TW200406248A - The scrubber waste air treatment system and related method - Google Patents

The scrubber waste air treatment system and related method Download PDF

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Publication number
TW200406248A
TW200406248A TW91132134A TW91132134A TW200406248A TW 200406248 A TW200406248 A TW 200406248A TW 91132134 A TW91132134 A TW 91132134A TW 91132134 A TW91132134 A TW 91132134A TW 200406248 A TW200406248 A TW 200406248A
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Taiwan
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tower
washing
exhaust gas
scrubber
patent application
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TW91132134A
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Chinese (zh)
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TW546159B (en
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Chien-Hsing Tu
Yuan-Tsai Sung
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Powerchip Semiconductor Corp
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Publication of TW200406248A publication Critical patent/TW200406248A/en

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Abstract

A scrubber waste air treatment method is provided for treating the particles and acidic gas, which comprise to input the hardness softened scrubbing liquid to the scrubber; adjust the pH of scrubbing liquid over 10.5 by adding reagent; introduce the waste air into the scrubber; wash the waste air completely with the scrubbing liquid to remove the particles and acidic gas; exhaust the clean air to open air from the gas outlet of the scrubber. The method can enhance the remove efficiency of pollutant and save the waste air treatment cost by raising the pH of scrubbing liquid over 10.5 to increase the reaction for the weak acidic gas. It also employed the water softening apparatus to provide the hardness softened scrubbing liquid without calcium ion and magnesium ion, which can avoid forming the calcium hydroxide and magnesium hydroxide in the scrubber.

Description

200406248 五、發明說明(1) 技術領域 本發明是有關於一種廢氣處理 一種洗滌塔廢氣處理系統。 背景說明 一般工業製程所產生的製程廢 具有臭味,如果廢^未經過妥善處 染。而且,若廢氣中之有毒物質濃 值’就可能危害工廠員工及一般民 制空氣污染物,必須利用空氣污染 11氣中之有毒物質濃度低於法規 種業界常用的空氣污染防治設備為 一般的洗滌塔廢氣處理系統, 理廢氣。首先,將洗滌液導入洗滌 果輪送至塔頂,並由塔頂進入洗滌 喷灑裴置而均勻灑下並回到塔底, 輪送至塔頂而成一循環。另一方面 務塔中,然後向上流動並與洗滌液 物(如微粒、酸氣等)溶入洗滌液, 頂排出。因為,洗務液與廢氣接觸 以需要補充乾淨的洗滌液至洗滌塔 膝液。對於洗滌塔廢氣處理系統而 接觸面積越大,洗滌塔之廢氣洗滌 塔通常需設計成具有大的液面面積 失。為了達到上述之目的,通常在 系統,且特別是有關於 氣通常 理,就 度超過 眾的身 防制設 規定的 洗滌塔 係以液 塔中後 塔中。 然後再 ,廢氣 接觸, 而經淨 後會帶 中,並 言,由 效果會 和最低 洗滌塔 包括有 會造成 法規規 體健康 備處理 限值, 廢氣處 體洗滌 ,以洗 接著, 由洗務 則由塔 使廢氣 化的氣 有許多 排出不 於洗條 越好, 的氣體 内會裝 毒物質且 空氣污 定的限 。為了控 廢氣,以 其中的一 理系統。 的方法處 滌液循環 洗滌液經 液循環泵 底導入洗 中的污染 體則由塔 雜質,所 乾淨的洗 液與廢氣 因此洗滌 壓力損 填一些填200406248 V. Description of the invention (1) TECHNICAL FIELD The present invention relates to an exhaust gas treatment and an exhaust gas treatment system for a scrubber tower. Background note Process waste produced by general industrial processes has an odor. If the waste is not properly treated. In addition, if the concentration of toxic substances in the exhaust gas is likely to endanger factory employees and general civilian air pollutants, air pollution must be used.11 The concentration of toxic substances in the gas is lower than the air pollution control equipment commonly used in the industry for general washing. The tower exhaust gas treatment system manages the exhaust gas. First, the washing liquid is introduced into the washing fruit wheel and sent to the top of the tower. The washing liquid is sprayed from the top of the tower and sprayed evenly and returned to the bottom of the tower. On the other hand, the tower flows upwards and dissolves with the washing liquid (such as particles, acid gas, etc.) into the washing liquid, and is discharged from the top. Because the washing liquid comes into contact with the exhaust gas, it is necessary to replenish the clean washing liquid to the washing tower knee fluid. For the scrubber exhaust gas treatment system, the larger the contact area, the scrubber's exhaust scrubber is usually designed to have a large liquid surface area loss. In order to achieve the above-mentioned purpose, usually in the system, and especially with regard to gas theory, the washing towers that exceed the requirements of the public defense system are installed in the liquid tower and the rear tower. Then, the exhaust gas comes into contact, and it will be brought into the net after being cleaned, and the effect will be included in the minimum washing tower, which will cause the health regulations of the regulatory body. The exhaust gas will be washed in order to be washed. Many of the gases that are made by the tower to exhaust gas are not discharged as well as the washing bar, the poisonous substances will be contained in the gas and the air will be contaminated. In order to control the exhaust gas, one of these systems is used. The method is to recycle the washing liquid through the bottom of the liquid circulation pump. The contaminated body is introduced into the washing by the bottom of the tower. The clean washing liquid and exhaust gas are cleaned.

9954twf.pld 第6頁 200406248 五、發明說明(2) 充料(Packing),以增加液氣之交換面積,填 多不同的形狀二具:其獨特的表面積 選、有: 用,常用的填充料如拉西環及貝爾鞍環。 擇使 一般而言’目如業界常採用之底A/ ^ ν σ! 休用之廢乳處理系統為將各個 設備端排放之廢乳刀'別依酸鹼特性各別集中後, 個洗務塔廢處理。然而,隨著設備及產能 之擴充,設備鈿/f生的廢排氣亦大量增加,已超出原先 洗滌塔的處理设计里,隨之而來的結果是製程廢氣,未 妥善處理而逸散至空氣中。 、 又 習知的改善技術為在機台側安裝局部洗滌塔(local scrubber )以滿式洗條或活性碳吸附之方法,降低製程廢 氣之含量,最後才排至濕式洗滌塔。但限於場地與成本, 並#每家工廠皆適用安裝局部洗滌塔,以提昇廢氣處理效 率0 另外習知的改善技術為增加循環水量,以降低循環水 内酸氣濃度’但會加重純水系統及廢水處理系統的負荷, 與造成全廠用水回收率驟降及全廠用水排放率驟升與用水 成本大增等問題。 有鑑於此,本發明之一目的係提供一種洗滌塔廢氣處 理系統及方法’能夠有效的移除廢氣中的酸氣,而提高廢 氣洗滌效果。 本發明的目的係提供一種洗滌塔廢氣處理系統及方 法,在不需安裝局部洗條塔,且不增加洗滌塔的循環水量 情況下,可以提高廢氣洗滌效果,而能夠節省廢棄處理成9954twf.pld Page 6 200406248 V. Description of the invention (2) Packing, in order to increase the exchange area of liquid and gas, filled with different shapes: two unique surface areas, there are: Use, commonly used filler Such as Laxi ring and Bell saddle ring. In general, the “A / ^ ν σ” that is commonly used in the industry! The waste milk treatment system that is not in use is a waste milk knife discharged from each equipment end. Tower waste disposal. However, with the expansion of equipment and production capacity, the waste and exhaust gas generated by the equipment has also increased greatly, which has exceeded the original design of the treatment tower of the washing tower. The consequent result is that the process exhaust gas is not properly treated and escapes to in the air. A well-known improvement technology is to install a local scrubber on the machine side with a full-type scrubbing bar or activated carbon adsorption method to reduce the content of process waste gas, and finally discharge it to the wet scrubber. However, it is limited to the site and cost, and each plant is applicable to install a local washing tower to improve the efficiency of exhaust gas treatment. In addition, the conventional improvement technology is to increase the amount of circulating water to reduce the concentration of acid gas in the circulating water. And the waste water treatment system load, and caused the whole plant water recovery rate to drop sharply, the whole plant water discharge rate to rise sharply and water consumption costs and other issues. In view of this, an object of the present invention is to provide an exhaust gas treatment system and method for a scrubber tower, which can effectively remove the acid gas in the exhaust gas and improve the scrubbing effect of the exhaust gas. The object of the present invention is to provide an exhaust gas treatment system and method for a washing tower. Without the need to install a partial washing tower and increase the circulating water volume of the washing tower, the exhaust gas washing effect can be improved, and the waste treatment can be saved.

Μ 9954twf.Ptd 第7頁 200406248 五、發明說明(3) ------- 本。 本發明提供一種洗你松 ^ » a H y ^ ^ a先“‘廢氣處理系統,此糸統疋由洗 滌塔、洗滌液供給裝晋、从 ^ 裝置、廢氣注入管盘廢氣ί水裝f、洗蘇液循環泵、加樂 給裝置連接至洗務塔廢管所構成。㊣中,f條;t 裝置設置於洗蘇塔i洗:停、^供給洗蘇液至洗蘇塔中;軟水 ;務液,並送至洗蘇塔中;洗滌液循 ϊί ϊ = ΐ底部與項部,使洗務液可以在洗蘇塔内 循%,加樂裝置連接姝、狄w 酸驗值大於ΡΗ10 5^ΐ =,並控制洗蘇塔内之洗務液的 氣導入洗料之巾;廢人管連結至洗料,使廢 ν. . 廢乳排出管連結至洗務塔上,使經洗 滌塔處理後之氣體排放至大氣中。 本發明係利用加藥裝置調整洗滌塔中之洗滌液的酸鹼 為ρΗ10· 5以上’在反應時間内酸性氣體就能與強鹼充分 ,應三如此可將氯化氫之去除率由82%〜95%提昇至1〇〇% 、 ^化氯之去除率由39%〜91%提昇至9 9.93%左右,完全解決 酸味的問題。然而,當洗滌液之酸鹼值調升至1〇5以上 時二洗滌液含有之的鈣離子及鎂離子就會與氫氧根離子形 =氫氧化鈣及氫氧化鎂等結垢物而附著於洗滌塔内部造成 、、’。垢,並導致洗條塔内部堵死,造成内部壓差升高。因 ,,本發明於洗滌液供給裝置與洗滌塔之間設置:座軟 =置,用於去除洗滌液中所含的鈣離子及鎂離子。 各液酸鹼值控制調升至10· 5以上的狀洗 效率,並使洗滌塔一人a-------- 廢氣處理 200406248Μ 9954twf.Ptd Page 7 200406248 V. Description of Invention (3) ------- This. The present invention provides a washing gas ^ »a H y ^ a first" 'exhaust gas treatment system, which is generally provided by a washing tower, a washing liquid supply device, a ^ device, an exhaust gas injection pipe pan exhaust water water f, Dissolving liquid circulation pump and Jiale feed device are connected to the waste pipe of the washing tower. In the middle, f; t device is installed in the washing tower i: stop, ^ supply the washing liquid to the washing tower; soft water ; Wash solution, and send it to the washing tower; Washing solution cycle ϊί ϊ = ΐ bottom and top, so that washing solution can be cycled in the washing tower%, Jiale device connection 姝, Di w acid test value is greater than PΗ10 5 ^ ΐ =, and control the gas of the washing liquid in the washing tower into the towel of the washing material; the waste pipe is connected to the washing material, so that the waste milk discharge pipe is connected to the washing tower, so that the washing tower The treated gas is discharged into the atmosphere. The present invention uses a dosing device to adjust the acid and alkali of the washing liquid in the washing tower to be ρΗ10 · 5 or more. The acid gas can be sufficient with the strong alkali within the reaction time. The removal rate of hydrogen chloride was increased from 82% to 95% to 100%, and the removal rate of chlorine chloride was increased from 39% to 91% to about 9.93%. Completely solve the problem of sour taste. However, when the pH value of the washing solution is increased to more than 105, the calcium and magnesium ions contained in the second washing solution will form hydroxide ions = calcium hydroxide and magnesium hydroxide Fouling and other factors attached to the inside of the washing tower cause scale formation and blockage of the inside of the washing tower and increase the internal pressure difference. Therefore, the present invention is provided between the washing liquid supply device and the washing tower: The seat is soft and is used to remove the calcium and magnesium ions contained in the washing liquid. The pH value of each liquid is controlled to rise to a washing efficiency of more than 10.5, and one person in the washing tower a ------ -Exhaust treatment 200406248

而且’本發明不需要設置局部洗滌塔與增加用水量, 而只需要設置一套軟水裝置就可以提高廢氣處理效率,因 此可以節省成本。 本發明另外提出一種洗滌塔廢氣處理方法,此方法係 將經過軟化處理之洗滌液注入至洗滌塔中。然後加入藥劑 至洗條塔内以調整洗滌液的酸鹼值大於pH 1 0 · 5以上,並注 尾氣至洗;纟 i合内。接著,使廢氣與洗(條液充分混和以移 除廢氣中之微粒及酸氣後,排放經過洗液處理後之氣 體。 ^本發明係藉由提高洗滌液的酸驗值至1 〇 · &,以增加對 =酸鹼中和作用,而且利用軟水裝置以去除循環洗滌 子ί鎮離子,可避免洗滌塔内部結垢而能夠 除效率。由於本發明不需要設置局部洗條塔與 ^理呤1里,而只而要设置一套軟水裝置就可以提高廢氣 處理效率,因此可以節省廢氣處理成=置就 為讓本發明之上述目的、特 ° 下文特舉一較佳實施例,並配::、優點能更明顯易懂’ 下: 、 〇所附圖式,作詳細說明如 圖式之標示說明: 1 〇 〇 :洗滌塔 10 2 :洗滌液供給裝置 1 〇 4 :軟水裝置 10 6 :洗滌液循環泵 1 0 8 :加藥裝置Moreover, the present invention does not need to install a local washing tower and increase the water consumption, but only needs to set a set of water softening device to improve the efficiency of exhaust gas treatment, thereby saving costs. The present invention also provides a method for treating exhaust gas from a washing tower. This method involves injecting a softened washing liquid into the washing tower. Then add the agent to the washing column to adjust the pH value of the washing solution to be greater than pH 1 0 · 5 and inject the tail gas to the washing; Next, the exhaust gas and the washing liquid are thoroughly mixed to remove the particles and acid gas in the exhaust gas, and then the gas after the washing liquid treatment is discharged. ^ The present invention improves the acid value of the washing liquid to 1 〇 · & In order to increase the neutralization effect of acid and alkali, and the use of a soft water device to remove the circulating scrubber ions, can avoid scaling inside the washing tower and can remove efficiency. Because the present invention does not need to set up a local washing tower and the For example, only a set of water softening device can improve the efficiency of waste gas treatment. Therefore, waste gas treatment can be saved as follows: In order to achieve the above-mentioned object of the present invention, a preferred embodiment is given below. :: The advantages can be more obvious and easy to understand. 'The following: 〇 The attached drawings are described in detail as shown in the figure: 1 〇: Washing tower 10 2: Washing liquid supply device 1 〇 4: Soft water device 10 6 : Washing liquid circulation pump 10 8: Dosing device

9954twf.ptd 200406248 五、發明說明(5) 110 廢 氣 注 入 管 112 廢 氣 排 出 管 114 廢 氣 116 洗 滌 液 118 洗 滌 液 噴 灑裝置 120 填 充 料 122 酸 鹼 偵 測 器 124 藥 劑 實施 例 第1圖所緣示為本發明較佳實施例之一種洗滌塔廢氣 處理系統。請參照第1圖,本發明之洗滌塔廢氣處理系統 至少是由洗滌塔1 〇 〇、洗滌液供給裝置丨〇 2、軟水裝置 104、洗滌液循環泵1〇6、加藥裝置1〇8、廢氣注入管11〇與 廢氣排出管11 2等裝置所構成。 洗務塔1〇〇包括一槽體,其提供空間使廢氣114與洗滌 液116發生接觸與作用。常用的洗滌塔1〇〇種類例如填充 塔、泡罩塔、噴霧塔與文式塔。 洗滌液供給裝置1〇2例如是連接至洗滌塔丨〇〇,用以供 給洗滌液116至洗滌塔丨00中。其中,洗滌液116包括清 水、自來水及冷凝水。 軟水裝置104設置於洗滌塔i 〇〇與洗滌液供給裝置1〇2 ^、a, $用以軟化洗務液供給裝置102所供給之洗滌液116, 120达中:,滌塔1〇0中。軟水襞置104例如是用於去除洗滌液 中的妈離子及鎮離子,其中去除約離子及鎂離子的方9954twf.ptd 200406248 V. Description of the invention (5) 110 Exhaust gas injection pipe 112 Exhaust gas discharge pipe 114 Exhaust gas 116 Washing liquid 118 Washing liquid spraying device 120 Filling material 122 Acid-base detector 124 The embodiment of the medicine shown in Figure 1 A preferred embodiment of the invention is a scrubber exhaust gas treatment system. Please refer to FIG. 1. The scrubbing tower exhaust gas treatment system of the present invention is at least composed of a scrubbing tower 100, a scrubbing liquid supply device 02, a soft water device 104, a scrubbing liquid circulation pump 106, a dosing device 108, The exhaust gas injection pipe 110 and the exhaust gas discharge pipe 112 are composed of devices. The washing tower 100 includes a tank, which provides space for the exhaust gas 114 to come into contact with the washing liquid 116. Common types of washing tower 100 are, for example, packed tower, bubble tower, spray tower and vent tower. The washing liquid supply device 102 is, for example, connected to a washing tower 100, for supplying the washing liquid 116 to the washing tower 00. The washing liquid 116 includes clean water, tap water, and condensed water. The water softening device 104 is provided in the washing tower i00 and the washing liquid supply device 102, a, and $ to soften the washing liquid 116 and 120 supplied by the washing liquid supply device 102, and the cleaning tower 100 . The soft water setting 104 is, for example, a method for removing mother ions and ballast ions in a washing liquid, and a method for removing about ions and magnesium ions.

200406248 五、發明說明(6) 法包括化學沉降法或離子交換法。 洗滌液循環泵1 0 6之入水端及出水端分別連接洗滌塔 1 0 0之底部與頂部使洗滌液1 1 6在洗滌塔1 0 0内循環。亦 即。此洗滌液循環泵1 0 6從洗滌塔1 〇 〇底部抽取洗滌液 1+1 6,並將洗滌液1 1 ^送至洗滌塔丨〇 〇頂部後,經由洗滌液 喷瀧裝置11 8喷入塔中後,散成液滴狀而流回到洗滌塔1 〇 〇 底部’再從洗滌塔1 0 0底部抽取洗滌液送至洗滌塔丨〇 〇頂 邛,而使洗滌液1 1 6在洗務塔1 〇 〇内循環。其中,洗蘇液喷 灑裝置1 1 8可將洗滌液11 6均勻分配向下喷灑,充分與廢氣 接觸。 ^加藥裝置1 0 8例如是連接至洗滌塔1 0 0,用以控制洗滌 塔内之循環洗滌液的酸鹼值例如是大於pH丨〇 · 5以上。加藥 裝置1 08加入之藥劑可使洗滌液與廢氣發生酸鹼中和反 應’而有效的移除廢氣中之酸性物質。 ^ 廢氣注入管11 0連結至洗滌塔1 0 0,使一廢氣導入洗滌 。10 0之中。其中所欲處理廢氣11 4如敦化氫、氯化氫、石肖 酸氣體的混和酸氣或至少包括其中之一的氣體。 廢氣排出管11 2連結至洗滌塔上,使經洗滌塔1 00處理 後之氣體排放至大氣中。 而且,為了增加液氣交換面積,通常在洗滌塔1 00内 ^凌填一些填充料(?&(:1^叫)120,填充料具有許多不同的 形狀,其具有其獨特的表面積可供設計者選擇使用,常用 的填充料如拉西環及貝爾鞍環。 此外’在洗滌塔内設有一酸鹼偵測器1 2 2,此酸鹼偵200406248 V. Description of the invention (6) The method includes chemical precipitation method or ion exchange method. The inlet end and outlet end of the washing liquid circulation pump 106 are respectively connected to the bottom and the top of the washing tower 100 to circulate the washing liquid 1 6 in the washing tower 100. That is. This washing liquid circulation pump 106 draws the washing liquid 1 + 1 6 from the bottom of the washing tower 100, and sends the washing liquid 1 1 ^ to the top of the washing tower 11 and sprays it through the washing liquid spraying device 11 8 After being in the tower, it dispersed into droplets and flowed back to the bottom of the washing tower 100. The washing liquid was drawn from the bottom of the washing tower 100 and sent to the washing tower, and the washing liquid 1 16 was washed in the washing tower. The service tower circulates within 1,000. Among them, the washing liquid spraying device 1 1 8 can evenly distribute the washing liquid 116 to be sprayed downward, and fully contact the exhaust gas. ^ The dosing device 108 is connected to the washing tower 100, for example, and is used to control the pH value of the circulating washing liquid in the washing tower, for example, the pH is greater than pH. Dosing The medicine added in the device 08 can make the washing liquid and the exhaust gas undergo an acid-base neutralization reaction 'and effectively remove the acidic substances in the exhaust gas. ^ The exhaust gas injection pipe 110 is connected to the washing tower 100, so that an exhaust gas is introduced into the washing. 10 out of 10. Among them, the waste gas 114 to be treated is a mixed acid gas such as hydrogenated hydrogen, hydrogen chloride, and lithocholic acid, or a gas including at least one of them. The exhaust gas exhaust pipe 112 is connected to the washing tower, so that the gas treated by the washing tower 100 is discharged into the atmosphere. Moreover, in order to increase the liquid-gas exchange area, some filling materials (? &Amp; (: 1 ^ 叫) 120) are usually filled in the washing tower 100, and the filling materials have many different shapes, which have their unique surface area available. The designer chooses to use, commonly used packing materials such as Raschig ring and Bell saddle ring. In addition, there is an acid-base detector 1 2 2 in the washing tower.

200406248 五、發明說明(7) = ΓΛ22Λ接加藥裝置’用以監測洗務液116的酸驗值,並 力…先條塔100中之加藥量·。舉例來說 i::狀:态所偵測的酸鹼值低於設定值時,#送-訊號 中加‘衣置,而使加藥裝置108開啟而加入藥劑至洗滌塔 π 的本辦發^明係利用加藥裝置108調整洗滌塔100中之洗滌液 的馱鹼值為ρΗΙ 〇·5以上,使酸性氣體能夠與強鹼在反 土日守間内充分反應,如此提升廢氣中酸性氣體之去除率, 完全解決酸味的問題。然而,當洗滌液11 6之酸鹼值調升 至1."5以上時,洗滌液11 6含有之的鈣離子及鎂離子就會 與氫氧根離子形成氫氧化鈣及氫氧化鎂等結垢物而附著於 洗滌塔100内部造成結垢,而導致洗滌塔1〇〇内部堵死並造 成内部壓差升高。因此,本發明於洗滌液供給裝置102與 洗條塔100之間設置-座軟水裝置104,用於去除洗條液 116中所含的鈣離子及鎂離子。使在洗滌液116酸鹼值控制 调升至10. 5以上的狀況下,提高廢氣114處理效率,並使 洗務i合1 〇 〇不會結垢而可順利操作。 一 以上說明本發明之洗滌塔廢氣處理系統,接著說明本 實施例所揭露之洗滌塔廢氣處理方法。首先,提供洗滌液 11 6至洗滌塔1 〇 〇使用,洗滌液11 6由塔頂流入經噴灑裝置 11 8均勻灑下,與廢氣接觸後的洗滌液丨丨6流至拔底,再由 洗務液循環泵106輸送至塔頂循環使用,使用前對洗滌液 11 6進行液體中金屬離子如鈣離子及鎂離子的軟化步驟, 然後再加入藥劑1 24例如是液鹼,調整洗滌液的酸驗值大200406248 V. Description of the invention (7) = ΓΛ22Λ Dosing device for monitoring the acid value of the washing liquid 116, and the strength ... Dosing amount in the first column 100 ·. For example, when the detected pH value is lower than the set value in the i :: status: state, a 'clothing device' is added to the # 送-signal, and the dosing device 108 is turned on, and the medicine is added to the washing tower π. ^ Ming used the dosing device 108 to adjust the alkali value of the washing liquid in the washing tower 100 to be above ρΗ1 0.5, so that the acidic gas can fully react with the strong alkali in the anti-earthen room, thus increasing the acidic gas in the exhaust gas The removal rate completely solves the problem of sour taste. However, when the pH value of the washing solution 116 is increased to 1. " 5 or more, the calcium and magnesium ions contained in the washing solution 116 will form calcium hydroxide and magnesium hydroxide with hydroxide ions, etc. The fouling matter adheres to the inside of the washing tower 100 and causes fouling, which causes the inside of the washing tower 100 to be blocked and the internal pressure difference to rise. Therefore, in the present invention, a water softening device 104 is provided between the washing liquid supply device 102 and the washing bar tower 100 to remove the calcium ions and magnesium ions contained in the washing liquid 116. Under the condition that the pH value of the washing liquid 116 is adjusted to more than 10.5, the treatment efficiency of the exhaust gas 114 is improved, and the washing service can be smoothly operated without scaling. The above describes the scrubber exhaust gas treatment system of the present invention, and then describes the scrubber exhaust gas treatment method disclosed in this embodiment. First, the washing liquid 116 is provided to the washing tower 100, and the washing liquid 116 flows from the top of the tower and is uniformly sprayed by the spraying device 118, and the washing liquid contacting the exhaust gas flows to the bottom and is then washed by the washing The liquid circulation pump 106 is transported to the top of the tower for recycling. Before use, the softening step of the metal ions such as calcium ions and magnesium ions in the washing liquid 116 is performed, and then the agent 1 24 such as liquid alkali is added to adjust the acid of the washing liquid. Check value

9954twf.ptd 第12頁 200406248 五、發明說明(8) 於10.5以上;接著由塔底導入欲處理的廢氣114如氟化 氫、氯化氫、硝酸氣體混合的酸氣或至少包括其中之一的 氣體至洗滌塔1 〇 〇内,向上流動與洗滌液接觸,廢氣11 4中 的污染物溶入洗滌液11 6,經過洗膝液11 6淨化的氣體由塔 頂排出。 本發明係將洗滌液1 1 6之酸驗值控制調升至1 〇 · 5以 上,酸性氣體就能與強鹼在反應時間内充分反應,如此可 將氯化氫之去除率由82%〜95%提昇至100% 、I化氫之去除 率由39%〜91%提昇至99· 93%左右,完全解決酸味的問題。 但是將洗滌液之酸驗值調升至1 〇 · 5以上時,洗條塔内部就 會開始結垢’造成内部壓差升高以致内部堵死。其原因為 供應的洗滌液11 6本身就含濃度極高的詞離子及鎂離子, s酸驗值在9 · 0以下時,會形成硫酸鈣及硫酸鎂懸浮固 體,並不會造成結垢,但當酸鹼值大於1〇· 5時,洗滌液 116中的鈣離子及鎂離子就會與氫氧根離子形成氫氧化鈣 及氫氧化鎂等結垢物。 為了解決在洗滌液酸鹼值大於⑽丨〇 5 州,係於洗務液供給裝謹兄;供= 兮π π ut 〇〇之前,加設一座軟水裝置104,用於去除 值控㈣Λ Λ τ ζ°Λ在洗㈣116酸驗 蚀冰狄W , Λ Α 上的狀况下’ k兩廢氣處理效率,並 使洗戽塔1 〇 〇不會結垢而可順利操作。 廢氣5 I: : t ^由提南洗滌液的酸鹼值至1()· 5,以增加對 ^ ^作用,而且利用軟水裝置以去除循環洗滌9954twf.ptd Page 12 200406248 V. Description of the invention (8) Above 10.5; Then, the exhaust gas 114 to be treated, such as hydrogen fluoride, hydrogen chloride, nitric acid, mixed acid gas or at least one of the gases is introduced into the scrubbing tower from the bottom of the tower. Within 1000, upward flow comes into contact with the washing liquid, and the pollutants in the exhaust gas 114 are dissolved in the washing liquid 116, and the gas purified by the knee washing liquid 116 is discharged from the top of the tower. In the present invention, the acid test value of the washing liquid 1 16 is controlled to be increased to more than 10.5, and the acid gas can fully react with the strong alkali in the reaction time, so that the removal rate of hydrogen chloride can be from 82% to 95%. It is increased to 100%, and the removal rate of hydrogen hydride is increased from 39% to 91% to about 99.93%, which completely solves the problem of sour taste. However, when the acid value of the washing solution is increased to more than 10.5, the scale inside the washing column will begin to fouling ', which will cause the internal pressure difference to rise and cause internal blockage. The reason is that the supplied washing liquid 11 6 itself contains extremely high concentrations of word ions and magnesium ions. When the acid value of s is below 9 · 0, suspended solids of calcium sulfate and magnesium sulfate will be formed without causing scaling. However, when the acid-base value is greater than 10.5, calcium and magnesium ions in the washing liquid 116 and hydroxide ions form scales such as calcium hydroxide and magnesium hydroxide. In order to solve the state where the pH value of the washing liquid is greater than ⑽ 〇 05, the washing liquid supply equipment is installed; before = = π π ut 〇〇, a water softening device 104 is added to remove the value control ㈣ Λ Λ τ ζ ° Λ under the conditions of washing 116 acid corrosion test ice W, Λ Α 'k two exhaust gas treatment efficiency, and the washing tower 100 will not scale and can be smoothly operated. Exhaust gas 5 I:: t ^ from the pH value of Tinan washing liquid to 1 () · 5 to increase the effect on ^ ^, and use a soft water device to remove circulating washing

200406248 五、發明說明(9) 液所含之鈣離子及鎂離子,可避免洗滌塔内部結垢而能夠 提高廢氣去除效率。由於本發明不需要設置局部洗滌塔與 增加用水量,而只需要設置一套軟水裝置就可以提高廢氣 處理效率,因此可以節省廢氣處理成本。 雖然本發明已以一較佳實施例揭露如上,然其並非用 以限定本發明,任何熟習此技藝者,在不脫離本發明之精 神和範圍内,當可作些許之更動與潤飾,因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。200406248 V. Description of the invention (9) The calcium ions and magnesium ions contained in the liquid can avoid scaling inside the washing tower and improve the efficiency of exhaust gas removal. Since the present invention does not need to install a local washing tower and increase water consumption, only a set of water softening device can be used to improve the efficiency of exhaust gas treatment, and therefore the cost of exhaust gas treatment can be saved. Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make some changes and retouch without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be determined by the scope of the attached patent application.

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Claims (1)

200406248 六、申請專利範圍 1 · 一種洗滌塔廢氣處理系統,該系統至少包括: 一洗滌塔; 一洗滌液供給裝置,該洗滌液供給裝置連接至該洗滌 塔,用以供給一洗滌液至該洗滌塔中; 一軟水裝置,該軟水裝置設置於該洗滌塔與該洗滌液 供給裝置之間,用以軟化該洗滌液供給裝置所供給之該洗 滌液,並送至該洗滌塔中; 一洗務液循環泵,該洗條液循環泵連接該洗務塔之底 部與頂部,使該洗滌液可以在該洗滌塔内循環; 一加藥裝置,該加藥裝置連接該洗務塔,並控制該洗 滌塔内之該洗滌液的酸鹼值大於pH 1 0. 5以上; 一廢氣注入管,該廢氣注入管連結至該洗滌塔,使一 廢氣導入該洗滌塔之中;以及 一廢氣排出管,該廢氣排出管連結至該洗滌塔上,使 經該洗滌塔處理後之氣體排放至大氣中。 2. 如申請專利範圍第1項所述之洗滌塔廢氣處理系 統,其中更包括一酸鹼偵測器,該酸鹼偵測器設置於該洗 滌塔中用以監測該洗滌液之酸鹼值。 3. 如申請專利範圍第1項所述之洗滌塔廢氣處理系 統,其中更包括一洗滌液喷灑裝置,該洗滌液喷灑裝置設 置於該洗滌塔頂部用以喷灑該洗滌液。 4. 如申請專利範圍第1項所述之洗滌塔廢氣處理系 統,其中該廢氣至少包括氟化氫氣體、氯化氫氣體、硝酸 氣體之其中之一。200406248 VI. Application Patent Scope 1 · A scrubber exhaust gas treatment system, the system includes at least: a scrubber tower; a scrubber liquid supply device, the scrubber liquid supply device is connected to the scrubber tower to supply a scrubber liquid to the scrubber In the tower; a water softening device, which is disposed between the washing tower and the washing liquid supply device, to soften the washing liquid supplied by the washing liquid supply device and send it to the washing tower; a washing service Liquid circulation pump, the strip washing liquid circulation pump connects the bottom and the top of the washing tower, so that the washing liquid can be circulated in the washing tower; a dosing device, the dosing device is connected to the washing tower, and controls the washing tower The pH value of the washing liquid in the washing tower is greater than pH 10.5; an exhaust gas injection pipe connected to the washing tower so that an exhaust gas is introduced into the washing tower; and an exhaust gas discharge pipe, The exhaust gas exhaust pipe is connected to the washing tower, so that the gas treated by the washing tower is discharged into the atmosphere. 2. The scrubber exhaust gas treatment system according to item 1 of the scope of patent application, further comprising an acid-base detector, the acid-base detector is installed in the scrubber tower to monitor the pH value of the washing liquid . 3. The scrubber exhaust gas treatment system according to item 1 of the patent application scope, further comprising a scrubbing liquid spraying device, the scrubbing liquid spraying device is disposed on the top of the scrubbing tower to spray the scrubbing liquid. 4. The scrubber exhaust gas treatment system according to item 1 of the scope of patent application, wherein the exhaust gas includes at least one of hydrogen fluoride gas, hydrogen chloride gas, and nitric acid gas. 9954twf.ptd 第16頁 200406248 六、申請專利範圍 5 ·如申請專利範圍第1項所述之洗務塔廢氣處理系 統,其中該加藥裝置加入該洗滌塔中之藥劑包括氫氧化 納。 6. 如申請專利範圍第1項所述之洗滌塔廢氣處理系 統,其中該洗務塔包括填充塔、泡罩塔、喷霧塔與文式塔 之其中之一。 7. 如申請專利範圍第1項所述之洗滌塔廢氣處理系 統,其中該洗滌塔内填充有拉西環。 8. 如申請專利範圍第1項所述之洗滌塔廢氣處理系 統,其中該洗務液包括清水。 9. 如申請專利範圍第1項所述之洗滌塔廢氣處理系 統,其中該洗滌液包括自來水。 1 0.如申請專利範圍第1項所述之洗滌塔廢氣處理系 統,其中該洗滌液包括冷凝水。 1 1. 一種洗滌塔廢氣處理方法,該方法至少包括下列 步驟: 提供一洗滌液,並對該洗滌液進行一軟化步驟; 注入經軟化之該洗滌液至一洗滌塔中; 加入一藥劑至該洗滌塔内以調整該洗滌液的酸鹼值大 於pHl 0· 5以上; 注入一廢氣至該洗滌塔内; 混合該廢氣與該洗滌液;以及 排放經過該洗滌液處理後之氣體。 1 2.如申請專利範圍第1 1項所述之洗滌塔廢氣處理方9954twf.ptd Page 16 200406248 6. Scope of patent application 5 • The scrubber tower exhaust gas treatment system as described in item 1 of the scope of patent application, wherein the medicinal unit added to the scrubber tower includes sodium hydroxide. 6. The scrubber exhaust gas treatment system according to item 1 of the scope of the patent application, wherein the scrubber tower includes one of a packed tower, a blister tower, a spray tower and a vent tower. 7. The scrubber exhaust gas treatment system according to item 1 of the scope of the patent application, wherein the scrubber is filled with a Raschig ring. 8. The scrubbing tower exhaust gas treatment system as described in item 1 of the scope of patent application, wherein the washing liquid includes clean water. 9. The scrubber exhaust gas treatment system according to item 1 of the scope of the patent application, wherein the scrubbing liquid includes tap water. 10. The exhaust gas treatment system for a scrubbing tower according to item 1 of the scope of the patent application, wherein the scrubbing liquid includes condensed water. 1 1. A method for treating exhaust gas from a washing tower, the method comprising at least the following steps: providing a washing liquid and subjecting the washing liquid to a softening step; injecting the softened washing liquid into a washing tower; adding a medicament to the washing tower; In the washing tower, the pH value of the washing liquid is adjusted to be greater than pH 105; injecting an exhaust gas into the washing tower; mixing the exhaust gas with the washing liquid; and discharging the gas treated by the washing liquid. 1 2. The scrubber exhaust gas treatment party as described in item 11 of the scope of patent application 9954twf.ptd 第17頁 200406248 六、申請專利範圍 法,其中該廢氣至少包括氟化氫、氯化氫氣體、硝酸氣體 之其中之一。 1 3.如申請專利範圍第11項所述之洗滌塔廢氣處理方 法,其中更包括監測該洗滌液之酸鹼值,以控制該洗滌液 的酸鹼值維持在pH 1 0. 5以上。 1 4.如申請專利範圍第1 1項所述之洗滌塔廢氣處理方 法,其中該藥劑包括氫氧化鈉。 1 5.如申請專利範圍第11項所述之洗滌塔廢氣處理方 法,其中該洗滌塔包括填充塔、泡罩塔、喷霧塔與文式塔 之其中之一。 1 6.如申請專利範圍第11項所述之洗滌塔廢氣處理方 法,其中該洗滌塔内填充有拉西環。 1 7.如申請專利範圍第11項所述之洗滌塔廢氣處理方 法,其中該洗滌液包括清水。 1 8.如申請專利範圍第11項所述之洗滌塔廢氣處理方 法,其中該洗滌液包括自來水。 1 9.如申請專利範圍第11項所述之洗滌塔廢氣處理方 法,其中該洗條液包括冷凝水。 IH 9954twf.ptd 第18頁9954twf.ptd Page 17 200406248 VI. Patent Application Law, where the exhaust gas includes at least one of hydrogen fluoride, hydrogen chloride gas, and nitric acid gas. 1 3. The method for treating exhaust gas from a scrubbing tower as described in item 11 of the scope of the patent application, which further comprises monitoring the pH value of the washing liquid to control the pH value of the washing liquid to be maintained at pH above 0.5. 14. The method for treating exhaust gas from a scrubbing tower as described in item 11 of the scope of patent application, wherein the agent comprises sodium hydroxide. 1 5. The scrubber exhaust gas treatment method according to item 11 of the scope of the patent application, wherein the scrubber tower includes one of a packed tower, a blister tower, a spray tower and a vent tower. 1 6. The method for treating exhaust gas from a scrubbing tower as described in item 11 of the scope of the patent application, wherein the scrubbing tower is filled with a Raschig ring. 1 7. The method for treating exhaust gas from a scrubbing tower as described in item 11 of the scope of the patent application, wherein the scrubbing liquid includes clean water. 1 8. The method for treating exhaust gas from a scrubbing tower according to item 11 of the scope of the patent application, wherein the scrubbing liquid includes tap water. 19. The method for treating exhaust gas from a scrubbing tower as described in item 11 of the scope of the patent application, wherein the strip washing liquid includes condensed water. IH 9954twf.ptd Page 18
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