TW200413660A - Method for closing fluid passage, water hammerless valve and water hammerless closing device - Google Patents

Abstract

The present invention relates to a method for closing fluid passage, water hammerless valve and water hammerless closing device. In other words, the present invention can urgently close a fluid passage is emergency-closed in a short time without causing water hammer by extremely simple device or operation. A water hammerless closing device comprises is constructed with the following components: an actuator-operated valve provided in the fluid passage; and an electro-pneumatic converter for supplying a two-step actuator working pressure Pa to the actuator-operated valve; a vibration sensor secured removably to the upstream-side pipe-line of the actuator-operated action valve; and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc for controlling the magnitude of the step working pressure Ps' of the two-step actuator working pressure Pa to the electro-pneumatic converter, and regulating the control signal Sc to deliver the two-step actuator working pressure Pa of the step working pressure Ps' for bringing the vibration detection signal Pr substantially to zero from the electro-pneumatic converter.

Description

200413660 (1) 发明. Description of the invention [Technical field to which the invention belongs] The present invention relates to an improvement of a water clock generation prevention system capable of completely preventing a water hammer from being generated during an emergency lock of a fluid path, and is not limited to a fluid pressure A method for closing a fluid passage that is capable of quickly and surely closing a fluid passage without generating a water hammer, and a water hammer-less valve device and a water hammer-free locking device used therefor. [Prior art] When the passage through which liquid such as water is rapidly blocked is blocked, the so-called water hammer system, which starts from the blocking position and oscillates the internal pressure of the upstream passage, vibrates, is widely known. In addition, when the water hammer is generated, various accidents such as damage to the equipment and devices connected to the upstream passage due to the increase in the internal pressure of the upstream channel. Therefore, measures to prevent the occurrence of water hammer have been used from the past. Development of various technologies. However, no matter what kind of technology is basically, it becomes: (1) set the blocking time of the fluid path slightly longer; or (2) make the vibration pressure generated in the path open to the bypass path and Escaping to the outside or being absorbed into a pressure accumulator separately installed; in the former method, it takes time to lock the fluid path and cannot cope with the requirements of emergency lockout. In addition, in the latter method, there will be high incidental equipment costs. Problems arise. In addition, the aforementioned water hammer problem has been a major problem in the industrial field where relatively large volumes of fluids have been processed so far. However, in recent years, even in the treatment of small flow fluids In areas such as semiconductor wet silicon oxide film processing or pharmaceutical manufacturing, the demand for water during emergency shutdown of fluid supply is strongly demanded in terms of equipment preservation or product quality improvement. Prevention of hammer generation. [Patent Document 1] Japanese Patent Laid-Open No. 1 — 1 0 0 2 3 5 [Patent Document 2] Japanese Patent Laid-Open No. 2000 0 — 1 0 6 02 [Patent Document 3] Japanese Patent Laid-Open No. 2002-295705 [Content of the Invention] [Invention [Reveal] [Problems to be Solved by the Invention] The present invention solves the problems described in the previous water hammer generation prevention technology, that is, (1) the blocking time of the fluid path is set slightly as long as The basic countermeasures cannot fully meet the emergency requirements; and (2) the basic countermeasures are to absorb or escape the vibration pressure as the basic countermeasures. A multi-stage operation is used to lock a valve interposed on a fluid path without generating water hammer, and a method for blocking the fluid path can be urgently blocked even for a short time (for example, less than 1000 msec), and the use thereof The water hammer valve device and the water hammer lock device are here. In addition, the present invention provides a valve lock condition capable of obtaining a water hammer lock capable of fluid passage by performing a valve lock test realistically, and using an electro-pneumatic switching device that memorizes the lock condition to activate the valve. -(3) (3) 200413660 Actuating the regulator of the valve body to quickly and surely lock the fluid path without water hammer, and the water hammer blocking device used for this. [Means to Solve the Problem] The inventors of this case focused on quickly moving the valve body of the passageway lock valve to a predetermined position in front of the closed valve and moving the valve body to the closed position after a short period of time. The method of valve blocking caused by the multi-stage method, and at the same time, using the blocking method to perform an analytical test of a large number of water hammer generating mechanisms. In addition, the inventors of the present case learned from the results of the foregoing tests that, when the valve is closed, the valve body stopping device at the first stage when the valve is closed is positioned in a specific range to prevent the occurrence of water hammer. The present invention was created based on the foregoing opinions; the invention in the first scope of the patent application is a method of closing the fluid passage by a regulator-actuated valve that is located in the pipeline with a pressure passage that is slightly constant, First, increase or decrease the drive input to the regulator to a predetermined setting, 'Move the valve body to the valve closing direction, and hold the drive input to the regulator to the setting for a short time. The input for driving is also increased or decreased to make the valve fully closed without generating water hammer to block the fluid passage; to become the basic structure of the invention. The invention of item 2 in the scope of the patent application is a method of closing the fluid passage by a regulator-actuated valve that is located in the pipeline and has a certain fluid passage. First, by increasing or decreasing the For driving, -7- (4) (4) 200413660 input, move the valve body to the valve closing direction, so that the valve stroke is maintained near the predetermined setting 値, and then after the valve stroke is kept at the setting 短 for a short time, By further increasing or decreasing the aforementioned driving input, the valve is brought into a fully closed state without generating water hammer to lock the fluid passage; it becomes the basic structure of the invention. The invention in item 3 of the scope of patent application is a method for closing a fluid passage by a regulator-actuated valve interposed in a fluid passage having an internal pressure in the pipeline, and firstly, by increasing or decreasing the drive for the aforementioned regulator Input, move the valve body to the valve closing direction 'so that the valve stroke is maintained near the predetermined setting 接着, and then' after the valve stroke is held at the setting 短 for a short time, the driving input is further increased or decreased so that The valve becomes fully closed without generating water hammer to close the fluid path; it becomes the basic structure of the invention. The invention in item 4 of the scope of patent application is the invention in item 1, 2 or 3 of scope of patent application, which makes the valve become a normally closed type pneumatically actuated diaphragm valve, or when the valve starts, it becomes the internal volume of the valve. Variable constant volume, often closed type pneumatically actuated diaphragm valve. The invention of item 5 in the scope of patent application is the invention in item 1, 2, 3 or 4 of the scope of patent application, which makes the valve blocking time extremely short, and at the same time, 'makes the pressure of the fluid passage rise, becoming the valve before the valve is blocked. The pressure is within 10%. The invention of item 6 in the scope of patent application is constituted by the following: a valve body; a regulator that drives the valve body; an automatic driving force controller that adjusts a driving force input to the regulator; and a valve stroke detection that detects a valve stroke of the valve body (5) (5) 200413660; and inputting the valve switching command signal S, the valve stroke detection signal Sp and the valve stroke setting signal SG simultaneously output the driving force control signal SR to the aforementioned automatic driving force controller and make the valve through the regulator. The valve stroke of the main body is kept behind the setting for a short time so that the valve body becomes a fully closed control circuit; it becomes the basic structure of the invention. The invention of item 7 in the scope of patent application is the invention in item 6 of the scope of patent application, so that the valve body becomes a diaphragm valve, and at the same time, the regulator becomes a pneumatically actuated regulator. The invention in item 8 of the patent application scope is the invention in item 6 or 7 of the patent application scope, so that the valve body becomes a normally closed diaphragm valve, and at the same time, the regulator becomes a pneumatically actuated regulator, and, This makes the valve fully closed time of the control circuit extremely short. The invention in item 9 of the scope of patent application is equipped with a water hammerless valve device, which is a valve body, a regulator that drives the valve body, an automatic driving force controller that adjusts the driving force input to the regulator, and a valve that detects the valve body. The valve stroke detector of the stroke, and the input valve switch command signal S, the valve stroke detection signal S p and the valve stroke setting signal SG simultaneously output the driving force control signal s R to the aforementioned automatic driving force controller, and make the valve body through the regulator. The valve stroke is maintained for a short time after the setting, and the valve body becomes t 1¾. The calculation memory device includes a pressure detection sensor that detects the fluid pressure in the primary side flow path, and an input. The pressure detection signal P from the internal pressure of the fluid path from the aforementioned pressure detection sensor, and the lock time detection signal T and the allowable pressure rise from the lock time detection sensor 値 The setting signal PM and the lock time setting signal TS are performed simultaneously- 9- (6) (6) 200413660 The comparison between the pressure detection signal P! And the allowable pressure rise 値 setting signal PM and the lock time check Comparison circuit between the signal T and the lock time setting signal TS, a memory circuit that holds the relationship data between the pressure rise 値 and the stroke setting 对应 corresponding to the lock time, and the comparison result of the comparison circuit to select the most suitable for the allowable pressure rise The calculation circuit of the stroke setting of the setting signal P M and the blocking time setting signal TS; to become the basic structure of the invention. The invention of item 10 in the scope of patent application is the invention in item 9 of the scope of patent application. 'For the control circuit of the water hammerless valve device, input the lock time setting signal TS' by the regulator of the valve when the valve is closed. The adjustment of the starting speed becomes a structure that can control the blocking time of the fluid path. The invention of item 11 of the scope of patent application is: the valve body, the regulator that drives the valve body, a vibration sensor that can be detachably fixed to the valve upstream side piping, and input the valve switching command signal at the same time by pre-memorizing in the An electro-pneumatic conversion control device that controls the control signal Sc of the data memory unit to control the regulator start-up pressure P a input to the regulator, and includes a vibration detection signal P r input from the aforementioned vibration sensor and a step supplied to the regulator The holding time setting signal Ts of the pressure setting signal Ps and the step pressure and the allowable upper limit vibration pressure setting signal Prm simultaneously perform a comparison between the aforementioned vibration detection signal Pr and the allowable upper limit vibration pressure setting signal prm and correct the aforementioned step pressure setting signal P s And a control signal S c composed of the aforementioned hold time setting signal T s and the modified step pressure setting signal ps is output to the calculation control device of the data storage section of the aforementioned electro-pneumatic conversion control device; Of the basic structure. -10- (7) (7) 200413660 The invention of item 12 in the scope of patent application is the invention in item 11 of the scope of patent application, which respectively constitutes the calculation control device 'in the step pressure setting circuit and the hold time setting circuit' The allowable upper limit vibration pressure setting circuit, the vibration pressure detection circuit, and the comparison calculation circuit are configured to make the vibration detection signal pr immediately after the step change of the regulator startup pressure exceeds the allowable upper limit vibration pressure setting signal Prm. The state of setting the signal P s along the rising step pressure and the state of the vibration detection signal Pr exceeding the allowable upper limit vibration pressure setting signal Prm immediately after the start pressure of the regulator starts from the middle step start pressure to zero. Next, it is corrected in the direction of the pressure setting signal Ps along the descending step pressure. The invention in item 13 of the scope of patent application is the invention in item 11 of the scope of patent application, which constitutes the electro-pneumatic conversion control device. The data memory section and the signal conversion section and the electro-pneumatic device that memorize the control signal S c from the calculation control device. The conversion unit is configured to output the regulator activation pressure control signal S e according to the control signal S c ′ when the water hammer stored in the data memory unit is not generated in advance. To output the regulator starting pressure P a. The scope of the patent application] Item 4 is the regulator-actuated valve interposed in the fluid path, the electropneumatic conversion device that supplies the regulator-actuated valve with a two-stage regulator actuation pressure Pa, and can be freely attached and detached. The vibration sensor fixed to the upstream line of the regulator-activated valve and the vibration detection signal Pr input by the vibration sensor are input to the electro-pneumatic converter to output and control the two-stage adjustment. The step start pressure ps of the actuator start pressure Pa, the control signal sc of the size and the control signal -11-(8) (8) 200413660 S c are adjusted and output by the electro-pneumatic conversion device so that the vibration detection signal Pr is almost The tuning box of the two-stage regulator start-up pressure P a which becomes the zero-step start-up pressure P s'; it becomes the basic structure of the invention. The invention of item 15 in the scope of patent application is: on the upstream side of the regulator-operated valve interposed in the fluid passage, a vibration sensor can be detachably installed, and the vibration detection signal Pr from the vibration sensor is input. To the tuning box, at the same time, input the control signal S c from the tuning box to the electro-pneumatic conversion device, and use the aforementioned control signal Sc to start the pressure regulator pa of the two-stage regulator generated by the electro-pneumatic conversion device. Method for blocking the fluid path of the regulator-actuated valve supplied to the regulator by 2-stage activation 'In the aforementioned tuning box, the 2-stage regulator starting pressure Pa and vibration detection signal pr supplied to the regulator The relative relationship between them is compared, 'When vibration occurs when the regulator starting pressure Pa of the first stage decreases, the step-up starting pressure Ps' rises, and it occurs when the regulator starting pressure pa of the second stage decreases. In the case of vibration, the step-down starting pressure P s ′ is decreased, and the vibration detection signal Pr is obtained by repeatedly performing adjustments by using the increase or decrease of the step-starting pressure Ps ′ described above a plurality of times. The stepwise starting pressure P s ′ of the two-stage starting pressure P a which is zero is based on the stepping starting pressure Ps which is output by the electro-pneumatic conversion device so that the vibration is almost zero, and the two-stage starting pressure Pa The information of the current control signal Sc, and the aforementioned regulator-actuated valve is blocked; it becomes the basic structure of the invention. In addition, the invention according to item 16 of the patent application scope is: on the upstream side of the regulator-operated valve interposed in the fluid passage, a vibration sensor can be detachably installed, and the vibration detection signal Pr from the vibration sensor is Pr Input -12- (9) (9) 200413660 to the tuning box, and at the same time, input the control signal S c from the tuning box to the electro-pneumatic conversion device. The aforementioned control signal S c will be used in the electro-pneumatic conversion device. The generated two-stage regulator starting pressure P a 'is supplied to the regulator. In the method of blocking the fluid path of the regulator-actuated valve by two-stage activation, the aforementioned tuning box' is supplied to the regulator. The relative relationship between the 2-stage regulator startup pressure Pa and the vibration detection signal Pr is compared. When the regulator startup pressure Pa in the first stage rises and vibrates, the step-by-step startup pressure Ps' is decreased. In addition, when vibration occurs when the regulator starting pressure Pa increases in the second stage, the stepping starting pressure Ps 'is raised by repeatedly using the falling or rising of the aforementioned stepping starting pressure Ps' repeatedly. For adjustment The stepwise starting pressure Ps 'that causes the vibration detection signal Pr to become almost zero in two-stage starting pressure Pa is based on the two-stage state of the stepping starting pressure Ps' that causes the vibration to be almost zero when output by the electro-pneumatic converter. The data of the control signal Sc at the time of the starting pressure pa, and the aforementioned regulator-actuated valve is blocked; it becomes the basic structure of the invention. The invention in the 17th scope of the patent application is the invention in the 15th scope of the patent application or the 16th scope of the patent application. It will output a control signal when the starting pressure Pa of the two-stage state that causes the vibration to be almost zero is output. After the data of Sc is input to the memory device of the electro-pneumatic conversion device, the vibration sensor and the tuning box are disassembled. The invention in the 18th scope of the patent application is the invention in the 15th scope of the patent application or the 16th scope of the patent application. The vibration sensor is set at 1,000 mm from the position of the regulator-activated valve. Within the upstream position. -13- (10) (10) 200413660 The invention of item 19 in the scope of patent application is the invention in item 15 of the scope of patent application, and the step-by-step startup pressure holding time t of the two-stage startup pressure Pa is set to be smaller than 1 second. [Effects of the invention] In the invention of the method of the present case, when the fluid pressure is constant, the driving force to the regulator is maintained at a setting 値, or the driving force to the regulator is adjusted to adjust the valve stroke of the valve △ G is maintained at the set position, and the valve is initially moved to close the valve body. Once the valve body is stopped at the predetermined position for a short time, the valve is closed by a locking method that moves the valve body to the fully closed position. It is possible to make the above setting of the driving force 値 or the setting of the valve stroke Δ G into an appropriate range 値, but in a very short time (for example, 300 ~ 1000 msec), no water hammer is generated. , Securely block fluid passages. Similarly, in the method of the present case, the valve stroke Δ G becomes a control element under a state where the fluid pressure is changed, and when the valve is closed in advance, when the valve stroke Δ G reaches a range where no water hammer is caused, The valve closing operation is stopped for a short time, and then, from the aspect of the valve stroke Δ G, 'the method of closing the valve body to the valve closing state (valve stroke △ G 2 0)' is not necessary. Limited by the material or structure of the valve body, the emergency lockout of the fluid path of the stable water hammer is always performed. In addition, in the invention of the device of this case, the valve stroke △ G of the detection valve body is fed back to the control circuit. When the valve body is locked, the valve stroke △ G is more quickly and surely reached the predetermined setting. At the same time, -14-(11) (11) 200413660 starts by closing the valve to the fully closed position immediately after the set valve stroke △ G, and it becomes a structure for valve lock. As a result, it is not limited to a simple structure, and it is possible to close the fluid path without water hammer in a very short time, and it is possible to completely remove various problems caused by the increase in the internal pressure of the pipeline. The water hammer blocking device in this case will feed back the pressure detection 値 P! Caused by the pressure detection sensor PC and the lock time detection signal T caused by the lock time detection sensor TC of the valve body 10. The calculation / memory device 15 and the stroke setting signal s G input to the control circuit 13 of the water hammer valve device are used to control the structure of the stroke setting signal which is the most appropriate setting of the set lock time. As a result, the stroke setting signal SG is automatically corrected to the most appropriate state in a state where the internal pressure of the first-pass path exceeds the allowable pressure when the flow path is blocked, thereby completely preventing the subsequent flow path from being blocked. The water hammer caused by the allowable maximum pressure rise. In addition, in the anhydrous hammer locking device of the present invention, the vibration sensor 18 can be detachably installed in the pipeline L !, and the vibration detection signal Pr detected by the vibration sensor 18 is fed back to The calculation control device 16 controls the actuator starting pressure Pa of the regulator 11 which is applied to the valve body through the electro-pneumatic switching control device 17 so as to achieve a structure for achieving the lock of the waterless valve. As a result, even if no stroke position detection device is provided in the valve body 10, or even if no pressure detector is provided in the piping line LI, the water hammer valve can be locked, and if it becomes the target piping line L; -15- (12) (12) 200413660 If you find the most suitable conditions for locking the water hammer valve (that is, the control conditions of the regulator starting pressure Pa), you can remove the vibration sensor 18 or the calculation control device. 16. It is also suitable for other pipelines, which is also very economical. In addition, in the anhydrous hammer locking device of the present invention, a vibration sensor is installed near the valve body 10 of the pipeline in the actual starting state. At the same time, starting from the electro-pneumatic conversion device 20, a predetermined two-stage regulator starting pressure Pa is applied to the regulator body 11 of the valve body 10, and realistically, the valve body 10 is carried out. The switch is started, and the actual start of the valve body 10 is used to select the most appropriate step start pressure Ps' of the aforementioned two-stage regulator start pressure pa, and the selected regulator start pressure pa is memorized to electricity. Air conversion device 2 0 memory device. As a result, the valve body 10 can be emergency-locked by the starter pressure P a of the electro-pneumatic converter device 20 in the fluid path more reliably and quickly without generating water hammer. In addition, the selection and setting (tuning) of the starting pressure pa of the aforementioned two-stage regulator can also be ended simply by actually starting the valve body 10 5 to 6 times, and it can be made to have an appropriate size. The regulator start pressure P a of the step start pressure P s ′ is applied to the regulator 11 to suppress the amplitude of the pressure vibration at the time when the actual closing of the valve body 10 is further lower than the first time, It is not necessary to add a great adverse effect to the piping, and the optimum value of the aforementioned regulator starting pressure Pa can be accurately obtained in advance. In addition, not only can the selection and setting of the aforementioned two-stage regulator start-up pressure pa be extremely simple and quick by using a personal computer (-16- (13) (13) 200413660 tuning), but it can also be cheaper Manufacture of anhydrous hammer locking devices. [Embodiment] [The best embodiment of the invention] First, the inventors of the present case investigated the occurrence of water hammer in the water supply system of the semiconductor manufacturing device. Therefore, the diaphragm valve was actuated using air pressure, and the fluid flow path was fully opened to switch. The pressure of the flow path in the fully closed state fluctuates. Figure 1 is the circuit configuration diagram of the test device used in the aforementioned survey. In Figure 1, the drawing number is 1 series tank, 2 series tank pressure source, 3 series pressure sensor, 4 series valve, and 5 series electro-pneumatic conversion. Device, 6 series valve driving gas source, 7 series signal generator, 8 series storage oscilloscope. The aforementioned water tank 1 is of a closed structure type having a capacity of about 301. Inside it, a fluid of about 251 (water at 25 ° C) is stored. In addition, the water tank 1 is pressurized in a freely adjustable range from 100 to 300 KPaG by N2 from the pressure source 2. The pressure sensor 3 is a sensor capable of detecting the water pressure upstream of the valve 4 with high sensitivity. In this test device, a pressure sensor of a diffusion semiconductor method is used. As the aforementioned valve 4 series, a diaphragm type air pressure valve is used, and its specifications are fluid inlet pressure 〇 ”MPa, fluid outlet pressure 0.3MPa, fluid temperature 10 ~ 100 ° C, CVC〇 · 27, operating pressure 0 · 3 ~ 〇.6MPa, the material of the wetted part (valve PTFE, diaphragm PTFE), the inner diameter of the passage is 4mm. In other words, 'the valve 4 is a normally-closed synthetic resin diaphragm to become -17- (14) (14) 200413660. The air-actuated diaphragm valve of the valve body makes the diaphragm valve by the elastic force of a spring (not shown). The body has been coped with the valve seat and kept in the closed state. In addition, the regulator 4a is activated by the supply of the starting air pressure, and the diaphragm valve body is maintained in the open state by the valve seat being separated from the seat. Therefore, to close the normally closed air-actuated diaphragm valve, it is necessary to reduce the starting air pressure supplied to the regulator 4a due to the opening of the valve. In addition, in the present invention, of course, a normally-open air-actuated diaphragm valve can be used instead of the normally-closed air-actuated diaphragm valve. In this state, the valve is closed by increasing the starting air pressure supplied to the regulator 4a. valve. The aforementioned electro-pneumatic conversion device 5 is used to supply the driving pressure (air pressure) of the input signal corresponding to the valve opening degree to the regulator 4 a of the valve 4. In this test device, a structure as shown in FIG. 2 is used. Electro-pneumatic converter 5 〇 In other words, when the input signal I is input to the control circuit A, the gas supply solenoid valve B is opened, so that part of the supply pressure C is output through the gas supply solenoid valve B. The pressure Pa is supplied to the regulator 4 a of the valve 4. This output pressure Pa is fed back to the control circuit A 'through the pressure sensor E to perform a corrective action until it becomes the output pressure P a corresponding to the input signal I. In addition, in FIG. 2, the F-type exhaust solenoid valve, the g-type exhaust gas, and the Η-type power supply] are output signals corresponding to the input signal I, and the output signal J (that is, the input signal Ϊ) is an input voltage. And input to CH2 of the storage oscilloscope described later. FIG. 3 is a line chart showing the relationship between the input signal I 値 (-18- (15) (15) 200413660 input voltage V) and the output pressure pa of the aforementioned electro-pneumatic conversion device 5; at an input voltage of 5V (barometric pressure for startup) P 2 is about 5kgf / cm2 · G), and the valve 4 is kept in a fully open state. The valve activation air source 6 uses a compressor to supply air at a predetermined pressure. In addition, the aforementioned signal generator 7 generates an input signal I and the like input to the electro-pneumatic conversion device 5 and the like, and a required voltage output becomes an input signal I and outputs to the electro-pneumatic conversion device 5. In addition, the aforementioned storage oscilloscope 8 inputs a detection pressure signal pi (voltage v) from the upstream pipeline L 1 of the pressure sensor 3 or an input signal I (input voltage v) to the electro-pneumatic conversion device 5 and observes • Record changes in pressure [] in pipeline L] or changes in input signal (input voltage v) I, etc. In addition, in this test device, the storage oscilloscope 8 is used, and the time scale is taken as 500 m s e c / 1 scale. Referring to Figure 1, first, the pressure p T in the water tank 1 is maintained at a certain pressure of 3 kgf / cm2 · G, and the air pressure P a of 5 kgf // cm 2 · g is supplied to the regulator 4 a, so that the valve 4 is fully opened. . In addition, at this time, the inner diameter of the piping L! Between the valve 4 and the water tank 1 is 4.0 m 1Ώ, and the length is about 2.5 m. The water flow rate is Q 2 and about 3 4 5] / min. The knife starts from this state, so that the supply pressure Pa of the valve 4 to the regulator 4 a is (a) 5kgf / cm2 · G (fully open) —Okgf / cm2 · G (fully closed), (b) becomes 5 — 1.9—0, (c) becomes 5-1 · 66—0, (e) becomes 5—1.65—0, (f) becomes 5—1.62—0, and (g) becomes 5—I. • At 50-00, the change in the internal pressure p] of the upstream pipe L] was observed by storing the -19- (16) (16) 200413660 wave device 8. Figure 4 shows the observation results; from (a) to (0) in the previous Figure 4, it is clearly shown that after the process of 5kgf / cm2 · G (full open)-0 (fully closed), the valve 4 becomes full. In the closed state, as shown in Fig. 4 (a), it shows the change in pressure P] with a maximum amplitude of 9.15 kgf / cm2 · G. On the other hand, it is known that the change in the supply pressure Pa becomes 5- > 1.65 — 〇 (Fig. 4 (e)), the pipeline pressure P] hardly changes and completely prevents the occurrence of water hammer. On the other hand, the supply pressure Pa changes to 5— 1.50-0. (Fig. 4 (f)), a vibration with a maximum amplitude of 2.90 kgf / cm2 · G occurs at the pressure P! Of the pipeline. According to the results of the previous tests, it is known that: under the condition of the valve 4, When the valve 4 is switched from fully open to fully closed, the starting air pressure P a of the regulator 4 a may be passed through 5 V (fully open) —1 · 6 5 V (the valve opening is 0.072mm / 1.93inmxl00 = 3.73%) — 0 (fully closed) in the process of blocking to completely prevent the occurrence of water hammer. In other words, it is known that the internal pressure p in the pipeline ^ 1 is in a certain state '(1) It can start from a fully open state to a certain' opening of the valve 'and immediately close it urgently, and then become a fully closed state by passing a short time, and at about 5 0 0 ~ 1 000 msec 'no water hammer' is used to close the fluid path; and (2) even if it is the initial valve body stop position, that is, the valve opening degree is greater or less than a certain value, it cannot prevent water hammer -20- (17) 200413660 Figure 5 uses the same valve 4 and under the same conditions as in Figure 4 for the full opening of the valve repeatedly-> in the road during the fully closed test The pattern of pressure P! Rises to perform patterning; no matter in any test, the pressure P! In the pipeline Li is constant (3kgf / cm2 · G) when the initial use (paragraph 1) is stopped When the regulator supply air pressure Pa of the valve body becomes approximately 1.65 k gf / cm2 · G, the pressure rise of the internal pressure is slightly reduced to 0. Fig. 6 is a test in the aforementioned Fig. 4 showing the supply of the regulator Relationship between pressure P a and valve travel △ G (mm), test strip At the internal pressure Pi = 3kgf / cm2 * G (—constant) and the flow rate Q 3.45 1 / min (—constant) in the pipeline L !, the valve 4 is closed by a multi-stage blocking. In addition, the valve stroke △ G (mm) is measured using a potentiometer. The amount of movement from the fully closed position of the valve shaft that squeezes the diaphragm valve body from the top to the valve opening direction is specified as the valve stroke △ G (mm). It is clearly shown from (a) to (f) of FIG. 6 that the valve stroke Δ (mm) when the supply pressure Pa to the regulator 4a becomes 1.9 kgf / cm2 · G is 0 · 7 8 2 m υ, When P a = 1 · 6 6, it becomes △ G = 0 · 1 0 8. When Pa = 1.65, it becomes △ GsO.tnSmm. In addition, it is clearly shown from (d) in FIG. 3%) when the water hammer production system is slightly 0. In other words, the multi-stage closing is performed under a certain pressure in the tube, regardless of whether the valve opening degree ΔG is more than or less than 0.072,

The Pi 4 a of the same tube type has 5 square knots. The G Cheng Suo also produces water hammer at -21-(18) (18) 200413660. Fig. 7 is a line diagram showing the measured pressure between the valve stroke △ g and the pressure rise △ P! Of the pipeline under the same conditions as in the previous Fig. 6 when the supply pressure pa to the regulator 4a is changed; Regardless of whether the valve body position is stopped at the beginning (the first stage) and the valve stroke Δ G is about 0.0 7 mm, the water hammer generation system is slightly reduced to zero. Next, "the water hammer in the state where the internal pressure P T of the water tank 1 is changed is prevented, and the test is performed using the test apparatus shown in Fig. 1". (A) to (c) in FIG. 8 show the results. When the internal pressure PT of the tank is 3 kgf / cm2 · G, the supply pressure Pa to the regulator is made 5-> 1 · 6 5-0 of With multi-stage lockout, no increase in the internal pressure p of the pipeline was seen (Figure 6 (a)). However, when the internal pressure PT of the tank changes, it is obvious from the arrows A in Figs. 8 (b) and 8 (c) that the internal pressure P i in the pipeline causes some pressure fluctuations. FIG. 9 is the valve stroke ΔG when the starting pressure Pa of the regulator 4a becomes 1.65 kg f / cm2 · G by the potentiometer during the test of the aforementioned FIG. 8; by the diaphragm applied to the valve 4 The pressure of the fluid (water) of the valve body and the supply pressure (1.65 kgf / cm2 · G) to the regulator 4a become the same, the valve stroke △ G is changed. As a result, (b), ( c) As shown in A of the figure, the internal pressure P! of the pipeline causes a change in vibration. Figure 10 shows the multi-stage locking of the valve to show the internal pressure of the tank PT and the adjustment to prevent the internal pressure of the pipeline P! Of the relationship between the actuator starting pressure Pa-22 (19) (19) 200413660

Line graph; curve A 3 shows the tank internal pressure PT = 3 kgf / c m2 · G, curve A2 shows Pa = 2 and curve A] shows Pa = 1 and learns that it can prevent the adjustment of water hammer The range of the device pressure Pa is largely changed by the tank internal pressure PT. In other words, it is clear from the test results of Figs. 5 and 7 that the internal pressure PT of the tank, that is, the internal pressure Pi 槪 of the pipeline Li is slightly constant, can be controlled by the valve 4 Multi-stage lockout of the starting pressure P a supplied to the regulator 4 a (often-closed air-actuated diaphragm valves in this embodiment, Pa = 5kgf / cm2 · G- > 1.65kgf / cni2 · G-0 as much Stage-type lock) In a short time of about 5,000 to 1,000 msec, the water hammer is almost completely prevented, and the pipeline L1 is blocked at high speed. However, the pressure in the tank PT (that is, the pipeline internal pressure P) ,) In a state of change, it is also clearly shown from the above-mentioned Fig. 10 that in controlling only the air supply pressure pa to the regulator 4a, the multi-stage locking is not easy to completely prevent the occurrence of water hammer. Therefore, the applicant of this case changed the control of the supply pressure Pa of the aforementioned regulator 4a so that the valve stroke ΔG of the valve 4 became a control element, and performed many multi-stage latch-up tests with the tank internal pressure PT as a parameter. In addition, the test apparatus is slightly the same as the state shown in Fig. 1 except that a potentiometer for measuring the valve stroke Δ G of the valve 4 is added to it. Figure 11 shows the relationship between the valve stroke △ G and the pressure rise △ p of the valve with the tank internal pressure PT as the parameter in the state where the valve 4 is in a multi-stage lock-out state. -23- (20) (20) 200413660, Figure 12 is an enlarged view of the main part of Figure 1. In addition, in Figures 11 and 12, when A3 and A3 'show the tank internal pressure PT to 3kgf / cm2 · G, A2 and A21 indicate that PT = 2kgf / cm2 · G, A1, A 】 'When displaying PT 2 1 kgf / c in 2 · G ϋ It is also clear from Figure 12 that it is possible to perform a multi-stage blocking of valve 4 by controlling the valve stroke △ G. It is limited to the internal pressure P in the pipeline L]. When the valve stroke △ G becomes 0.0 7 ~ 0 · 0 8 mm, once the valve is closed and started for a short time, then it will be fully closed. In a short time of about 500 to 800 msec, no water hammer is generated, so that the valve 4 is started from fully open to fully closed for emergency locking. Fig. 13 is a block diagram showing a water hammer valve device according to the present invention constructed according to the test results of Figs. 11 and 12 described above. In Figure 13, the 10 series valve body, the 11 series regulator, the 12 series automatic driving force controller, the 13 series control circuit, and the 14 series valve stroke detector. The above-mentioned valve body 10 is interposed in the piping line L! In this embodiment, a valve body 10 having a diaphragm valve body is used. In addition, of course, the valve body itself may be of any type, such as a disc valve having a disc valve body. In addition, in this embodiment, a diaphragm valve having a seat inner diameter of 4.00 mm is used as the valve 4. However, the size of the valve 4 can be selected freely to about 10A to 100A. The aforementioned regulator 1 1 is the driving part of the valve body 10. In this embodiment, the pneumatic cylinder system is used as a regulator, and the piston 1 1 b is pressed down by the spring U a to lock the valve body 1. 0, In addition, on the contrary -24- (21) (21) 200413660, the driving pressure pa is supplied by the automatic driving force controller 12 and the piston is pressed against the elastic force of the spring Π a. Square, and open the valve body I 〇. In addition, in this embodiment, a pneumatic cylinder is used as the regulator π. Of course, it may be a hydraulic cylinder type regulator 11 or an electric actuator (solenoid, motor, or piezoelectric element) regulator Π. In this embodiment, the normally closed valve 4 is used. However, the normally closed valve 4 may be used. In addition, in this embodiment, the valve is closed by increasing the driving pressure P a supplied to the regulator 4 a. However, the valve closing structure may be adopted by reducing the driving pressure Pa supplied to the regulator 4a. The automatic driving force controller adjusts the supply driving force supplied to the regulator 4a. In this embodiment, the supply pressure Pao from a pressure source such as a compressor (not shown) is used to control the pressure to a predetermined pressure pa. The automatic pressure controller that supplies the pressure Pa to the regulator 11 1 In addition, when the regulator 11 uses an electric regulator, of course, the automatic driving force control device becomes a controller for electric output . For the aforementioned control circuit 1 3, the detection signal Sp of the valve stroke ΔG from the valve stroke detector] 4, the switching command signal S for the valve body 10, and the intermediate stop position of the multi-stage blocking (that is, the control valve) The setting signal s G and the like of the stroke △ G), and at the same time, the automatic driving force controller 12 outputs a pressure control signal s R for giving the control pressure P a required for the predetermined valve stroke △ g. -25- (22) 200413660 In other words, in the control circuit 1 3, the valve stroke detection signal SP from the valve row 14 and the cage at the intermediate stop position are compared to adjust the supply air pressure P a to the regulator 11 so that Both are zero. In addition, in this embodiment, the display control circuit 13 and the force controller 12 are separate entities, but they may be integrated as a matter of course. Referring to FIG. 13, in a steady state, an automatic drive 12 is used to supply a predetermined pressure (for example, 5 kgf // cm2 · 〇) /; to the regulator 1 1 and to resist the spring 1 1 a to make the piston supreme Square 'in order to make the valve body 10 fully open. Now, in an emergency, when the valve lockout command signal S is inputted, the valve body is locked by a so-called multi-stage lockout. That is, the force P a supplied to the aforementioned regulator 1 1 first drops instantaneously to the force 値 (for example, 1.65 kgf / cm2 · G) set by the valve stroke setting signal s G, and thereby 1 1 b, comes Use the spring force of the spring η a to lower the valve body (not shown) on the shaft 1 1 c until it reaches the predetermined position of g. Here, stop for a short time (for example, 3 00-) ° at the valve When the body 1 〇 is activated, the detection signal S p from the valve stroke detector is input to the control circuit 1 3 ′. Control is performed by comparing the stroke SP and the valve stroke setting signal SG. The valve of the valve body 1 〇 is adjusted. The stroke △ G is in the range of 〇〇 ～ 2 0 0 ms. Detector: The difference in signal SG is automatically driven so that the pressure of the two-force controller L Pa 1 1 b is raised to the control power for emergency supply air pressure to make the piston Make the 3 stroke △ G -500msec [4 stroke detection signal, press Pa between ec, and keep -26-(23) (23) 200413660 at the set position. The valve shaft 1 c stopped at a position of a predetermined valve stroke Δ G for a short time (300 to 500 msec) is then caused to decrease the air pressure Pa to 0 by the automatic driving force controller 12. And instantly dropped to the fully closed position. As a result, the valve body 10 is fully closed without generating a so-called water hammer, and the time required for the full closure is in this embodiment (tube path 10 A), and becomes approximately 300 to 1000 msec. In addition, in the foregoing embodiment, a diaphragm air-actuated valve with a seat inner diameter of 4.00 mm is mainly used as a valve state to explain. However, the present invention is also applicable to a larger size (for example, 2 to 5 to 1). 0 0 A) ball valve or disc valve. Fig. 14 shows the basic structure of the first embodiment of the water hammer-free locking device of the fluid passage of the present invention. In the water hammer valve device shown in the foregoing Fig. 13, additional valve lock time T and allowable pressure increase 値 PM As a control element. In other words, in this water hammer-free locking device, the detection pressure PC of the primary pressure and the detection sensor TC of the valve lock time and the input from each of the detectors PC, TC are detected 値 P !, T calculations · The memory circuit 15 is attached to the aforementioned water hammer valve device. In addition, the blocking time setting signal TS is configured to be also input to the control circuit 1 3 of the waterless hammer blocking device, and by adjusting the output state of the driving force control signal SR output from the control circuit 13 to the automatic driving force controller 12 And control the starting speed of the regulator Π (that is, the state of application of the starting pressure pa to the regulator 1 1), thereby adjusting from the valve body] 0 of the full -27- (24) 200413660 to the fully closed time. The valve lock time detection sensor TC is provided in the regulator to detect the time τ from the start (opening of the valve) to the start and stop (closed) of the valve shaft 11c, and this is input to the calculation / memory circuit 15. In addition, the aforementioned The pressure detection sensor PC is installed in the primary side L1, and the fluid pressure detection 値 PI 'is input to the calculation and memory 15. The pressure calculation, time comparison circuit, calculation circuit, and calculation circuit are respectively set in the foregoing calculation and memory circuit 15'. The "billion circuit" compares the allowable pressure rise, the set signal PM and the pressure detection signal in the pressure comparison, and also compares the lock time setting signal TS and the lock time detection signal T in the time comparison circuit. In addition, In the aforementioned memory circuit, there is stored a lot of relationship data between the stroke setting pressure rise of the valve body which is obtained in advance by actually determining the lock time T as a parameter. In addition, the aforementioned calculation circuit is when the pressure detection signal P1 exceeds the pressure rise. In the state of setting the signal PM, the setting signal TS is set in cooperation with the blocking time T exceeding the blocking time, so that the memory is stored in the aforementioned memory. The lock time T is shorter than the lock time setting signal TS 'and is set to the pressure rise 値 and stroke setting data in the state closest to this. From this data, the pressure detection 値 P] is selected as the pressure rise 値 setting signal. The stroke setting signal s G 'below PM is input to the control circuit 1 3. In addition, the minimum of the above-mentioned blocking time setting signal TS is determined by the valve) Flow circuit circuit circuit! CBB's allowance is limited by the starting characteristics of the valve -28- (25) (25) 200413660 or 或: 11. The next day is usually set to 1 ~ 3 se C. In addition, the lock time setting signal T $ of the valve body 10 is selected as long as possible within the allowable range. Why this is so, the longer the blocking time T is, the less likely it is that water hammer will occur. When the water hammer-free locking device is used, a lock time setting signal T S and an allowable pressure increase are input, and a setting signal P M is input. In this way, the memory circuit of the calculation and g-memory device] 5 outputs an appropriate stroke setting signal s 0 and inputs it to the control circuit 13. When the fluid flow path L! Is closed, the valve closing command signal S is input to the control circuit 13 to thereby cause the valve body 10 to switch from fully open to fully closed. At this time, in case of the internal pressure P of the primary side flow path; in the state of vibration due to the production of water hammer, the pressure detection signal P from the pressure detection sensor PC is feedbacked and compared with the allowable pressure rise値 Setting signal. In case the pressure detection signal P 1 exceeds the allowable pressure rise setting 値 PM, a new stroke setting signal SG 'is selected by the calculation circuit and input to the control circuit 1 3. As a result, the rod body 1 1 c of the valve body 10 is instantly restored to the new stroke position, and the next time the switch of the valve body 10 is activated, the pressure rise caused by the water hammer is suppressed to an allowable maximum pressure rise.値 P Μ or less. Figures 15 and 16 show the basic structure of the second embodiment of the water hammer-free locking device for the fluid path of the present invention, as shown in Figure 4]-29- (26) (26) 200413660 Example As shown in the state, it is mainly used in a state where it is not easy to install a pressure detector pc for the upstream upstream piping L 1 already installed or for a valve body} 〇 to install a valve stroke detector (position detector). Referring to FIG. 15 and FIG. 16, the water hammer-free locking device can be combined: the valve body 10 and the regulator 1 in a state in which the valve stroke detector 14 is removed from the water hammer valve device in FIG. 13. 1. Electro-pneumatic conversion control device 1 7. Calculation control device capable of controlling the stepwise switching of the regulator starting pressure P a and the pressure holding time T s after switching, etc. 6, and the freely detachable fixing on the upstream side distribution pipeline The vibration sensor 18 of LI can select the regulator switching pressure pa which is applied to the regulator 10 of the valve body 10 and the phase switching (the switching from P2max to Ps in step 16 (a) (step The holding time Ts of the inlet pressure Ps)) or the step pressure ps is previously set and memorized for the lock condition of the valve body 10 capable of performing the lock without water hammer. That is, in Fig. 15 and Fig. 16, the 16 series calculation control device '17 series electro-pneumatic conversion control device, 18 series vibration sensor, 6 series valve driving gas source, and 10 series The valve body, the Π series regulator, and the driving pressure Pa from the valve driving gas source 6 (the state of this embodiment is about 0.6 MPa) are converted by the electro-pneumatic switching control device] 7 as shown in the first 6 (a) The step-like starting pressure Pa in the state shown in the figure is applied to the regulator 11. In addition, the regulator starting pressure Pa or the holding time T s applied to the regulator 11 is to use the valve body 1 by arranging each of the lines L] on the upstream side of the valve by a method described later. The control signal S c of the calculation control device 16 obtained in the lock-up start test is convenient for control. If the vibration sensor] 8 and the calculation control device 16 are completed by the valve body -30- (27) ( 27) The selection of the aforementioned control signal Sc caused by the blocking start test of 200413660 10 will be removed by the upstream side pipeline L !. That is, in the aforementioned calculation control device] 6'g ^; set: the setting circuit of the step pressure setting P s 16a 'the setting circuit of the pressure holding time setting signal 16b, the setting of the allowable upper limit vibration pressure setting signal Prm Circuit 1 6 c, pipeline vibration pressure detection circuit 16 d and comparison calculation circuit 16 e, etc .; input separately because the internal pressure P of the valve body 1 0 when it is detected by the vibration sensor 18 1 The vibration detection signal Pr, the step pressure setting signal Ps, the step pressure holding time setting signal Ts, and the allowable upper limit vibration pressure setting signal Prm caused by the change. Next, in the aforementioned comparison calculation circuit 16e, in a state where a difference is generated between the vibration detection signal P1 · and the allowable upper limit vibration pressure setting signal Prm, as described later, the correction step pressure setting signal Ps' includes The modified control signal of the step pressure setting signal P s and the holding time setting signal Ts is output to the data 6 of the electro-pneumatic conversion control device [6]. In addition, the aforementioned electro-pneumatic conversion control device 17 is provided with a data storage portion 17a, a signal conversion portion 17b (signal generator 7), an electro-pneumatic conversion portion 17c (electro-pneumatic conversion device 5), etc. The regulator activation pressure control signal Sc from the signal conversion section 17b is input to the electro-pneumatic conversion section 17c, and the regulator activation pressure Pa supplied to the regulator 11 is shown in (a) of FIG. 6 , Switching in stages.

In addition, for this electro-pneumatic switching control device 17, a valve switching command signal S and a switching signal S corresponding to the valve body's starting condition (N o or NC -31-(28) (28) 200413660)) are input. 〇. Referring to FIG. 16, first, fix the vibration sensor 18 on the pipeline L !. Next, for the calculation control device 16, an appropriate step pressure setting signal P s, a step pressure holding time setting signal τ s, and an allowable upper limit vibration pressure setting signal P are input, and at the same time, the electro-pneumatic switching control device 1 is appropriately set. The valve body switching signal So of the valve body 7 and the regulator start fluid supply pressure P a 〇〇 Then, the valve switch command signal S is input, and the valve body 1 of the valve body 1 0 is supplied to, for example, the (a) of FIG. 16 The regulator starting pressure Pa shown in the figure is now 'at time t !, when the regulator starting pressure P a starts to decrease from P ama X to P s, the fluid passage of the valve body 10 is locked to the intermediate position' And 'at the time 12 when the set holding time TS elapses, the valve body 10 is brought into a fully closed state by causing the g-cycle starting pressure P s to be zero. During this period, when the internal pressure P 1 of the piping line L is changed due to the occurrence of water hammer, the change state is detected by the vibration sensor 18, and the vibration detection signal Pr is input to the calculation control device 1. 6. In the calculation control device 16, the detection signal Pr and the allowable upper limit vibration pressure setting signal P rm are compared. At the position A! (Time 11), no vibration is generated or the magnitude of the vibration is within the valley limit. However, at A 2 Position (time t2), when the vibration exceeds the allowable 値 Prm, modify the step pressure setting signal Ps and lower the regulator start pressure PS slightly, so that the modified step pressure setting signal Ps and its holding time setting signal D s ， -32- (29) (29) 200413660 becomes the control signal S c and is output from the calculation control device 16 to the electro-pneumatic conversion control device 17. Then, the same latching start test of the valve body 10 is performed again. . In addition, on the contrary, even in a state where the vibration generated at the A1 position (time t!) Exceeds the allowable upper limit vibration pressure setting signal Prm, the setting signal is corrected in a direction of slightly increasing the aforementioned step pressure setting signal Ps. P s starts from the calculation control device 16 and becomes the control signal S c and is output to the electro-pneumatic conversion control device 17. Then, the lock-up start test of the same valve body 10 is performed again. The intermediate starting pressure of the regulator 11 required for the installation of the pipeline L! Of the vibration sensor 18 by repeating the above-mentioned starting tests described in 0 0 7 0 and 0 0 7 1 P s (step pressure setting signal P s) is selected based on a predetermined step pressure holding time setting signal T s (valve lock time Ts), and the selected most appropriate step pressure setting signal P that does not cause water hammer is selected. s and the control signal Sc which is given to maintain the set time Ts are stored in the data storage unit 17a of the electro-pneumatic conversion control device 17, and the subsequent blocking of the pipeline L! is based on the control signal Sc according to the billion It is performed by controlling the regulator starting pressure Pa. In addition, in the foregoing embodiments of Figs. 15 and 16 ', the control regulator is activated by the starting pressure Pa to switch to two stages. However, it is of course possible to switch between three or four stages if necessary. In addition, the step hold time setting signal T s is usually set between 0.5 and 1 second. Of course, as the time T s becomes shorter, it is difficult to find the condition of the anhydrous hammer lockout. -33- (30) (30) 200413660 Figure 17 shows the third embodiment of the method for blocking the fluid passage of the present invention and the water hammer blocking device used therefor. In Figure 17, L! Is equipped with piping, 10 series valve body, 11 series air conditioner, 18 series vibration sensor! The basic structure of the 9-series tuning box and the 20-series electro-pneumatic conversion device as the anhydrous hammer locking device is almost the same as that of the second embodiment shown in FIG. 15. The aforementioned tuning box 19 enables the vibration detection signal Pl. From the vibration sensor 18 installed on the upstream side of the valve body 10 to be a feedback signal to be inputted. 'The detection signal Pr is used to detect the occurrence of water hammer. By outputting the regulator activation pressure control signal S c to the electro-pneumatic conversion device 20, the regulator activation pressure P a supplied to the air conditioner 11 in a two-stage state is optimized. Specifically, as described later, the step start pressure ps of the regulator start pressure Pa of Fig. 21 is calculated, and the size of the step start pressure ps and the step start pressure holding time t are the most appropriate, so that the regulator start pressure Pa is output from the electro-pneumatic conversion device 20 to the control signal sc of the regulator 11 to be output to the electro-pneumatic conversion device 20. In addition, the tuning box 19 is provided with a selector switch for switching the control signal S c in accordance with the activation type (N. O. or N. C.) of the air conditioner 11 of the valve body 10. Fig. 18 is an example of a personal computer screen display showing the main part of the tuning box 9; the switching state of the valve body 10, the regulator starting pressure P a for the air conditioner 11, and the vibration of the pipeline L Status, step start pressure P s ′ and piping vibration 値, condition setting for automatic tuning, condition setting for manual switch, and valve body], etc. -34- (31) (31) 200413660 May be constructed. The aforementioned electro-pneumatic conversion device 20 is a combination of a signal converter and an electro-pneumatic converter. As shown in FIG. 19, the air supply solenoid valve B, the exhaust solenoid valve F, the pressure sensor, the control circuit A, etc. The structure is basically the same as that shown in (a) and (b) of FIG. 2. In other words, the air supply solenoid valve B supplies an air pressure of 0.6 MPa or more 'to an air pressure of 0 to 0.5 MPa, which becomes the regulator startup pressure control pressure P a and is output to the air conditioner 1. In addition, a control board A of the electro-pneumatic conversion device 20 is provided with a base plate A! And an external input / output interface a 0, and the like, and an external input / output interface A 0 is provided with two electronic connectors a c and A d. Next, for the electronic connector Ac, connect the power supply (DC24 or 12V), the switching signal I (voltage input or no voltage input), and the pressure monitor (0 to 5DCV, 0 to 98 1KPaG). Ad to connect the tuning box 19 〇 Figure 20 shows the implementation process of the automatic tuning of the third embodiment. In addition, Figure 21 shows the regulator starting pressure Pa and vibration generated by the air conditioner n added. The relative relationship between them. In addition, as the regulator starting pressure Pa is the same state as in Fig. 16, a two-stage regulator starting pressure Pa is added. Referring to Fig. 20, as shown in Fig. 17, fix the vibration sensor 18 to a predetermined position of the piping line L (the upstream side position within about 100 mm from the valve body 10, the most Fortunately, it is separated from the upstream side of 1000 ~ 100m), and at the same time, a tuning box is installed] 9 and electro-pneumatic conversion-35- (32) (32) 200413660 device 20. Then, after the auto-tuning start signal is input (step S!) And the valve is kept fully open for about 2 seconds (step S2), it is controlled by adding a two-stage regulator activation pressure Pa (step S3). ). The holding time t of the step start pressure Ps' is set to 0.5 to 1 sec as described later. The vibration occurring in the piping line L by the locking of the valve body 10 is detected and confirmed by the vibration detection signal Pr from the vibration sensor 18 (step S 4). The point A in the figure 2 may occur at point B (steps S 5 to S 6). In the state of point A, increase the step start pressure ps ′ of the regulator start pressure Pa (step S7), and In the state of point B, the aforementioned regulator starting pressure Ps is reduced (step S 8). By repeatedly performing the above-mentioned latching control of the valve body 10 (usually coefficient times to 15 times), and finally obtaining the regulator starting pressure pa having the most suitable step starting pressure Ps' that does not generate vibration at all, The output can completely prevent the control signal S c of the two-stage regulator start-up pressure P a of the vibration obtained by the automatic tuning, and input it to the electropneumatic conversion device 20 to facilitate the blocking of the valve body 10. The shorter the start-up pressure holding time t of the two-stage regulator start-up pressure P a added to the aforementioned automatic tuning is, the better the situation is. However, it is better to use air-actuated regulator 11 to become t == Less than 1 second. In addition, in the aforementioned FIG. 20 and FIG. 21, by using a normally-closed air-actuated diaphragm valve to supply the regulator starting pressure pa, the valve body 1 of the opening-36- (33) (33) 200413660 〇 The description will be made on the state of blocking, but of course, by using a normally open air-actuated diaphragm valve, the regulator starting pressure Pa can be divided into two stages and raised to perform water hammer blocking. In the state, the adjustment of the step start pressure Pa 'of the regulator starting pressure Pa is opposite to the state of the normally closed type described above. When the step start pressure Pa of the first stage rises, when the vibration occurs, the step step starts. When the pressure Pa 'is increased in the second stage, when the regulator starting pressure Pa rises, when the vibration occurs, the starting pressure Pa' is increased by step. Fig. 22 shows: when the valve switch is used, there is no change in the internal pressure of the pneumatic start valve (19 · 0 5 mm), when the regulator start pressure P a becomes 0.490MPaG — 0.19MPaG — OPaG 2-stage start Press Pa to lock the pressure of the liquid line. 0.098MPa, 0.198MPa and 0.294MPa three kinds of piping when the step start pressure holding time t and the pressure rise of the liquid line 値 ΔP (MPAG) relationship. It is found that if the step start pressure holding time t becomes 1 second or longer, the pressure increase ΔP can be made almost zero, but when t becomes 0 · 5 seconds or less, the pressure increase ΔP becomes large. In addition, if the above-mentioned automatic tuning is ended, if a control signal Sc capable of performing the anhydrous hammer lockout of the pipeline L (that is, a control signal Sc for outputting the starting pressure Pa of the two-stage regulator capable of performing the anhydrous hammer lockout) is obtained, Then, the data of the aforementioned control signal Sc (that is, the starting pressure Pa) is transferred to the electro-pneumatic conversion device 20, and this is also memorized. Then 'remove the auto-tuning 19 and the vibration sensor 18. In the state that the valve body is required to be in the emergency lockout state, 'using the borrowed-37-200413660 (34) information obtained by the automatic tuning of the aforementioned control signal Sc, and the electro-pneumatic conversion device 20 will be able to perform water hammer-free The blocked two-stage regulator activation pressure P a is output to the regulator Π of the valve body 10. In the above-mentioned embodiment of FIG. 7, if the auto-tuning operation is ended, if the regulator starting pressure Pa (step starting pressure Ps · and its holding time t) is determined, information about the starting pressure Pa will be obtained. Transfer to the electro-pneumatic conversion device 20, and then the vibration sensor 18 and the tuning box 19 are completely removed, but of course, the tuning box can also be miniaturized and integrated into the electro-pneumatic conversion device 2 0 . The invention is not only an industrial water supply pipe, steam, gas, etc. supply pipe, but also applicable to general household water supply and hot water supply pipe, the semiconductor (manufacturing plant) fluid (gas and liquid) supply pipe 5. Fluid supply pipelines in chemical industry factories. Even among them, the present invention is particularly suitable for a chamber device for semiconductor manufacturing, a cleaning device for wafers, and various uranium engraving devices. [Brief description of the figure] The figure] is a circuit configuration diagram of a test device used for investigating the state of water hammer generation in the fluid path. Fig. 2 is an explanatory diagram of an electro-pneumatic conversion device used in a test device, (a) is a basic structure diagram 'and (b) is a block structure diagram. Fig. 3 is a line chart showing the relationship between the input signal I (input voltage V) and the output pressure Pa (kgf / cm2 · G) of the electro-pneumatic conversion device 5. Fig. 4 shows the pipeline upstream of the valve in a state where the internal pressure P of the pipeline is closed to a certain number of stages § -38-(35) (35) 200413660 and the supply pressure pa to the regulator is changed L] is a line diagram of the change of the internal pressure P 1; (a) shows the state when Pa is directly blocked from 5kgf / cm2 · G to Okgf / cm2 · G, and (b) shows that the Pa is changed from 5 kgf / cm2 · G starts to decrease to 1.9 kgf / cm2 · G and then becomes 0. (c) shows a state of 5 — 1.66 — 0, (d) shows a state of 5 — 1.65 — 0, (E) indicates a state of 5-1.62-0, (f) indicates a state of 5-1.62-0, and (g) indicates a state of 5-1.50-0. Fig. 5 is a graph showing the relationship between the driving pressure Pa of the regulator and the pressure rise Δ P! To make the internal pressure P! FIG. 6 is a line chart showing the change in valve stroke Δ G in a state where the internal pressure P of the pipeline is locked in a certain multi-stage manner and the air supply pressure Pa to the regulator is changed; (a) is a display showing Pa becomes 5kgf / cm2 · G (fully open)-0 (fully closed). (B) shows that it becomes 5kgf / cm2 · G (fully open) and starts to 1.9kgf / cm2 · G (middle opening). (Fully closed), (c) shows a state of 5-1.66-0 '(d) shows a state of 5-1.65-0' (e) shows 5-1.62 — 0 state, (f) shows the state of 5 — 1. 5 0 0. Fig. 7 is a graph showing the relationship between the valve stroke △ G (mm) and the pressure rise △ P 1 of the pipeline L! Which make the internal pressure P! -39- (36) (36) 200413660 Figure 8 shows the tube with a multi-stage lockout (Pa = 5 — 1.65-〇kgf / cm2 · G) when the tank pressure (piping internal pressure pi) is changed. Line diagram of the change in road internal pressure PI; (a) shows the state when the tank internal pressure P] = 3kgf / cm2 · G, (b) shows the state when P! = 2 and (c) shows P] The state of two. Fig. 9 is a line graph showing the relationship between the regulator starting pressure pa and the valve stroke △ G in the test of Fig. 8; (a) shows the time when the tank pressure ρ τ becomes 3kgf / cm2 · G '(b) display? When D = 2, (c) shows when PT = 1. Fig. 10 is a line diagram showing the relationship between the multi-stage closed-valve internal pressure P T of the valve and the starter pressure P a of the regulator capable of preventing water hammer. Fig. 11 is a diagram showing the relationship between the valve stroke △ G and the pipeline pressure rise △ P! That make the internal pressure PT of the multi-stage lock of the valve a parameter. Figure 12 is an enlarged view of the main part of Figure 11. Fig. 13 is an overall configuration diagram of the water hammer valve device of the present invention. Fig. 14 is an overall configuration diagram of the first embodiment of the anhydrous hammer locking device for the fluid passage of the present invention. Fig. 15 is an overall configuration diagram of the second embodiment of the anhydrous hammer locking device for the fluid passage of the present invention. Fig. 16 is an explanatory diagram showing the control of the starter pressure P a of the anhydrous hammer locking device of Fig. 5 (Fig. 6 a) and an example of vibration generation (b of Fig. 16) . Fig. 17 is a structural diagram of the entire system of the anhydrous hammer locking device according to the third embodiment of the present invention. -40-(37) (37) 200413660 Figure 18 is the main figure of the p C bundle surface of the tuning box. Figure 19 is a schematic diagram of the structure of the electro-pneumatic conversion device. Figure 20 is a flowchart of the automatic tuning operation. Fig. 21 is an explanatory diagram of the relationship between the driving pressure P a of the auto-tuning operation and the generated vibration. Fig. 22 is a graph showing the relationship between the step pressure holding time t and the pressure rise 値 ΔP of the step-like driving pressure Pa. [Illustration of drawing number] A: Control circuit A〇: External I / O interface A ;: Substrate A c: Electronic connector

Ad: Electronic connector B: Air supply solenoid valve C: Supply pressure E: Pressure sensor F: Exhaust solenoid valve G: Exhaust △ G: Valve stroke Η: Power supply I: Input signal J: Output signal L ]: Valve upstream line -41-(38) (38) 200413660 P!: Internal pressure of pipeline (pressure detection signal)

Pa: Regulator starting pressure

Pao: Air supply pressure PM: Allowable pressure rise 値 Set signal

Pi *: Vibration detection signal P r m: Permissible upper limit vibration pressure setting signal

Ps: step pressure setting signal P s ’: step start pressure P T: tank internal pressure S: valve switch command signal S c: control signal S c’: control signal

Se: Regulator start pressure control signal S G: Valve stroke setting signal S 〇: Ν Ο · N C switching signal of valve

Sp: Valve stroke detection signal S R: Driving force control signal T: Blocking time detection signal t _Step pressure holding time TC: Blocking time detection sensor TS: Blocking time setting signal

Ts: Step pressure holding time setting signal (blocking time setting signal) 1: Water tank 2: Water tank pressure source -42- (39) (39) 200413660 3: Pressure sensor 4: Valve 4a: Regulator 5: Electric Air conversion device 6 = Valve driving gas source 7: Signal generator 8: Storage oscilloscope 1 0: Valve body 1 1: Regulator 1 2: Automatic driving force controller (automatic pressure controller) 1 3: Control circuit 1 4 : Valve stroke detector (position detector) 1 5: Calculation and memory device 16: Calculation control device 16 a: Setting circuit 1 6 b: Setting circuit 1 6 c: Setting circuit 1 6 d: Setting circuit 1 6 e : Setting circuit 17: Electro-pneumatic conversion control device 17a: Data memory portion 17b: Signal conversion portion 17c: Electro-pneumatic conversion portion 1 8: Vibration sensor-43- 200413660 (40) 1 9: Tuning box 20: Electro-pneumatic Conversion device

Claims (1)

(1) (1) 200413660 Patent application scope 1. A method for locking a fluid path with a certain fluid pressure, which is characterized by adjusting the fluid path with a certain fluid pressure through a pressure in the pipeline. The method of the actuator-actuated valve to block the fluid path is to first 'increase or decrease the drive input to the regulator to a predetermined setting, move the valve body to the valve closing direction, and shorten the drive input to the regulator. After the time is maintained at the aforementioned setting 値, the drive input is also increased or decreased, so that the valve is fully closed without generating water hammer to close the fluid passage. 2. A method for blocking a fluid path with a certain fluid pressure, which is characterized in that: a method for blocking the fluid path through a regulator-activated valve interposed in a pipeline with a certain fluid pressure, First, by increasing or decreasing the drive input to the aforementioned regulator, the valve body is moved to the valve closing direction so that the valve stroke is maintained near a predetermined setting 値, and then the valve stroke is maintained at the setting for a short time 値Then, by increasing or decreasing the aforementioned driving input, the valve is brought into a fully closed state without generating water hammer to close the fluid passage. 3. —A method for blocking a fluid path with an uncertain fluid pressure, which is characterized by a method of urgently closing a fluid path by a regulator-actuated valve interposed in a fluid path with an uncertain fluid pressure in the pipeline. First, By increasing or decreasing the drive input to the aforementioned regulator, the valve body is moved to the valve closing direction so that the valve stroke is maintained near a predetermined setting 値, and then the valve stroke is maintained at the setting 短 for a short time. By also increasing or decreasing the aforementioned drive input, the valve is fully closed without generating water hammer, so -45- (2) (2) 200413660 blocks the fluid passage. 4 · The method for closing the fluid passage as described in the scope of the patent application No. 2, 2 or 3, where the valve becomes a normally closed type pneumatically actuated diaphragm valve, or when the valve starts, it becomes a valve Constant volume changes • Frequently closed, pneumatically actuated diaphragm valves. 5 · The method for blocking the fluid path as described in the scope of the patent application No. 2, 2, 3 or 4, in which the valve blocking time is made extremely short, and at the same time, the pressure of the fluid path is increased, before the valve is blocked. The pressure is within 10%. 6 · A water hammer valve device for fluid path blocking, characterized by: • constituted by: a valve body; a regulator that drives the valve body; an automatic driving force controller that adjusts a driving force input to the regulator; detection A valve stroke detector for the valve stroke of the valve body; and inputting the valve switch command signal S, the valve stroke detection signal S p and the valve stroke setting signal s G simultaneously output the driving force control signal SR to the aforementioned automatic driving force controller and adjust the The valve body keeps the valve stroke of the valve body behind the setting for a short time, so that the valve body becomes a fully closed control circuit. 7 * The water hammer valve device described in item 6 of the scope of patent application, wherein the valve body is a diaphragm valve, and at the same time, the regulator is a pneumatically actuated regulator. 8 · The water hammer valve device described in item 6 or 7 of the scope of the patent application, where the valve body becomes a normally closed diaphragm valve, and at the same time, the regulator becomes a pneumatically actuated regulator, and the control The fully closed time of the valve of the circuit becomes extremely short. -46-(3) 200413660 9. A water hammer blocking device for a fluid path, which is characterized by the following features: The water hammer valve device is used to adjust the driving force input to the regulator through the valve body and the valve body. The valve stroke detector of the valve stroke of the valve body of the automatic driving force controller, and the input valve switch number S, the valve stroke detection signal Sp, and the valve stroke setting signal s G are the same as the driving force control signal SR to the aforementioned automatic driving force controller. The valve body is configured to maintain the valve stroke of the valve body for a short period of time so that the valve body becomes a fully closed control circuit; and a calculation memory device is provided with: a pressure detection sensor and an input for detecting a side flow path The pressure detection signal P! From the internal pressure in the passage of the pressure detection sensor, the lock time detection signal T and the allowable pressure increase from the lock time detection. The signal lock time setting signal TS is set to perform the pressure increase signal at the same time. Comparison circuit between signal PM and comparison between blocking time number T and blocking time setting signal TS Zhi should rise and the stroke setting value in the pressure relationship of the dwell time of the memory circuit, and the result of the comparison by the comparison circuit selects the most appropriate setting pressure rise Zhi calculation circuit and the latch time setting signal PM signal TS setting value. 10. The fluid path hammer lockout device described in item 9 of the scope of the patent application, wherein the lockout time setting signal TS for the control circuit of the waterless hammer valve device is adjusted by the speed of the valve's closing valve activation joint. The controllable fluid path is closed by the regulator, the fluid sensor PM and P which output the fluid pressure through the adjustment when the command signal is detected, and the volume detection signal. The structure of the lock time -47-(4) (2004) 200413660 when losing. 1 1 · A water hammer-free locking device, which is characterized in that the valve body is composed of the following: an adjuster that drives the valve body; a vibration sensor that is detachably fixed on the upstream side of the valve with an electric-pneumatic switching control device Is the input of the valve switching command signal, and at the same time, the control input pressure to the regulator is activated by the control signal S c stored in the data memory part in advance; and, the calculation control device is provided with: the input from the foregoing The vibration detection signal Pr of the vibration sensor and the step pressure setting signal Ps supplied to the regulator and the holding time setting signal T s of the step pressure and the allowable upper limit vibration pressure setting signal P rm perform the aforementioned vibration detection signals Pr and The comparison calculation circuit between the allowable upper limit vibration pressure setting signal Prm and the correction of the aforementioned step pressure setting signal P s will output a control signal Sc composed of the aforementioned holding time setting signal Ts and the modified step pressure setting signal ps to output Billion copies of the data to the aforementioned electro-pneumatic conversion control device. 12. The water hammer-free locking device described in item 11 of the scope of the patent application, wherein the calculation control device is constituted separately, and the vibration pressure detection circuit is composed of a step pressure setting circuit, a holding time setting circuit, and an allowable upper limit vibration pressure setting circuit. Simultaneously with the structure of the comparison calculation circuit, the vibration detection signal Pr immediately after the step change of the regulator startup pressure exceeds the allowable upper limit vibration pressure setting signal Prm is corrected in the upward step -48- (5) ( 5) 200413660 The direction of the input pressure setting signal P s, and in a state that the vibration detection signal Pr exceeds the allowable upper limit vibration pressure setting signal Prm such that the starter pressure of the regulator starts from the middle stepping start pressure to zero. Corrected in the direction of the set pressure Ps along the descending step pressure. 13. The anhydrous hammer locking device as described in item 11 of the scope of patent application, wherein the electro-pneumatic conversion control device is constituted by a data storage unit and a signal conversion unit and electro-pneumatic conversion that memorizes the control signal S c from the calculation control device. At the same time, the signal conversion unit outputs the regulator start-up pressure control signal S e according to the control signal S c 5 when the water hammer stored in advance is not recorded in the data storage unit, and is converted by electric and air. To output the regulator starting pressure Pa. 1 4. A water hammer-free locking device, characterized in that: a regulator-actuated valve composed of the following is provided in the fluid passage; an electro-pneumatic conversion device is provided for the regulator-actuated valve to provide 2-stage adjustment The startup pressure Pa of the device; the vibration sensor is detachably fixed to the upstream pipeline of the aforementioned regulator-operated valve; and, the tuning box is used to input the vibration detection signal P detected by the vibration sensor. r. At the same time, for the electro-pneumatic conversion device, a control signal Sc that controls the size of the step-up start pressure Ps' of the aforementioned two-stage regulator start pressure Pa is output from the electro-pneumatic conversion device by adjusting the control signal Sc. To output the two-stage regulator start-up pressure Pa, which makes the vibration detection signal Pr almost zero. -49- (6) 200413660 1 5. A method for locking the fluid path, which is characterized in that: a vibration sensor can be detachably installed on the upstream side of the regulator-actuated valve interposed in the fluid path, The vibration detection signal pr of the vibration sensor is input to the tuning box, and at the same time, the control signal Sc from the tuning box is input to the electro-pneumatic conversion device. The control signal S c will be generated in the electro-pneumatic conversion device. The two-stage regulator starting pressure Pa is supplied to the regulator. In the method of blocking the fluid path of the regulator-activated valve by two-stage activation, the aforementioned tuning box will be supplied to the regulator's second stage. The relative relationship between the regulator startup pressure Pa and the vibration detection signal Pr is compared. When the regulator startup pressure Pa in the first stage decreases and vibration occurs, the stepping startup pressure Ps' rises, and, In the case where vibration occurs when the start pressure P a of the regulator in the second stage is decreased, the step start pressure ps is decreased. The adjustment is caused by repeatedly using the aforementioned step start pressure ps repeatedly or repeatedly. and The step start pressure ps of the two-stage start pressure pa which causes the vibration detection signal Pr to be almost zero is obtained. According to the step start pressure P s' which is output by the electro-pneumatic converter to make the vibration almost zero. The data of the control signal S c at the time of the two-stage starting pressure pa, and the aforementioned regulator-actuated valve is closed. 16 · —A method for locking a fluid path, which is characterized in that: a dynamic sensor can be installed detachably on the upstream side of a regulator-operated valve interposed in the fluid path, and the vibration from the vibration sensor is detected The signal Pr is input to the tuning box, and at the same time, the control signal Sc from the tuning box is input to the electro-pneumatic conversion device, and the two-stage regulator generated by the electro-pneumatic conversion is set by the aforementioned control signal S c Start pressure Pa to supply to the regulator -50- (7) 200413660 In the method of blocking the fluid path of the regulator-activated valve by 2-stage activation, the 2-stage regulator starting pressure Pa is supplied to the regulator in the aforementioned tuning box. The relative relationship with the vibration detection signal Pr is compared. When the regulator start pressure Pa in the first stage rises and vibration occurs, the step start pressure P s ′ is decreased, and the regulator in the second stage starts. When vibration occurs when the pressure Pa rises, the step-up starting pressure Ps 'is raised, and a vibration detection signal is obtained by repeatedly performing adjustments by using the decrease or rise of the step-starting pressure Ps' described above. Pr becomes the stepwise starting pressure Ps 'of the two-stage starting pressure Pa almost zero. According to the stepwise starting pressure Pa of the stepping starting pressure Ps' which is almost zero when the vibration is output by the electro-pneumatic conversion device, Data of the control signal Sc at the time, and the aforementioned regulator-actuated valve is blocked. 1 7 · The method for blocking the fluid path as described in item 15 or 16 of the scope of the patent application, wherein the information of the control signal S c when outputting the starting pressure pa in a two-stage state such that the vibration generation becomes almost zero is output. After inputting to the memory device of the electro-pneumatic conversion device, remove the vibration sensor and tuning box. 1 8 · The method for locking the fluid path as described in item 15 or 16 of the scope of the patent application, wherein the vibration sensor is set at the start position of the regulator-activated valve; [〇〇〇 Upstream position within mm. 19 · The method for blocking the fluid passage as described in item 15 or 16 of the scope of patent application, wherein the stepwise starting pressure holding time t of the two-stage starting pressure Pa is set to be less than 1 second. -51-