TW200403200A - Support for sintering ceramic electronic components - Google Patents

Abstract

A support for sintering ceramic electronic components is characterized is that the support is formed of a thick substrate material, and is resistant to bending after repetitive use in situations where a thin wall is used, thereby providing a long period of use. The invented support is made by using a ceramic substrate material, and coating a covering having ZrO2 as the main ingredient to form a support for sintering ceramic electronic components, where the residual expansion for the support face and the reverse face of the substrate material is different.

Description

Description of the invention: [Technical field to which the invention belongs] Ceramic electronic parts such as thermistors The present invention relates to a carrier used for firing ceramic capacitors, piezoelectric elements, and the like. [Prior technology] Placer for firing ceramic electronic parts (hereinafter referred to as "loading burner ;: trays, ceramic parts are being produced; = clothing set = low suitability, heat resistance and resistance to rapid cooling and rapid ageing .Silk, wide-ranging, crying, sex! I: 3.Si〇2 as the base material for rapid cooling and heat resistance, the substrate 'reacts.', And 6 coatings as the main component of the coating layer to To prevent the firing of the body composition and the base material, there is a tree-like delamination. 11 Due to the repeated heating and cooling of the system, there is a problem of performance. From the perspective of improving the durability, the body material is urgently needed. Existing considerations In order to increase the resistance of the carrier, the base material is fired at a high temperature to increase the hardness to improve the resistance to bending. = Yes, because of this, it will consume a lot of energy when fired at this high temperature. The problem of increasing the cost of placing ϋ of fuel = berth = In addition, when sintering at high temperature, shrinkage due to firing = the resulting susceptor is prone to deformation and dimensional wave decomposition, and the opposite is the low utilization rate of raw materials. When covering the base material, the cover layer is keyed, and a thin quilt is made. ' The thickness of the coating device of the thick coating layer (for example, Japanese Patent Publication _-146456). The focus of the reading device is that the mounting device will be bent because the thickness of each coating layer is different, so that each coating The thickness of the layer is substantially the same to prevent the occurrence of bending. However, this kind of mounting device does not consider the coating layer on the surface on which the fired body is placed. Influence, and the stabilization rate of the ❺z pool constituting the coating layer, the use of hybridization surfaces and the ground hole of the coating layer to intervene. In addition, according to the material of the base material used and the remaining expansion characteristics of the coating, the thickness is thinner. The substrate may sometimes have a firing temperature of the substrate, and the substrate does not even take this into consideration. ^ Below, the case of Ququ, but most of the results of this loading is the actual situation. The coating layer with the same thickness is placed on the surface of the fired body and the opposite surface of the fired body. It is impossible to use the firing times 10 times. 3. Under the cut, the loading state is also [Summary of the Invention] In view of the above problems The object of the present invention is to provide a study of the following: the local prevention of the bender of the mounting device, and the study of the body composition of burned adults. =: After the amount of curvature, control of the _ Stabilizing phase, porosity, ZrG2 sensitization type, etc., by placing a single layer of residual impurities on the surface on which the fired body is placed and the reverse side of the surface, it is possible to make contact until the present invention is completed. In other words, this sun and the moon provide a kind of mounter, which is characterized in that the base material made of Tao Lai has a layer consisting of ZrO2 resident components. The electronic component burns the mounter and the base material On the mounting surface © and its opposite surface, there is a residual coating layer. On the card of the present invention, the coating layer on the mounting surface is stabilized by a Zr of 30 to 100% as shown in the following formula (1). It is preferable that there is a difference (absolute value) of 1 to 60% in the stabilization ratio of the ZrO2 layer constituting each of the coating layers on the mounting surface and the opposite surface thereof. Stability ratio (%) = (cubic crystal / (cubic crystal + monoclinic crystal)) x 100 (1) [The stabilization ratio in the formula (1) is a value in a state before use. In addition, in the present invention, each of the coating layers on the mounting surface and the opposite surface thereof is preferably composed of a ZrO2 layer containing a different type of stabilizer. In addition, in the present invention, it is preferable that the coating layers on the mounting surface and the opposite surfaces thereof have different porosities. At this time, the coating layer on the mounting surface is preferably formed by any method of thermal spraying or spray coating, and 200403200 Opposite to the mounting surface _ The coating layer is excellent. It is formed by either of the methods of square spray coating for forming the coating layer on the mounting surface.叼 contribute to a chalk [Embodiment] Hereinafter, an embodiment of the present invention will be specifically described. The mounting device of the present invention is a mounting device having a covering sound with ZrO2 as a main component and different residual expansion amounts on the base material, the mounting surface and / or the opposite surface of the base material. Device. In this way, due to the influence of the composition of the fired body, the coating layer on the mounting surface has an increase in the amount of residual expansion caused by the ZrO2 crystal phase transfer. However, even when the fired body is fired, the base material is In% e of bending, the main factors related to these bendings can be offset based on the difference in the residual expansion between the coating layers. Even if it is repeatedly used, the carrier does not bend and can be used for a long time. Here, the so-called "residual expansion" refers to the length of the coating layer after firing minus the length of the coating layer of fired uranium in the length direction. Here, the length of each coating layer in the length direction It means the length of the base material in an unconstrained state. In the present invention, due to the reaction with the fired body and the influence of the amount of bending of the base material, the entire mount is bent in the direction of the mounting surface (hereinafter referred to as In the case of "upward bending," or bending in the opposite direction (hereinafter referred to as "downward bending ,,"), it is necessary to set the difference in the residual expansion between the mounting surface and the coating on the opposite surface to the opposite direction. In the range where the direction is bent, the amount of bending of the carrier during firing of the fired body can be reduced to a range of less than 2.0 legs. Specifically, because of the coating on the mounting surface, The amount of residual expansion varies depending on the composition and firing conditions of the fired body, and the amount of bending of the base material varies depending on the thickness and material of the base material and the firing temperature of the fired body, so it is necessary to integrate These factors are taken into consideration to determine the difference in the amount of residual expansion between the two coating layers. In addition, as shown in Fig. 1, the amount of bending of the mounting means refers to the mounting means before and after firing when the mounting means is left to stand horizontally. The length (X) at which the topmost point moves in the thickness direction of 1 and 2. In addition, when using 1 ~ n (integer of n = l0 or more) times at the time of firing, it is relative to the placement before use. The bending amount of the holder after each firing of the holder is similar. Therefore, the holder of the present invention, 200403200, is bent at least 10 times compared to the holder before use, no matter which Once, almost all of them are not above the 2.0 plane. Stabilization rate (%) = (cubic crystal / (cubic crystal + monoclinic crystal)) χ1〇〇 (ι: [Equation (1) The stabilization ratio is in The value in the state before use.] Here, the relationship between the stabilization rate and the change caused by the number of firings of the residual expansion amount will be described with reference to FIG. 2. As shown in FIG. 2, 7F 'is based on ZrO2 as the main component. In the coating layer, the closer the stabilization rate is to 臓 or 0%, the more difficult it is to transfer the crystal phase of the secret layer during firing, so When the number of times of entering and exiting is less than 15 times, the residual expansion is also smaller. On the other hand, the closer the stabilization rate is to 50%, the easier it is to cause the crystalline phase of the ZrO2 layer to be transferred during firing, even if the number of times of entering and leaving is lonely. Within 15 times, the amount of residual swelling will increase approximately proportionally with the number of uses. In addition, the coating layer provided on the mounting surface (the coating layer with a stabilization rate of 100% in the figure is a dotted line, (Shown) The coating with the same stabilization rate as that provided on the opposite surface shows a different behavior. That is, when the number of times of entering and exiting the kiln is within 15 times, the reaction with the fired body during firing is high. The frequency of crystalline phase transfer causes the residual expansion to increase. Therefore, if a coating layer with the same stabilization rate is placed on the mounting surface and the opposite surface, the residual expansion of the two will be reduced during a period of relatively few uses. The difference becomes large, and bending which cannot be used as a mounter easily occurs. In contrast, as shown in FIG. 1, for example, if a covering layer with a stabilization rate of 100% is provided on the mounting surface, and a covering layer with a stabilization rate of 90% is provided on the opposite side, the two coating layers exhibit a residual expansion amount. The behavior of the change is substantially the same. If the bending of the base material is considered, the bending of the carrier can be prevented. In the present invention, it is preferable that the stabilization ratio of each ZrO2 constituting each coating layer has a difference (absolute value) of 1 to 60%. More preferably, a difference (absolute value) of 2 to 50%, and particularly preferably 5 to 50%. 35% difference (absolute). When the stabilization ratio of each ZrO2 layer constituting each coating layer is greater than 60% (absolute value), not only the difference in residual expansion between the two coating layers provided on the mounting surface and its opposite surface is accurately determined. The effect of the fired body on the base material during the firing of the fired body and the coating layer on the mounting surface is offset to prevent the bending of the mounting device. A coating layer with a small amount of Zr02 particles and a low stabilization rate is liable to be lost due to powdering. In the present invention, it is preferable that the coating layer provided on the surface of the base material is composed of a secret layer having a stabilization rate of 30 to 100% as shown in the above formula. When the coating layer is composed of a ZrO2 layer having a stabilization rate of less than 30%, loss is liable to occur due to powdering. However, as shown in Fig. 1, the amount of change in the residual expansion amount due to the components of the fired body varies depending on the stabilization rate and the firing conditions of the body to be fired. For example, the smaller the stabilization rate, the residual expansion amount changes. Bigger. Therefore, it may be suspected that the stabilization rate of the reduction coating layer selected on the surface of the mounting surface is within an appropriate range. In addition, for any coating layer on the mounting surface and its opposite surface, for example, the larger the residual expansion caused by firing of the coating layer with a stabilization rate on the left f, the more difficult it is to precisely control the bending of the mounting device. . Therefore, in the present invention, it is more preferable that the coating layer on the mounting surface and / or the opposite surface thereof is a ZrO2 layer having a stabilization rate of 65 to 100% as shown in the above formula (1), and particularly preferably 7 〇 ~% Zr〇2 layer. In the present invention, each coating layer having a different stabilization rate may, for example, contain a single amount of 敎 _ 补 _ 彡 成 in the raw material. In addition, as a stabilizer, for example, there are oxidation period ⑽3), oxidation about (Ca〇), oxidation town (_) f dioxide # (Ce〇), and the like. In addition, for example, by containing yttrium oxide (m) at 8 mass% or more and reducing the amount (CaO) to 5 mass% or more, a coating layer having a stabilization rate can be formed. It is sufficient to reduce the content of ^ in proportion to the desired stabilization rate. The effect of suppressing the stabilization rate of the ZrO2 layer to be low and reducing the transition of the crystal phase varies depending on the type of stabilizer contained in ZrO2. Therefore, as coating layers having different residual expansion amounts according to the present invention, each coating layer may be composed of ZrO2 as a stabilizer. There are two coating layers with different residual expansions separately set at η1. Even in the two leather coatings, the difference in residual expansion can be set between the coatings.

/ 7 J In the present invention, in consideration of the difference in the effects of the above-mentioned stabilizers, it is possible to use a mixture of early alone-type or two-type companies, and each coating layer can be used separately. 200403200 / In addition, in the present invention, Each coating layer is composed of a ZrO2 layer containing different kinds of stabilizers and different stabilizing ratios. It is preferable to set a wide range of the difference in the residual expansion amount, which can appropriately correspond to the residual expansion caused by the components of the fired body. Corresponding to the increase. In addition, in the present invention, it is more preferable that each coating layer having a difference in the amount of residual expansion is composed of a coating layer on the mounting surface and the opposite surface thereof, each of which has a different porosity. In the k-like coating layer, since the coating layer having a larger porosity has a larger interval between particles, the expansion amount at the time of firing itself decreases, and the residual expansion amount becomes smaller. When the coating layer i with porosity decreases, the expansion of each particle can be reflected as the expansion amount of the coating layer itself, and the residual expansion amount becomes larger. Therefore, with this feature, the ZrQ2 layer segments with non-porosity in each coating layer can appropriately set the difference in residual expansion a: between the coating layers. In the present invention, it is needless to say that it is preferable to set a right mist on the mounting surface and its opposite surface.

~ 一 々 / ^ Kai Xi Yu He solitary layer to get.

= 3 to 15%) 'is preferably a thermal spraying method. It is preferable that the coating layer on the mounting surface is formed by spray coating or by any method of spray coating to precisely control the thickness of the coating layer, and any method that is the opposite of the mounting surface. On the other hand, the coating on the opposite side of the mounting surface is "coated or blasted". 11 200403200-Control of the porosity of the second U broken coating Needless to say, it can be determined by the choice of the construction method. Silk production: mouth coating, spray forging In the case of any other type, the particle size of the raw material, the conditions of the material f can be within a desired range, and the electric isolation chamber can also be in a predetermined range. For example, there is a gas injection of a combustion flame generated by a heating method. Use as a plasma spray. There are ^ == starting points, and plasma nozzles are preferred. In addition, Angstrom s, sintered hybrid sputter plating, gas plasma gangue, etc., require people who are exhausted. Plasma spraying (porosity 7 ~, it is preferred to use milk plasma spraying (porosity 3 ~ 10%) under the field port with a small porosity. Pond two: bursts: the amount of residual expansion can also be based on the coating layer In terms of thickness, it is preferable that the thickness of the coating layer is within the range of 2 () ~ 4 () () _ fan_, which is more preferable, and particularly preferably within the range of ⑽ ~ 2G0_. In addition, from the coating There is no organization breakdown inside the layer. You can set the difference of the remaining expansion 1 in a wider range. The difference between the thickness of each coating layer is within the range of 50 ~ • π. It is more preferably within the range of ⑽, particularly preferably ⑽ ~ 2_ = outside: the base material of this rich fortune does not make special materials for its material f. Fossil xi, oxygen brain, oxidized sulphur dioxide-oxidized sulphur dioxide, cordierite and so on. 〇If you use μΪΪμH, the influence will be given by the recording officer ^, so it is preferred to use warm sound, heat resistance and impact resistance. The quality is better than the quality of ===. In addition, from the point of the dioxin. From the point of the book, it is preferred that the oxide A · Jr is in this hair, and the thickness of the base material is not particularly limited, so that A The body can also increase the resistance of the carrier to bending. In addition, the material "" is more sintered when it is _set || _ Ling Rongchunda, _ $, because it is fired and its opposite setting The present invention will be described in more detail based on examples with a predetermined residual expansion amount on the mounting surface of the base material 12 200403200 or less. However, the present invention is not limited to these embodiments. '(Evaluation method) (1) Mounting device The amount of bending was cut to 15 mm x 20 mm x 4 in each of the mounts obtained in the examples and the comparative examples. After preparing a titanium solution containing 10% of the main component of the ceramic capacitor on the surface corresponding to the mounting surface of each sample, the test was repeated 1 () times. C, 2 hours For each impurity after firing, calculate the bending amount X of the sample before firing, as shown by @i. The price is as follows: the bending amount of the loader at each time is L 〇 When the following is deleted, it is evaluated as ◎, when it is less than 2.0 mm, it is evaluated as 〇, and when it is more than 2.0, it is evaluated as χ. (2) The amount of bending of the base material is cut in the base materials produced in each example and each comparative example. The test piece was cut into a size of 15 mm x 20 mm x 4 mm, and samples were prepared as they are. Each sample was repeatedly subjected to 10 to 30 rc firing for 2 hours. For 10-person fired samples, The reference shown in FIG. 1 is the same, and the amount of bending is obtained. (3) Difference in residual swelling amount. For each solid _ and each ratio __, the base material portion was removed by research, and the coating layer on the mounting surface and the coating layer on the opposite surface were taken out to prepare a sample. For each of the samples that were passed, a sample was taken from the coating layer, and a solution containing titanium, which is the main component of the ceramic capacitor, was applied, and f was not taken from the surface opposite to the mounting surface. Any application was repeated 10 times each. c. After firing for 2 hours, the lengths in the respective longitudinal directions are measured, and the difference between the two is determined. (4) Variation of the residual expansion amount in the coating layer of the mounting surface. For the mounting devices obtained in each of the examples and the comparative examples, the base material portion was removed by research to obtain the quilt on the mounting surface. In order to touch each of the coating layers, an outline of the coating solution containing the main component of the compound Y and the content of the coating solution was prepared, and the test was repeated separately. The temperature was measured at C, and the length was measured to determine the variation of the relative swelling amount of the sample coated with the barium titanate solution. 〃 八 13 200403200 (5) The strength of the coating layer is evaluated when the coating layer is not pulverized. 价 w is 0, and the powder coating layer is degraded to be X. (Example 1) ^ First, the oxide chain with a particle size of 1.5 ~ 0.5 was deleted (pass): ^ r ° · 5fflm Bailey% 15% by mass of clay below Ho township and The particle size is 25 masses, and the mixed raw materials for the base material are prepared. Then add === mass parts as the connection of methyl fiber _. 5 f parts by weight, ί == Γ150— to make the surface 'dry the shaft shape at 8 (rc for 8 hours Ϊ Ϊ:), make the matrix In addition, the obtained base material was bent, and then, on the surface of the base material, 8% by mass of green stabilized zirconia particles (stabilization rate: 100%) were applied, and water plasma spraying was performed. Ore to form a coating layer with a thick spawning egg. In addition, the rubidium oxide particles 99 are stabilized with 8% by mass of γ2O3 having a particle size of 100 ^ 2200 扉 on the surface opposite to the base material mounting surface. A mixed raw material (stabilization rate: 99%) in which mass% and unstabilized oxide cone particles are mixed, is subjected to water plasma plating to form a coating layer of the same thickness, and a carrier for firing ceramic transformer electronic parts is manufactured. Detailed results A summary is shown in Table VII. (Examples 2 to 4 and Comparative Examples 1 to 3) Except the use of 8% by mass of Υ203-stabilized zirconia particles and unstabilized oxidized particles having a particle size of 100 to 200 Am, respectively. The mixed raw materials mixed at the ratio shown in Table 1 form a coating layer on the mounting surface of the base material and its opposite surface. In addition, it was carried out in the same manner as in Example i to manufacture a ceramic sintered electronic component mounter. The detailed results are summarized in Table 1. Base material | Method Thanks Mixing Ratio * 1 Ste (Key (%) Μτ Method Riding Mixing Ratio * 1 Stable and Secluded (0Z \ J ^ lll 1550 Xiao 100: 0 100 Surface 100: 0 \ / 0) 100 1550 Xiao 1⑴ ： 〇100 — Surface 99: 1 x \ J \ J 99 14 200403200 mmn 1550 _degree 100: 0 100 surface 90:10 90 real track! 13 1550 surface 1⑴: 0 0 surface 65:35 65 actual aspect 4 1550 surface 100: 0 100 surface 40:60 40 t2 2 1550 Xiao 100 = 0 100 noodles 39:61 39 t 3 350 Xiao 100: 0 100 雠 20: 80 20 * 1: particle size 100 to 8% by mass / m2 ¥ 2. 3 Mass ratio (stability) of stabilized zirconia particles (stabilization rate: 100%) and unstabilized hafnium oxide particles In any of the examples and comparative examples, the stabilization rate of the coating layer on the mounting surface was 100%. The mounting layer of Examples 2 and 3 having a stabilization rate of the coating layer on the surface opposite to the mounting surface of 65 to 90% (a difference between the stabilization rates of 10 to 35%) had a bending amount of 1 or less. , Generally does not bend. In addition, The coatings of Examples 1 and 4 in which the stabilization rate of the coating layer on the surface opposite to the mounting surface was 99% (the difference in the stabilization rate was 1%) and 40% (the difference in the stabilization rate was 60%). Device, a small amount of bending of less than 2.0 legs occurred, but there is generally no practical problem. Contrary to this, the placement rate of the coating layer on the surface opposite to the placement surface is 100% (the difference in the stabilization ratio is 0%), and the placement of the comparative example 1 is the same as the coating layer on the placement surface. Device with a bending amount of 2 · or more (large torsion occurs. In addition, the stabilization rate of the coating layer on the surface opposite to the mounting surface is 39% smaller (the difference in the stabilization ratio is 61%)) The mounting device of Comparative Example 2 had a large bending amount of 2.0 mm or more, and a large bending occurred. In addition, the stabilization rate of the coating layer on the side opposite to the mounting surface was 20% (the difference in the stabilization rate was 80%). %) Of the mounting device of Comparative Example 3, the bending amount is less than 1.0 mm, but the coating layer provided on the surface opposite to the mounting surface of the base material is lost due to powdering. The evaluation results are summarized in Table 2. Table 2 Base material warp halo (mm) Xiao Shen Shen fiber care long surface es (mm) 10 times medium mm mm mm (mm) test mm (%) mount clear curvature (mm) bending direction WSM 0.3 0.84 0.80 0 X upper ◎ nwu 0.3 0.84 0.43 1 〇 upper ◎ mwn 0.3 0.84 0.07 10 ◎ upper ◎ real J 丨 0.33 0.84 0.14 30 ◎ lower ◎ 15 200403200 _9 ^ 4_ 0.3 0.84 0. 55 60 JWU2 03 —0.84 0.60 61 t coffee 3 ---------: ---— 0.3 0.84 0.13 80 ◎ (Examples 5 to 8 and Comparative Examples 4 and 5)

< In addition to using a mixed raw material in which 8% by mass of ία-stabilized oxidized unstabilized osmium oxide particles having a particle size of 100 to 200 # m were mixed at a ratio shown in Table 3, the base material, The same procedure as in Example 1 was carried out except that a coating layer was formed on the placement surface and the opposite surface thereof, and a holder for firing a Tonai carrier part was produced. The detailed results are summarized in Table 3.乂 Meter-free meter 3 rc) Lai mmm The tank method is willing to mix ratio * 1 Examination (%) The tank method is away from the mix ratio * 1 Pants (0 / \ 1550 surface 80:20 80 Xiao 70: 30 7Π * 5 ^ ( 16 1550 surface 50:50 50 fiber 40: 60 / U 1550 surface 40:60 40 scar 30: 70 4U JW! I4 1550 howl 30: 70 30 surface 20: 80 20 * MI8 1550 surface 31: 69 31 surface 30: 70 1550 surface 30:70 30 surface 29: 71 J \ J 29

~~ ^ __ L H Following | w · / ulw π * 1: Mass ratio of 8 mass% m stabilized hammer oxide particles (stabilization rate 100%) and unstabilized zirconia particles with a particle size of 100 to 200 ~ (Evaluation)

(Examples 5 to 7 and Comparative Example 4) In the mounters of Examples 5 to 7 and Comparative Example 4, the difference between the stabilization rates of the erbium oxide constituting the coating layer between the coating layers on each side was 10%. The placement device of Examples 5 to 7 in which the stabilization rate of the coating layer on the surface opposite to the placement surface was 40 to 70% resulted in a small bend with a bending amount of less than 2.0 mm, but it was not practical. problem. In contrast, in the mounting device of Comparative Example 4 that stabilized the coating layer on the surface opposite to the mounting surface by 20%, the amount of deflection was less than 2.0, but the mounting surface was opposite to the mounting surface of the base material. The coating layer provided on the surface is lost due to powdering. The evaluation results are summarized in Table 4. (Example 8 and Comparative Example 5) In the mounts of Example 8 and Comparative Example 5, the difference in the stabilization ratio between the coating layers on each side with respect to the hafnium oxide 'constituting the coating layer 16 200403200 was 1%. The mounting device of Example 8 in which the stabilization rate of the coating layer on the surface opposite to the mounting surface was 30% resulted in a small bending with a bending amount of less than 2.0, but there was no practical problem. In contrast, in the placement device of Comparative Example 5 which stabilized the coating layer on the surface opposite to the placement surface at 29%, the bending amount was less than 2.0, but the coating layer on the opposite side to the placement surface was caused by Brittle failure and flaking. The evaluation results are summarized in Table 4. In addition, these results show that the stabilization rate of the ZrO2 layer constituting the surface layer of the mounter need not necessarily be set to 100% on one side, and the bending caused by the difference in the residual expansion amount can be controlled. , When the stabilization rate is insufficient, problems will also occur in use. Table 4

Base material warpage amount (mm) Fiber (mm) 10 firing times SS ^ (mm) Stabilization mm (%) Relay clear curvature (mm) Bending direction 0.3 0.64 0.35 10 〇 上 ◎ 03 0.18 0.50 10 〇 above ◎ * ^! 17 03 0.12 038 10 〇 above 〇t \ M ^ U 0.3 0.19 0.50 10 〇 above X wmn 0.3 0.18 0.16 1 〇 above 0 t circle 5 0.3 0.19 0.22 1 〇h X (Example 9 ~ 12 and Comparative Examples 6 and 7) Except that the base material was prepared by firing at 1400 C for 2 hours, and Υ203 which was 8 粒径% by particle size of 100200 = was used to stabilize the oxidation and non-oxidation. The stabilized oxidized particles are shown in Table 5.

The mixed raw materials and the coating layer formed on the mounting surface and the opposite surface of the base material were carried out in the same manner as in Example i. The manufacturing and electronic components are summarized in Table 5.

200403200 — Real side_9 1400 Xiao 99: 1 99 啰 100: 0 100 one * 5_10 1400 Surface 90: 10 90 啰 100: 0 100 1400 _degree 65:35 65 啰 100: 0 100 — Real track! 112 1400 51: 49 51 啰 100: 0 100-1400 surface 50:50 50 啰 100: 0 100 * 1: 8 mass% Y2O3 stabilized zirconia particles with a particle size of 100 to 200 / zm (stabilization rate 100% ) And mass ratio (evaluation) of unstabilized zirconia particles These examples and comparative examples are examples involving changing the stabilization rate of the mounting surface coating layer when the amount of bending of the base material is large. As shown in Table 6, the mounting device of Example 11 in which the stabilization rate of the coating layer on the mounting surface was 65% (the difference in the stabilization rate was 35%), the bending amount was approximately 1.0 mm or less, and was substantially No bending occurs. In addition, the mounting devices of Examples 9 and 10 in which the stabilization rate of the coating layer on the mounting surface was 90 to 99% (the difference in the stabilization rate was 〖%), the bending amount of the mounting devices of Examples 9 and 10 was less than 2.0. The small bending, the mounting device of Example 12 which stabilized the coating layer on the mounting surface by 40%, produced a small bending with an upward bending amount of less than 2.0 mm, but there was no practical problem. On the other hand, the stabilization rate of the coating layer on the mounting surface was 100% (the difference in the stabilization rate was 0%). The mounting of Comparative Example 6 was the same as the coating layer on the opposite surface of the mounting surface. The device bends downward by an amount of 2.0 mm or more. In addition, the placement device of Comparative Example 7 that stabilized the coating layer on the placement surface (the difference between the stabilization ratios was 61%) also had a bend with an upward bending amount of 2.0 or more. The evaluation results are summarized in Table 6. · Body curl (mm)

2.0 2.0 2.0 2.0 2.0 2.0 Face! 19 _! J10 _! 111 scarm 18 200403200 (Example 13) 5 Except that the molded body obtained by force molding is dried at 8 (rc for 2 hours and dried and fired), the same as in Example !: The deflection amount is 2.0. In addition, the served base vn and the base material are placed on the surface of the base material, and are oxidized by 80 mass% of 8 mass denier r with a particle size of 22GG_ Hua Mi Si Zi 2 ^: The original = Ding 彳 _%), Si Liu Xuan Qing, spider w ^ r degree 10 / zm tflyl 60 mixed original oblique, i-days, Japanese people 広 b Bailey / Y2〇 3 Stabilizing and rolling 鍅 40% by mass of mixed ethyl alcohol ⑽) The polymer of the trace transport agent steals the slurry! Money: two. Thereafter, it was fired at the time of spraying at an air pressure of 5 Kg / cm2, and the opposite side of oxygen ^ = 3 ^ was placed on one side. Place the loader under C for 2 minutes. Details; the summary of the coating layer, the production of Tao Zhan parts firing (Example 14) and implementation # 丨 Ρ ion He mine in addition to forming a coating layer on the substrate surface, shown ^ =. 13 places to manufacture Tao Weizi parts firing device. Detailed information

19 200403200 In these embodiments, the difference in porosity is provided between the two coating layers by forming a coating layer on the opposite side of the mounting surface from the mounting surface. Difficult-and-comfortable, as described in 矣 S :, use the example of the difference in the porosity of the daytime fork due to 66 sidings, soil, #a, L _ / into ... Other; == small bends, but practically no problem. In particular, the embodiment is exhausted: = bending of the device. In addition, the example of Example 13 also shows that, in addition to & on the other hand, the mounting device of Comparative Example 6 was coated with a coating layer having a difference of 0% on the mounting surface and its opposite surface). = Bends downward. The evaluation results are summarized in Table 8. Bali on 2. Grnnm

Viewing difference (%), mm (mm * 5SM13 20 〇 * 6SM14 0 〇 t \ mu 0 X (Example 15)

Bai Xian, the same as in Example 1 except that the miscellaneous molding 剌 観: 成 was fired for 2 hours, making === the amount of bending of the base material is 2.0 coffee. For the person who arrives, the surface of the base material is placed on the surface of the substrate with a particle diameter of 100 ~ fine denier = CaO stabilized oxide particles 80% by mass and unstabilized oxygen _ = rate called water, etc. On the opposite side of Ozaki mass, record the diameter of 8 L > lice hammer particles (stabilization rate of 100%), apply water to the coating layer, and burn the electronic parts. (Example 16) In addition to 5 mass% CaO stabilized with arsenic oxide particles with a particle size of ~ 2GG // m, 100 mass 20 200403200 volume% (stabilization rate 100%) was placed on the base material. It is obscured, and it is carried out in the same way as 15 to manufacture Tao Weizi part burner. Detailed results_secret =. ’

The base refractory load surface is called _ ------ _ The mm degree (.0 stable tilt mm ratio * 2 stable remote (%) stable tilt iW mixed hh * l stable i down to 15 1400 CaO 80: 20 80 γ ^ α 1-1 X 100: 〇 \%) 1ΠΠ Sina ί16 1400 CaO 100: 0 100 Υ2〇3 100 ·· 〇1UU inn ί: 6 1400 Y £ k 100: 0 100 loom iUU 1 / Tv Wood 1: 皙. ,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, 10 Mass ratio of 5 mass% Ca0 stabilized oxidized particles (stability rate 100%) and unstabilized oxidized particles with a particle size of 100 to 200 mm ^ (Evaluation) These examples relate to the use of stabilizers containing different stabilizers. An example of forming a coating layer on a mounting surface and a coating layer on the opposite surface thereof. As shown in Table P, the mounts of Examples 15 and 16 in which each coating layer contains different stabilizers have relatively small bends in the upward or downward direction of less than 2 · Gmm, but are generally practical. / There are problems. On the side is the mounting H of Example 16. Although the stabilization rate is the same between the coating layers, the bending of the mounting device can be suppressed. In addition, the example of Embodiment 15 also shows that in addition to setting the stabilization rate of each coating layer so that each bedding contains instability, more precise control can be achieved. On the other hand, in the mounting device of Comparative Example 6 in which the coating layer was formed with 8% by mass of m stabilized oxide cone particles (stabilization rate of 100%) on the mounting surface and the opposite surface, the amount of bending was 2 • Bend in the downward direction above 0. The evaluation results are summarized in Table 10. Table 10 Stability (%) Loading curvature (mm) Bending application 5 Delete 15 20 〇 On 21 200403200

〇 Under X, not only the base mounting position, but also the case of thinning ’can properly prevent the bending of the mounting base caused by repeated use, so that it can be used for a long time. [Brief Description of the Drawings] Fig. 1 is a diagram schematically showing a measurement standard of a bending amount of a base material constituting a mounter. ° Fig. 2 is a graph showing the relationship between the amount of residual expansion in the oxide coating and the number of times of entry and exit t. [Description of component symbols] Loader 1 Loader 2

twenty two

Claims (1)

200403200 Scope of patent application: 1 · -The kind of shouting electronic parts burns on the carrier, the pottery 兖 —, 7 丨 丨 Zhai Zhai, sculpting and making porcelain mines; two pottery wares «shouting on the material, with a secret The depositing device is left on the mounting surface of the base material and the opposite surface thereof: The coating layer is composed of Zr〇2f with a stabilization rate represented by the following formula (1) plus ⑽ ^ ′ and There is a difference (absolute value) of 1 to 60% in the women's stabilization rate on this mounting surface and its opposite surface. Device, the stabilizing rate (%) of the ZrO2 layer with a special coating layer = (cubic crystal / (cubic crystal + monoclinic crystal) χ100) [In the formula (1), the stabilization rate is in use The value in the previous state.] Α 3 · According to the scope of the patent application scope of the first or second item of the ceramic transformer electronic component firing device, which is particularly «Yu, Shanglai and its Chengguan were attacked and turned Composition of ZrO2 layer of Lin Zhi classifying agent. 4. According to the holder for firing ceramic electronic parts according to item 1 or item 2 of the scope of patent application, the above-mentioned placing surface and its Each coating layer on the opposite surface has a different porosity. 5. The holder for firing ceramic electronic components according to item 4 of the scope of the patent application, wherein the coating layer on the mounting surface is sprayed or sprayed. The coating layer is formed by any method of coating, and the coating layer on the opposite side of the mounting surface is formed by any method of spraying or spraying different from the method of forming the coating layer of the mounting surface.