TW200414517A - Integrated circuit embedded with single-poly non-volatile memory - Google Patents
Integrated circuit embedded with single-poly non-volatile memory Download PDFInfo
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200414517200414517
發明所屬之技術領域 本發明係關於一藉撻4主址虚m 統邏輯製程,所製造之:J JJ用f體電路USIC)或傳 (N VM )之積體電路。 人早曰稷日日矽非揮發性記憶體 先前技術 依據過去的設計,電子系統係以一主, ί其ί ii二:例如微處理器或微控制器、:己憶刀 體、、週邊;丨面與匯流排控制器等,彼此以主機板上 路連結。以現今的工業技術,電子系統已可整合於單、一 晶片上,即所謂的系統單晶片(system on chip,簡稱為 S0C晶片)。S0C晶片為一積體電路,包含有處理器、内嵌 記憶體、各類型週邊與外部匯流排介面(external bu/ interface)。此内嵌記憶體可為揮發性記憶體(如靜態記 憶體或動態記憶體)或非揮發性記憶體(唯讀記憶體或快 閃記憶體)。週邊依實施目的不同,可為計數器/計時 器、通用非同步收發器(UART)、並列輸出輸入電路、中 斷控制器,或LCD控制器、繪圖控制器、網路控制器 等。外部匯流排介面使S0C晶片可外接記憶體裝置或與其 它週邊連結。S0C晶片技術之進步讓系統設計人員得以縮 減電子系統所佔用的體積以及測試時間,增加可靠度, 並縮短產品上市時程。FIELD OF THE INVENTION The present invention relates to a 4 main address virtual m system logic process, which is manufactured by J JJ using f-body circuit USIC) or pass (N VM) integrated circuit. People said that the previous technology of silicon non-volatile memory was based on the design of the past. The electronic system is based on the main design, such as a microprocessor or a microcontroller, a memory device, and a peripheral device. The surface and the bus controller are connected to each other on the motherboard. With today's industrial technology, electronic systems can be integrated on a single chip, a so-called system on chip (S0C chip for short). The SOC chip is an integrated circuit, which includes a processor, embedded memory, various types of peripherals and external bus / interface. This embedded memory can be volatile memory (such as static memory or dynamic memory) or non-volatile memory (read-only memory or flash memory). Peripherals can be counters / timers, universal asynchronous transceivers (UARTs), parallel output / input circuits, interrupt controllers, or LCD controllers, graphics controllers, network controllers, etc., depending on the purpose of implementation. The external bus interface enables the S0C chip to be connected to a memory device or connected to other peripherals. Advances in SOC chip technology allow system designers to reduce the volume and test time occupied by electronic systems, increase reliability, and shorten product time to market.
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於 製 w 隧 ,η肊併入標準邏輯製程有個很大的好處在 ρ,、#二;=ζ改變用以製造邏輯電路之單層複晶石夕 s: 一机製私整合或簡化之目❾。依此“票,現已發 .μ二,f底上之單層複晶石夕唯讀記憶體胞,其具 有:^原:極與㈣極及-複晶石夕浮動閘極。然而,此早期 之早曰複晶矽唯項記憶體胞需有一設置於ρ型基底之_ 擴巧區作為控制閘極,並透過一二氧化石夕層,電容輕合 邊浮動閘極。此二氧化矽層具有一通道窗(tunnel i n d 〇 w ) ’開a又於接近N》及極的位置,方便進行電子穿 。此單層複晶矽唯讀記憶體胞之控制閘極與浮動閘極 構成一電容’其作用類似於傳統堆積閘極 (stacked-gate)或雙複晶矽層(d〇uble — p〇1 y)電子抹除式 可程式化唯讀記憶體(EEPR0M)。然而,上述N通道單層複 晶矽唯讀記憶體胞必須在操作電壓達2 0 V的高電壓情況For the system w tunnel, the integration of η 肊 into the standard logic process has a great advantage in that ρ, # 二; = ζ changes the single-layer polycrystalline stone used to manufacture logic circuits. S: a mechanism for private integration or simplified Heads. Based on this, the ticket has been issued. ΜII, a single-layer polycrystalline spar-only memory cell on the f base, which has: ^ Original: pole and ㈣ pole and-polyspar safari floating gate. However, Earlier in the early days, it was said that the polycrystalline silicon mere memory cell needs to have a _ expansion region set on the p-type substrate as a control gate, and through a layer of stone dioxide, the capacitor lightly closes the floating gate. This dioxide The silicon layer has a channel window (tunnel ind 〇w) 'open a and close to N' and the pole position for easy electronic penetration. This single-layer complex-crystal silicon read-only memory cell consists of a control gate and a floating gate. A capacitor 'is similar to a traditional stacked-gate or douplex — p0y y erasable programmable read-only memory (EEPR0M). However, the above N-channel single-layer crystalline silicon read-only memory cells must be operated at high voltages up to 20 V
下,才能進行程式化與抹除的作業,而此高電壓需求卻 限制了進一步縮小元件尺寸的可能。 於美國專利6,0 4 4,0 1 8號中,s u n g與W u揭露了 一種可 運用傳統的互補式金氧半導體(CMOS)製程製造之單層複 晶矽記憶體裝置。一互補胞耦合一 N通道金氧半導體 (NM0S)裝置之浮動閘極至一 P通道金氧半導體(PM0S)之浮 動閘極,其中,上述各閘極至少覆蓋部份源極與部份沒 極。此專利中亦提出利用鄰近於該PM0S之源極之一通道Can only be programmed and erased, but this high voltage requirement limits the possibility of further reducing the component size. In U.S. Patent No. 6,04,018, sung and Wu disclose a single-layer complex silicon memory device that can be manufactured using a conventional complementary metal-oxide-semiconductor (CMOS) process. A complementary cell couples the floating gate of an N-channel metal-oxide-semiconductor (NM0S) device to the floating gate of a P-channel metal-oxide-semiconductor (PM0S) device, where each of the above gates covers at least part of the source and part of the non-electrode . This patent also proposes to use a channel adjacent to the source of the PMOS
第7頁 200414517 五、發明說明(3) 停止區,以抑制源極與汲極間通道的產生,藉此消除 PM0S的汲極至源極電流發生,即使該源極與該汲極間, 使浮動閘極具有一足夠開啟通道之電壓。 上述揭露於美國專利6, 044, 0 1 8號之單層複晶矽記憶 體裝置具有的缺點包括,首先,此記憶體裝置由一 PMOS 裝置與一 NMOS裝置,加上一分隔該兩元件之場氧化層組 成,因此記憶體裝置會佔用不少寶貴的晶片面積。其 二,此記憶體裝置需要製作一額外的通道停止區。其 三,此記憶體裝置需要製作一用以連結兩浮動閘極的導 體或導線,如此導致額外的製程與成本耗費。 發明内容 因此,本發明之主要目的在於提供一能以較低的程 式化或寫入電壓操作,並可以傳統邏輯製程並結合SOC晶 片製程製造之單層複晶矽非揮發性記憶體。本發明單層 複晶矽非揮發性記憶體裝置得以較低的電壓操作,為一 低耗電、低耗能之非揮發性記憶體。 本發明的另一目的在於提供一種可與邏輯製程相 容,佔用較小晶片空間,及較省電等優點之内嵌高密度 單層複晶矽非揮發性記憶體裝置之SOC晶片。Page 7 200414517 V. Description of the invention (3) Stop region to suppress the generation of the channel between the source and the drain, thereby eliminating the occurrence of the drain-to-source current of the PM0S, even if the source and the drain are between, so that The floating gate has a voltage sufficient to turn on the channel. The shortcomings of the single-layer polycrystalline silicon memory device disclosed in the above-mentioned U.S. Patent No. 6,044,0 18 include: first, the memory device consists of a PMOS device and an NMOS device, and a device separating the two components Field oxide layer, so memory devices will occupy a lot of valuable chip area. Second, this memory device requires an additional channel stop area. Thirdly, the memory device needs to be manufactured with a conductor or a wire for connecting two floating gates, which results in extra manufacturing process and cost. SUMMARY OF THE INVENTION Therefore, the main object of the present invention is to provide a single-layer polycrystalline silicon non-volatile memory that can be operated with a lower programming or write voltage and can be manufactured by a conventional logic process combined with a SOC wafer process. The single-layer polycrystalline silicon non-volatile memory device of the present invention can operate at a lower voltage and is a non-volatile memory with low power consumption and low energy consumption. Another object of the present invention is to provide an SOC chip with embedded high-density single-layer polycrystalline silicon non-volatile memory devices that is compatible with logic manufacturing processes, occupies less chip space, and saves power.
200414517 五、發明說明(4) 本發明的另一目的在於提供一種獨特之内嵌高密度 單層複晶矽非揮發性記憶體裝置及其操作方法。 根據本發明之一實施例,提供一積體電路,其組成 包括一核心電路,與一内嵌單層複晶矽非揮發性記憶體 胞陣列之輸出輸入電路,其中,該單層複晶矽非揮發性 記憶體胞包含有一第一 P通道金氧半導體電晶體順序連接 一第二P通道金氧半導體電晶體。該第一與第二P通道金 氧半導體電晶體皆設置於一半導體積底之摻雜井中。該 第一電晶體包含有一單層複晶矽浮動閘極、一第一汲 極、與一第一源極;該第二P通道金氧半導體電晶體包含 有一單層複晶矽選擇閘極與一第二源極,其中,該第一 電晶體之第一源極係作為該第二電晶體之汲極。 於程式化模式時,一摻雜井電壓係施加於該摻雜 井,而該第一電晶體之源極係以一第一電壓為偏壓,與 設置於單層複晶矽浮動閘極之一第二電壓耦合,於該單 層複晶矽浮動閘極下啟動一通道。本發明之優點在於, 由於内嵌單層複晶矽非揮發性記憶體胞與該輸出輸入電 路裝置具有相同之電晶體與裝置結構(舉例而言,該内嵌 單層複晶矽非揮發性記憶體胞係由部分輸出輸入電路裝 置所改製,或以相同的設計格進行製作),因此,相較於 該核心電路裝置,他們得以維持一相對較高的電壓。該 核心電壓裝置得以較低的電壓與較快的速度操作。200414517 V. Description of the invention (4) Another object of the present invention is to provide a unique embedded high-density single-layer polycrystalline silicon non-volatile memory device and a method for operating the same. According to an embodiment of the present invention, an integrated circuit is provided, which includes a core circuit and an input / output circuit of a non-volatile memory cell array with a single-layered polycrystalline silicon embedded therein, wherein the single-layered polycrystalline silicon The non-volatile memory cell includes a first P-channel metal-oxide-semiconductor transistor sequentially connected to a second P-channel metal-oxide-semiconductor transistor. The first and second P-channel metal-oxide-semiconductor transistors are both disposed in a semiconductor doped well. The first transistor includes a single-layer polycrystalline silicon floating gate, a first drain, and a first source; the second P-channel metal-oxide semiconductor transistor includes a single-layer polycrystalline silicon selective gate and A second source, wherein the first source of the first transistor is used as the drain of the second transistor. In the stylized mode, a doped well voltage is applied to the doped well, and the source of the first transistor is biased with a first voltage, and the source of the first transistor is set to a single-layer polycrystalline silicon floating gate. A second voltage coupling activates a channel under the single-layer polycrystalline silicon floating gate. The advantage of the present invention is that, since the embedded single-layered polycrystalline silicon nonvolatile memory cell has the same transistor and device structure as the input / output circuit device (for example, the embedded single-layered polycrystalline silicon non-volatile silicon) The memory cell line is modified by some I / O circuit devices or made with the same design grid), so they can maintain a relatively high voltage compared to the core circuit device. The core voltage device can operate at lower voltages and faster speeds.
200414517 五、發明說明(5) 在不同的製程技術中,具不同操作電壓範圍的輸出 輸入裝置係具有相同的電子行為。同時,由於製程技術 的改良,裝置體積仍舊繼續縮小。故,本發明的另一項 目的在於提供一内嵌單層複晶矽非揮發性記憶體胞,該 記憶體胞可茲運用於不同世代之製程技術。因此,該内 嵌#揮發性記憶體胞可隨製程技術的進步,縮小體積。 實施方式 請參考圖一,圖一為根據本發明之内嵌單層複晶矽 #揮發性記憶體之積體電路方塊示意圖。如圖一所示, 積體電路10包含有一核心電路12與一輸出輸入( I/O)電路 1 4。核心電路1 2包含有複數個以先進的邏輯製程,如 〇· 25微米製程技術,製作之核心電路元件(如PMOS或NMOS 元件’未顯示於圖中),核心電路元件以相對較低之電壓 與較快的速度操作。利用〇 . 2 5微米製程技術製作核心電 路元件係指其臨界尺度(critical dimension,CD)為 0 · 2 5微米,且具有較薄之場氧化層厚度,使該核心電路 元件得以較快速度運作。目前,晶片製程技術已演進至 0 · 1 8微米、〇 ·丨3微米,甚至是小於1 〇 〇奈米,本發明之實 施並非侷限於〇 · 2 5微米之技術範疇。 輪出輸入電路1 4包含有輸出輸入元件,能承受相對200414517 V. Description of the invention (5) In different process technologies, output and input devices with different operating voltage ranges have the same electronic behavior. At the same time, due to improvements in process technology, the device volume continues to shrink. Therefore, another object of the present invention is to provide a non-volatile memory cell with embedded single-layer polycrystalline silicon. The memory cell can be used in different generation process technologies. Therefore, the embedded #volatile memory cell can shrink in size as process technology advances. Embodiment Please refer to FIG. 1. FIG. 1 is a schematic block diagram of an integrated circuit of a single-layered polycrystalline silicon #volatile memory according to the present invention. As shown in FIG. 1, the integrated circuit 10 includes a core circuit 12 and an output / input (I / O) circuit 14. The core circuit 12 includes a plurality of core circuit components (such as PMOS or NMOS components' not shown in the figure) produced by advanced logic processes, such as 0.25 micron process technology, and the core circuit components have a relatively low voltage. Operate with faster speed. The use of a 0.25 micron process technology to produce a core circuit element refers to a critical dimension (CD) of 0.25 micron and a thin field oxide layer thickness, which enables the core circuit element to operate more quickly. . At present, the wafer process technology has evolved to 0.18 microns, 0.3 microns, or even less than 1,000 nanometers. The implementation of the present invention is not limited to the technical scope of 2.5 microns. The wheel-out input circuit 1 4 contains output-input components, which can withstand relative
第10頁 200414517 五、發明說明(6) 較高的電壓(如3. 3V)。部份的3.3V輸出輸入電路元件 用以組成一内嵌非揮發性記憶體之陣列141與—記憶體控 制電路142。内嵌非揮發性記憶體141及核心電路”盥 憶體控制電路142之連結方式’係利用產業界廣泛利、用 技術,於下略述。 ' 請參考圖二至圖十,本發明之另一項目的係提供一 獨特的内嵌高密度單層複晶石夕非揮發性記憶體裝置與其 相關操作方法。首先請參考圖圖二與圖三,其中圖二 根據本發明之非揮發性記憶體胞之電路5意;,‘ I本 發明非揮發性記憶體胞佈局之放大上視圖。如圖二與圖 二所示’非揮發性記憶體裝置2 0包含有兩個串接之ρ μ 〇 $ 電晶體201與2 0 2。PM0S電晶體201係作為一選擇電晶體或 開關電晶體’其中Ρ Μ 0 S電晶體2 0 1之選擇閘極係電性連結 一字元線。於運作時,一選擇閘極電壓(v sg)係透過某一 選定之字元線施加於PMOS電晶體201之選擇閘極。PM〇s選 擇電晶體2 0 1另包含有一源極3 0 1,施以一電源線偏壓(v sl),與一汲極3 0 2,用以耦合Ρ Μ 0 S電晶體2 0 2。如此, Ρ Μ 0 S電晶體2 0 2之汲極3 0 2係同時作為Ρ Μ 0 S電晶體2 0 2之源 極。Ρ Μ 0 S電晶體2 0 2另地包含有一單層複晶石夕浮動閘極 3 0 6與一沒極3 0 3,施加一位元線偏壓(ν bl)。ρ μ 〇 §電晶體 201之汲極3 0 2 (亦為PM0S電晶體2 0 2之源極)與汲極3 0 3定 義為一於該浮動閘極3 0 6下之Ρ通道。Page 10 200414517 V. Description of the invention (6) Higher voltage (such as 3.3V). Part of the 3.3V input and output circuit elements is used to form an array 141 and a memory control circuit 142 with embedded non-volatile memory. Built-in non-volatile memory 141 and core circuit "The connection method of the memory control circuit 142 'is based on a wide range of technologies and technologies used in the industry, which will be briefly described below.' Please refer to FIG. 2 to FIG. One project is to provide a unique non-volatile memory device with embedded high-density monolayer polycrystalline spar and its related operation methods. Please refer to FIG. 2 and FIG. 3 first, and FIG. 2 is a non-volatile memory according to the present invention. The circuit of the body cell 5 means; 'I enlarged top view of the non-volatile memory cell layout of the present invention. As shown in Figures 2 and 2, the' non-volatile memory device 20 contains two serially connected ρ μ 〇 $ Transistor 201 and 202. PM0S Transistor 201 is used as a selection transistor or a switching transistor. Among them, the selection gate of PM 0 S transistor 2 01 is electrically connected to a word line. At this time, a selection gate voltage (v sg) is applied to the selection gate of the PMOS transistor 201 through a selected word line. The PM 0s selection transistor 2 0 1 also includes a source 3 0 1. A power line bias (v sl) and a drain 3 2 2 are used to couple P M 0 S Transistor 2 0 2. In this way, the drain 3 0 2 of the P M 0 S transistor 2 0 is also the source of the P 2 0 transistor 2 0. The P M 0 S transistor 2 0 2 Contains a single-layer polycrystalline spar floating gate 3 06 and a non-pole 3 3. A one-bit line bias (ν bl) is applied. Ρ μ 〇§Drain 3 2 of transistor 201 (also The source of the PM0S transistor 2 0 2) and the drain 3 0 3 are defined as a P channel under the floating gate 3 06.
第11頁 200414517 五、發明說明(7) " ^--—- 請參考圖十九之表一與圖四至圖七,豆 一 低電壓記憶體操作之最佳模式,關於本發明之單以 矽(slngle-P〇ly)電子可程式化唯讀式記憶體裝置s曰曰 (Ε=0Μ)之程式化/讀取模式係分別以圖四“至圖、七之 圖說,之。如圖四所示,於程式化模式寫入邏 =, 5V’範圍介於3至8V之正電\# H佳為 被選擇位元線係施加一較佳 立兀線係接地,未 壓。選擇電晶體201之源極係、於 &介於3至8V之正電 VSL。N型摻雜井(NW)係施加二:〇捧,5V之電源線電壓 條件下,PMOS選擇電晶體2〇 = t雜井電壓。在上述 浮動閘極下之p通道將開啟,J i將:與M0S電晶體202之 複晶矽PMOS電晶體2〇2之浮動^極將通道熱電子注入單層 如圖五所示,於p々 、 元線係接地,未被選^ ^化f式寫人邏輯” 0”,被選擇字 較佳為5V,範圍介線與被選擇位元線係施加一 源極係施以一約為 ' 之正電壓。選擇電晶體2 0 1之 一約5V之摻雜井電,,源線電壓VSL。N型摻雜井係施以 浮動閘極下之p诵、# 在上述條件下,PM0S電晶體2 0 2之 法注入浮動閘極。、糸处於’’關閉(off)”狀態,而電子無 如圖六所示,卢-欠 士 接地。未被選擇〜貝料讀取模式時,被選擇字元線係 干凡線係施加一約2· 5V至5V之偏壓。被Page 11 200414517 V. Description of the invention (7) " ^ ---- Please refer to Table 1 in Figure 19 and Figures 4 to 7 for the best mode of operation of Dou Yi low voltage memory. The programming / reading mode of silicon (slngle-P0ly) electronic programmable read-only memory device s yue (E = 0M) is described in Figure 4 "to Figure 7", respectively. As shown in the figure, the logic is written in the stylized mode, and the positive voltage of 5V 'ranges from 3 to 8V. It is better to select a bit line to apply a better vertical line to ground, and not press. The source of crystal 201 is a positive voltage VSL between 3 and 8V. For N-type doped wells (NW), a voltage of 5V is applied, and PMOS selects a transistor 2〇 = t well voltage. The p channel under the above floating gate will open, and Ji will: inject the channel hot electrons into the single layer with the floating ^ 2 of the polycrystalline silicon PMOS transistor 202 of the MOS transistor 202 As shown, p々 and the element line are grounded, and the f-type writing logic "0" is not selected. The selected word is preferably 5V. The range dielectric and the selected bit line apply a source. A positive voltage of about 'approximately' is applied. One of the transistor 201 is doped well voltage of about 5V, and the source line voltage is VSL. The N-type doped well is applied with a floating gate electrode, # Under the above conditions, the PM0S transistor 2 0 2 is injected into the floating gate. 糸 is in the "off" state, and the electrons are not shown in Figure 6, and Lu-Oshi is grounded. When the reading mode is not selected ~, the selected character line is a normal line. A bias voltage of about 2.5V to 5V is applied. Be
200414517200414517
選擇字元線係施加一約〇V至2. 5V之偏壓。未被選擇位元 線係施加一約為3· 3V之偏壓。電源線電壓與該N型摻 電壓係約2. 5V至5V。當讀取一已程式化記憶體胞,該圮 ,,=之浮動閘極係被充電,而Vfg_Vs< Vthp (v^系PM〇s 電Ba體2 0 2之臨界電壓),該記憶體胞維持一"開啟(〇n)" 狀態。若該未程式化記憶體胞之浮動閑極並未充電,則 V FG- V s> V THP,該記憶體胞係處於”關閉(〇 f f ),,狀能。 二八係顯不沒極電流I與浮動閘極電壓之。The selected word line is applied with a bias voltage of about 0V to 2.5V. The unselected bit lines are biased at approximately 3.3V. The power line voltage and the N-type doped voltage are about 2.5V to 5V. When a programmed memory cell is read, the floating gate system is charged, and Vfg_Vs < Vthp (v ^ is the threshold voltage of PM 0 2 electric body 0 2), the memory cell Maintain a "On (On)" status. If the floating pole of the unprogrammed memory cell is not charged, then V FG- V s> V THP, the memory cell line is in the "off (0ff)" state, and the energy is not significant. The current I is equal to the floating gate voltage.
九.·、員不被選擇之PM0S電晶體(以通道執^田 在:同的沒極對N摻雜井偏壓V、熱電:;HE气作) 承,根據本發明之最c。如圖八與圖九所 V杓為-5V至-6V。在浮動^朽及極對N型摻雜井之偏 i.ox 可 更進一步說a月,如1 β m最大閘極電流。Nine .., the PM0S transistor that is not selected (the channel is used in the field: the same non-pole pair N doped well bias V, thermoelectric :; HE gas operation), according to the most c of the present invention. As shown in Figure 8 and Figure 9, V 杓 is -5V to -6V. In the floating gate and the bias of the pole to the N-type doped well i.ox can be further described as a month, such as 1 β m maximum gate current.
閉極獲得二相對;=;:壓¥為-5V的情況時,浮I 約為5x 1 〇 -11 a A / k被開啟,並達到一閘極電流最大, 於該閘極電流相對二二雷清:兄?言之’根據本發明,^ 入操作時可達成—= 比例(Ι八)提高了,於寫 圖十為根據本發 列之部份上視圖。如 明之單層複晶石夕非揮發性記憶體陣 圖十所示,對一程式化(寫入邏輯The closed pole obtains two phases; = ;: When the voltage ¥ is -5V, the floating I is about 5x 1 〇-11 a A / k is turned on and reaches a maximum gate current. Lei Qing: Brother? In other words, according to the present invention, ^ can be achieved during the input operation-= the ratio (18) is increased. Figure 10 is a top view of the part according to the present invention. As shown in Figure 10 of the non-volatile memory array of single-layer polycrystalline spar, a stylized (write logic
第13頁 200414517 五、發明說明(9) 1 M )記憶體胞I (於圖上特別以虛線圓圈表示之部分),一 5 V至6 V之位元線電壓V b係施加於記憶體胞I之浮動閘極 PM0S電晶體的汲極。記憶體胞I之選擇閘極係接地。在同 一條位元線上,其他的未程式化記憶體胞(記憶體胞I j、 I I I、I V )並不會遭受傳統堆積閘極記憶體裝置進行程式 化作業時會發生的來自源極的干擾。 請參考圖十一與圖十二,其中圖十一顯示根據本發 明另一較佳實施例之N型非揮發性記憶體胞電路,圖十二 為圖十一所示非揮發性記憶體胞佈局之放大上視圖。如 圖十一與圖十二所示,非揮發記憶體裝置2 0包含有兩串 接之NΜ0S電晶體401與402。NMOS電晶體40 1係作為一選擇 電晶體或開關電晶體,而NM0S電晶體401之選擇閘極係電 性連結一字元線。於操作時,一選擇閘極電壓ν 3係透過 某一選定之字元線施加於NMOS電晶體401。NMOS選擇電晶 體4 0 1另包含有施加一電源線偏壓ν 源極6 0 1與一耦合 NMOS電晶體4 0 2之汲極6 0 2。亦即,NMOS電晶體401之汲極 6 0 2係同時作為NMOS電晶體40 2之源極。NMOS電晶體40 2另 地包含有一早層複晶石夕浮動閘極6 0 6與施加一位元線偏壓 (V BL)之没極6 0 3。NMOS電晶體4 0 1之汲極6 0 2 (亦為NMOS電 晶體4 0 2之源極)與汲極6 0 3定義一於浮動閘極6 0 6下之N通 道。 請參考圖十三至圖十六,關於本發明單層複晶矽N型Page 13 200414517 V. Description of the invention (9) 1 M) Memory cell I (part particularly indicated by a dotted circle on the figure), a bit line voltage V b of 5 V to 6 V is applied to the memory cell The drain of the floating gate PM0S transistor. The selection gate of memory cell I is grounded. On the same bit line, other unprogrammed memory cells (memory cells I j, III, IV) will not suffer from source interference that would occur when programming a traditional stacked gate memory device for programming . Please refer to FIG. 11 and FIG. 12, wherein FIG. 11 shows an N-type non-volatile memory cell circuit according to another preferred embodiment of the present invention. FIG. 12 is a non-volatile memory cell shown in FIG. The enlarged top view of the layout. As shown in Fig. 11 and Fig. 12, the non-volatile memory device 20 includes two NMOS transistors 401 and 402 connected in series. The NMOS transistor 40 1 is used as a selection transistor or a switching transistor, and the selection gate of the NMOS transistor 401 is electrically connected to a word line. During operation, a selected gate voltage ν 3 is applied to the NMOS transistor 401 through a selected word line. The NMOS selection transistor 4 0 1 further includes a source line bias ν source 6 0 1 and a coupled NMOS transistor 4 0 2 drain 6 0 2. That is, the drain 602 of the NMOS transistor 401 is also used as the source of the NMOS transistor 402. The NMOS transistor 40 2 further includes an early polycrystalline spar floating gate 6 06 and a non-polar 6 0 3 applied with a bit line bias (V BL). The drain 6 0 2 of the NMOS transistor 4 0 1 (also the source of the NMOS transistor 4 0 2) and the drain 6 0 3 define an N channel under the floating gate 6 6. Please refer to FIGS. 13 to 16 for the single-layer polycrystalline silicon N-type of the present invention.
第14頁 200414517Page 14 200414517
非 面 被 壓 較 線 上 電 揮發性記憶體裝置之最佳程式化 圖說明,十三所示,於貝取拉式係分別以剖 選擇字元線係施加一範圍介於3至广二:二:輯"1、 。被選擇之位元線係施加一範圍 ^ 之正電 電壓vSL。p型摻雜井(Pm施加=電二 述條件下,選擇電晶體4〇kN通道0^之門換啟雜井電壓。在 洞脾妳人兮-β 艰逍將開啟,而通道熱 將注入6亥早層複晶矽NM〇s電晶體4〇2之浮動閘極。.,、 字元所:’於程式化模式寫入邏輯"〇",被選擇 子兀線係施加一範圍介於3至8V,較彳、^ 選擇電壓係施加一 ον之雷壓。嘴 、、 電坠。被 雜井Γί i = :SL。p型摻雜井(")係施加-ον之摻 Τ ^ ^ Λ P; g ^ NM〇St ^ 11 4〇2^ ^ ^ ^ 如圖十五所示 電壓V 施加於被 約〇V至2· 5V,較佳 擇字元線係施加一 約為0 V至2 . 5 V,較 型摻雜井電壓係為 操作係依據圖十七 ’在資料讀取模式 選擇字元線。被選 為1 V之偏壓。如圖 〇 v之偏壓。未被選 佳為1 V之位元線偏 〇v。圖十三至圖十 所示之關係圖實施 時,一 3 · 3 V之選擇 擇子元線係施加一 十六所示,未被選 擇位凡線係施加>-壓。電源線電壓與 六有關記憶體胞之Description of the best stylized diagram of the non-surface-compressed online volatile memory device. As shown in Thirteen, the Bethel system is used to select the character line system by cutting a range from 3 to 2: 2: Edit " 1. The selected bit line is applied with a positive voltage vSL in the range ^. Under the condition of p-type doped well (Pm application = electrical two-state, choose the gate of transistor 40kN channel 0 ^ to change the voltage of the starting well. In the spleen you will be turned on -β, and the channel heat will be injected. 6Hai early layer polycrystalline silicon NMOS transistor 402 floating gate .., Characters: 'Write logic in stylized mode " 〇 ", a range is selected by the sub-wire system Between 3 and 8V, a voltage of ον is applied to the voltage between 彳 and ^. The nozzle, and electric sinker are applied by the well Γί i =: SL. The p-type doped well (") is applied with -ον Τ ^ ^ Λ P; g ^ NM〇St ^ 11 4〇2 ^ ^ ^ ^ As shown in Fig. 15, the voltage V is applied between about 0V and 2.5V. 0 V to 2.5 V, the comparative doped well voltage system is the operation system according to Figure 17 'select the word line in the data read mode. It is selected as a bias voltage of 1 V. As shown in Figure OV bias voltage. The unselected bit line of 1 V is 0V. When the relationship diagrams shown in Figures 13 to 10 are implemented, a 3 · 3 V selection element line is applied as shown in Figure 16 and is not Select Weifang line to apply > -voltage. Power line voltage Related to Six of Memory Cells
N 200414517 五、發明說明(π) 總結而論,本發明提供可茲運用於不同世代之製程 技術(如0 . 2 5、0 · 1 8、0 · 1 3微米等)之積體電路内嵌獨特 之非揮發性記憶體,如電子可程式唯讀記憶體(EPROM)或 一次寫入(0ΤΡ )記憶體胞。無論積體電路之核心電路邏輯 製程處於任一世代,可運用一部份的3.3 V輸出輸入裝置 以產生一非揮發記憶體陣列與記憶控制電路。對該非揮 發性記憶體,不需要額外的光罩。在各邏輯製程世代 下,針對内嵌邏輯非揮發性記憶體之研發時程可因之縮 短。此外,用以程式化該非揮發性記憶體胞之高電場不 再耗合於輸出輸入裝置,如此,該輸出輸入裝置之閘極 氧化層與接面至井之區域不會再出現高電場,而能保證 該裝置的可靠性。 以上所述僅為本發明之較佳實施例,凡依本發明申 請專利範圍所做之均等變化與修飾,皆應屬本發明專利 之涵蓋範圍。N 200414517 V. Description of the invention (π) To sum up, the present invention provides embedded circuit of integrated circuits that can be applied to different generations of process technology (such as 0.2, 0.5, 1.8, 0.3, etc.). Unique non-volatile memory, such as electronic programmable read-only memory (EPROM) or write-once (0TP) memory cells. No matter the core circuit logic manufacturing process of the integrated circuit is in any generation, a part of the 3.3 V input / output device can be used to generate a non-volatile memory array and memory control circuit. No additional mask is required for this non-volatile memory. Under each logical process generation, the development time for non-volatile memory with embedded logic can be shortened accordingly. In addition, the high electric field used to program the non-volatile memory cell is no longer consumed by the input / output device. In this way, the gate oxide layer of the input / output device and the area from the interface to the well will no longer appear, and Can guarantee the reliability of the device. The above description is only a preferred embodiment of the present invention, and any equivalent changes and modifications made in accordance with the scope of the patent application of the present invention shall fall within the scope of the patent of the present invention.
200414517 圖式簡單說明 圖式之簡單說明 圖一為根據本發明内嵌單層複晶矽非揮發性記憶體 之積體電路方塊圖。 圖二顯示根據本發明之p型非揮發性記憶體胞。 圖三為圖二所示非揮發性記憶體胞佈局之放大上視 圖。 圖四至圖七為本發明之操作示意圖。 圖八顯示沒極電流I d與浮動閘極電壓之關係。200414517 Brief description of the diagram Brief description of the diagram Figure 1 is a block diagram of an integrated circuit of a single-layer polycrystalline silicon non-volatile memory according to the present invention. Figure 2 shows a p-type non-volatile memory cell according to the present invention. Figure 3 is an enlarged top view of the non-volatile memory cell layout shown in Figure 2. Figures 4 to 7 are schematic diagrams of the operation of the present invention. Figure 8 shows the relationship between the non-polar current I d and the floating gate voltage.
圖九顯示被選擇之PM0S電晶體(以通道熱電子(CHE) 操作),在不同的汲極對N摻雜井偏壓(Vd=VB「VNW)條件 下,其閘極電流I G對浮動閘極閘電壓之關係圖。 圖十為根據本發明單層複晶矽非揮發性記憶體陣 列。 圖十一顯示根據本發明之N型非揮發性記憶體胞。 圖十二為圖十一所示非揮發性記憶體胞佈局之放大 上視圖。 圖十三至圖十六為本發明之操作示意圖。 圖十七顯示對於NM0S電晶體之閘極電流對浮動閘極 電壓之關係。Figure 9 shows the selected PM0S transistor (operated with channel hot electron (CHE)) under different drain-to-N-doped well bias voltages (Vd = VB "VNW). Its gate current IG versus floating gate The relationship between the gate voltages. Fig. 10 shows a single-layer polycrystalline silicon non-volatile memory array according to the present invention. Fig. 11 shows an N-type non-volatile memory cell according to the present invention. An enlarged top view of the non-volatile memory cell layout is shown. Figures 13 to 16 are schematic diagrams of the operation of the present invention. Figure 17 shows the relationship between the gate current of the NMOS transistor and the floating gate voltage.
圖十八為根據本發明另一較佳實施例之單層複晶矽 非揮發性記憶體陣列(NMOS ce 1 1 )。 圖十九之表一為低電壓記憶體操作之最佳模式表。FIG. 18 is a single-layer polycrystalline silicon non-volatile memory array (NMOS ce 1 1) according to another preferred embodiment of the present invention. Table 1 in Figure 19 shows the best mode for low voltage memory operation.
第17頁 200414517 圖式簡單說明 圖式之符號說明Page 17 200414517 Brief description of the drawings Symbols of the drawings
第18頁 10 積體電路 12 核 心 電 路 14 輸出輸入電路 141 内 嵌 記 憶 體 陣 列 142 記憶體控制電路 20 非 揮 發 性 記 憶 體裝置 201 P通道金氧半導體 電晶體 202 P通道金氧半導體 電晶體 301 源極 302 汲 極 303 汲極 306 浮 動 閘 極 40 非揮發性記憶體裝置 401 N通道金氧半導體 電晶體 402 N通道金氧半導體 電晶體 601 源極 602 汲 極 603 汲極 606 浮 動 閘 極Page 18 10 Integrated circuit 12 Core circuit 14 Input / output circuit 141 Embedded memory array 142 Memory control circuit 20 Non-volatile memory device 201 P-channel metal oxide semiconductor transistor 202 P-channel metal oxide semiconductor transistor 301 source Pole 302 Drain 303 Drain 306 Floating Gate 40 Non-volatile memory device 401 N-channel MOS transistor 402 N-channel MOS transistor 601 Source 602 Drain 603 Drain 606 Floating gate
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