些結構對 光束4不具影響，亦即不改變此光束之方向或邊界。 、’％射、、、口構93與94可為全息圖（h〇i〇gram)。這些全息圖之原 始結構，亦即用以形成供製造繞射構件9〇用之模之結構係 電腦產生之結構。 圖7所示繞射構件9〇僅係w〇〇2/25646中所述之合成預準 直器與集光構件之一具體實施例。另一具體實施例採用非 對稱繞射結構93、94，其不僅改變LD光束邊界，亦偏折部 分光束至光學軸。此舉導致得以使用源光束6之對稱部分形 成光束9 6。另—具體實施例導致HD光束中產生變化，而非 88414 -20- 200415607 ld光束」有關合成之預準直器與集光繞射構件之原理μ =體實施例，可參閱WO()2/25646。這些具體實施例均; 供本發明之雙記錄裝置之用。 就雙記錄裝置中之HD與⑶光束所需之高功率而古，且吸 引力處在於在雙波長二極體雷射相鄰處配置所謂的分：哭 以增加掃描光束之邊緣強度。：極體雷射發射之角孔徑位 1與其王動層平行之平面（已知為橫向面）之光束，，較孔徑 位於垂直於主動層之平面（已知為縱向面）之光束小。在離二 極體雷射-段距離處’㈣所謂的二極體雷射之遠場處， 極體雷射之光束具有橢圓剖面。在用以掃描資訊層之 知描裝置巾’應採用圓且小，較佳為繞射受限型之掃描光 點：就此而言，形成掃描光點之物鏡系統須充滿具圓形剖 面之輕射光束。若於物鏡系統之人口孔徑處，以具糖圓剖 面尺寸之二極體雷射照射物鏡系統，使得在橢圓之短軸方 向中 < 孔徑被填滿，則在橢圓之長軸方向中之輻射量將落 在孔瓜外。於二極體雷射與物鏡系統間配置分光器即可將 橢圓光束轉換為圓光束而避免此輻射損失。 一種具吸引力之分光器揭如US-A5,467,335。圖8顯示此分 光器110,其係具圓柱形入口表面112與超環形出口表面113 ，且與二極體雷射120相鄰之透鏡構件。此雷射包括複數個 不同訌淖層，現僅頜不帶狀主動層丨22。兩可部分透光鏡琢 面123與124限制此帶，俾當電流自電源129通過雷射而產生 2射輻射時，雷射輻射得以離開主動帶2。在主動帶122與 則琢面124之三軸系統座標χγζ<χγ平面中之剖面為矩 88414 -21 - 200415607 形此形狀導致二極體雷射發射之光束不對稱，並於平行 於王動帶122之XZ平面（亦即橫向面）中具孔徑角㈨。此孔徑 角較在υζ平面(亦即縱向面)中之孔徑角Μ、。在橫向平面； 之雷射光束之邊緣射線係以代號125與126表之，在縱向面 之邊緣射線則以代號127與128表之。入口表面U2具部分圓 柱體外形，其圓柱軸與Υ轴平行。對在γζ平面之射線而言， 表面係介於例如空氣及折射率η之介質間之平坦介面 。這些射線受η值影響而偏向ζ軸至一定程度。換言之，在 入口表面m處之ΥΖ平面中之角放大率為1/η,_縮減。 在XZ平面中，入口表面112具曲率R，且此表面引入之角放 大率為η。分光器11〇之出口表面113在縱向面之曲率半徑為 ，並且位於ζ位置處使其曲率中心大致與雷射琢面124之 表面m形成之影像重叠。表面113於縱向面中以未繞射方式 發射射線，且在此平面中之角放大率大致為卜在橫向面中 、’出口表面之曲率半徑為R2，且其曲率中心與雷射琢面124 <表面112形成之虛擬影像重疊，故在此平面中之角放大率 為1。由於入口表面Π2形成之兩虛擬影像位於z軸上不同位 置，故出口表面113應具些微超環狀外形，俾將這些影像合 成為單-影像。已知超環形係指在橫向面與縱向面中之i 面之曲率半徑相異。於圖8中以出口表面之非共面周圍曲線 K。圖8之分光器之深入細節及具體實施例，請參閱us_a 5,467,335。 若於本發明之雙掃描裝置中加入此分光器，則可將 ⑶光束塑形。藉由分別配置繞射結構％於繞射、結構％於分 88414 -22- 200415607 光器之入口表面112與出口表面113上，圖8之分光器即可與 圖7之合成繞射構件整合。雙波長二極體雷射之兩發射構件 應相對於整合之透鏡分光器精確定位。在已定位這些構件 中之第一構件後，可藉由轉動雙波長雷射之外殼而定位第 二構件。圖7之繞射構件或其改良品’亦可與異於圖8所 之它類分光器整合。 【圖式簡單說明】 參閱前揭具體實施例及以下隨附圖式，即可由範例彰顯 與闡明本發明之各態樣。 在圖式中： 圖1顯示一具雙掃描裝置，其包括在LD光束路徑中之兩二 極體雷射及預準直（precollimator)透鏡； 圖2顯示一具雙掃描裝置，其包括對HD光束之三點光柵； 圖3顯示一具雙掃描裝置，其包括對HD光束與LD光束之 三點光柵； 圖4概略顯示在此掃描裝置中使用之雙三點光柵； 圖5顯示此裝置之檢測系統之具體實施例之頂視圖； 圖6顯示一具雙掃描裝置，其包括配置於雙三點光柵與輻 射源間之集光構件； 圖7顯示雙掃描裝置中使用之整合光束組合與預準直構 件之具體實施例；及 圖8顯示雙掃描裝置中使用之塑光器之具體實施例。 圖中相同構件具相同代號。 【圖式代表符號說明】 88414 -23 - 200415607 1，1’ 輻射源 2, 2，，3, 3， 發射構件 4, 6 輕射光束 8 分光器 10 反射表面 14 準直透鏡 16 準直光束 18 物鏡系統 20 光束 22, 28 焦點 24, 25 檢測器光點 26 輻射敏感性檢測器 30, 36 紀錄載體 31 可透光層 32, 35 資訊層 34 基板 40 集光構件 42 順向感應檢測器 50 繞射光柵 52, 54 光柵 55 雙光柵 56, 58 槽 57, 59 中間帶 60 中央檢測器 88414 -24- 200415607 61，62, 63， 檢測器構件 64 65,70 外部檢測器 66, 67, 71， 檢測器構件 72 75 主檢測器光點 77, 79 衛星檢測器光點 80 摺疊鏡 82 分光器 84 準直透鏡 85 凹球表面 86 表面 90 集光構件 91 基板 93, 94 繞射結構 95 會聚光束 96 發散光束 99 主射線 110 塑光器 112 入口表面 113 出口表面 120 二極體雷射 122 主動帶 123， 124 可部分透光鏡琢面 88414 -25- 200415607 125，126 邊界射線（橫向面） 127，128 邊界射線（縱向面） 129 電流源 26- 88414Sr2 = (S61 + s63)-(S62 + S64)-y / 2. [(S66- S67) + (SV1-S72)]? Where γ is the intensity ratio of the main light spot to the satellite light spot. The basic requirement is that for HD and LD beams, the distance D between the main spot and the satellite spot is approximately the same. This distance is related to the diffraction angle of the diffraction grating, that is, the angle between the main rays of the zeroth and first order beams. The diffraction angle ^ is proportional to λ / ρ. So, if the wavelengths M and λ2, the distance should be equal, the first stage needs 88414 -17- 200415607 ρ / ρ2 = (λιΈι) / (λ2 ^ 2) where g 1 and g2 are different polar bodies The optical path between the laser and the grating 1 (pitch P i) and the grating 2 (pitch P2) is long. However, since the information track pitch q 1 on the HD record carrier is smaller than the information track pitch center on the LD record track, the line connecting the two satellite spots and the local track direction on the HD disk The included angle should be smaller than the included angle between the line connecting the two satellite spots on the LD record carrier and the local magnetic track direction. It should be noted that there should be slight differences in the azimuth of the grating, or the difference in azimuth angle θ (that is, the angle between the virtual zone and the direction of the virtual band of the grating band and the Λ magnetic track) is not large. It is known that the virtual local direction refers to a local direction projected on the relevant grating. The azimuth angle Θ of the two gratings is determined by the distance d between the main light spot on the detection system and the satellite light spot; the magnification m of the objective lens system in the direction from the record carrier to the detection system; and the information magnetic pitch q on the record carrier . For a three-point push-pull server magnetic track system, the distance between the main light spot and the satellite light spot in the information plane of the record carrier is approximately equal to the half information track pitch, and the azimuth is: Θ kissm) / (2D ) Dual scanning device with magnification m = 6 and pitch D = 150 microns is suitable for recording and reading track pitch q1 = 0.74 microns iHD record carrier, and LD record carrier with track pitch seven = 1.6 microns, two The azimuth difference Δθ of the grating is equal to 0.05. . Fig. 6 shows another specific example of a dual recording / reading device that can implement the present invention. This specific embodiment differs from FIG. 3 in that the radiation source and the detection system 26 are interchanged in position; the folding mirror 80 is located between the beam splitter 82 and the collimating lens; the additional lens 84 is located between the beam splitter 82 and the detection system 26; and the light collecting member 9 〇 is located between the double grating 55 and the radiation source 1. The lens 84 on the detection system side can have a concave spherical surface 85 and can be used as a negative reservoir lens for setting the focus of the beam to 88414 -18-200415607. This lens can be lifted along the optical axis. The surface 86 of the lens 84 on the side of the beam splitter 82 may be cylindrical, so that this lens also has a cylindrical lens function. This function can be used if the astigmatism introduced by the skew beam splitter 82 is too small. The lens 84 may be only a negative spherical lens or only a cylindrical lens. If necessary, a component for correcting the coma phase difference introduced by the spectroscope 82 may be added, or a lens may be replaced therewith. The light collecting member 90 can be a single diffraction grating, such as a scintillation grating similar to the scintillation grating shown in US 2002/0027844, which can pass the zero-order light beam of the incident light beam and the first-order light beam of the E incident light beam. It is better to integrate the light collection function and the pre-collimation function in the component 90. The reason for using the pre-collimation function is that the light spot 22 for scanning the HD information layer 35 is smaller than the scanning light spot 28 for scanning the LD information layer 32. If the smaller spot 22 is formed with the entire objective lens system 18 aperture, only the central portion of the aperture should be available for forming the larger spot 28. In this regard, the objective lens system 18 may have a two-color ring around the center, which ring allows only the HD beam to pass and blocks the LD beam from the outside. In the path of only the LD beam, a better alternative to the dual scanning device that can record the green information in the ld information layer is configured with a positive lens in front of the collimating lens 16. This positive lens converges the divergence from the source! The ^ 0 beam converges to a greater degree of divergence. The collimator lens 14 centers the center of the divergent aperture and can pre-diffract the beam, so it is called pre-collimation. lens. The lower-level LD beam is converged into a beam that only fills the objective lens system. However, in a dual-scanning device with a dual-wavelength laser, the collimating lens is placed in the path of only the LD beam. As described in International Patent Application No. WO 02/25646 using a ring-diffractive structure using a pre-collimated lens, where the diffractive structure is only valid for the light beam, 88414 -19- 200415607 can solve this problem. This diffractive structure can be integrated into a component with the light-concentrating diffractive structure. . The old shows this-the principle of the composite diffractive member 90, and the HD beam 4 and the LD beam 6 from the two-wavelength laser emitting members 2 'and 3' to the beam splitter 8 of Fig. 3 and passing through the diffractive member. Its path. The optical axis of the radiation path portion shown in FIG. 7 is superposed on the main ray 99 of the HD beam 4. The composite diffractive member includes a substrate 91 which can penetrate the light beam 4 and the light beam 6 of two wavelengths. The substrate on the side of the emitting member 2 and 3 has a diffraction structure 93, such as a mirror structure with a generally circular groove and a platform, which can be used as a positive lens of the LD beam 6 / this winding: the structure converts the divergent beam 6 To converge the beam 95. After passing through the substrate 91, the cross section of the LD beam 95 is smaller than that of the HD beam 4. On the side far from the emitting members 2, 3, the substrate 91 has a second diffractive structure 94 that converts the focused beam 95 into a divergent beam%, and its edge rays are approximately parallel to the corresponding edge rays of the HD beam 4. The diffractive structure 94 serves as a negative lens for the LD beam, and may be a Fresnei lens type structure. The groove depth of the two diffractive structures 63 and 64 is selected so that these structures have no effect on the light beam 4, that is, the direction or boundary of the light beam is not changed. The ′% ′, ′, ′, ′, ′, ′, ′, ′, ′, ′, and ′ ′, 93 and 94 may be holograms. The original structure of these holograms, i.e., the structure used to form the mold for manufacturing the diffractive member 90, was a computer-generated structure. The diffractive member 90 shown in FIG. 7 is only one specific embodiment of the composite pre-collimator and the light collecting member described in WO 2/25646. Another specific embodiment uses asymmetric diffraction structures 93, 94, which not only change the LD beam boundary, but also deflect a portion of the beam to the optical axis. This results in the use of a symmetrical portion of the source beam 6 to form the beam 9 6. Another—specific embodiments lead to changes in the HD beam, instead of 88414 -20- 200415607 ld beams ”Principles of the synthesized pre-collimator and light-diffractive diffractive member μ = body embodiment, see WO () 2 / 25646. These specific embodiments are provided for the dual recording device of the present invention. The high power required for the HD and CD beams in the dual recording device is ancient, and the attraction lies in the so-called split: crying to increase the edge intensity of the scanning beam adjacent to the dual-wavelength diode laser. : The angular aperture of polar body laser emission 1 is a light beam in a plane (known as the transverse plane) parallel to its king moving layer, which is smaller than a beam whose aperture is perpendicular to the plane (known as the longitudinal plane) of the active layer. At the far-field distance from the diode laser ', the far field of the so-called diode laser, the polar laser beam has an elliptical profile. In the scanning device used to scan the information layer, the scanning light spot should be round and small, preferably a diffraction-restricted scanning light spot: In this regard, the objective lens system forming the scanning light spot must be filled with light with a circular cross section.射 光束。 Beam. If the objective lens system is irradiated with a diode laser with a sugar circle cross-section size at the aperture of the objective lens system so that the aperture in the minor axis of the ellipse is filled, the radiation in the major axis of the ellipse The amount will fall outside Kong Kong. By disposing a beam splitter between the diode laser and the objective lens system, the elliptical beam can be converted into a circular beam to avoid this radiation loss. An attractive spectroscope is disclosed in US-A 5,467,335. FIG. 8 shows this beam splitter 110, which is a lens member having a cylindrical entrance surface 112 and a toroidal exit surface 113, and is adjacent to a diode laser 120. This laser includes a number of different condylar layers, and now only the jaw-free active layer22. The two partially transparent mirror facets 123 and 124 limit this band. When the current is generated from the power source 129 through the laser to generate 2 radiations, the laser radiation can leave the active band 2. The cross section in the three-axis system coordinate χγζ < χγ plane of the active zone 122 and the facet 124 is a moment 88414 -21-200415607. This shape results in the asymmetry of the light beam emitted by the diode laser and is parallel to the king moving zone. The XZ plane (ie, the transverse plane) of 122 has an aperture angle ㈨. This aperture angle is smaller than the aperture angle M in the νζ plane (that is, the longitudinal plane). In the horizontal plane, the edge rays of the laser beam are represented by the codes 125 and 126, and the edge rays in the longitudinal plane are represented by the codes 127 and 128. The entrance surface U2 has the shape of a partially cylindrical body, and its cylindrical axis is parallel to the Υ axis. For rays in the γζ plane, the surface is a flat interface between media such as air and refractive index η. These rays are deflected to the z-axis to some extent by the value of η. In other words, the angular magnification in the ΥZ plane at the entrance surface m is reduced by 1 / η, _. In the XZ plane, the entrance surface 112 has a curvature R, and the angle magnification introduced by this surface is η. The radius of curvature of the exit surface 113 of the beam splitter 11 in the longitudinal plane is and is located at the ζ position so that the center of curvature thereof substantially overlaps the image formed by the surface m of the laser facet 124. The surface 113 emits rays in an undiffracted manner in the longitudinal plane, and the angular magnification in this plane is approximately in the transverse plane. The radius of curvature of the exit surface is R2, and its center of curvature and the laser facet 124 < The virtual image formed by the surface 112 overlaps, so the angular magnification in this plane is one. Since the two virtual images formed by the entrance surface Π2 are located at different positions on the z-axis, the exit surface 113 should have a slightly super-circular shape, and these images are combined into a single-image. It is known that a toroid means that the radius of curvature of the i-plane in the transverse and longitudinal planes is different. The non-coplanar surrounding curve K of the exit surface is shown in FIG. 8. Please refer to us_a 5,467,335 for in-depth details and specific embodiments of the optical splitter of FIG. 8. If the beam splitter is added to the dual scanning device of the present invention, the ⑶ beam can be shaped. By arranging the diffraction structure% to the diffraction and the structure% to the entrance surface 112 and the exit surface 113 of the optical device 88414 -22- 200415607, the optical splitter of FIG. 8 can be integrated with the composite diffractive member of FIG. 7. The two emitting components of a dual-wavelength diode laser should be accurately positioned relative to the integrated lens beamsplitter. After the first of these components has been positioned, the second component can be positioned by rotating the housing of the dual wavelength laser. The diffractive member shown in FIG. 7 or an improved product thereof may also be integrated with a beam splitter other than that shown in FIG. 8. [Brief description of the drawings] With reference to the specific embodiments disclosed before and the accompanying drawings below, various aspects of the present invention can be shown and clarified by examples. In the drawings: FIG. 1 shows a dual scanning device including two diode lasers and a precollimator lens in the LD beam path; FIG. 2 shows a dual scanning device including a pair of HD Three-point grating for light beams; Figure 3 shows a dual-scanning device including a three-point grating for HD beams and LD beams; Figure 4 schematically shows a dual-three-point grating used in this scanning device; Top view of a specific embodiment of the detection system; Figure 6 shows a dual-scanning device, which includes a light-gathering member disposed between a double three-point grating and a radiation source; Figure 7 shows an integrated beam combination and A specific embodiment of the collimating member; and FIG. 8 shows a specific embodiment of the plasticizer used in the dual scanning device. The same components in the figure have the same code. [Illustration of Symbols in the Drawings] 88414 -23-200415607 1,1 'Radiation source 2, 2, 3, 3, emitting member 4, 6, light beam 8 beam splitter 10 reflecting surface 14 collimating lens 16 collimating beam 18 Objective system 20 Beam 22, 28 Focus 24, 25 Detector spot 26 Radiation sensitivity detector 30, 36 Record carrier 31 Light-transmissive layer 32, 35 Information layer 34 Substrate 40 Light collecting member 42 Forward sensing detector 50 Beam Gratings 52, 54 Gratings 55 Double Gratings 56, 58 Slots 57, 59 Intermediate Band 60 Central Detector 88414 -24- 200415607 61, 62, 63, Detector Components 64 65, 70 External Detectors 66, 67, 71, Inspection Detector member 72 75 Main detector spot 77, 79 Satellite detector spot 80 Folding mirror 82 Beamsplitter 84 Collimator lens 85 Concave spherical surface 86 Surface 90 Light collecting member 91 Substrate 93, 94 Diffraction structure 95 Converging beam 96 Divergence Beam 99 Main ray 110 Plasticizer 112 Inlet surface 113 Outlet surface 120 Diode laser 122 Active band 123, 124 Partially transparent mirror facet 88414 -25- 200415607 125, 126 Boundary rays ( Facing surface) boundary 127,128 rays (longitudinal plane) 26-88414 current source 129