TW200410913A - Supporting member in an over for barking glass substrate - Google Patents

Abstract

This invention discloses a supporting member in an oven, especially employing in the oven for barking glass substrate. The glass substrate yield of thin-film transistor (TFT) can be raised by the oven. According to this invention, a plurality of first bar supporting members and second bar supporting members are disposed on the oven walls for supporting a glass substrate. The outer portion of the first and the second bar supporting members are each wrapped by a soft layer with low heat conductive index. Thus, the defects, such as the scrape on the glass substrate or the unequal heat-conduction, will not happen. Moreover, the quality of the glass substrate after barking with the oven of this invention can be raised.

Description

200410913 V. Description of invention α) 1. [Technical field to which the invention belongs] The present invention relates to a structure of a support frame in a baking furnace, and more particularly to a support frame applied in a baking furnace for baking a glass substrate. The structure is to improve the yield of the glass substrate used by the thin-film transistor (TFT) and to improve the quality of the glass substrate after the baking process of the baking furnace. 2. [Previous technology] Thin film transistor is a kind of liquid crystal display (Liquid Crystal D isp 1 ay; LCD) technology. This screen puts a transistor at each point to control the color, so that it can be updated on the screen. During the display period, the display information on the screen is maintained. This technology is also called an "active-matrix" screen. Today's notebook computer displays are mostly dominated by thin-film transistor liquid crystal displays. This display improves the previous dual-scan liquid crystal display (DSTN) when the light is too strong and the display angle is too small. problem. At present, the thin film transistor display has been made into a desktop screen, and there is a tendency to replace the traditional cathode ray tube (CRT) screen. The so-called liquid crystal display uses the principle that rod-shaped crystal molecules (rod-shaped wy ^ tal molecule) are changed in direction by the action of current to display no poor information. LCD monitors are usually found on digital watches, pen 5 PCs, or computers, and they have very low power consumption, so they are suitable for long-time display devices. The structure of the liquid crystal display is

200410913 V. Description of the invention (2) Liquid crystals are placed in the glass substrate. In the middle of these two glass substrates, there are multiple small vertical and horizontal wires, which control the dots displayed on the liquid crystal display through the action of power on and power off. In the manufacturing process of the thin-film transistor liquid crystal display panel, the frame adhesive (thermosetting epoxy resin) used to adhere to the glass substrate to form the liquid crystal cell (ce 11) needs to be hardened by heating. In general, the heating method is a process in which a glass substrate is sent to a baking oven for baking, so as to harden the frame material. Referring to the first figure, this is a top view of a conventional oven for baking glass substrates. The structures in the conventional baking oven 10 for baking glass substrates are all layered structures, so that multiple glass substrates can be baked at the same time in a single baking process. Generally, the baking oven 10 has different layers depending on the design of the equipment. Generally, the inside of the general baking oven 10 is divided into about forty layers so that the heat is evenly distributed in each layer of the baking oven. A glass substrate can be placed in each layer of the baking furnace 10 for the baking process, and the interior of the baking furnace includes a plurality of thimble pins (p i η) 12 for supporting the glass substrate. The number of thimbles is determined according to different equipment and product requirements. Usually, the number of thimbles 12 in each layer in the baking oven 10 is eight, and these thimbles 12 are distributed in pairs in Huan Two side walls in the oven. Referring to the second figure, this is a schematic diagram of placing a glass substrate in a single layer inside the baking furnace. Refer to the third picture, this is a piece of glass

Page 6 200410913 V. Description of the invention (3) Glass substrates are placed on each wall of the furnace. The normal installation method is safe and easy to touch, but the defect of the high pressure glass substrate display is not good. A black pin on the first layer of the black display is displayed on the surface of the black display. The shortage of production baking ovens are all distributed by letting the weight of the oven in the glass oven, and when the picture between the needle 12 and the stress-bearing glass substrate is trapped, the industry will cost. Schematic diagram of the defect when the inner thimble is on. During the baking, a plurality of thimbles 12 are used to carry the glass substrate i 6 A thimble support frame 14 is fixed to the side substrate 16 of the baking furnace can be smoothly placed on the thimbles 12 and the arrangement of the thimbles 12 For two side walls corresponding to each other. Usually, the volume phase of the glass substrate 6 and the large glass substrate 16 are placed in the baking furnace. The contact surfaces between the thimbles i 2 and the glass substrate 16 are all spot-shaped defects. The internal support material (spacer) makes the gap locally low, which causes defects such as poor display in the liquid crystal. This kind of display failure is called a black gap. This item reduces the yield of the glass substrate and increases the liquid crystal. 3. [Content of the Invention] Oven Ming! 1Using the traditional thimble method to support the drying process, " to = points :::: == the majority of the existing installation of the plate stress concentration-rod-shaped 3 :: ,, # is used to install on the furnace wall of the baking furnace A glass substrate is loaded, and most of them: υ several second rod-shaped support frames are used to support the exterior of the building frame. The heart-shaped support frame and most of the second rod-shaped sentences L are provided with a layer of soft and low thermal conductivity material. 200410913, description of the invention (4) After the plate is baked in the block oven, the defect is caused by the bad black spots caused by the painful response. The second purpose of the invention is to use the shelf and most of the first Two rod-shaped racks, the homogeneous support frame and the majority of the second rod-shaped low glass substrate; the soft and low thermal conductivity material is used for the majority of the second on the furnace wall of the baking furnace. The rod-shaped support frame is used for 7 | rod-shaped support frame and most second rod-shaped cymbals with low thermal conductivity, and the yield after the baking process of the furnace. For the use of several second rod-shaped support brackets on the furnace wall of the baking furnace for 7 | the talent-shaped support bracket and the majority of the second rods are soft and have a low thermal conductivity, the operating efficiency of the system process . The present invention provides an application of a support frame structure to prevent the glass base handle from being concentratedly installed with multiple glass supports to reduce the third mesh number of the first rod-shaped support frame and the third mesh of the present invention. The glass substrate 'and most of the first frame are covered with a layer of soft South glass substrate. After passing through another mesh of the present invention for several first rod-shaped support frames and glass substrate', and most of the first frame are outside, all Covering a layer of flexible thin film liquid crystal display ^ According to the above-mentioned purpose, the glass substrate is baked in the baking furnace. After the baking process of the oven, a multi-load glass support is installed to lift the multi-load glass support to increase the baking Defects 200410913 V. Description of the invention (5) Defects of black dots. The present invention is to bake a second pole support and two sides of the support by using a pole-shaped support frame and a plurality of each of the first pole-shaped supports, wherein a pair of ways is installed corresponding to each first layer of soft wounds and transmissions. Improving the baking process can increase the rod shape of the glass substrate and increase the thermal conductivity of the glass substrate and the film after the uneven heat transfer in the baking furnace. The present invention is on the second rod wall on the second rod wall after baking the liquid crystal to display a second-lowest material and improve the furnace tube of the oven which can also be used for baking. The glass substrate is used to reduce glass baking. A rack on the wall of the system is used to support the majority of the first-loaded glass substrate-like support frames. The support substrates are rod-shaped, and any one of the first load-bearing glass supports prevents the glass plates from passing through the glass substrate. The good operation efficiency after the process is that all the substrates are covered with a substrate and the baking production cost and rate of the baking furnace are achieved. The invention rate. 4. Embodiments ^ Some embodiments of the present invention will be described in detail as follows. However, in addition to the detailed description, the present invention can be widely implemented in other embodiments, and the scope of the present invention is not limited, which is subject to the scope of subsequent patents. ^ The present invention provides a supporting structure used in a baking furnace for baking glass substrates' to avoid the defects of bad black spots due to the effect of stress concentration after the glass substrates have undergone the baking process of the baking furnace. Refer to the fourth figure y hujinbu 'This is a top view of the support frame structure of the present invention installed in a baking oven for baking glass substrates. In the baking process of baking glass substrates, the structures in the Angstrom oven 100 are all layered structures, so that multiple glass substrates can be baked at the same time in a single baking process. Usually baking oven 1 〇 〇 depending on the equipment

200410913 V. Description of the invention (6) Different designs and different layers ’Usually the inside of a general baking oven 1⑽ is roughly divided into forty layers’ so that the heat is evenly distributed in each layer of the baking oven. A glass substrate can be placed on the mother layer in the baking furnace 100 for baking. Many thimble pins are installed on both sides of the traditional baking furnace wall to stably support the glass substrate. However, the traditional thimble is used to carry the glass substrate, which is prone to the occurrence of bad black spots on the glass substrate. Therefore, the present invention installs a plurality of first rod-shaped support frames 1 on the first side wall in the baking furnace 100. 0 and a plurality of second talented support frames 1 12 are installed on the second side wall of the baking furnace 100 to support the glass substrate, wherein each of the first rod-shaped support frames 110 and each second The rod-shaped support frames 11 2 are installed in pairs on the two side walls of the flood-roasting oven, and the position of each first rod-shaped support frame 1 1 0 corresponds to each of the second rod-shaped support frames 1 1 2 A glass substrate is stably carried on the outside of any of the first and 'shaped outriggers 1 1 0 and any of the second rod-shaped outriggers 112, and further covered with a layer of soft and low thermal conductivity material 2 In order to avoid the defects of scratching and uneven heat transfer of the broken glass substrate. According to the fifth figure * 'This is a schematic diagram of placing a glass substrate in a single layer using the support structure of the present invention. Baking furnace used in the baking process of 14 ° of 2 substrates-a first rod-shaped support frame 110 and a second rod-shaped support: hibiscus = the stem-shaped support frame u ° by most of the- Side wall support =; 丄 3 ° on the first-side wall of the oven, and any-second pole oven 2: i1 2 measures / 1: the number of the second side wall support frame structure 1 32 is fixed to the inside of the oven On the second sidewall. Buddy-rod-shaped underframe U. The position is in 200410913 V. Description of the invention (7) The two rod-shaped support frames 1 1 2 and the rod-shaped support frames 1 1 2 are in the horizontal direction of the baking oven, and each corresponds to any first and any first rod-shaped support. Frame 1 10 is in a state parallel to any of them.

When the glass substrate i40 is to be baked, the glass substrate 14 is sent into a baking furnace in a divided manner for baking. A glass substrate 140 is placed in a layer in the baking oven, and is supported by a first rod-shaped support frame 110 and a first button-shaped support frame 112 installed in the baking furnace. The shapes of the first rod-shaped support frame i and the second rod-shaped support frame 112 can be designed differently according to the requirements of the manufacturing process. The shape can be a circular tube shape or a polygonal tube shape. If the first rod-shaped support frame 110 and the second rod-shaped support frame 112 are in the form of a polygonal tube, the parts of the first rod-shaped support frame 110 and the second rod-shaped support frame 112 that are in contact with the glass substrate 140 must be One plane to stably support the glass substrate, and avoid the defects of the dark spots caused by the stress concentration effect of the glass substrate 140 during the baking process. When the glass substrate 14 is placed in the baking furnace by the load of the first support frame 110 and the second support frame 112, the glass substrate 1 40 is in contact with the first support frame 11 and the second support frame n2. The method is a flat contact method, not the traditional point contact method, so the weight of the glass substrate can be evenly distributed on the first support frame π0 and the second support frame.

The above 11 2 can avoid the phenomenon of stress concentration, so the defects of bad black spots can be avoided. Because the baking oven uses a relatively high temperature when baking glass substrates, most of the materials used by the first support frame 110 and the second support frame 112 are

Page 11 Λ Γ-; «200410913 V. Description of the invention (8) is made of stainless steel to avoid the defects that the first support frame 110 and the second support frame n 2 are deformed in a high temperature environment. However, because the hardness of stainless steel is greater than that of the glass substrate, and the thermal conductivity of stainless steel is higher than that of air, if the glass substrate 140 is placed directly on the first support frame and the second support frame made of stainless steel 1 1 2 Surface, the surface of the glass substrate 1 40 will be more prone to scratch defects, and the heat transfer speed of the glass substrate 1 40 and the first support frame 1 1 0 and the second support frame 1 1 2 The heat transfer rate will be faster than other places on the glass substrate 140, and the temperature distribution on the glass substrate 140 will be uneven. In order to avoid the defects of scratching the glass substrate 14 and the uneven temperature distribution of the glass substrate 140 during the heating process, the first support frame 1 1 0 and the second support frame i 2 must be used. The outer layer is coated with a soft and low thermal conductivity material 120 to avoid defects such as scratches and uneven heat transfer on the glass substrate. Teflon is usually used as this soft and low thermal conductivity material 1 2 0. Referring to the sixth figure, the supporting structure installed in this furnace and the comparison diagram. It can be seen from the figure that if a plate is taken, the gap between the glass substrate and the top glass substrate will be due to the occurrence of a bad black dot structure on the glass substrate. Using the first rod-shaped support frame, although the glass substrate Where the glass substrate is in contact (

The quality of the glass substrate after using the present invention to make use of the traditional supporting structure to support the place where the glass pin is in contact with (the abnormal region) by the conventional thimble is thinner and easier to defect. If the support of the present invention is used #the second rod-shaped support frame to support the glass base, the distance between the glass substrate of the rod-shaped support frame and the second rod-shaped support is abnormal)

Page 12 200410913 V. Description of the invention (9) Shrinking, but this shrinking | u μ can be avoided & * 砵 14 Γ is within the quality tolerance range, avoiding the defects of bad black spots on the glass substrate. Ming provided a structure to avoid the concentrated effect of the furnace wall support frame with two rod-shaped supports, each first rod fixedly carries the outside of the glass-based support frame, 'to avoid glass substrates The design of the operating efficiency of the yield process after the substrate is baked. The essential elements are functional, and will be reviewed in detail, and the baked glass will pass through the baked black spot. The first rod-shaped support plate corresponds to the paired racks. Baking oven. The hair frame and the first pole are mounted on the second pole support frame, the conduction system is of poor quality. The plate is outside the membrane liquid crystal, and ‘it ’s already done. After combining the above-mentioned support, it is clear that the support is in the shape of several first-supporting ovens and any number of lower depressions, and the over-baking display of the present invention is in accordance with the special examination before, and the support of this hair is stressed. A rod-shaped rack of the baking furnace and a second side wall frame are used to stabilize the material of the second rod. The glass can also be lowered. The whole furnace has not been seen. The racks are used to bake substrates. Many glass-based substrates support the board in two or two shapes, and they all cover the board to incur the production cost of the oven. This hairpin, not only the validity and method of writing, will soon give any first layer of soft scratches and bakes, and mention that the defects of the oven of the quasi-patented substrate that can be applied for practical progress can be applied in every way. Each rod is soft and the heat transfer function of the broken base is improved. For, I feel that the above description is only a preferred embodiment of the present invention, and this implementation is not intended to illustrate but not to limit the scope of patent application of the present invention. , Not take off

200410913 V. Description of the Invention (ίο) It can still be implemented within the scope of the essence of the present invention, and these changes should still be within the scope of the present invention. Therefore, the scope of the present invention is defined by the following patent application scope. Φ

Page 14 200410913 Brief description of the drawings 5. Simple explanation of the drawings The first picture is a top view of a traditional baking glass substrate baking furnace; 'The second picture is a single layer inside the baking furnace-placed in the layer The intention of a glass substrate, the third picture is a schematic diagram of the defect when a glass substrate is placed on the thimble in the baking furnace; the fourth picture is the support frame structure of the present invention installed in the baking furnace of the glass substrate The top view; the fifth view is a schematic view of placing a glass substrate in a single layer inside the baking oven using the support frame structure of the present invention; and the sixth view is a glass substrate installed in the baking oven using the present invention Comparison of the quality of the support structure and the traditional support structure. Symbols of the main parts: 10 baking oven 4 11 thimble 1 4 thimble support 16 glass substrate 1 0 0 baking oven

Page 15 200410913 Brief description of drawings 110 112 120 130 132 140 First rod-shaped support frame Second rod-shaped support frame Soft and low thermal conductivity material First sidewall support frame Second sidewall support frame Glass substrate ❿ < 1

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Claims (1)

200410913 VI. Scope of patent application 1. A support frame structure in a baking furnace, wherein the support frame structure includes: a plurality of first rod-shaped support frames, and any one of the first rod-shaped support frames is fixed to a baking On a first side wall in the furnace; and a plurality of second rod-shaped support frames, any of which is fixed on a second side wall in the baking furnace and the second rod-shaped support The frame is parallel to the first rod-shaped support frame. 2. For example, the support frame structure in the baking furnace of the scope of application for the patent, wherein the plurality of first rod-shaped support frames described above are of a round rod type. 3. The support frame structure in the baking furnace according to item 1 of the patent application range, wherein the plurality of second rod-shaped support frames described above are of a round rod type. 4. For example, the support frame structure in the baking oven of the scope of patent application, wherein the first plurality of rod-shaped support frames described above are in the shape of a polygonal tube. 5. For example, the support frame structure in the baking furnace of the scope of patent application item 4, wherein a part of the above-mentioned first rod-shaped support frame contacting a glass substrate is a flat surface. 6. The support frame structure in the baking furnace according to item 1 of the patent application range, wherein the plurality of second rod-shaped support frames described above have a polygonal tubular shape. 7. The support frame structure in the baking furnace as claimed in item 6 of the patent scope, wherein Page 17 200410913 VI. Scope of patent application Most of the above-mentioned second rod-shaped support frames contact a glass substrate as a flat surface. 0. For example, the support frame structure in the baking furnace of item 1 of the patent application scope, where One of the plurality of first rod-shaped support frames and the plurality of second rod-shaped support frames is made of stainless steel. i 9. The support frame structure in the baking oven according to item 8 of the patent application scope, wherein one of the plurality of first rod-shaped support frames and the plurality of second rod-shaped support frames includes a soft and thermally conductive outer portion. Material with lower coefficient. Fan Li specially applied for Ruruo. Jielong frame fluorinated iron is one of the lower baking items of the inner furnace. 9 It is the heat conduction and softness of the medium. 1 1. As in the baking furnace in the first scope of the patent application The support frame structure, wherein the first rod-shaped support frame is fixed on the first side wall by a first side wall support frame. 12. The support frame structure in a baking furnace according to item 1 of the patent application range, wherein the second rod-shaped support frame is fixed to the second side wall by a second side wall support frame. 1 3. The support frame structure in the baking furnace according to item 1 of the patent application scope, wherein the position of any of the first rod-shaped support frames is in a horizontal direction of the baking furnace Page 18 200410913 VI. The scope of patent application corresponds to any one of the second rod-shaped support frames. 1 4 · A support frame in a baking oven for baking glass substrates. The support frame structure includes: m & a plurality of first rod-shaped support frames, any of which includes a plurality of first: A side wall support frame is fixed to a material provided on the inner wall of the oven and has a low thermal conductivity coefficient of any of the first rod-shaped support frames; and 1 J Dagger 5 a soft and most second rod-shaped support frame, which _ All are supported by a plurality of second side walls + one side of a cup-shaped support frame and any one of the "" = two is fixed to one of the materials with a lower thermal conductivity in the baking oven, Α Two:-the outside contains the soft and runs on the majority of the first-the second skin of the rod-the number of the second rod-shaped support frame in the flat position of the oven-the first rod-shaped support frame Support. The direction of less than one thousand corresponds to any one of the second rods 5: ί i π; m to bake the glass substrate in the oven for the rod type. Most of the above-mentioned first rod-shaped supporting frames are-round 1 6 · Such as the supporting frame structure within the scope of the patent application, round rod type. The baking furnace for baking glass substrates around item 14 in which most of the above-mentioned second rod-shaped supporting frames are two Page 19 200410913 VI. Scope of patent application 17 • For the support frame structure in the baking furnace for baking glass substrates, such as in item 14 of the patent application range, most of the above-mentioned first rod-shaped support frames are one Polygonal tubular shape. 18 · The support frame structure in a baking furnace for baking glass substrates as claimed in item 17 of the scope of patent application, wherein a portion of the above-mentioned first rod-shaped support frame contacting a glass substrate is a flat surface. 19 · The support frame structure in a baking furnace for baking glass substrates according to item 14 of the scope of patent application, in which most of the above-mentioned second rod-shaped support frames are in the shape of a polygonal tube. 20 · The support frame structure in a baking furnace for baking glass substrates according to item 19 of the patent application scope, wherein a portion of the above-mentioned plurality of second rod-shaped support frames contacting a glass substrate is a flat surface. 2 1 · The support frame structure in a baking furnace for baking glass substrates as claimed in item 14 of the scope of patent application, wherein one of the plurality of first rod-shaped support frames and the plurality of second rod-shaped support frames described above The material is stainless steel. 2 2 · The structure of the supporting structure in the baking furnace for baking glass substrates according to item 14 of the scope of patent application, wherein the above-mentioned soft and low thermal conductivity material is a Teflon.