0) 200409067 ，、發明說明 (發明明應敘明：發明所屬之技術領域、先前技術、内容、實施方式及圖式簡單 技術領域 σ0) 200409067 ， Invention description
本發明關於一顯示面板，其包含一光波導板，一面對光 波導板之第二板，一可動元件位於光波導板與第二板之間 用以耦合光於光波導板之外，光波導板有一面對可動元件 之接觸表面以便接觸可動元件，第二板具有面對可動元件 、觸表面以與可動元件接觸，可動元件具有與面對光波 導：之第一接觸表面用以與光波導板接觸，及面對第二板 之第-接觸表面以與第二板接觸，用以降低可動元件與板 :接之裝置包含粗糙度R1位於光波導板之接觸表面，其粗 R :位於可動兀件之第-接觸表面，至少粗糙度R1及粗 八千於5nm，二者粗糙度R1及粗糙度R2小於100nm，及包 ::極以將可動元件之接觸表面與光波導板之各接觸表面 及弟一板之接觸表面成局部接觸。 先前技術^ 在首段所提及型 99/28890 。 式之顯示面板之實施例曾揭示於w〇The present invention relates to a display panel including an optical waveguide plate, a second plate facing the optical waveguide plate, and a movable element located between the optical waveguide plate and the second plate for coupling light outside the optical waveguide plate. The waveguide plate has a contact surface facing the movable element so as to contact the movable element. The second plate has a contact surface facing the movable element and a contact surface to contact the movable element. The movable element has a first contact surface facing the optical waveguide: The waveguide plate is in contact, and the first-contact surface facing the second plate is in contact with the second plate to reduce the movable element and the plate: the device connected includes the roughness R1 on the contact surface of the optical waveguide plate, and its rough R The first contact surface of the movable element has a roughness of at least R1 and a roughness of more than 8000 nm, and the roughness R1 and the roughness R2 of both are less than 100 nm, and the package includes: the contact surface of the movable element and the optical waveguide plate The contact surface and the contact surface of the plate are in local contact. Prior art ^ Type 99/28890 mentioned in the first paragraph. An example of a display panel of the type has been disclosed at
面==?板包含一營光材料之光波導板，在該顯示 波導板，二8::光產生後被陷住’俾此第-板構成-光 電…波導二:動元件。施加適當 局部與光波導板或第板動以時，可動元件 共同電極。在可動：,接觸。可動元件上之電極亦稱為 被轉合至光波導招 先波導板接觸之處，操作時，光 波導板以外’並散射至可動元件之外。光被輕The surface ==? Plate contains an optical waveguide plate of optical materials. In this display waveguide plate, 2: 8: is trapped after the light is generated. 'This first plate constitutes-optoelectronic ... Waveguide 2: moving element. When an appropriate part is moved with the optical waveguide plate or the second plate, a common electrode of the movable element is applied. In movable :, contact. The electrode on the movable element is also called the point where the waveguide is brought into contact with the optical waveguide. During operation, it is scattered outside the optical waveguide 'and scattered outside the movable element. Light was light
-6- 200409067 發_明續頁、、 ---- ,% > S Λ ·> V 〇、 , δ至光波導板之外之處稱為4 冉馮圖像疋件。以調節光是否耦合 至圖像元件，一影像為其代表。 粗糙度R1及R2出現在面對可動元件之光波導板之接觸 ^面，以降低黏性范德瓦斯力方式以降低可動元件對光波 ‘板之黏|±。粗糙性之定義為表面輪廊被限制住之距離範 圍，如以原子力顯微鏡所測者。已知，如至少一粗糙度ri 及R2大於5 nm時，范德瓦斯力可大幅降低。另一方面，如 一粗糙度R1及R2大於i00nm，可動元件與光波導板間之光 接觸則IV低’故光轉合至光波導板之外則嚴重變小。此外 ’反黏接層備於光波導板與可動元件之間，及備於可動元 〃第板之間。此等層藉降低化學黏接力之強度而降低 可動元件與各板之黏接性。 面對可動7L件《二板之表面上之電極以一厚纟為一微米 之、、巴、味層與可動元件上之共同電極分開。此等絕緣層出現 在光波V板上之電極上及第二板上，以防止與可動元件上 之共同電極之直接電接觸。該絕緣層代表板之接觸表面。 因此，面對其它構件之一構件之接觸表面，不論被此層蓋 住與否’其可與其他構件作直接電接觸。 β 4 ”、、員示衣置之缺點為其需要相當大之能量才能在加電 見於電極後’使光波導板與可動元件接觸。因此，操作時 ’已知面板需要相當大能量。 發明内容， 二 i 本發明之目的為提供一首段所提之顯示面板，習需要相 當少之能量即可操作。 (3) (3)200409067 此目的之達成係因為降低黏接之裝置，尚包含一粗糙度 R3於第二板之接觸面，及粗糙度R4於可動元件之第二接觸 兀件，粗糙度111及R2二者較至少一粗糙度R3及R4為小。 本發明人認為加電壓於電極上而使光波導板與可動元件 接觸之月b里，如果粗链度幻出現在面對可動元件之第二板 之接觸表面，及粗糙度R4出現在面對第二板之可動元件之 接觸表面時則較小。如至少一粗糙度R3及R4大於5 nm，在 第二板與可動元件間之范德瓦斯力可大幅降低，導致顯示 面板需要相當小之能量即可使光波導板與可動元件局部接 觸僅考慮见付瓦斯力，並無理由使粗縫度反3及&4超過$ nm。但，發明人進一步認為粗糙度们及以在第二板與可動 元件間之包壓差可影響第二板與可動元件間之吸引電力。 此吸引電力係與第二板上電極及可動元件上之共同電極間 之距離平方成反比。以第二板及可動元件言，其經由表面 接觸而黏在-起，此一吸引電力相當大。欲使其分開，此 相當大之吸引電力必須香月g 杳· m L # 、, 屑兄服貝際上甚為困難以移除電壓 是方式消除此吸引電力。如第二板與可動元件間之距離較 大’可動兀件與第二板不會因表面接觸而黏接一起，即， 接觸表面最多在突出之尖端彼此接觸以保護各表面或二表 面’因而甚易將其分開。甚為明顯’如可動元件與第二板 緊密黏接’可動元件上電極與阻止接觸之光波導板間之電 壓差相當大。利用粗糙度们在面對可動元件之第二板之接 觸表面上，及利用粗链度以在面對第二板之可動元件之接 觸表面上’則較小之可動元件與第二板間之吸引電力，如 200409067 (4) 可動元件與第二板接觸時必須克服以終止此接觸。此吸引 電力在粗糙度R3及R4小於5 nm，而其他粗糙度等於5 nm時 則仍然不能忽略。粗糙度大於5 nm可使終止此接觸之能 量較小。事實上，粗糙度幻及以之最大值受限於光波倒俺 與第二板間之空間，該空間可由可動元件之厚度降低。 "T動元件與第二板間由電壓施加至可動元件上電極及第 二板而感應之相當小之吸引電力，如可動元件與第二板為 接觸’造成由施加至可動元件上之電極及光波導板之電壓 感應’及終止此接觸所必需之所需電力將為相當小，對變 化影響甚小及甚易控制。 本發明顯示面板之一實施例中，至少一粗糙度R〕及R4大 於 100 nm，及二 R3 及 R4 小於 1000 nm。 面對可動元件之二板之表面上電極由一具有厚度約一微 米之絕緣層所蓋住。該絕緣層代表板之接觸表面。粗糙度 低於100 nm時，需克服之電力甚難降低，因粗糙度與絕緣 層之厚度相比則甚小。較大之粗糙度值，需克服之電力可 大幅降低。如粗糙度大於1000 nm，與二板間之約四微米距 離比較’則無法忽略，該距離可由降低可動元件之厚度而 降低，該距離約為一或二微米範圍。 本發明之顯示面板之另一實施例粗糙度R2大於粗糙度 R1，粗糙度R4大於粗糙度R3。光波導板及第二板均有平滑 之接觸表面，其在生產程序中易於實現。此外，光波導板 一 之光導特性將隨其表面平滑之增加而增加。 最後實施例之修改中，粗糙度!^2在5 nm至1〇〇 nm之範圍 200409067 (5) 發嘱f懸:· ’粗糙度R4在100 nm至1000 nm之範圍。此等範圍為出現在 可動元件之較佳粗糙度範圍。此外，當粗糙度114為1〇〇至 1000 nm時，在圖像元件之發射光之各向同性甚大。 ’ 如至少一粗糙度R2及R4自可動元件無機物突出達成則 甚為理想。當可動元件與一板接觸時，該無機物突出不易 受到范德瓦斯力引起之彈性及/或塑料變形之影響，因此， 可防止范得瓦斯黏性引起之彈性及/塑料變形。如有一體積 之可動元件包含選自包含非結晶玻璃及結晶聚合體層一組 · 之矩陣層，以1-25%之體積由Ti02顆粒佔據，其直徑在2〇〇 至400 nm之間，及一氧化銦錫層則更佳。該矩陣層可以非 ‘ 晶玻璃狀態，晶態或混合之非晶玻璃/晶態以使聚合體材料 硬度與晶態有機材料相似。此等矩陣層為Parylene，多異丁 烯酸甲酯，氟聚合體及聚亞硫氨層。此等材料不易受塑料 變形及/或蠕變影響。可動元件可在面對光波導板之表面有 一表面粗糙度約為30-50 nm之範圍，如由Ti〇2顆粒構成自 可動元件穿出，及面對第二板表面之粗糙度為1〇(Ki〇〇〇nm 之範圍。可動元件之厚度可在一或二微米之間。導電之^ · 化銦錫（ITO)層代表跨可動元件之全部表面之共同電極以 便施加電壓於可動元件。該IT〇層為透明以防止光導板與接 觸表面間之接觸表面放射之光被吸收。ΙΤ〇層之較佳厚度為 約為30-50 nm。可動元件自光波導擷取之光由散射中:如-6- 200409067 Development_continued pages,, ----,% > S Λ · > V 〇,, δ outside the optical waveguide plate are called 4 Ran Feng image files. To adjust whether light is coupled to the image element, an image is representative of it. Roughness R1 and R2 appear on the contact surface of the optical waveguide plate facing the movable element, in order to reduce the viscosity of the van der Was force to reduce the adhesion of the movable element to the light wave ‘the adhesion of the plate | ±. Roughness is defined as the range over which the surface contour is restricted, as measured by an atomic force microscope. It is known that if at least one roughness ri and R2 is larger than 5 nm, the van der Waals force can be greatly reduced. On the other hand, if the roughness R1 and R2 are larger than i00nm, the optical contact between the movable element and the optical waveguide plate is low IV ', so that the light is severely reduced outside the optical waveguide plate. In addition, an anti-adhesion layer is provided between the optical waveguide plate and the movable element and between the movable element and the first plate. These layers reduce the adhesion between the movable element and the boards by reducing the strength of the chemical adhesion force. The electrodes on the surface of the two plates facing the movable 7L piece are separated by a thickness of one micron, and the taste layer is separated from the common electrode on the movable element. These insulating layers appear on the electrodes on the light wave V plate and on the second plate to prevent direct electrical contact with the common electrode on the movable element. This insulating layer represents the contact surface of the board. Therefore, the contact surface facing one of the other members, whether covered by this layer or not, can make direct electrical contact with the other members. The disadvantage of "β 4" is that it requires a considerable amount of energy in order to 'contact the optical waveguide with the movable element after power is applied to the electrode. Therefore, it is known that the panel requires considerable energy during operation.' The purpose of the present invention is to provide a display panel mentioned in the first paragraph, which requires relatively little energy to operate. (3) (3) 200409067 This purpose is achieved because the device for reducing adhesion still includes a The roughness R3 is on the contact surface of the second plate, and the roughness R4 is on the second contact element of the movable element. Both the roughness 111 and R2 are smaller than at least one roughness R3 and R4. The inventor believes that the voltage is applied to In the month b where the optical waveguide plate is in contact with the movable element on the electrode, if the rough chain degree appears on the contact surface of the second plate facing the movable element, and the roughness R4 appears on the movable element facing the second plate It is smaller when contacting the surface. If at least one roughness R3 and R4 is greater than 5 nm, the van der Waals force between the second plate and the movable element can be greatly reduced, resulting in the display panel requiring a relatively small amount of energy to make the optical waveguide plate Bureau of Movable Components The contact only considers seeing the gas force, and there is no reason to make the slackness reverse 3 and & 4 exceed $ nm. However, the inventor further believes that the roughness and the pressure difference between the second plate and the movable element can affect The attracting power between the second plate and the movable element. This attracting power is inversely proportional to the square of the distance between the electrode on the second plate and the common electrode on the movable element. With the second plate and the movable element, it is sticky through surface contact. From-on, this one attracts considerable electricity. To separate it, this relatively large attracting electricity must be Kayuki g 杳 · m L # ,, it is even difficult to remove the voltage to remove this. Attract electric power. If the distance between the second plate and the movable element is large, the movable element and the second plate will not stick together due to surface contact, that is, the contact surfaces will contact each other at the most protruding tip to protect each surface or The surface is thus easy to separate. It is very obvious that the voltage difference between the electrode on the movable element and the light guide plate that prevents contact is quite large if the movable element is closely adhered to the second plate. The roughness is used to face the movable Of the components On the contact surface of the second plate, and on the contact surface of the movable element facing the second plate by using the thick chain degree, the attracted power between the smaller movable element and the second plate, such as 200409067 (4) The movable element and The second plate contact must be overcome to terminate this contact. This attraction power cannot be ignored when the roughness R3 and R4 are less than 5 nm, and other roughness is equal to 5 nm. The roughness greater than 5 nm can terminate the energy of this contact In fact, the maximum roughness is limited by the space between the light wave and the second plate, and the space can be reduced by the thickness of the movable element. &Quot; The voltage is applied between the movable element and the second plate. The relatively small attraction power induced by the electrode and the second plate on the movable element, such as the contact between the movable element and the second plate 'caused by the voltage induction of the electrode and the optical waveguide plate applied to the movable element' and the termination of this contact The required power required will be quite small, with little impact on change and easy to control. In one embodiment of the display panel of the present invention, at least one roughness R] and R4 is greater than 100 nm, and two R3 and R4 are less than 1000 nm. The electrodes on the surface facing the two plates of the movable element are covered by an insulating layer having a thickness of about one micrometer. This insulating layer represents the contact surface of the board. When the roughness is less than 100 nm, it is difficult to reduce the power to be overcome, because the roughness is very small compared to the thickness of the insulating layer. For larger roughness values, the power to be overcome can be greatly reduced. If the roughness is greater than 1000 nm, it cannot be ignored compared with the distance of about four micrometers between the two plates. This distance can be reduced by reducing the thickness of the movable element. The distance is about one or two micrometers. In another embodiment of the display panel of the present invention, the roughness R2 is greater than the roughness R1, and the roughness R4 is greater than the roughness R3. Both the optical waveguide plate and the second plate have a smooth contact surface, which is easy to implement in the production process. In addition, the optical waveguide characteristics of an optical waveguide plate will increase as its surface smoothness increases. In the modification of the last embodiment, the roughness R 2 is in the range of 5 nm to 100 nm. 200409067 (5) It is issued that the roughness R4 is in the range of 100 nm to 1000 nm. These ranges are the preferred roughness ranges that appear in a movable element. In addition, when the roughness 114 is 100 to 1000 nm, the isotropy of the emitted light in the image element is very large. ′ It is ideal if at least one roughness R2 and R4 is protruded from the inorganic of the movable element. When the movable element is in contact with a plate, the inorganic substance is not prone to be affected by the elasticity and / or plastic deformation caused by Van der Was force. Therefore, it is possible to prevent elasticity and / or plastic deformation caused by van der Was viscosity. For example, if a volume of movable element includes a matrix layer selected from the group consisting of amorphous glass and crystalline polymer layers, it is occupied by Ti02 particles in a volume of 1-25%, and its diameter is between 200 and 400 nm, and An indium tin oxide layer is more preferred. The matrix layer may be in a non-crystalline glass state, a crystalline state, or a mixed amorphous glass / crystalline state so that the hardness of the polymer material is similar to that of the crystalline organic material. These matrix layers are Parylene, methyl polymethacrylate, fluoropolymer, and polysulfite layers. These materials are not susceptible to plastic deformation and / or creep. The movable element can have a surface roughness in the range of about 30-50 nm on the surface facing the optical waveguide plate. For example, the surface of the movable element is made of Ti02 particles and the roughness of the surface facing the second plate is 1 °. (Ki00nm range. The thickness of the movable element can be between one or two microns. The conductive ITO layer represents a common electrode across the entire surface of the movable element in order to apply a voltage to the movable element. The IT0 layer is transparent to prevent light emitted from the contact surface between the light guide plate and the contact surface from being absorbed. The preferred thickness of the IT0 layer is about 30-50 nm. The light extracted by the movable element from the optical waveguide is scattered by :Such as
Ti02及可動元件二側上之表面粗糙度所散射。小於微… 米之顆粒無法有效散射光。大於一微米或之顆粒太大而益 法適當限於可動元件之内。 … -10- (6) (6)200409067 __槪· '、，吟、Ά<、ν>$Νν-〜乂、 s'**、、、 本發明之顯示面板之一實施例中，顯示面板為顯示裝置 之一部分。顯示裝置尚包含選擇裝置，其用以施加電壓至 電極，視顯示之影像資訊而定。 實施方式 圖1中，顯示面板21包含一光波導板2 一可動元件3，及 一 f二板4 °電極5 ’ 6配置在面對可動元件3之光波導板2 及第二板4之二側。顯示面板21包含—蓋元子件7與光波導 板2連接’因而構成一空間8。顯示面板21尚含一光源9。光 源9產生之光斗合至光波導板2。光在光波導板2中傳播，由 ;内4反射而热法自光波導板2逸出，除非圖2所示之情況 =。圖2顯示可動元件3局部位於光波導板2之上。在此狀 態時’部分光進入可動元件。可動元件3將光散射俾其能離 開顯示面板21。該光可在二側或_側發出。較佳為，為使 光離開可動元件3，可動元件3包含—料層如聚合材料，亦 稱為矩陣層’其中備有散射中心。該散射中心可由與矩陣 層材料不同之材料形成’或由矩陣中之氣泡形成。進入可 動元件3之光由散射中心散射。圖2中，由直箭頭所示。此 外，圖2中亦顯示出面對可動元件3之光波導板2之接觸表面 Μ，面對光波導板2之可動元件3之接觸表面15，面對可動 疋件3之第二板4之接觸表面16，及面對第二板*可動元件3 之接觸表面17。 圖3中，可動元件3以隔片12及13將其配置於光波導板2 第二板4之間。一共同電極25為可動元件3之一部分。共同 電極25可位於面對光波導板2之可動元件3之一側，可位於 •11- 200409067Scattered by surface roughness on both sides of Ti02 and the movable element. Particles smaller than micrometers ... meters cannot effectively scatter light. Particles larger than one micron or too large are suitably limited to the movable element. … -10- (6) (6) 200409067 __ 槪 · ',, Yin, Ά <, ν > $ Nν- ~ 乂, s' ** ,,, In one embodiment of the display panel of the present invention, display The panel is part of the display device. The display device also includes a selection device for applying a voltage to the electrodes, depending on the image information displayed. Embodiment 1 In FIG. 1, a display panel 21 includes an optical waveguide plate 2, a movable element 3, and an f 2 plate 4 ° electrode 5 ′ 6 arranged on the optical waveguide plate 2 and the second plate 4 bis facing the movable element 3. side. The display panel 21 includes a cover element 7 connected to the optical waveguide plate 2 and thus constitutes a space 8. The display panel 21 further includes a light source 9. The light generated by the light source 9 is coupled to the optical waveguide plate 2. The light propagates in the optical waveguide plate 2 and is reflected by the inner 4 and thermally escapes from the optical waveguide plate 2 unless the situation shown in FIG. 2 =. FIG. 2 shows that the movable element 3 is partially located on the optical waveguide plate 2. In this state, a portion of the light enters the movable element. The movable element 3 scatters light so that it can leave the display panel 21. The light can be emitted on both sides or the _ side. Preferably, in order for the light to leave the movable element 3, the movable element 3 includes a material layer such as a polymer material, also called a matrix layer, and a scattering center is provided therein. The scattering center may be formed of a material different from the material of the matrix layer 'or formed by bubbles in the matrix. The light entering the movable element 3 is scattered by the scattering center. In FIG. 2, it is indicated by a straight arrow. In addition, FIG. 2 also shows the contact surface M of the optical waveguide plate 2 facing the movable element 3, the contact surface 15 of the movable element 3 facing the optical waveguide plate 2, and the second plate 4 of the movable member 3. The contact surface 16 and the contact surface 17 facing the second plate * movable element 3. In FIG. 3, the movable element 3 is disposed between the optical waveguide plate 2 and the second plate 4 with the spacers 12 and 13. A common electrode 25 is a part of the movable element 3. The common electrode 25 may be located on one side of the movable element 3 facing the optical waveguide plate 2, and may be located on • 11- 200409067
面對第二板4之可動元件3之一側，或甚至為可動元件3體之 一部分。電極5及6被絕緣層1〇及η所蓋住以預防可動元件〕 上之共同電極與電極5與6間之直接電接觸。在光波導板2 上之絕緣層10如共同電極25在面對第二板4之可動元件3之 一側則不必要。施加適當電壓至電極5及6及可動元件3上之 共同電極25上時，即產生電力F，該力壓縮可動元件3抵住 光波導板2上之電極5。該電極為透明及由IT〇組成。可動元 件3與光波導板2間之接觸使光離開光波導板2及進入在接 觸位置之可動元件3。在可動元件3中，光被散射並經透明 電極5及光波導板2離開顯示面板2 1。在面對可動元件之光 波導板2之接觸表面14之粗糙度R1，及在面對光波導板2之 可動元件3之接觸表面15之粗糙度R2之存在可降低可動元 件3與光波導板2之黏接。至少一粗糙度^及们為大於5 nm ，及二R1及R2之粗糙度為小於1〇〇 ηπι。在面對第二板4之 可動元件3之接觸表面16之粗糙度R3，及在面對第二板4之 可動元件3之接觸表面17之粗糙度R4，二粗糙度R1&r2小 於至少粗糙度R3與R4之一，因此可降低可動元件3黏接至 第二板4。較佳為至少一粗糙度R3與R4大於1〇〇 nm及二粗 糙度R3及R4小於1〇〇〇 nm°如粗糙度R2大於粗糙度ri及粗 糙度R4大於粗糙度R3，光波導板2及第二板4可能有面對可 動元件3之平滑接觸表面，此點在製造程序中甚易實現。特 別是，粗糙度之較佳範圍出現在面對光波導板2及第二板4 之可動元件3接觸表面：粗糙度R2在5-100 nm之範圍，粗糙 度R3贊100-1000 nm之範圍。 -12- 200409067One side of the movable element 3 facing the second plate 4, or even a part of the body of the movable element 3. The electrodes 5 and 6 are covered by the insulating layers 10 and η to prevent direct electrical contact between the common electrode on the movable element] and the electrodes 5 and 6. The insulating layer 10 such as the common electrode 25 on the optical waveguide plate 2 is unnecessary on the side facing the movable element 3 of the second plate 4. When an appropriate voltage is applied to the electrodes 5 and 6 and the common electrode 25 on the movable element 3, electric power F is generated, and this force compresses the movable element 3 against the electrode 5 on the optical waveguide plate 2. The electrode is transparent and consists of IT0. The contact between the movable element 3 and the optical waveguide plate 2 causes light to leave the optical waveguide plate 2 and enter the movable element 3 at the contact position. In the movable element 3, light is scattered and leaves the display panel 21 through the transparent electrode 5 and the optical waveguide plate 2. The presence of the roughness R1 on the contact surface 14 of the optical waveguide plate 2 facing the movable element and the roughness R2 on the contact surface 15 of the movable element 3 facing the optical waveguide plate 2 can reduce the movable element 3 and the optical waveguide plate. 2 of the adhesion. At least one roughness ^ is greater than 5 nm, and the roughness of two R1 and R2 is less than 100 nm. The roughness R3 on the contact surface 16 of the movable element 3 facing the second plate 4 and the roughness R4 on the contact surface 17 of the movable element 3 facing the second plate 4, the two roughnesses R1 & r2 are less than at least rough One of the degrees R3 and R4 can reduce the adhesion of the movable element 3 to the second plate 4. Preferably, at least one of the roughnesses R3 and R4 is greater than 1000 nm and two of the roughnesses R3 and R4 are less than 1000 nm. For example, the roughness R2 is greater than the roughness ri and the roughness R4 is greater than the roughness R3. And the second plate 4 may have a smooth contact surface facing the movable element 3, which is easily realized in the manufacturing process. In particular, the preferred range of roughness appears on the contact surface of the movable element 3 facing the optical waveguide plate 2 and the second plate 4: the roughness R2 is in the range of 5-100 nm, and the roughness R3 is in the range of 100-1000 nm. . -12- 200409067
圖4中矩陣層1 8為一非晶玻璃層。矩陣層丨8亦可為晶態聚 合體層。例如，此等層為parylene，多異下烯酸甲酯，氟聚 合體及聚亞硫氨層。同時，交差鏈接之聚合體層具有與非 晶悲玻璃或晶態聚合體層等之機械特性者亦可使用。矩陣 層18之厚度較佳在〇.5及3微米，最佳為1-2微米之間。散射 顆粒19亦作為無機突出物24，以丁i〇2，bn，ΖιΌ2 , Si〇2 ’ Si3N4及AL203製成。散射顆粒19之尺寸較佳在2〇〇-4〇〇 nm之間。散射顆粒19之濃度在1-5〇%之間。較佳為濃度在1 及25%之間。矩陣層18與散射顆粒19間之折射係數大於〇」 因差異較小，散射顆粒19之散射效率甚低。良好之散射 結果在折射係數大於〇.5時可獲得。散射材料19較佳之材料 為丁i〇2，BN及AL203 ,因此等材料實際上無色。矩陣材料 18之折射係數較佳為接近光波導板2之折射係數，即，折射 係數約為0.2。此時，光波導板2與可動元件3間之接觸表面 之反射甚小。備有一導電之氧化銦錫層2〇用以施加電壓至 可動元件。 圖5中’顯示裝置1包含顯示面板21及選擇裝置22用以施 加電壓至電極5，6及25，視待顯示之圖像資訊而定。 圖式簡單說明 本發明之各特性將進一步配合圖式加以說明，圖中· 圖1為顯示面板之剖面圖， 圖2為顯示面板之一部分略圖， 圖3為顯示面板一部分之詳細圊， 圖4為可動元件略圖，及 200409067 (9) 發明說明續頁 圖5為顯示裝置略圖。 圖中相同參考號碼代表對 以上圖式為略圖而未合比例 應零件。 圖式代表符號說明 2 光波導板 3 可動元件 4 第二板 5 電極 6 電極 7 蓋子元件 8 空間 9 光源 10 絕緣層 11 絕緣層 12 隔片 13 隔片 14 接觸表面 15 接觸表面 16 接觸表面 17 接觸表面 18 矩陣層 19 散射顆粒 20 氧化銦錫層 21 顯示面板 秦 -14- 200409067 (10) 響說明續；Η:· 22 選擇裝置 24 無機突出物 25 電極The matrix layer 18 in FIG. 4 is an amorphous glass layer. The matrix layer 8 may also be a crystalline polymer layer. For example, these layers are parylene, polyisoxenoate, fluoropolymer, and polysulfite layers. At the same time, cross-linked polymer layers with mechanical properties such as amorphous glass or crystalline polymer layers can also be used. The thickness of the matrix layer 18 is preferably between 0.5 and 3 microns, and most preferably between 1-2 microns. The scattering particles 19 also serve as the inorganic protrusions 24, and are made of butyl io2, bn, Zn2, SiO2 'Si3N4, and AL203. The size of the scattering particles 19 is preferably between 2000 and 400 nm. The concentration of the scattering particles 19 is between 1 and 50%. Preferably, the concentration is between 1 and 25%. The refractive index between the matrix layer 18 and the scattering particles 19 is greater than 0 ". Because the difference is small, the scattering efficiency of the scattering particles 19 is very low. Good scattering results are obtained when the refractive index is greater than 0.5. The preferred materials for the scattering material 19 are SiO 2, BN, and AL203, so these materials are practically colorless. The refractive index of the matrix material 18 is preferably close to that of the optical waveguide plate 2, that is, the refractive index is about 0.2. At this time, the reflection of the contact surface between the optical waveguide plate 2 and the movable element 3 is very small. A conductive indium tin oxide layer 20 is provided for applying a voltage to the movable element. The ' display device 1 in FIG. 5 includes a display panel 21 and a selection device 22 for applying a voltage to the electrodes 5, 6, and 25, depending on the image information to be displayed. The drawings briefly explain the characteristics of the present invention and will be further explained in conjunction with the drawings. FIG. 1 is a cross-sectional view of a display panel, FIG. 2 is a schematic view of a part of the display panel, and FIG. 3 is a detailed view of a part of the display panel. It is a schematic diagram of a movable element, and 200409067 (9) Description of the invention Continued FIG. 5 is a schematic diagram of a display device. The same reference numbers in the figure represent the sketched parts of the above figure without scale. Description of symbolic figures 2 Optical waveguide plate 3 Movable element 4 Second plate 5 Electrode 6 Electrode 7 Cover element 8 Space 9 Light source 10 Insulation layer 11 Insulation layer 12 Spacer 13 Spacer 14 Contact surface 15 Contact surface 16 Contact surface 17 Contact Surface 18 Matrix layer 19 Scattering particles 20 Indium tin oxide layer 21 Display panel Qin-14- 200409067 (10) Response description continued; Η: · 22 Selecting device 24 Inorganic protrusion 25 Electrode
-15--15-