TW200414640A - Structure for packing and method of controlling power of optical sub-assembly (OSA) module - Google Patents

Structure for packing and method of controlling power of optical sub-assembly (OSA) module Download PDF

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TW200414640A
TW200414640A TW92101280A TW92101280A TW200414640A TW 200414640 A TW200414640 A TW 200414640A TW 92101280 A TW92101280 A TW 92101280A TW 92101280 A TW92101280 A TW 92101280A TW 200414640 A TW200414640 A TW 200414640A
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optical sub
sleeve
patent application
item
optical
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TW92101280A
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TW578351B (en
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Cheng-Ting Chiang
Kuo-Kang Sun
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Truelight Corp
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Abstract

A structure for packing and a method of controlling power of optical sub-assembly (OSA) module are disclosed. The present invention is featured in that an attenuation piece is inserted into a gap in a sleeve of an optical sub-assembly (OSA) from the outer side surface of the sleeve, whereby an optical axis of the semiconductor laser can pass through the attenuation piece. With the use of the present invention, the power loss of the laser diode during the packaging of the OSA is prevented, the attenuation piece can be replaced any time, and the issue that the optoelectronic efficiencies among the different devices vary severely during the process of the OSA can be improved.

Description

200414640 發明驟猜 (發明說明應敘明:發明臟之郷藤或、先前技術、內容、實施方艰圖式簡單說明) 發明所屬之技術領域: 本發明係有關於一種光學次模組元件之封裝結構及其 光功率輸出之控制方法,特別是有關於一種將衰減片由套 管之外側面置入套管中的凹槽内之光學次模組元件之封裝 結構及其光功率輸出之控制方法。 先前技術: 光電產業係將電子學(Electronics)與光學(Optics)相互 結合而產生的一種應用領域。其中,光電元件中的光收發 模組可包括發送器(Transmitter)、接收器(Receiver)、或可 將二者整合為收發器(Transceive0。 發送器的功能在於將電氣訊號轉為光訊號傳送出去。 發送器一般是依照光源來區分,其中用於光纖通訊的光源 以發光二極體與雷射二極體為主。由於雷射二極體具有輸 出功率高、傳輸速度快、發光角度小(表示光源耦合進入光 纖中的效率較高)、以及頻譜較窄(色散較小),故較適合中、 長距離傳輸之用。至於,發光二極體則由於具有成本低以 及較易使用(驅動與補償電路較簡單)等優點,因此適合短 距離傳輸用途。 雷射二極體或稱半導體雷射,具有體積小、耗電少、 反應快、耐衝撞、壽命長、效率高、以及價格低等優點, 於光電系統產品中應用範圍十分廣泛。由於雷射二極體製 200414640 作精細,技術層次高,生產設備昂貴,元件價格卻低廉’ 因此由光電產業整體視之,雷射二極體是極重要的關鍵性 元件。 雷射二極體依波長及應用大致分為短波長與長波長雷 射兩大類。短波長雷射泛指發光波長由390nm至950nm之 雷射,主要使用於光碟機、雷射印表機、條碼機、掃描器、 以及指示器等光資訊與顯示應用中。而長波長雷射則是指 發光波長由980nm至1 550nm之雷射,主要用於光纖通訊。 另一類發展迅速的雷射二極體是垂直腔面射型雷射 (Vertical Cavity Surface Emitting Laser ; VCSEL),此元件 與傳統雷射二極體基本的差別在於共振腔與磊晶層相對位 置之不同。傳統的雷射二極體的共振腔與磊晶層平行,其 中反射面係利用晶體自然斷裂面形成而與磊晶層垂直,且 雷射光由側面發出,故傳統的雷射二極體又稱為邊射型雷 射(Edge Emitting Laser; EEL)。而垂直腔面射型雷射的共 振腔與蠢晶層垂直,其中反射面係由磊晶層或表層介電質 薄膜組成’而雷射光由正面發出,故稱為垂直腔面射型雷 射。由於垂直腔面射型雷射的共振腔非常短,故增益物質 (Gain Media)少’且輪出功率也受到極大的限制。典型的垂 直腔面射型雷射之輪出功率在lmW左右。然而,由於垂直 腔面射型雷射的輸出光束呈圓形對稱,易於與光纖耦合, 且又方便製作垂直腔面射型雷射陣列(Array),故未來可望 取代部份低功率的邊射型雷射二極體,使系統價格再降 7 200414640 低。其中,850nm的垂直腔面射型雷射已於i 997年上市, 並於1 998年開始進入各種區域網路(L〇cal Area Network ; LAN)中,並獲得如光纖網路(Fibre Channel)和十億位元 (Gigabit)乙太網路等十億位元級傳輸模組之標準所採用, 藉以進行短距離之大量資訊之傳輸工作。 傳統之半導體雷射在應200414640 The invention is guessed (the description of the invention should state: the invention of dirty vines, or the previous technology, content, and implementation methods are illustrated in a simple diagram) The technical field to which the invention belongs: The present invention relates to the packaging of an optical sub-module component Structure and method for controlling optical power output thereof, and in particular, to a packaging structure of an optical sub-module element in which an attenuation sheet is placed into a groove in the sleeve from the outer side of the sleeve and a method for controlling optical power output thereof . Prior Technology: An application area created by the Optoelectronics Department combining electronics and optics. Among them, the optical transceiver module in the optoelectronic component may include a transmitter (Transmitter), a receiver (Receiver), or the two can be integrated into a transceiver (Transceive0. The function of the transmitter is to convert electrical signals into optical signals and transmit them out) Transmitters are generally distinguished according to light sources. The light sources used for optical fiber communication are mainly light-emitting diodes and laser diodes. Because laser diodes have high output power, fast transmission speed, and small light-emitting angles ( It means that the light source is more efficient in coupling into the fiber), and has a narrower spectrum (smaller dispersion), so it is more suitable for medium and long distance transmission. As for the light emitting diode, it has low cost and is easier to use (driving It is simpler than the compensation circuit) and is suitable for short-distance transmission. Laser diodes or semiconductor lasers have small size, low power consumption, fast response, impact resistance, long life, high efficiency, and low price. And other advantages, it is widely used in optoelectronic system products. Due to the sophisticated laser diode system 200414640, high technical level and expensive production equipment The price of components is low, so from the perspective of the optoelectronic industry as a whole, laser diodes are extremely important and critical components. Laser diodes are roughly divided into two categories, short wavelengths and long wavelengths. Lasers generally refer to lasers with emission wavelengths from 390nm to 950nm, and are mainly used in optical information and display applications such as optical disc drives, laser printers, barcode printers, scanners, and indicators. Long-wavelength lasers are Refers to lasers with emission wavelengths from 980nm to 1 550nm, which are mainly used for optical fiber communication. Another type of laser diode that is developing rapidly is Vertical Cavity Surface Emitting Laser (VCSEL). The basic difference between laser diodes is the relative position of the resonant cavity and the epitaxial layer. The resonant cavity of a traditional laser diode is parallel to the epitaxial layer, in which the reflective surface is formed by the natural fracture surface of the crystal and the epitaxial layer. The vertical layer and the laser light emitted from the side, so the traditional laser diode is also known as edge-emitting laser (Edge Emitting Laser; EEL). The vertical cavity surface-emitting laser's resonance cavity is perpendicular to the stupid crystal layer The reflection surface is composed of an epitaxial layer or a surface dielectric film, and the laser light is emitted from the front side, so it is called a vertical cavity surface shot laser. Because the resonant cavity of a vertical cavity surface shot laser is very short, the gain is There is less material (Gain Media) and the output power is also greatly limited. The output power of a typical vertical cavity surface laser is around lmW. However, the output beam of a vertical cavity surface laser is circular Symmetric, easy to couple with optical fiber, and easy to make vertical cavity surface-emitting laser array (Array), so it is expected to replace some low-power edge-emitting laser diodes in the future, reducing the system price 7 200414640 low . Among them, 850nm vertical cavity surface-emission lasers were launched in 997, and began to enter various area networks (Local Area Network; LAN) in 1998, and obtained such as optical fiber networks (Fibre Channel) And Gigabit Ethernet and other billion-level transmission module standards are adopted to carry out large-scale information transmission over short distances. Traditional semiconductor lasers

(Metal-Can)。為了滿足不同的應用需求,在半導體雷射隹 裝成金屬罐之前,於金屬蓋之玻璃窗上往往需先鍍上券 膜,以控制雷射所輸出之光功率之大小,然後再將金屬』 蓋上以封裝成金屬罐。接著,進行二次封裝,以形成具^ 光學機構之光學次模組元件(〇ptical Sub_AsSembly ' OSA)。請參考第i圖所繪示之習知雷射二極體封裝之結木 剖面圖,其中金屬罐封裝之形式為平面玻璃。第i圖中白 光學次棋組TL件1〇〇包括半導體雷射二極體、基座2〇 引腳3〇、金屬蓋40、玻璃窗50、薄膜60、套管80、護$ 以及光纖92等元件。其中,半導體雷射二極體1〇 γ 固疋至基座20之一表面上。引腳30則連接至基座20之;(Metal-Can). In order to meet different application requirements, before a semiconductor laser is packaged into a metal can, a coupon film is often coated on the glass window of the metal cover to control the amount of optical power output by the laser. Cover to seal into a metal can. Next, secondary packaging is performed to form an optical sub-module element (Optical Sub_AsSembly 'OSA) with a ^ optical mechanism. Please refer to the cross-sectional view of the conventional laser diode package shown in Figure i. The metal can package is in the form of flat glass. The white optical sub-group TL 100 in the figure i includes a semiconductor laser diode, a base 20 pins 30, a metal cover 40, a glass window 50, a film 60, a sleeve 80, a protective cover, and an optical fiber. 92 and other components. The semiconductor laser diode 10 γ is fixed on one surface of the base 20. Pin 30 is connected to the base 20;

表面用以傳輪電氣訊號。所謂半導體雷射二極體丨〇自 金屬罐封裝係指將金屬蓋40套至基座20,藉以保護半$ ,雷射一極體10。金屬蓋40的中央部分具有一貫穿金^ 蓋 40 之: ^ d ’而玻璃窗50則嵌在此孔洞中,藉以當金义 盖4 0套至其 土座20上時,半導體雷射二極體10所發出的^ 射光可穿越姑& 坡螭m 50而到達金屬蓋40之外部。為了控3 8 200414640 雷射所輸出之光功率之大小以滿足不同的應用需求,在金 屬蓋4〇套至基座20上之前,於金屬蓋4〇之玻璃窗50上 需先鑛上薄膜60。當玻璃窗50上鍍上薄膜60之後,接著 便可將金屬蓋+ ^ 套至基座20上,而在金屬蓋4〇與基座 20間形成空間7〇。 …、後將套管80套至金屬蓋40上,並將其中具有光 纖92之濩套90置入套管8〇中之孔洞,藉以形成空間71 與空間77,i φ , ,、中工間71位於金屬蓋40與薄膜60上,空 間7 7位於空間7 ί ϊ- ^ , J / 1上’而其中具有光纖92之護套9〇則位 於工間77上。此外,套管80需具備透鏡82,藉以做為光 線聚焦之用。 上述第1圖中所繪示之金屬罐封裝為平面玻璃形式, 係因玻璃_ 50平行基座2〇。另有一種斜面玻璃之金屬罐 封表形式,如第2圖中所示。在第2圖中,玻璃窗52並不 平订基座20,而是與基座2〇成一角度。如前所述,在金 屬盖42套至基座2〇上之前,於金屬蓋42之玻璃窗52上 而先鍍上薄膜62。當玻璃窗52上鍍上薄膜62之後,接著 便可將金屬蓋42套至基座2〇上,而在金屬蓋42與基座 2〇間形成空間72。然後,將套管go套至金屬蓋42上, 並將其中具有光纖92之護套90置入套管80中之孔洞,藉 以形成空間73與空間77,其中空間73位於金屬蓋42與 薄膜62上’空間77位於空間π上,而其中具有光纖92 之護套90則位於空間77上。此外,套管8〇需具備透鏡 9 200414640 82,藉以做為光線聚焦之用。 再者,更有一種球面玻璃之金屬罐封裝形式,如第3 圖中所示。在第3圖中,玻璃窗54之表面為球面。如前所 述,在金屬蓋44套至基座20上之前,於金屬蓋料之玻璃 窗54上需先鍍上薄膜64。當玻璃窗54上鍍上薄膜之 後,接著便可將金屬蓋44套至基座2〇上,而在金屬蓋44 與基座20間形成空間74。然後,將套管8〇套至金屬蓋 上,並將其中具有光纖92之護套9〇置入套管8〇中之孔The surface is used to transmit electrical signals to the wheel. The so-called semiconductor laser diode self-encapsulation means that the metal cover 40 is sleeved on the base 20 to protect half of the laser diode 10. The central part of the metal cover 40 has a through hole ^ of cover 40: ^ d 'and the glass window 50 is embedded in this hole, so that when the gold cover 40 is set on its earthen seat 20, the semiconductor laser diode The light emitted by the body 10 can pass through the & slope 50 and reach the outside of the metal cover 40. In order to control the amount of optical power output by 3 8 200414640 laser to meet different application requirements, before the metal cover 40 is set on the base 20, the glass window 50 on the metal cover 40 needs to be coated with a film 60. . After the glass window 50 is coated with the thin film 60, a metal cover + ^ can be placed on the base 20, and a space 70 is formed between the metal cover 40 and the base 20. …, Then put the sleeve 80 on the metal cover 40, and insert the sleeve 90 with the optical fiber 92 into the hole in the sleeve 80, so as to form the space 71 and the space 77, i φ,, and the middle room. 71 is located on the metal cover 40 and the film 60, the space 7 7 is located on the space 7, and the jacket 90, which has the optical fiber 92 therein, is located on the workshop 77. In addition, the sleeve 80 needs to be provided with a lens 82 for focusing the light. The metal can package shown in the above Figure 1 is in the form of flat glass, because the glass_50 is parallel to the base 20. There is also a form of metal can sealing for beveled glass, as shown in Figure 2. In Fig. 2, the glass window 52 does not flatly align the base 20, but forms an angle with the base 20. As described above, before the metal cover 42 is set on the base 20, the glass window 52 of the metal cover 42 is coated with a thin film 62 first. After the glass window 52 is coated with the thin film 62, the metal cover 42 can be placed on the base 20, and a space 72 is formed between the metal cover 42 and the base 20. Then, the sleeve go is sleeved on the metal cover 42, and the sheath 90 with the optical fiber 92 is inserted into the hole in the sleeve 80 to form a space 73 and a space 77, wherein the space 73 is located on the metal cover 42 and the film 62. The upper space 77 is located on the space π, and the sheath 90 having the optical fiber 92 therein is located on the space 77. In addition, the tube 80 must be provided with a lens 9 200414640 82 for focusing the light. In addition, there is a metal can packaging form of spherical glass, as shown in Figure 3. In FIG. 3, the surface of the glass window 54 is spherical. As described above, before the metal cover 44 is set on the base 20, the glass window 54 of the metal cover material needs to be coated with a thin film 64 first. After the glass window 54 is coated with a thin film, the metal cover 44 can then be placed on the base 20, and a space 74 is formed between the metal cover 44 and the base 20. Then, the ferrule 80 is put on the metal cover, and the sheath 90 having the optical fiber 92 therein is inserted into the hole in the ferrule 80.

洞,藉以形成空間75與空間77,其中空間75位於金屬^ 44與薄膜64上,空間77位於空間乃上,而其中具有^ 纖92之護套90則位於空間77上。此外,由於表面為球3 之玻璃窗54即具有透鏡之功能,因此第3圖中的套管8 並不需如第1圖與第2圖中的套管8〇 一樣具有透鏡“The hole forms a space 75 and a space 77, wherein the space 75 is located on the metal 44 and the film 64, the space 77 is located on the space, and the sheath 90 having the fiber 92 is located on the space 77. In addition, since the glass window 54 whose surface is the ball 3 has the function of a lens, the sleeve 8 in Fig. 3 does not need to have a lens like the sleeve 8 in Figs. 1 and 2 "

如上所述,傳統之雷射二極體在封裝成金屬罐前,需 先在金屬蓋之玻璃窗上鍍上薄膜,再以金屬蓋將雷射二極 體封裝成金屬罐,如此可藉以控制半導體雷射之光功率。 ^而 *雷射二極體之金屬罐封裝進一步進行二次封裝以 形成具光學機構之光學次模組元件時,往往會造成光功率 的遺漏,致使產品之光功率無法精確掌握,因而使產品的 穩定性降低,並且嚴重地影響產品之良率。 發明内容: 乂鑒於上述發明背景中,習知雷射二極體在封裝成金屬 罐前,需先在金屬蓋之玻璃窗上鍍上薄膜,再以金屬蓋將 10 200414640As mentioned above, before the traditional laser diode is packaged into a metal can, it must be coated with a thin film on the glass window of the metal cover, and then the laser diode is packaged into a metal can with a metal cover. Optical power of semiconductor lasers. ^ And when the metal can package of the laser diode is further packaged to form an optical sub-module component with an optical mechanism, the optical power is often missed, which makes the optical power of the product unable to be accurately grasped, thus making the product The stability of the product is reduced, and the yield of the product is seriously affected. Summary of the Invention: 乂 In view of the above background of the invention, before the conventional laser diode is packaged into a metal can, it needs to be coated with a thin film on the glass window of the metal cover, and then the metal cover is used to cover it. 10 200414640

雷射二極體封褽成金屬罐。然而,當雷射二極體之金屬罐 封裝進一步進行二次封裝以形成具光學機構之光學次模組 元件時,往往會造成光功率的遺漏,致使產品之光功率無 法精確掌握。因此,本發明之一目的為提供一種光學次模 組元件之封襞結構及其光功率輸出之控制方法,可於光學 次模組元件組裝後再進行光功率調變,以精確地控制光學 次模組元件之光功率輸出,並有效解決光學次模組元件組 裝時所造成之光功率遺漏。 本發明之另一目的為提供一種光學次模組元件之封裝 結構及其光功率輸出之控制方法,可藉以隨時更換衰減 片,以調變輸出之光功率。 本發明Μ -目㈤為提供一㈣學次模組元件之封裳 結構及其光功率輸出之控制方法 可不受不同之金屬罐封 裝方式(平面玻璃、斜面 由套管之外側面將衰減片 光功率之大小。 玻璃、或球面破璃)之影響,均可 置入套管之凹槽中,以精確控制The laser diode is sealed into a metal can. However, when the metal can package of the laser diode is further packaged to form an optical sub-module component with an optical mechanism, the optical power is often missed, and the optical power of the product cannot be accurately grasped. Therefore, an object of the present invention is to provide a sealing structure of an optical sub-module element and a method for controlling optical power output thereof, which can perform optical power modulation after the optical sub-module element is assembled to accurately control the optical sub-module. The optical power output of the module components can effectively solve the leakage of optical power caused by the assembly of optical sub-module components. Another object of the present invention is to provide a packaging structure of an optical sub-module element and a method for controlling the optical power output thereof, so that the attenuation sheet can be replaced at any time to adjust the output optical power. The M-head of the present invention is to provide a sealing structure of a module module and a method for controlling the optical power output of the module, which are not affected by different packaging methods of metal cans (flat glass, beveled surface will attenuate sheet light from the outer side of the sleeve) The size of the power. The influence of glass or spherical glass can be placed in the groove of the sleeve for precise control

本發明之又^一目的為提供 結構及其光功率輸出之控制方 搭配,以進行光功率之二次調 良率。 一種光學次模組元件之封裝 法,可與傳統之鍍膜金屬罐 整,因而大幅降低產品之不 本發明之另一目的為提供一種光 結構及其光功率輸出之控制方法,可:^模組元件之封裝 元件之製程中,各元件間光電效攻改善光學次模組 化過大之情況。 11 200414640 依據本發明之上述目的,因此本發明提供一種光學次 杈組兀件之封裝結構,至少包括:基座;帛導體雷射二極 體固疋至基座之表面上;金屬蓋,套在基座上,藉以在 金屬蓋與基座間花?上、& # Β日 、 和 形成第一二間,而半導體雷射二極體係位 於第工間中’其中金屬蓋中嵌入-玻璃窗,藉以使半導 體雷:二極體所發射出之半導體雷射可穿越玻璃窗而到達 :屬蓋之外部;套^ ’套在金屬蓋上,藉以在套管與金屬 蓋間幵7成第-空間,其中套管中具有凹槽,此凹槽從套管 之側面延伸進入套管中,且凹槽與第二空間具有一共同之 相交部分·,以及衰減片,置入上述凹槽中,藉以使得半導 體雷射穿越衰減片。 A依據本發明之上述目的,因此本發明另提供一種光學 次模組元件之光功率輸出之控制方法,至少包括下列步 驟首先,提供基座;接著,將一半導體雷射二極體固定 至基座之表面上;接著,將一金屬蓋套在基座上,藉以在 金屬蓋與基座間形成第一空間,而半導體雷射二極體係位 於第一空間中,其中金屬蓋中嵌入一玻璃窗,藉以使半導 體雷射二極體所發射出之半導體雷射可穿越玻璃窗而到達 金屬蓋之外部;接著,將一套管套在金屬蓋上,藉以在套 官與金屬蓋間形成第二空間,其中套管中具有一凹槽,此 凹槽從套管之側面延伸進入套管中,且凹槽與第二空間具 有/、同之一相交部分;以及,將一衰減片置入凹槽中,藉 以使得上述半導體雷射可穿越衰減片。 12 200414640 實施方式: 本發明係有關於一種光學次模組元件之封襞結構及其 光功率輸出之控制方法,其中本發明可用於垂直腔面射型 雷射或邊射型雷射。請參考第4圖所繪示之本發明之一較 佳實施例之光學次模組元件封裝之結構剖面圖。第4圖中 的光學次模組元件200包括半導體雷射二極體11〇、基座 120、引腳130、金屬蓋144、玻璃窗154、套管18〇、護套 190、光纖192、以及衰減片21〇等元件。其中,半導體雷 射二極體1 ίο係固定至基座120之一表面上。引腳13〇則 連接至基座120之另一表面,用以傳輸電氣訊號。此外, 光學次模組元件200之形式可為sc或LC。 至於’半導體雷射二極體11()的金屬罐封裝係指將金 屬蓋144套至基座12〇,藉以保護半導體雷射二極體11〇。 此外,金屬蓋144的中央部分具有一貫穿金屬蓋144之孔 洞,而玻璃窗1 54則嵌在此孔洞中,藉以當金屬蓋丨44套 至基座120上時,半導體雷射二極體11〇所發出的雷射光 可穿越玻璃窗154而到達金屬蓋144之外部。另外,當金 屬蓋144套至基座120上時,在金屬蓋144與基座12〇間 形成空間1 74,其中半導體雷射二極體丨丨〇係位於空間i 74 中。 然後,將套管180套至金屬蓋144上,並將其中具有 光纖192之護套190置入套管18〇中之孔洞,藉以在金屬 蓋144、玻璃窗154、套管180、以及護套19〇間形成空間 13 200414640 175與空間177 ’其中空間175位於金屬蓋144與玻璃窗 154上’空間177位於空間175上,而其中具有光纖i92 之護套190則位於空間丨77上。此外,套管丨8〇之材質例 如可為金屬、高分子、或陶堯等。 本發明之主要特徵之一在於,套管18〇具有凹槽2〇5。 凹槽205係從套管180之一外側面延伸進入套管18〇中且 與空間177相交。亦即,凹槽2〇5之至少其中一端係與外 界相通,而凹槽205與空間177具有共同之一相交部分。 本發明之另一主要特徵為,具有衰減片21〇,置入上述 凹槽205中’藉以使得半導體雷射二極體i丨〇所發射出之 半導體雷射可沿著光軸215依序穿越空間174、玻璃窗 1 54、空間1 75、空間1 77、衰減片2 1 〇而到達光纖1 92。 衰減片210之功用在於’可使穿越其中之半導體雷射 之光功率衰減至一預設值,藉以使得半導體雷射之光功率 可被任意精確調整以符合實際需求。至於,衰減片210係 由基材與薄膜等所組成,而薄膜係鍍至基材上,其中基材 之材貝可為玻璃或塑膠專’而薄膜之材質可為金屬薄膜、 高反射(High Reflection ; HR)薄膜、或者光吸收薄膜等。 此外,衰減片2 1 0可根據實際之光功率需求而隨時予以更 換。 上述第4圖中的光學次模組元件2〇〇係藉由衰減片2 i 〇 來調整半導體雷射二極體110所發射出之半導體雷射之光 功率。然而,本發明亦可應用於如第5圖所示。亦即,金 14 200414640 屬蓋144在套至基座120之前,嵌入至金屬i μ之孔洞 中的玻璃窗154可先鍍上薄臈164,其材質可為金屬薄膜、 高反射薄膜、或光吸收薄膜。然後,再將金屬i 144套至 基座120上,藉以進行光功率之第一次調整。至於仪” 套官180套至金屬蓋! 44上並將衰減片21〇置入凹槽2〇 中以進灯光功率之第二次調整之過程則與第4圖中相同。 另外,上述第4圖與第5圖中的玻璃窗154之形式名 球面玻璃。事實上,本發明亦可適用於玻璃窗154之形3 為平面玻璃或斜面玻璃之情況。至於,玻璃窗154之形式 為平面玻璃或斜面玻璃之情況可分別參考前述習知第丨圖It is another object of the present invention to provide a structure and a control method for the optical power output, so as to perform the secondary adjustment of the optical power. An optical sub-module component packaging method can be integrated with traditional coated metal cans, thus greatly reducing the product. Another object of the present invention is to provide an optical structure and a method for controlling optical power output, which can: ^ Module In the process of packaging the components, the photoelectric efficiency of each component improves the situation that the optical sub-module is too large. 11 200414640 In accordance with the above purpose of the present invention, the present invention provides a package structure for an optical sub-trigger assembly including at least: a base; a 帛 conductor laser diode is fixed to the surface of the base; a metal cover, a sleeve On the base, to spend between the metal cover and the base? , &Amp;# Β 日, and forming the first two rooms, and the semiconductor laser diode system is located in the second room 'where the metal cover is embedded in the glass window, so that the semiconductor laser: the semiconductor emitted by the diode The laser can pass through the glass window and reach: it is outside the cover; the sleeve is placed on the metal cover, so as to form a 70% space between the sleeve and the metal cover, wherein the sleeve has a groove, and the groove is from The side of the sleeve extends into the sleeve, and the groove and the second space have a common intersection portion, and an attenuation sheet is placed in the groove, so that the semiconductor laser passes through the attenuation sheet. A According to the above purpose of the present invention, the present invention further provides a method for controlling the optical power output of optical sub-module components, which includes at least the following steps. First, a base is provided; then, a semiconductor laser diode is fixed to the base. Then, a metal cover is placed on the base to form a first space between the metal cover and the base. The semiconductor laser diode system is located in the first space, and a glass window is embedded in the metal cover. , So that the semiconductor laser emitted by the semiconductor laser diode can pass through the glass window and reach the outside of the metal cover; then, a set of tubes is sleeved on the metal cover to form a second between the cover officer and the metal cover A space, wherein the sleeve has a groove therein, the groove extends from the side of the sleeve into the sleeve, and the groove and the second space have an intersecting portion; and an attenuation sheet is placed in the recess In the slot, the semiconductor laser can pass through the attenuator. 12 200414640 Embodiment: The present invention relates to a sealing structure of an optical sub-module element and a method for controlling optical power output thereof, wherein the present invention can be used for a vertical cavity surface emitting laser or an edge emitting laser. Please refer to FIG. 4 for a structural cross-sectional view of an optical sub-module component package according to a preferred embodiment of the present invention. The optical sub-module element 200 in FIG. 4 includes a semiconductor laser diode 110, a base 120, a pin 130, a metal cover 144, a glass window 154, a sleeve 18, a sheath 190, an optical fiber 192, and Attenuator 21 and other components. The semiconductor laser diode 1 is fixed on one surface of the base 120. Pin 13 is connected to the other surface of base 120 for transmitting electrical signals. In addition, the form of the optical sub-module element 200 may be sc or LC. As for the metal can package of the 'semiconductor laser diode 11', the metal cap 144 is set to the base 120 to protect the semiconductor laser diode 110. In addition, the central part of the metal cover 144 has a hole penetrating through the metal cover 144, and the glass window 154 is embedded in this hole, so that when the metal cover 44 is set on the base 120, the semiconductor laser diode 11 The emitted laser light can pass through the glass window 154 and reach the outside of the metal cover 144. In addition, when the metal cover 144 is placed on the base 120, a space 1 74 is formed between the metal cover 144 and the base 120. The semiconductor laser diode 丨 丨 0 is located in the space i 74. Then, the ferrule 180 is sleeved on the metal cover 144, and the sheath 190 having the optical fiber 192 therein is inserted into the hole in the ferrule 180, so that the metal cover 144, the glass window 154, the sleeve 180, and the sheath are The space between 190 and 13 200414640 175 and space 177 'where space 175 is located on metal cover 144 and glass window 154' space 177 is located on space 175, and the sheath 190 with optical fiber i92 is located on space 77. In addition, the material of the sleeve 丨 80 may be metal, polymer, or Tao Yao. One of the main features of the present invention is that the sleeve 18 has a groove 205. The groove 205 extends from one outer side of the sleeve 180 into the sleeve 180 and intersects the space 177. That is, at least one end of the groove 205 is in communication with the outside world, and the groove 205 and the space 177 have a common intersection portion. Another main feature of the present invention is that it has an attenuator 21, which is inserted into the groove 205, so that the semiconductor laser emitted by the semiconductor laser diode i 丨 〇 can be sequentially passed along the optical axis 215 The space 174, the glass window 1 54, the space 1 75, the space 1 77, and the attenuation sheet 2 1 0 reach the optical fiber 1 92. The function of the attenuating sheet 210 is to attenuate the optical power of the semiconductor laser passing through it to a preset value, so that the optical power of the semiconductor laser can be arbitrarily and precisely adjusted to meet actual needs. As for the attenuation sheet 210, it is composed of a base material and a thin film, and the thin film is plated on the base material, wherein the material of the base material can be glass or plastic, and the material of the thin film can be a metal thin film, high reflection (High Reflection; HR) film, or light absorbing film. In addition, the attenuation sheet 2 10 can be replaced at any time according to the actual optical power requirements. The optical sub-module element 200 in the above FIG. 4 adjusts the optical power of the semiconductor laser emitted by the semiconductor laser diode 110 through the attenuation sheet 2 i 〇. However, the present invention can also be applied as shown in FIG. 5. That is, before the cover 14 of the gold 14 200414640 is placed on the base 120, the glass window 154 embedded in the hole of the metal i μ may be plated with a thin 臈 164, and the material may be a metal film, a highly reflective film, or light. Absorptive film. Then, the metal i 144 is put on the base 120 to perform the first adjustment of the optical power. As for the instrument's official set of 180 sets to the metal cover! 44 and the attenuation sheet 21o is placed in the groove 20 to perform the second adjustment of the light power. The process is the same as that in Figure 4. In addition, the above 4 The form of the glass window 154 in the figure and FIG. 5 is called spherical glass. In fact, the present invention can also be applied to the case where the shape 3 of the glass window 154 is flat glass or beveled glass. As for the form of the glass window 154 is flat glass For the case of beveled glass, please refer to the previous figure.

與第2圖中所繪示者。 綜合上述,本發明之一優點為提供一種光學次模組元 件之封裝結構及其光功率輸出之控制方法,可於光學次模 組兀件組裝後再進行光功率調變,以精確地控制光學次模 組元件之光功率輸出,並有效解決光學次模組元件組裝時 所造成之光功率遺漏。As shown in Figure 2. To sum up, one advantage of the present invention is to provide an optical sub-module component packaging structure and a method for controlling optical power output, which can perform optical power modulation after the optical sub-module components are assembled to accurately control the optical The optical power output of the sub-module components can effectively solve the optical power leakage caused by the assembly of the optical sub-module components.

本發明之另一優點為提供一種光學次模組元件之封鲈 結構及其光功率輸出之控制方法,可藉以隨時更換衰減 片,以調變輸出之光功率。 、彳 本發明之再一優點為提供一種光學次掇 俱組疋件之封裝 結構及其光功率輸出之控制方法,可不受 又不冋之金屬罐封 裝方式(平面玻璃、斜面玻璃、或球面坡璃、 』〈衫響,均可 由套管之外側面將衰減片置入套管之凹槽φ 、 ,以精確控制 15 200414640 光功率之大小。 本發明之又-優點為提供一種光學次模組元件 結構及其光功率輸出之控制方法’可與傳統之鍍膜 搭配,以進行光功率之二次調整,因而大幅降低產良率。 本發明之另-優點為提供一種光學次模組元件 結構及其光功率輸出之控制方法,可有效改善光學 元件之製程中,各件間光電效率變化過大之情況 如熟悉此技術之人員所瞭解的,以上所述^為 之較佳實施例而已,並非用以限定本發明之申請 圍;凡其它未脫離本發明所揭示之精神下所完成之 變或修飾,均應包含在下述之申請專利範圍内。 圖式簡單說明: 第1圖係繪示習知雷射二極體封裝之結構剖面 中金屬罐封裝之形式為平面破璃; 第2圖係繪示另一習知雷射二極體封裝之結 其中金屬罐封裝之形式為斜面玻璃; 第3圖係繪示又一習知雷射二極體封裝之灶 其中金屬罐封裝之形式為球面玻璃; 。 第4圖係繪,示本發明之—較佳實施例之光學次 件封裝之結構剖面圖;以及 第5圖係繪示本發明之另一較佳實施例之光學 元件封裝之結構剖面圖。 之封裝 金屬罐 品之不 之封裝 次模組 〇 本發明 專利範 等效改 圖,其 圖 圖 構剖面 構剖面 模組元 次模組 16 200414640 圖號對照說明: 10 半導體雷射二極體 20 30 引腳 40 42 金屬蓋 44 50 玻璃窗 52 54 玻璃窗 60 62 薄膜 64 70 空間 71 72 空間 73 74 空間 75 77 空間 80 82 透鏡 90 92 光纖 100 110 半導體雷射二極體 120 130 引腳 144 154 玻璃窗 164 174 空間 175 177 空間 180 190 護套 192 200 光學次模組元件 205 210 衰減片 215 基座 _ 金屬蓋 ' 金屬蓋 玻璃窗 薄膜 薄膜 空間 Φ 空間 空間 套管 護套 光學次模組元件 基座 金屬蓋 薄膜 空間 φ 套管 光纖 凹槽 光轴 17Another advantage of the present invention is to provide a sealed structure of an optical sub-module element and a method for controlling the optical power output thereof. The attenuator can be replaced at any time to adjust the output optical power. Another advantage of the present invention is to provide a packaging structure of optical sub-assembly components and a method for controlling the optical power output, which can be unencumbered by metal can packaging methods (flat glass, beveled glass, or spherical slope). The glass can be placed in the groove φ, of the sleeve from the outer side of the sleeve to accurately control the optical power of 15 200414640. Another advantage of the present invention is to provide an optical sub-module Element structure and method for controlling optical power output 'can be matched with traditional coatings to perform secondary adjustment of optical power, thereby greatly reducing yield. Another advantage of the present invention is to provide an optical sub-module element structure and The optical power output control method can effectively improve the optical element efficiency during the manufacturing process of optical components. As those skilled in the art understand, the above is only a preferred embodiment. To limit the scope of the application of the present invention; all other changes or modifications made without departing from the spirit disclosed by the present invention should be included in the scope of patent application described below Schematic description: Figure 1 shows the structure of a conventional laser diode package. The metal can package in the cross section is a flat glass. Figure 2 shows another conventional laser diode package. The result is that the metal can package is in the form of bevel glass; Figure 3 shows another conventional laser diode package cooker in which the metal can package is in the form of spherical glass; Figure 4 is a diagram showing the invention -The structural sectional view of the optical secondary component package of the preferred embodiment; and FIG. 5 is a structural sectional view of the optical element package of another preferred embodiment of the present invention. Submodule 〇 Equivalent modification of the patent scope of the present invention, its drawing structure, section, section, module, submodule 16 200414640 Drawing number comparison description: 10 semiconductor laser diode 20 30 pin 40 42 metal cover 44 50 Glass window 52 54 Glass window 60 62 Film 64 70 Space 71 72 Space 73 74 Space 75 77 Space 80 82 Lens 90 92 Optical fiber 100 110 Semiconductor laser diode 120 130 Pin 144 154 Glass window 164 174 Space 175 17 7 Space 180 190 Sheath 192 200 Optical sub-module element 205 210 Attenuation sheet 215 Base _ Metal cover 'Metal cover glass window film film space Φ Space space sleeve sheath Optical sub-module element base metal cover film space φ Optical fiber grooved optical axis 17

Claims (1)

200414640 申請專利範圍 ι· 一種光學次模組元件(0ptical Sub Assembiy; 〇sa) 之封裝結構,至少包括: 一基座; 一半導體雷射二極體, 固定至該基座之一表面上;200414640 Scope of patent application ι · An optical sub-module component (0ptical Sub Assembiy; 〇sa) package structure, at least includes: a base; a semiconductor laser diode, fixed to a surface of the base; 金屬蓋,忒金屬蓋套在該基座上,藉以在該金屬蓋 與該基座間形成一第一空間,而該半導體雷射二極體係位 於該第-空間+,其中該金屬蓋中礙入一玻璃窗,藉以使 該半導體雷射二極體所發射出之一半導體雷射可穿越該玻 璃窗而到達該金屬蓋之外部; 套管’该套管套在該金屬蓋上,藉以在該套管與該 金屬蓋間形成一第二空間,其中該套管中具有一凹槽,該 凹槽從該套管之一外側面延伸進入該套管中,且該凹槽與 該第二空間具有共同之一相交部分;以及 一衰減片,置入該凹槽中,藉以使得該半導體雷射穿 越該衰減片。A metal cover, a metal cover is sleeved on the base, thereby forming a first space between the metal cover and the base, and the semiconductor laser diode system is located in the -space +, in which the metal cover hinders access A glass window, so that a semiconductor laser emitted by the semiconductor laser diode can pass through the glass window and reach the outside of the metal cover; a sleeve, 'the sleeve is sleeved on the metal cover, thereby A second space is formed between the sleeve and the metal cover, wherein the sleeve has a groove therein, the groove extends from an outer side of the sleeve into the sleeve, and the groove and the second space Having a common intersecting portion; and an attenuating sheet inserted into the groove, so that the semiconductor laser passes through the attenuating sheet. 2.如申請專利範圍第1項所述之光學次模組元件之封 裝結構,其中該半導體雷射係選自於由垂直腔面射型雷射 (Vertical Cavity Surface Emitting Laser ; VCSEL)以及邊射 型雷射(Edge Emitting Laser ; EEL)所組成之一族群。 18 200414640 3. 如申請專利範圍第1項所述之光學次模組元件之封 一 裝結構,其中該衰減片至少包括: 一基材;以及 一薄膜,鍵至該基材之一表面上。 4. 如申請專利範圍第3項所述之光學次模組元件之封 裝結構,其中該基材之材質係選自於由玻璃以及塑膠所組 成之一族群。 _ 5 .如申請專利範圍第3項所述之光學次模組元件之封 裝結構,其中該薄膜係選自於由金屬薄膜、高反射(High Reflection ; HR)薄膜、以及光吸收薄膜所組成之一族群。 6. 如申請專利範圍第1項所述之光學次模組元件之封 裝結構,其中該玻璃窗之形式係選自於由平面玻璃、斜面 玻璃、以及球面玻璃所組成之一族群。2. The packaging structure of the optical sub-module component according to item 1 of the scope of the patent application, wherein the semiconductor laser is selected from a vertical cavity surface emitting laser (VCSEL) and an edge laser A type of group consisting of edge laser (Edge Emitting Laser; EEL). 18 200414640 3. The encapsulation structure of the optical sub-module element according to item 1 of the scope of the patent application, wherein the attenuating sheet includes at least: a substrate; and a film bonded to a surface of the substrate. 4. The packaging structure of the optical sub-module component according to item 3 of the patent application scope, wherein the material of the substrate is selected from a group consisting of glass and plastic. _ 5. The packaging structure of the optical sub-module element according to item 3 of the scope of patent application, wherein the film is selected from the group consisting of a metal film, a high reflection (HR) film, and a light absorbing film One ethnic group. 6. The packaging structure of the optical sub-module element according to item 1 of the scope of patent application, wherein the form of the glass window is selected from the group consisting of flat glass, beveled glass, and spherical glass. 7. 如申請專利範圍第1項所述之光學次模組元件之封 裝結構,其中該玻璃窗上更具有一薄膜。 8·如申請專利範圍第1項所述之光學次模組元件之封 裝結構,其中該光學次模組元件之形式係選自於由SC以及 LC所組成之一族群。 19 200414640 9.如申請專利範圍第1項所述之光學次模組元件之封 裝結構,其中該套管之材質係選自於由金屬、高分子、以 及陶瓷所組成之一族群。 1 0. —種光學次模組元件之光功率輸出之控制方法, 至少包括:7. The packaging structure of the optical sub-module component according to item 1 of the patent application scope, wherein the glass window further has a thin film. 8. The packaging structure of the optical sub-module component according to item 1 of the scope of the patent application, wherein the form of the optical sub-module component is selected from the group consisting of SC and LC. 19 200414640 9. The encapsulation structure of the optical sub-module component according to item 1 of the scope of patent application, wherein the material of the sleeve is selected from the group consisting of metal, polymer, and ceramic. 1 0. —A method for controlling the optical power output of optical sub-module components, including at least: 提供一基座; 將一半導體雷射二極體固定至該基座之一表面上; 將一金屬蓋套在該基座上,藉以在該金屬蓋與該基座 間形成一第一空間,而該半導體雷射二極體係位於該第一 空間中,其中該金屬蓋中嵌入一玻璃窗,藉以使該半導體 雷射二極體所發射出之一半導體雷射可穿越該玻璃窗而到 達該金屬蓋之外部;Providing a base; fixing a semiconductor laser diode to a surface of the base; covering a metal cover on the base to form a first space between the metal cover and the base, and The semiconductor laser diode system is located in the first space, and a glass window is embedded in the metal cover, so that a semiconductor laser emitted by the semiconductor laser diode can pass through the glass window to reach the metal. Covered outside 將一套管套在該金屬蓋上,藉以在該套管與該金屬蓋 間形成一第二空間,其中該套管中具有一凹槽,該凹槽從 該套管之一外側面延伸進入該套管中,且該凹槽與該第二 空間具有共同之一相交部分;以及 將一衰減片置入該凹槽中,藉以使得該半導體雷射穿 越該衰減片。 1 1 ·如申請專利範圍第1 0項所述之光學次模組元件之 光功率輸出之控制方法,其中該半導體雷射係選自於由垂 20 X200414640 直腔面射型雷射以及邊射型雷射所組成之一族群。 - >0 1 2 .如申請專利範圍第1 0項所述之光學次模組元件之 、 光功率輸出之控制方法,其中該衰減片至少包括: ' 一基材;以及 一薄膜,鑛至該基材之一表面上。 1 3 .如申請專利範圍第1 2項所述之光學次模組元件之 Φ 光功率輸出之控制方法,其中該基材之材質係選自於由玻 璃以及塑膠所組成之一族群。 14.如申請專利範圍第12項所述之光學次模組元件之 光功率輸出之控制方法,其中該薄膜係選自於由金屬薄 膜、高反射薄膜、以及光吸收薄膜所組成之一族群。A set of tubes is sleeved on the metal cover, thereby forming a second space between the sleeve and the metal cover, wherein the sleeve has a groove therein, and the groove extends from an outer side of the sleeve into In the sleeve, the groove and the second space have a common intersection portion; and an attenuation sheet is placed in the groove, so that the semiconductor laser passes through the attenuation sheet. 1 1 · The method for controlling the optical power output of an optical sub-module element as described in item 10 of the scope of the patent application, wherein the semiconductor laser is selected from vertical 20 X200414640 vertical cavity surface-emitting laser and side-emitting laser A type of group consisting of lasers. -> 0 1 2. The method for controlling optical power output of the optical sub-module element according to item 10 of the patent application scope, wherein the attenuating sheet includes at least: 'a substrate; and a film, On one surface of the substrate. 1 3. The method for controlling the Φ optical power output of the optical sub-module element as described in Item 12 of the scope of patent application, wherein the material of the substrate is selected from a group consisting of glass and plastic. 14. The method for controlling the optical power output of the optical sub-module element according to item 12 of the scope of the patent application, wherein the thin film is selected from the group consisting of a metal thin film, a highly reflective thin film, and a light absorbing thin film. 1 5 ·如申請專利範圍第1 0項所述之光學次模組元件之 光功率輸出之控制方法,其中該玻璃窗之形式係選自於由 平面玻璃、斜面玻璃、以及球面玻璃所組成之一族群。 16·如申請專利範圍第10項所述之光學次模組元件之 光功率輸出之控制方法,其中該玻璃窗上更具有一薄膜。 1 7.如申請專利範圍第1 0項所述之光學次模組元件之 21 200414640 光功率輸出之控制方法,其中該光學次模組元件之形式係 選自於由SC以及LC所組成之一族群。 1 8.如申請專利範圍第1 0項所述之光學次模組元件之 光功率輸出之控制方法,其中該套管之材質係選自於由金 屬、高分子、以及陶瓷所組成之一族群。15 · The method for controlling the optical power output of the optical sub-module element as described in Item 10 of the scope of patent application, wherein the form of the glass window is selected from the group consisting of flat glass, beveled glass, and spherical glass One ethnic group. 16. The method for controlling the optical power output of the optical sub-module element according to item 10 of the scope of the patent application, wherein the glass window further has a thin film. 1 7. The method for controlling the optical power output of 21 200414640 of the optical sub-module element as described in item 10 of the scope of patent application, wherein the form of the optical sub-module element is selected from one of SC and LC Ethnic group. 1 8. The method for controlling the optical power output of the optical sub-module element as described in Item 10 of the scope of patent application, wherein the material of the sleeve is selected from a group consisting of metal, polymer, and ceramic . 22twenty two
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