TW200305046A - Liquid crystal display apparatus and its manufacturing method (1) - Google Patents

Liquid crystal display apparatus and its manufacturing method (1) Download PDF

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TW200305046A
TW200305046A TW092106278A TW92106278A TW200305046A TW 200305046 A TW200305046 A TW 200305046A TW 092106278 A TW092106278 A TW 092106278A TW 92106278 A TW92106278 A TW 92106278A TW 200305046 A TW200305046 A TW 200305046A
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Taiwan
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electrode
liquid crystal
crystal display
source
wiring
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TW092106278A
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Chinese (zh)
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TWI229229B (en
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Shingo Nagano
Yuichi Masutani
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Advanced Display Kk
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/1368Active matrix addressed cells in which the switching element is a three-electrode device
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134363Electrodes characterised by their geometrical arrangement for applying an electric field parallel to the substrate, i.e. in-plane switching [IPS]

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thin Film Transistor (AREA)

Abstract

The subject of the present invention is to provide a liquid crystal display (LCD) apparatus, which is capable of reducing short-circuit generated between source wiring and the common electrode, and its manufacturing method. In the invented LCD apparatus, a voltage is added between the pixel electrode 6 and the common electrode 5, and the so-called lateral electric field manner is obtained by adding the electric field roughly parallel to the substrate plane to the liquid crystal layer. In the LCD apparatus, the source electrode 3 is overlapped with one part of the common electrode 5 through the separation of the insulation film 4. The insulation film 4 is composed of plural insulation films 4a and 4b.

Description

200305046 五、發明說明(1) 【發明所屬之技術頜域】 本發明係關於橫向電場方式的主動矩陣型的液晶顯示 裝置及其製造方法。 ^ 【先前技術】 近年’例如特開平8-2547 1 2號公報所揭示,在主動矩 陣型的液晶顯示裝置中,將加在液晶上之電場方向設為與 基板平行的方向之橫向電場方式,是主要用來得到超廣視 野角的手法。當採用此方式時,很明顯地在改變視角方向 時幾乎不會有對比的變化,及階調層級的反轉(參考文獻: M.Oh-e,其他,Asia Display ,95,ρρ·577-58 0 )。圖 1 3 (a)是說明先前一般橫向電場方式的液晶顯示裝置的晝 素部之平面圖。圖13(b)是將其一部份加以擴大後之剖面 圖。圖中,100為TFT陣列基板,200為彩色滹光片(cf)吴 板。!為絕緣性基板上所形成之複數條掃; = = ; =線,2為閘極絕緣膜,3為源極配線,4為源極配線3上所 設之絕緣膜,5a與5];)為與閘極配線設 極丑特別是在此例中之共通電極5, “、罐心^ 及=通電極5b來配置。因此,當在源極配線上加上電壓的 ,以該電壓來產生電場E,將m陣列基紹⑽與⑶ '反00間所设置的液晶的排列狀態加以改變。目此,結 3 f圖13所示的構成t,圖上L1所示的寬度需要變寬, 因為光的穿透受到限制,而有開口率變低的問題點。 為了解決此一問題點,圖1(a)及圖1(b)中所示構造被 200305046200305046 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to an active matrix liquid crystal display device of a transverse electric field method and a manufacturing method thereof. ^ [Prior art] In recent years, for example, Japanese Unexamined Patent Publication No. 8-2547 1 discloses that in an active-matrix liquid crystal display device, the direction of the electric field applied to the liquid crystal is set to a transverse electric field direction parallel to the substrate. It is a technique mainly used to obtain a super wide viewing angle. When this method is adopted, it is clear that there is almost no change in contrast and the inversion of the tone level when changing the viewing direction (Reference: M.Oh-e, others, Asia Display, 95, ρρ · 577- 58 0). FIG. 13 (a) is a plan view illustrating a daylight portion of a conventional liquid crystal display device using a conventional lateral electric field method. Fig. 13 (b) is a sectional view in which a part of it is enlarged. In the figure, 100 is a TFT array substrate, and 200 is a color phosphor film (cf) Wu plate. ! Is a plurality of scans formed on an insulating substrate; = =; = lines, 2 is a gate insulating film, 3 is a source wiring, 4 is an insulating film provided on the source wiring 3, 5a and 5]; ) Is configured to be extremely ugly with the gate wiring, especially the common electrode 5, ", core ^ and = pass electrode 5b in this example. Therefore, when a voltage is applied to the source wiring, the voltage is used to The electric field E is generated, and the arrangement state of the liquid crystal set between the m-array base and the CD ′ 00 is changed. For this reason, the structure t shown in FIG. 13 and the width shown by L1 in the figure need to be widened. Because the penetration of light is limited, there is a problem that the aperture ratio becomes low. In order to solve this problem, the structure shown in Fig. 1 (a) and Fig. 1 (b) is 200305046.

提案出來。在此構造中,共通電極5覆蓋源極配線3,使兩 ^相重疊來配置。依據此種構成,源極配線3所產生的電 場因為被共通電極5遮住而無法達到液晶,可以降低液晶 白^狀態的變化。因&,可以縮小限制透光的寬度L2, 提南開口率。 【發明内容】 發明所欲解決的課題:Proposal comes out. In this structure, the common electrode 5 covers the source wiring 3 and is arranged so that two electrodes overlap each other. With this configuration, the electric field generated by the source wiring 3 cannot be reached by the liquid crystal because it is blocked by the common electrode 5, and the change in the white state of the liquid crystal can be reduced. Because of &, the width L2 that restricts light transmission can be reduced, and the aperture ratio can be raised. [Summary] The problems to be solved by the invention:

但是,在圖1中所示的構造中,源極配線3與共通電相 5 Γ曰:T有發生短路的問題。如圖4“)戶“,因*在源極配 線3與共通電極5之間會發生針孔缺陷41與42,而造成短 路。 本發明係為了解決此種問題點而被發明,目的是提令 種可以降低源極配線盘丑iS雷P目A t . 脸里▲ 深/…、通電極間發生短路之液晶顯开 襞置及其製造方法。 用以解決課題的手段: 本發明中之液晶顯示裝置 面配置之一對基板;夾在上述 板的一邊的基板上所形成相互 線;與上述閘極配線及源極配 述開關元件相連接,與源極配 條電極所形成之梳子狀的畫素 連接,與上述晝素電極的複數 包括:間隔一定距離來面對 基板間之液晶層;在上述基 父叉之閘極配線及源極配 線相連接之開關元件;與上 線大約成平行來配置之複數 電極;及與上述開關元件相 條電極大約成平行且交互地However, in the structure shown in FIG. 1, the source wiring 3 and the common current phase 5 Γ: T have a problem that a short circuit occurs. As shown in Fig. 4 ")", pinhole defects 41 and 42 will occur between the source wiring 3 and the common electrode 5, resulting in a short circuit. The present invention was invented in order to solve such a problem, and the purpose is to provide a liquid crystal display device that can reduce the source wiring board ugly iS thunder and patter A t. In the face ▲ deep / ..., a short circuit occurs between the through electrodes And its manufacturing method. Means for solving the problem: one pair of substrates of the liquid crystal display device surface arrangement in the present invention; mutual wires formed on the substrate sandwiched on one side of the board; connected with the gate wiring and the source switching device, The comb-shaped pixels connected to the source electrode are connected to the comb-shaped pixels. The plurality of pixels include: a certain distance to face the liquid crystal layer between the substrates; the gate wiring and the source wiring at the base fork. Connected switching elements; a plurality of electrodes arranged approximately parallel to the upper line; and phase electrodes of the switching elements approximately parallel and alternately

200305046 - _ 五、發明說明(3) 各^之複數條電極所形成之梳子狀的共通電極。在上述晝 成半t t t i共通電極間加上電壓,將與上述基板面大約 f千仃的電%加在上述液晶層上之液晶顯示裝置中,將上 而HΪ與亡述共通電極的〆部分隔著絕緣膜來重疊, 二、心、味膜疋以複數層絕緣膜來構成。藉著如此的構 率。’。以大幅地降低源極配線與共通電極間發生短路的機 ί iU好是以複數次的長膜步驟來形成。 去除異物,Γ 、、膜步驟間可以加上洗淨步驟。藉此可以 更有=洗i洗淨步驟中包括使用刷子之洗淨步驟,可以 在適當的實施型熊中 μ、+、查| + 與上述共通電極的梳子:電二的;電極, 向的液晶驅動Π =結構,可以得到2個方 方向所發生之視角特二ί =電…的液晶面板在特定 區域上这與ίίΞ極:的中央部附近以外的 近,不與上述源極配線相重:述晝素的中央部附 在構造上可以有效地防止在成。猎著如此的結構, 源極配線與共通電極的短路,X生缺陷的彎曲部處發生 此外,上述晝素電極的 與開關元件直接連接。_菩 狀電極中最好至少有2條 猎者如此的構成,即使是在畫素電 2185-5550-PF(Nl);Ahddub.ptd $ 6頁 200305046 五、發明說明(4) 極的-部份上有缺陷,只要不是2條都有 §忍為是點缺陷。所以可以提高良率。 便不會被 在較佳的實施型態中’畫素電極盘 度的絕對值至少有2個相異的 素電二方向所成的角 ^ ^ ^ ^ ^, ^ ^40 ^ 的晝素電極相對於摩擦方向所成的 =相連接 此種構成’可以將晝素電極的先端部的電。依據 =所該轉動的方向’可以使因加重而以相反轉 轉動的液晶,快速地回到正轉動方向來 減少因顯示面的荷重而產生之顯示故障在地 可視別之所謂加重痕之故障,以提高顯示ir時間 膜的i i 1可以將上述源極配線與上述開關元件的半㈣ = = 的上下方向上之同ι 線與上述共通電極相重疊的區 霉成精由如此地來構成,可以提高層間射 此夕卜,與共通電極相連接的共通電容配線,可:不盘 極配線相重疊地’在晝素間獨立地來設置 成,可以降低源極配線的上升段差的數目,s者此構 發生斷線故障的機率,提高良率。 牛低源極配線 本毛月中之其他的液晶顯示裝置,包括:一 離來面對面配置之一斟I · 1 ™ 疋距 在上述基板中=邊ί:上戶=述f板間之液晶層; 線及源極配線;盘形成’相互交又之問極配 元件;盘上述門關—二/線及源極配線相連接之開關 〃上这開關7C件相連接,與源極配線大約成平行來 2185-5550-PF(Nl);Ahddub.ptd 200305046 五、發明說明(5) _ 配置之複數條電極所形成之梳子狀的— 開關元件相連接,與上述晝素電極的複數:U與上述 極:在上述晝素電極及上述共通電極間共通電 述基板面大約成平行的電場加在上述液曰曰声5,將與上 ^,將上述源極電極與上述共通電極的顯示裝 膜來加以重疊,同時上述共通電極,在絕緣 卜的區域上,與上述源極配線相重il: 了 ;素的令央附近,不與上述源極配線相重属二盖j述 者如此的構成,可以有效地防止 成。藉 曲部處發生源極配線與共通電極的短路。易產生缺陷的彎 本發明中之其他的液晶顯示裝 離來面對面配置之一對基板;夹在上述間隔一定距 在上述基板中的一邊的基 土 β之液晶層; 線及源極配線;與上述閘極配極:配 ===元件相連接,與源極: 極。在上述畫素狀的共通電 上述基板面大約成平行之電場加:i;:力:ΐ:;;將與 不裝置中,上述源極配線,及上二日t之液日日顯 置,不會在上述源:;::::;=或線上並排的位 /、上述共通電極相重疊的區域 第8頁 2185-5550-PF(Nl);Ahddub.ptd 200305046 五、發明說明(6) 上。藉著如此的構成,可以提高層間耐壓。 本發明中之液晶顯示裝置的製造方法,而該液晶顯示 裝置包括:間隔一定距離來面對面配置之一對基板;夹在 、述基板間之/夜晶層,在上述基板中的一邊的基板上所形 成,相互交叉之閘極配線及源極配線;與上述閘極配線及 源極配線相連接之開關元件;與上述開關元件相連接,盘 源極配線大約成平行來配置之複數條電極所形成之梳子狀 的,素電極;及與上述開關元件相連接,與上述晝素 ^複數條電極大约成平行且交互地配置之複數條電極所形 成之梳子狀的共通電極,且在上述畫素電極與上述共雷 極之間加上電壓,將與上述基板面大約成平行之電場加在 上述液晶層上,該液晶顯示裝置的製造方法包括:形 ^源極電極之步驟;在上述源極電極上分成數次來形 數層絕緣膜之步驟;與上述源極電極隔著上述絕緣膜 疊地在上述絕緣膜上形成上述共通電極之步驟。藉著二= 的構成,可以大幅度地降低源極配線與共通電極 路的機率。 知玍妞 在此,形成上述絕緣膜的步驟,最好在形成複數声 緣膜的的步驟間加上洗淨步驟。藉此可以去除異物。9、 特別是,在上述洗淨步驟中包括使用刷子之洗淨+ 驟,可以更有效地去除異物。 ^ 發明效果: 依據本發明,可以提供一種能夠降低源極配線與共通200305046-_ V. Description of the invention (3) A comb-shaped common electrode formed by a plurality of electrodes of each ^. A voltage is applied between the common electrodes of the daytime half ttti, and an electric% of about f thousand 与 from the substrate surface is applied to the liquid crystal display device on the liquid crystal layer, and the upper part HΪ and the common part of the common electrode Overlapping with insulating film, two, heart, flavor film is composed of multiple layers of insulating film. By such a rate. '. In order to greatly reduce the occurrence of short circuit between the source wiring and the common electrode, iU is formed by a plurality of long film steps. To remove foreign matter, a washing step can be added between Γ, and membrane steps. In this way, the washing step including washing with a brush can be included in the washing step. In the appropriate embodiment, μ, +, and | | combs with the above-mentioned common electrodes: electric two; electrodes, and The structure of the LCD driver can obtain the viewing angles that occur in two directions. The LCD panel in a specific area is close to the central part of the LCD in a specific area, and does not overlap with the source wiring. : The structure of the central part of the said element can effectively prevent the formation. Hunting for such a structure, a short circuit between the source wiring and the common electrode occurs at the bent portion of the X-defect. In addition, the above-mentioned day element electrode is directly connected to the switching element. _ It is best to have at least 2 hunters in the form of a pudding electrode, even if it is 2185-5550-PF (Nl); Ahddub.ptd $ 6,200305046 5. Description of the invention (4)- There are defects in the copy, as long as not both of them have § forbearance. So you can increase yield. In the preferred embodiment, the pixel electrode's absolute value of the pixel electrode has at least two angles formed by two different pixel and electric directions. ^ ^ ^ ^ ^, ^ ^ 40 ^ day element electrode The structure formed with respect to the rubbing direction = is connected in this way, and the electricity at the tip of the day element can be charged. The basis = the direction of the rotation 'can make the liquid crystal rotated in the opposite rotation due to the weighting to quickly return to the positive rotation direction to reduce the display failure caused by the load on the display surface. In order to improve the display time ii of the film, the area where the source wiring and the switching element have the same line in the up-and-down direction, and the area where the common electrode overlaps with the common electrode can be formed in this way. Improving the inter-layer emission, and the common capacitor wiring connected to the common electrode can be set independently in the daytime without overlapping the plate electrode wiring, which can reduce the number of rising steps of the source wiring. This structure increases the probability of disconnection failure. The other low-voltage source wiring in the present month includes other liquid crystal display devices, including: one of the face-to-face configuration 1 · 1 ™ pitch in the above substrate = side ί: Uto = liquid crystal layer between the f Wire and source wiring; the plate forms' interconnecting and intersecting pole matching components; the above-mentioned door is closed-two / wire and the source wiring are connected to the switch; the switch 7C is connected to the source wiring approximately Coming in parallel 2185-5550-PF (Nl); Ahddub.ptd 200305046 V. Description of the invention (5) _ The comb-shaped switching element formed by a plurality of electrodes arranged is connected to the plural number of the above-mentioned day element electrodes: U and The above electrode: the electric field is applied between the day electrode and the common electrode, and the electric field on the substrate is approximately parallel, and the electric field is applied to the liquid 5 and the upper electrode, and the source electrode and the common electrode are filmed. It is overlapped, and the common electrode overlaps the source wiring in the area of the insulation plate; the vicinity of the prime ring does not overlap with the source wiring. Can effectively prevent success. A short circuit between the source wiring and the common electrode occurs at the bent portion. Defective bending The other liquid crystal displays in the present invention are separated from each other by arranging a pair of substrates; a liquid crystal layer sandwiched by the above-mentioned substrate β with a certain distance from one side of the substrate; lines and source wiring; and The above-mentioned gate electrode poles are connected with: === components, and are connected with the source: poles. In the above pixel-like common current, the substrate surface is approximately parallel to the electric field plus: i ;: force: ΐ: ;; will be installed in the device, the above source wiring, and the last two days t liquid day, Will not be in the above source:; ::::; = or side-by-side bit // area where the above common electrode overlaps Page 8 2185-5550-PF (Nl); Ahddub.ptd 200305046 V. Description of the invention (6) on. With such a structure, the interlayer pressure resistance can be improved. The method for manufacturing a liquid crystal display device according to the present invention includes: a pair of substrates arranged face to face at a certain distance; and a / night crystal layer sandwiched between the substrates, on a substrate on one side of the substrates The formed gate wiring and source wiring crossing each other; a switching element connected to the above gate wiring and source wiring; a plurality of electrodes arranged in parallel to the above-mentioned switching element and connected to the disk source wiring A comb-shaped, plain electrode formed; and a comb-shaped common electrode formed by a plurality of electrodes arranged in parallel and alternately with the above-mentioned day element ^ and a plurality of electrodes connected in parallel with the switching element, and A voltage is applied between the electrode and the common lightning electrode, and an electric field approximately parallel to the substrate surface is applied to the liquid crystal layer. The manufacturing method of the liquid crystal display device includes the steps of: forming a source electrode; Forming an insulating film on the electrode several times to form several layers; forming the common current on the insulating film by overlapping the source electrode with the insulating film interposed therebetween Extreme steps. With the configuration of two =, the probability of source wiring and common electrode circuit can be greatly reduced. Here, the step of forming the above-mentioned insulating film is preferably a step of adding a washing step to the step of forming the plurality of acoustic film. This can remove foreign matter. 9. In particular, the above-mentioned washing step includes a washing step using a brush, which can remove foreign matter more effectively. ^ Effect of the invention: According to the present invention, it is possible to provide a method capable of reducing source wiring and common

200305046 五、發明說明(7) 電極間發生短路之液晶顯示裝置及其製造方法。 【實施方式】 實施型態1 本發明中之液晶顯示裝置 一對CF基板與TFT基板。在^17;的距離來面對面配置之 線。此外,形成與閘極配線及配線及源極配 等開關元件。在開關元件:及::;::連接之m元件 之複數條電極所形成之梳子狀的查^ 極配線平行配置 的稷數條電極平行且交互地來配 2,、旦素電才5 梳子狀的共通電極。藉著在此查谡數條電極所形成的 電壓’可以將與基板面大約成;行的電極間加上 圖2是將本發明中之液晶顯示電:加在液晶層上。 之圖。 置中之畫素部擴大後 在圖中,與圖1具有相同符號之構 的構成相同或同等的部分,在此省略发十、,係與圖1所說明 為與以下所述的晝素電極β的複數條電極兄月在圖2中,5 配置之複數條電極所形成之梳子狀的共1平行且交互地 向電極。6為與薄膜電晶體相連接,血、^電極’亦稱為對 配置之複數條電極所構成之梳子狀的畫’素查配線3平行地來 等金屬或IT0(Indium Tin Oxide)等透明、性W以絡(◦r ) 成。7為以鉻(Cr)等金屬來形成之共通 導電膜來形 电各配線,經由貫 2185-5550-PF(Nl);Ahddub.ptd 第10頁 200305046200305046 V. Description of the invention (7) Liquid crystal display device with short circuit between electrodes and manufacturing method thereof. [Embodiment Mode] Embodiment 1 Liquid crystal display device in the present invention A pair of CF substrate and TFT substrate. Lines arranged face to face at a distance of ^ 17 ;. In addition, switching elements such as gate wiring, wiring, and source are formed. In the switching element: and ::; :: comb-shaped check formed by the plurality of electrodes of the connected m element, the electrode wiring is arranged in parallel, the plurality of electrodes are arranged in parallel and alternately to 2, and the denier is only 5 combs Shaped common electrode. By checking the voltage formed by several electrodes here, it can be approximately equal to the surface of the substrate; adding between the rows of electrodes. Figure 2 shows the liquid crystal display of the present invention: added to the liquid crystal layer. Figure. The enlarged pixel unit in the center is the same as or equivalent to the structure of the structure with the same reference numerals in FIG. 1 as those in FIG. 1, and is omitted here. It is the same as the day electrode described below with reference to FIG. 1. A plurality of electrodes of β In FIG. 2, a comb-shaped total of 1 formed by the plurality of electrodes of 5 is arranged in parallel and alternately toward the electrodes. 6 is connected to the thin film transistor. The blood and electrodes are also called comb-shaped pictures composed of a plurality of electrodes. The prime check wiring 3 is parallel to metal, IT0 (Indium Tin Oxide), etc. The property W is formed by the network (◦r). 7 is a common conductive film formed of a metal such as chromium (Cr) to form each wiring, and passes through 2185-5550-PF (Nl); Ahddub.ptd Page 10 200305046

孔(Through hole)與共通電極5相連接。如圖2所示,在電 場的產生方向之橫方向相鄰接的畫素間所設之源極配線3 ”共通電極5相互重疊。換言之’在源極配線3上隔著絕緣 膜4,共通電極5如同包住源極配線3 —般地來重疊設置。 ,圖3說明圖2的A-A剖面。如圖3所示,在SiN等絕緣膜 所形成之閘極絕緣膜2上設置源極配線3。此源極配線3的 膜厚為例如40〇ηπι〜500ηιη。在此源極配線3上設置第】絕緣 膜4a。此第!絕緣膜4a的膜厚為例如2〇〇〜3〇〇_。此 t,在此第1絕緣膜4a上設置第2絕緣膜4b。此第2絕緣膜 b的膜厚為例如200nm〜30 0nm。在此第2絕緣膜几上設置 共通電極5。此共通電極5的膜厚為例如1〇〇nm。亦即,在 =極I線3與共通電極’以2層絕緣心㈣來隔 。每裡的絕緣膜4a與4b都是以Si N或Si02來長膜所形 八9 ^此十處,在源極配線3與共通電極5之間所設的絕緣膜是 2 Λ Λ膜。在第1絕緣膜4&的長膜步驟與第2、絕緣膜# 本、、v驟之間具有使用刷子之洗淨步驟。可以用此 ::來?去異物。尤其是藉著使用刷子,有效地去除 猎者使用刷子之洗淨步驟,即使第1絕緣膜4a的一 邠刀,除去,因為在洗淨步驟後會長上第2絕緣膜讣, 以確貫地將源極配線3與共通電極5加以絕緣。 接著使用圖4來說明將絕緣膜4以複數層來構成 :效果。與圖4U)所示的例子相同地,圖4(b)^:= ,也無法避免在第i絕緣膜4a上發生針孔缺陷41&及过A through hole is connected to the common electrode 5. As shown in FIG. 2, the common wiring 5 of the source wiring 3 provided between pixels adjacent to each other in the transverse direction of the electric field generation direction overlaps with each other. In other words, the source wiring 3 is in common with the insulating film 4 interposed therebetween. The electrodes 5 are overlapped as if they surround the source wiring 3. Fig. 3 illustrates the AA cross section of Fig. 2. As shown in Fig. 3, the source wiring is provided on the gate insulating film 2 formed of an insulating film such as SiN. 3. The film thickness of the source wiring 3 is, for example, 40 nm to 500 nm. An insulating film 4a is provided on the source wiring 3. The film thickness of the insulation film 4a is, for example, 200 to 300. _. At this time, a second insulating film 4b is provided on the first insulating film 4a. The thickness of the second insulating film b is, for example, 200 nm to 300 nm. A common electrode 5 is provided on the second insulating film. This The film thickness of the common electrode 5 is, for example, 100 nm. That is, the common electrode 5 is separated from the common electrode ′ at the pole I line 3 by two layers of insulating cores. Each of the insulating films 4 a and 4 b is made of Si N or SiO 2. The length of the long film is 8 9 ^ In these ten places, the insulating film provided between the source wiring 3 and the common electrode 5 is a 2 Λ Λ film. In the first insulating film 4 & 2. Insulating film # There is a cleaning step using a brush between this step and the v step. You can use this ::: to remove foreign objects. Especially by using a brush, the hunter's cleaning step using a brush can be effectively removed, even if One trowel of the first insulating film 4a is removed because the second insulating film 长 is grown after the cleaning step to insulate the source wiring 3 and the common electrode 5 consistently. Next, the insulation will be described using FIG. 4. The film 4 is composed of a plurality of layers: the effect. As in the example shown in FIG. 4U), FIG. 4 (b) ^: = can not avoid the occurrence of pinhole defects 41 &

200305046 五、發明說明(9) 4 2 a。在第2絕緣膜4 b上也無法避免發生針孔缺陷41 b及 4 2 b。但是,在圖4 (a )中所示的構造中,一但發生針孔缺 陷41及42,在源極配線3與共通電極5間會發生短路,相對 地’在圖4(b)所示的構造中,只要第!絕緣膜乜所發生的 針孔缺陷41 a及42a與第2絕緣膜4b上所發生的針孔缺陷41b 及42b沒有導通,在源極配線3與共通電極5間便不會發生 短路。亦即,圖4(b)所示之本發明的實施型態i中的才^ 造,與圖4(a)中所示的構造相比,可以大幅度地降低源極 配線3與共通電極5間發生短路的機率。 在此例中係將源極配線3與共通電極5間的絕緣膜八2 次來長膜,但並不限定於此,分成3次以上也可以得到" 樣的效果。在此例中說明與晝素電極相同地,將源極 彎曲後的例子,但是沒有將源極配線彎曲時也 = 樣的效果。 4付W同 接著,使用圖5來說明本發明的實施型態丨 示裝置的製造流程圖。 ’夜日日顯 百先,如圖5(a)中所示,在絕緣基板上,將以 弋、、Ta、M〇、W、Ni、Cu、Au、Ag等或以這也為主 分:合金、或1T0等具有透光性之導電膜,或這:= 膜4以濺鍍法或蒸著法等來成膜,以昭相f版、夕層 成閘極配線卜閘極電、及容^力°,來形 =中所示,形成由氮化…構::丄; 二卜日:日石夕、多晶石夕等所形成之半導體膜93、η型m日士此 雜^辰度的P等不純物後之n+非晶石夕、n+多晶石夕等所^成參200305046 V. Description of the invention (9) 4 2 a. It is also unavoidable that pinhole defects 41 b and 4 2 b occur on the second insulating film 4 b. However, in the structure shown in FIG. 4 (a), once pinhole defects 41 and 42 occur, a short circuit occurs between the source wiring 3 and the common electrode 5 and is relatively shown in FIG. 4 (b). In the construction, just the first! The pinhole defects 41a and 42a occurring in the insulating film 与 and the pinhole defects 41b and 42b occurring in the second insulating film 4b are not connected, and a short circuit does not occur between the source wiring 3 and the common electrode 5. That is, the structure in the embodiment i of the present invention shown in FIG. 4 (b) can greatly reduce the source wiring 3 and the common electrode compared with the structure shown in FIG. 4 (a). Probability of short circuit between 5 In this example, the length of the insulating film between the source wiring 3 and the common electrode 5 is eight or two times, but it is not limited to this. The effect can be obtained by dividing into three or more times. In this example, an example in which the source is bent in the same manner as the day electrode is described, but the same effect is not obtained when the source wiring is bent. 4 is the same as W. Next, a manufacturing flowchart of an embodiment of the present invention will be described with reference to FIG. 5. 'Every day before the day, as shown in Figure 5 (a), on the insulating substrate, it will be divided into 弋,, Ta, Mo, W, Ni, Cu, Au, Ag, etc. : Alloy, or 1T0 or other transparent conductive film, or this: = film 4 is formed by sputtering method or evaporation method, etc., using f phase and slicing layer to form gate wiring, And the capacity °, as shown in the form =, forming a nitrided structure :: 丄; Erb: Nisushi, polycrystalline and other semiconductor films 93, n-type m ^ Chen + P and other impure substances after n + amorphous stone, n + polycrystalline stone, etc.

200305046 五、發明說明(10)200305046 V. Description of Invention (10)

之接觸膜,連、續M 來成膜。接著,、將接觸J】fCVD、常壓CVD、減壓CVD法 接著,如圖5(=:與半導體膜93加工成島狀。 HCu、AU、As 算弗、V 將以Cr、Ai、Ti、丁a、Mo、 具有透光性之導電膜,3或以^些為^主成分之合金、或ITO等 法等來成膜,以昭相f ‘ 2的多層膜等以濺鍍法或蒸著 電極及沒極電極或以形成此外,源極 觸膜,從通道區域去除。—俊(尤阻作為先罩來蝕刻接 機絕緣膜或有成:j:二化二或氧切、無 圖3所敛述過是分成2次以上 成此^ 及第2絕緣膜4b。然後以照成/ =成弟^緣膜4a 觸孔。 衣版及接者的蝕刻來形成接 最後,如圖5(e)中所示,在成長以、Ai、n M〇、W、Mi、Cu、Au、Ag等或以這些為主成分之、 :T0等具有透光性的導電膜、或這些的多層膜等‘:加: 圖案化來形成畫素電極及對向電極5。 藉著以上的步驟,可以製作構成本實施型態 電場方式的液晶顯示裝置之TFT基板。此外,在此^ 與對向基板之間夾著液晶’ Μ密封材料來加以接人。: 以摩擦、光排列等方法來將液晶分子排列成才;定的角 f。排列液晶的方法,可以使用已知的任一種方法。 者’將閘極配線、源極配線、共通電容配線分別與閑極線 2185-5550-PF(Nl);Ahddub.ptd 第13頁 200305046 五、發明說明(11)The contact film is formed continuously and continuously. Next, contact J] fCVD, atmospheric pressure CVD, and reduced pressure CVD methods. Next, as shown in FIG. 5 (=: is processed into an island shape with the semiconductor film 93. HCu, AU, As is calculated, V will be Cr, Ai, Ti, D, a, Mo, a light-transmitting conductive film, 3 or ^ as the main component of the alloy, or ITO and other methods to form a film, Zhao phase f '2 multilayer film, etc. by sputtering or evaporation Touch the electrode and electrode without electrode or to form the electrode. In addition, the source contacts the film and is removed from the channel area.-Jun (especially as a first cover to etch the insulating film of the connection or successful: j: two or two, oxygen cut, no picture The description of 3 is divided into two or more times to form this and the second insulating film 4b. Then, the contact hole is formed by the photo / = chengdi ^ edge film 4a. The etching of the clothes plate and the connector is used to form the connection, as shown in Figure 5. As shown in (e), Ai, n M0, W, Mi, Cu, Au, Ag, etc., or those having a main component, a light-transmissive conductive film such as T0, or a multilayer of these are grown. Films, etc .: Add: Patterning to form pixel electrodes and counter electrodes 5. By the above steps, a TFT substrate constituting a liquid crystal display device of the electric field method of this embodiment mode can be manufactured. In addition, here ^ A liquid crystal 'M sealing material is sandwiched between the opposing substrates for access .: The liquid crystal molecules are aligned by rubbing, light alignment, etc .; a fixed angle f. For the method of arranging liquid crystals, any known method can be used. ”The gate wiring, source wiring, and common capacitor wiring are respectively connected to the idle wire 2185-5550-PF (Nl); Ahddub.ptd Page 13 200305046 V. Description of the invention (11)

動:;原極線驅動電路、共通電容配線用電源相連接 來製作液晶顯示裝置。 < W 實施型態2 曰a 圖6中說明本發明的實施型態2中之液晶顯示裝置的者 圖1中所示的晝素部具有相同的構&,源極: 線3與共通電極5重疊來配置。在此例中,源極配線3、共 通電極5、及晝素電極6在中央部有丨次彎曲。此彎曲點設 在共通電容配線部7。如此地,以彎曲的電極構成可以 到2個方向的液晶驅動方向,可以改善橫電場方式的液、 面板在特定方向上發生視角特性的惡化 / 、 雖然源極配線3與共通電極5重疊來配置,在中央部附 近,採用使兩者不會重疊地來避開源極配線3的形狀。亦 :,共通電極5在除了畫素中央部附近的區域外與源極配 線3相重豐,在晝素的中央部附近不與源極配線3相重疊來 構成。藉著如此的構成,因為源極配線3與 : 曲部不會重疊,所以在構造上,电位b在弓 a a , j U有效地防止容易發生 缺之彎曲部處的源極配線3與共通電極5的短路。 ,而且,在中央部附近的彎曲部上源極配線3與乒 極5為重疊的構造時,如同發明的實施型中的說明,源 極配線3與共通電極5間的絕緣膜,最好 膜。這是因為如同上述一般地,·彎= 數次, 4 φ邵在構造上交具發生 缺陷,所以容易發生源極配線3與共 實施型態3 ,、通電極5的短路。 圖7是說明本發明的實施型態3中之液晶顯示聚置的畫Motion :; The original polar line drive circuit and the common capacitor wiring are connected with a power source to make a liquid crystal display device. < W implementation type 2 is referred to as a. FIG. 6 illustrates a liquid crystal display device in accordance with embodiment 2 of the present invention. The daylight unit shown in FIG. 1 has the same structure & source: line 3 and common The electrodes 5 are arranged to overlap. In this example, the source wiring 3, the common electrode 5, and the day element electrode 6 are bent at the central portion once. This bending point is provided in the common capacitor wiring portion 7. In this way, a curved electrode structure can be used to drive the liquid crystal in two directions, which can improve the lateral electric field method. The liquid crystal and the panel deteriorate the viewing angle characteristics in a specific direction. Although the source wiring 3 and the common electrode 5 are overlapped and arranged, In the vicinity of the central portion, a shape is adopted in which the source wiring 3 is avoided so that the two do not overlap. In addition, the common electrode 5 is formed with the source wiring 3 in a region other than the area near the central portion of the pixel, and is not overlapped with the source wiring 3 in the vicinity of the central portion of the pixel. With such a configuration, the source wiring 3 and the curved portion do not overlap, so the potential b in the structure aa, j U effectively prevents the source wiring 3 and the common electrode at the bent portion that is prone to be missing in structure. 5 short circuit. In addition, when the source wiring 3 and the ping-pong electrode 5 are overlapped on the bent portion near the central portion, as explained in the embodiment of the invention, the insulating film between the source wiring 3 and the common electrode 5 is preferably a film. . This is because, as described above, · bend = several times, 4 φ Shao is defective in the structure, so the short circuit between the source wiring 3 and the common implementation mode 3, and the through electrode 5 is likely to occur. FIG. 7 is a drawing illustrating liquid crystal display arrangement in Embodiment 3 of the present invention.

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第14頁 200305046Page 14 200305046

素特別是說明TFT元件附近的構成。如圖中所示,TFT :膜G由Ϊ極電極91、源極電極92、非晶矽所形成之半導 夸雷揣β 4甲極電極8所構成。汲極電極9 1透過貫孔9 11與晝 通電極卩Ϊ連接。畫素電極6具有梳子狀的構成,在夾著共 1 、位置上,具有晝素電極61及晝素電極6 2共2條。 接。 本例中,汲極電極91與2條畫素電極6〗及62相連 即使晝素電極的一部分上有缺陷 便不會被認為是點缺陷。因此 藉著如此的構成, 只要不是2條都有缺陷 可以提高良率。 實施型態4 圖§中說明此發明的實施型態4中之液晶顯示裝置的畫 ’、j的構成。圖中的C是指摩擦方向。從圖§可以了解,在 ^ =素部中共通電極5與畫素電極6分別與摩擦方向所成的 角又$絕對值為2個相異值0丨與θ 2。特別是,晝素電極6 :=端部相對於摩擦方向所成的角度的絕對值被設定成較 與其ί ί之晝素電極相對於摩擦方向所成的角度的絕對值 、藉著如此的構成,可以將畫素電極6的先端部的電場 的刀向控制成液晶所該轉動的方向,可以使因為加重而以 逆轉動方向轉動之液晶快速地回到正轉動方向。因此,可 以陕速地減少因對顯示面的荷重所造成之顯示故障在拔重 $仍長時間可視別之所謂加重痕之故障,可以改善顯示品 夤 此外,因為不需要設置用來防止顯示面的加重的保護 板’具有降低液晶顯示裝置的製造成本的效果。In particular, the structure in the vicinity of the TFT element will be described. As shown in the figure, the TFT: film G is composed of a semiconducting quarrel 揣 β 4 methyl electrode 8 formed of a ytterbium electrode 91, a source electrode 92, and amorphous silicon. The drain electrode 91 is connected to the daytime electrode 透过 through the through hole 911. The pixel electrode 6 has a comb-like structure, and has two day element electrodes 61 and two day element electrodes 62 in a total of 1 positions. Pick up. In this example, the drain electrode 91 is connected to two pixel electrodes 6 and 62, and even if a part of the day electrode is defective, it will not be considered as a point defect. Therefore, with this structure, as long as not two of them have defects, the yield can be improved. [Embodiment Mode 4] Fig. § illustrates a structure of a picture ', j of a liquid crystal display device in Embodiment Mode 4 of the present invention. C in the figure refers to the rubbing direction. As can be understood from the figure §, the angles between the common electrode 5 and the pixel electrode 6 and the rubbing direction in the ^ = prime part are respectively 2 absolute values of 0 and θ 2. In particular, the absolute value of the angle formed by the day element electrode 6: = with respect to the rubbing direction is set to be greater than the absolute value of the angle formed by the day element electrode with respect to the rubbing direction. The blade direction of the electric field at the tip of the pixel electrode 6 can be controlled to the direction in which the liquid crystal should rotate, and the liquid crystal rotating in the reverse rotation direction due to weighting can quickly return to the positive rotation direction. Therefore, the display failure caused by the load on the display surface can be quickly reduced. The failure of the so-called weight marks that can be seen for a long time when the weight is $, can improve the display quality. In addition, it is not necessary to set up to prevent the display surface. The increased weight of the protective plate has the effect of reducing the manufacturing cost of the liquid crystal display device.

第15頁 2185-5550-PF(Nl);Ahddub.ptd 200305046 五、發明說明(13) 實施型態5 圖9中說明本發明的實施型態5中之液晶顯示巢置 素部的構成。特別是說明TFT元件附近的構成。如圖中的畫 示’ TFT元件是由汲極電極9 1,源極電極92,非晶石夕所所 成之半導體膜93,及閘極電極8所構成。源極配線3與形 體膜93的側面的全部或一部分在上下方向(與紙面成、^導 的方向)上為同一平面或線上並排的位置E,不在源極直 3與共通電極5之重疊區域上。亦即,e的位置是在源ΰ彳逐配線 線3與共通電極5之重疊的邊緣之邊緣部β的外側。圖1 °配 說明包括位置Ε之Ε-Ε,的斷面。 回0(a) 當源極配線3與半導體膜93的側面的全部或_部八 上下方向為同一平面或同一線上並排的位置E,在源在 線3與共通電極5之重疊區域上時,其斷面如圖1 〇 (配 時’因為半導體膜93被成膜,與圖i〇(a)中所示的構、皮此 比較,中央部會變高相當於半導體膜93的厚度。另一造相 面,在不存在源極配線3與半導體膜93之週邊部, 方 中所示的構造與圖10(b)中所示的構造成為相^古二〇(a) 造。因此,與圖10(a)中所示的構造相比,圖的構 的構造中之中央部與週邊部的段差較大,所示 低。 嚐間耐壓會降 •因此,在本實施型態之液晶顯示裝置中, 配線3與半導體膜93的側面的全部或一部分在木用在源極 為同一平面或同一線上並排之位置E,不合方向上 共通電極5相重疊的區域上之構成。葬基:源極配線3與 再風精者如此的構成,Page 15 2185-5550-PF (Nl); Ahddub.ptd 200305046 V. Description of the invention (13) Implementation mode 5 Fig. 9 illustrates the structure of a liquid crystal display nested pixel unit in Embodiment 5 of the present invention. In particular, the structure in the vicinity of the TFT element will be described. As shown in the figure, the TFT element is composed of a drain electrode 91, a source electrode 92, a semiconductor film 93 made of amorphous stone, and a gate electrode 8. All or part of the source wiring 3 and the side surface of the body film 93 are at the position E side by side on the same plane or line in the up-down direction (the direction of the paper surface), not in the overlapping area of the source straight 3 and the common electrode 5 on. That is, the position of e is outside the edge portion β of the edge where the source-by-cable wiring 3 and the common electrode 5 overlap. Fig. 1 illustrates the cross section including position Ε-Ε ,. Return to 0 (a) When the source wiring 3 and all or the side surfaces of the semiconductor film 93 are positioned side by side on the same plane or on the same line E in the overlapping area of the source line 3 and the common electrode 5, The cross-section is as shown in FIG. 10 (with timing) because the semiconductor film 93 is formed. Compared with the structure and the skin shown in FIG. 10 (a), the central portion becomes higher corresponding to the thickness of the semiconductor film 93. Another In the phase forming surface, the structure shown in the square and the peripheral portion of the semiconductor film 93 where the source wiring 3 and the semiconductor film 93 do not exist are the same as those shown in FIG. 10 (b). Therefore, the structure shown in FIG. Compared with the structure shown in Fig. 10 (a), the step between the central portion and the peripheral portion in the structure shown in the figure is larger and the figure is lower. The breakdown voltage will decrease. Therefore, the liquid crystal in this embodiment In the display device, all or a part of the side surface of the wiring 3 and the semiconductor film 93 is formed on a region E side by side where the source electrode is on the same plane or line, and the common electrode 5 overlaps in a direction different from each other. The structure of the electrode wiring 3 and the re-winder,

2185-5550-PF(Nl);Ahddub.ptd 200305046 五 、發明說明(14) 以提高層間财壓。 在此,當源極配線3與半導體膜9 3的侧面的全部或一 部分在上下方向上為同一平面或同一線上並排之位置E, 在源極配線3與共通電極5相重疊的區域上時,包括在圖 11(a)中所示構造及圖11(b)中所示構造。圖n(a)中所示 構造中,在源極配線3的内側,與半導體膜93的一個側面 在上下方向上為同一平面上並排,該位置位於源極配線3 與共通電極5之重疊區域上。在圖n(b)中所示的構造中, 源極配線3與半導體膜93交叉,在上下方向上排列 線上,其位置位於源極配線3盥i£诵雷★ 田 上。 /…、逋電極5相重疊的區域 實施型態6 圖1 2中說明本發明的實施型態6中 畫素部的構成。如圖中所示,共通 /曰^、'貝不裝置的 鄰接晝素間不相連接,為相互獨立。庄、’、在橫方向的 由貫孔72與共通電極5相連接,成為相1共通t容配線7經 通電容配線不需要在橫方向的鄰接晝」電位。因此,共 各畫素以獨立之電極圖案來形成。’、0相連接,可以在 在上述各晝素為獨立之共通電心 的區域F中所示,•配置在與源極配::極圖案,如圖1 2中 因此,可以將源極配線的上升段差的不重疊的位置上。 容電極7在鄰接晝素間相連接時X的一丰文目減少為當共通電 源極配線3的斷線故障及源極配 。亦即,可以降低 路故障的機率,以提高良率。、/、共通電容電極7的短 第17頁 2185-5550-PF(Nl);Ahddub.ptd 200305046 圖式簡單說明 [圖1 (a )至圖1 (b)]說明本發明中之液晶顯示裝置的 晝素部之圖。 [圖2 ]說明本發明中之液晶顯示裝置的晝素部之圖。 [圖3 ]本發明中之液晶顯示裝置的畫素部的源極電極 與共通電極的重疊部分的剖面圖。 [圖4 (a )至圖4 (b )]用來說明本發明中之液晶顯示裝 置中之源極電極與共通電極的短路的圖。 [圖5 (a)至圖5 ( e)]說明本發明中之液晶顯示裝置的 製造流程圖。 [圖6 ]說明本發明中之液晶顯示裝置的晝素部之圖。 [圖7 ] 說明本發明中之液晶顯示裝置的晝素部之圖。 [圖8 ] 說明本發明中之液晶顯示裝置的晝素部之圖。 [圖9 ]說明本發明中之液晶顯示裝置的晝素部之圖。 [圖1 0 (a)至圖1 0 (b )]用來說明當源極配線,共通電 極與半導體膜相重疊時的影響之圖。 [圖11 (a)至圖1 1 (b)] 說明當源極配線,共通電極與 半導體膜相重疊構成的一個例子之圖。 [圖1 2 ] 說明本發明中之液晶顯示裝置的晝素部之 圖。 [圖1 3 (a)至圖1 3 (b )]說明先前的液晶顯示裝置的晝 素部之圖。 符號說明: 2〜閘極絕緣膜 3〜源極電極2185-5550-PF (Nl); Ahddub.ptd 200305046 V. Description of the invention (14) In order to improve inter-layer financial pressure. Here, when all or a part of the side surface of the source wiring 3 and the semiconductor film 93 are on the same plane or on the same line in the up-down direction, and the position E is in a region where the source wiring 3 and the common electrode 5 overlap, The structure shown in FIG. 11 (a) and the structure shown in FIG. 11 (b) are included. In the structure shown in FIG. N (a), the inside of the source wiring 3 is juxtaposed with one side surface of the semiconductor film 93 on the same plane in the up-down direction, and this position is located in the overlapping area of the source wiring 3 and the common electrode 5 on. In the configuration shown in FIG. N (b), the source wiring 3 intersects with the semiconductor film 93 and is arranged on the line in the up-down direction, and its position is located on the source wiring 3. / ..., area where the hafnium electrode 5 overlaps Embodiment 6 FIG. 12 illustrates the structure of the pixel unit in Embodiment 6 of the present invention. As shown in the figure, the adjoining daytime elements that are common to each other are not connected to each other and are independent of each other. Zhuang, ', in the horizontal direction are connected to the common electrode 5 through the through hole 72, and become the common capacitance line 7 of the phase 1 via the capacitor wiring. Therefore, a total of pixels are formed with independent electrode patterns. ', 0 connected, can be shown in the above-mentioned area F, where each day element is independent of the common energizing core, is arranged in the source matching :: electrode pattern, as shown in Figure 12 Therefore, the source can be wired On the non-overlapping positions. When the capacitive electrode 7 is connected in the adjacent day-to-day interval, the number of items of X is reduced to the disconnection failure of the source wiring 3 and the source matching when the common current is applied. That is, the probability of a road failure can be reduced to improve the yield. Short of common capacitor electrode 7 Page 17 2185-5550-PF (Nl); Ahddub.ptd 200305046 Brief description of the drawings [Fig. 1 (a) to Fig. 1 (b)] Description of the liquid crystal display device in the present invention Figure of the day prime department. FIG. 2 is a diagram illustrating a daylight unit of a liquid crystal display device in the present invention. [Fig. 3] A cross-sectional view of an overlapping portion of a source electrode and a common electrode in a pixel portion of a liquid crystal display device of the present invention. [FIG. 4 (a) to FIG. 4 (b)] A diagram for explaining a short circuit between a source electrode and a common electrode in a liquid crystal display device in the present invention. [FIG. 5 (a) to FIG. 5 (e)] A manufacturing flowchart of a liquid crystal display device in the present invention is explained. Fig. 6 is a diagram illustrating a daylight unit of a liquid crystal display device in the present invention. [FIG. 7] A diagram illustrating a daylight unit of a liquid crystal display device in the present invention. [FIG. 8] A diagram illustrating a daylight unit of a liquid crystal display device in the present invention. FIG. 9 is a diagram illustrating a daylight unit of a liquid crystal display device in the present invention. [Fig. 10 (a) to Fig. 10 (b)] A diagram for explaining the effect when the source wiring, the common current electrode and the semiconductor film overlap. [FIG. 11 (a) to FIG. 11 (b)] A diagram illustrating an example of a structure in which a common electrode and a semiconductor film are overlapped when source wiring is performed. [Fig. 12] A diagram illustrating a daylight unit of a liquid crystal display device in the present invention. [Fig. 13 (a) to Fig. 13 (b)] A diagram illustrating a daylight portion of a conventional liquid crystal display device. Explanation of symbols: 2 ~ gate insulating film 3 ~ source electrode

2185-5550-PF(Nl);Ahddub.ptd 第18頁 200305046 圖式簡單說明4〜絕緣膜 極極 ^"^\H素極 ^日IBglv Βπ I l 6 8 5〜共通電極 7〜共通電容電極2185-5550-PF (Nl); Ahddub.ptd Page 18 200305046 Brief description of the diagram 4 ~ Insulation film pole ^ " ^ \ H 素 极 ^ 日 IBglv Βπ I l 6 8 5 ~ common electrode 7 ~ common capacitor electrode

2185-5550-PF(Nl);Ahddub.ptd 第19頁2185-5550-PF (Nl); Ahddub.ptd Page 19

Claims (1)

200305046200305046 1 · 種液晶顯不裝置,包括: 一對基板,間隔一定距離來面對面配 液晶層,夾在上述基板間; ’ 問極配線及源極配線,在上述基 形成相互交又; 饥的—邊的基板上所 元件,與上述閘極配線及源極配線相 “子狀的畫素電極,與上述開關元件 B?绩大的士、+ 相連接’與源極 配綠大、、々成千仃來配置之複數條電極所形成;及 共通電極,與上述開關元件相連接,盘上 極大約成平行且交互地配置之複數 其特徵在於: 在上述畫素電極及上述共通電極間加上電壓,將與上 述基板面大約成平行的電場加在上述液晶層,將上述源極 電極與上述共通電極的一部分隔著絕緣膜來重疊,而且哕 絕緣膜是以複數層絕緣膜來構成。 2 ·如申請專利範圍第1項所述的液晶顯示裝置,其 中’該絕緣膜是以複數次的長膜步驟來形成。 3·如申請專利範圍第2項所述的液晶顯示裝置,其 中’在5亥絕緣膜的長膜步驟間具有洗淨步驟。 4.如申請專利範圍第3項所述的液晶顯示裝置,其 中’在該洗淨步驟中包括使用刷子之洗淨步驟。 5 ·如申请專利範圍第1、2、3或4項所述的液晶顯示事 置’其中’該畫素電極的梳子狀電極,與該共通電極的被1 · A liquid crystal display device, comprising: a pair of substrates, arranged at a certain distance to face to face with a liquid crystal layer, sandwiched between the above substrates; 'interrogation wiring and source wiring, which form an intersection with each other on the above substrate; The element on the substrate is in the form of a sub-pixel electrode with the gate wiring and the source wiring, and is connected to the switching element B with a large taxi, + connected to the source. It is formed by a plurality of electrodes arranged together; and a common electrode is connected to the switching element, and the plurality of poles on the disk are arranged in parallel and alternately. The feature is that a voltage is applied between the pixel electrode and the common electrode. An electric field approximately parallel to the substrate surface is applied to the liquid crystal layer, and the source electrode and a part of the common electrode are overlapped with an insulating film interposed therebetween, and the plutonium insulating film is composed of a plurality of insulating films. The liquid crystal display device according to item 1 of the patent application scope, wherein 'the insulating film is formed by a plurality of long film steps. 3. The liquid according to item 2 of the patent application scope A crystal display device, wherein 'the washing step is provided between the long film steps of the insulation film of 5.50. 4. The liquid crystal display device according to item 3 of the scope of patent application, wherein' the washing step includes washing with a brush. Net step. 5 · The liquid crystal display device described in item 1, 2, 3, or 4 of the patent application scope, wherein the comb-shaped electrode of the pixel electrode is connected to the common electrode. 200305046200305046 子狀=申=;口;晝素内的中央部附近彎,曲。 中,該共通電極最ΞΙΐ5項所述的液晶顯示裝置,其 上,與該源極配:重子t§玄晝素的中央部附近以外的區域 源極配線相重疊來# ^在該畫素的中央部㈣,不與該 中,範圍第1項所述的液晶顯示裝置,其 接連接了 μ —和的梳子狀電極中至少有2條與開關元件直 中,诗t 请專利範圍第1項所述的液晶顯示裝置,其 辋^ =旦素電極與摩擦方向所成的角度的絕對值至少有2 j /、的值,晝素電極的先端部相對於摩擦方向所成的角 二十絕對值’被設定成較與其相連接的晝素電極相對於摩 裇方向所成的角度的絕對值大。 t如申請專利範圍第1項所述的液晶顯示裝置,其 中」减源極配線與該開關元件的半導體膜的側面的全部或 、σ卩刀的上下方向上之同一面或線上並排的位置,不在該 源極配線與該共通電極相重疊的區域上。 10 ·如申請專利範圍第1項所述的液晶顯示裝置,其 中,與該共通電極相連接的共通電容配線,在晝素間獨立 地來設置。 11 · 一種液晶顯示裝置,包括: 一對基板,間隔一定距離來面對面配置; 液晶層,夾在該基板間; 閘極配線及源極配線,在該基板中的一邊的基板上所Child-like = Shen =; mouth; curved, curved near the central part of the day. In the liquid crystal display device according to item 5 of the common electrode, the source wiring is superimposed on the source electrode: baryon t§ Xuan Tiansu near the central part of the source wiring # ^ in the pixel The central part is not connected to the liquid crystal display device described in item 1 of the range, and at least two comb-shaped electrodes connected to the μ-line are directly connected to the switching element. In the liquid crystal display device, the absolute value of the angle between the rim element and the rubbing direction has a value of at least 2 j /, and the angle formed by the tip of the day electrode with respect to the rubbing direction is twenty absolute. The value 'is set to be larger than the absolute value of the angle made by the daylight electrode connected to the capricorn direction with respect to it. t The liquid crystal display device according to item 1 of the scope of application for a patent, wherein "the source wiring and the side of the semiconductor film of the switching element are all or side by side, the same side or line in the up-down direction of the sigma blade, It is not on a region where the source wiring overlaps the common electrode. 10. The liquid crystal display device according to item 1 of the scope of patent application, wherein the common capacitor wiring connected to the common electrode is provided independently in the daytime. 11 · A liquid crystal display device, comprising: a pair of substrates arranged face to face at a certain distance; a liquid crystal layer sandwiched between the substrates; a gate wiring and a source wiring located on one side of the substrate 200305046 六、申請專利範圍 形成,相互交叉; ;該間極配線及源極配線相連接; 線大約成平行來配置之複數以連J,與源極配 梳子狀的共通電極,與該開關元件相連接,i 電極的複數條電極大約成平杆 接人该畫素 所形成; 父互地配置之複數條電極 其特徵在於: 在該晝素電極及該共通電極 面大約成平行的電場加在該液晶層,將^極基板 通電極的一部分隔著絕緣膜來加以重疊,同'士 共 極’在除了該晝素的中央部附近 :以了通電 配線相重疊,在該晝素的中央1或上、’與該源極 重疊之構成。 、、,不與該源極配線相 1 2 · —種液晶顯示裝置,包括·· 一,基板,間隔一定距離來面對面配置; 液晶層,夾在該基板間; ’ 閘極配線及源極配線,在該基 形成,相互交叉; 锻r的邊的基板上所 ::凡件’與該閘極配線及源極配線相連接· 梳子狀的畫素電極,與該開關:η 線大約成平行來配置之複數條電極所形成;^源極配 梳子狀的共通電極,與該開關元件相連接氳 電極的複數條電極大約成平行 j接’:、邊-素 乂立地配置之複數條電極 第22頁 2185-5550-PF(Nl);Ahddub.ptd 200305046 六、申請專利範圍 所形成 其特徵在於: 在該畫素電極與該共通電極之間加上電壓,將與該基 板面大約成平行之電場加在該液晶層,該源極配線,及該 開關7G件的半導體膜的側面的全部或一部分在上下方向上 同一面或線上並排的位置,不會在該源極配線與該共通電 極相重疊的區域上。 1 3 · —種液晶顯示裝置的製造方法,而該液晶顯示裝 置包括: 一對基板,間隔一定距離來面對面配置; 液晶層’夹在該基板間; / 、閘極配線及源極配線,在該基板中的一邊的基板上 形成,相互交叉; 開關元件,與該閘極配線及源極配線相連接; 梳子狀的畫素電極,與該開關元件相連接,命、 線大約成平行來配置之複數條電極所形成;源極配 梳子狀的共通電極,與該開關元 電極的複數條電極大約成平行且交 ,,與該晝素 所形成; 配置之複數條電極 在戎畫素電極與該共通電極之間加 板面大約成平行之電場加在該液晶層, 楚,將與該基 其特徵在於包括: 形成该源極電極之步驟; 在該源極電極上分成數次來形成複數層 、、、巴緣膜之步200305046 6. The scope of the patent application is formed and cross each other; the inter-electrode wiring and the source wiring are connected; the plurality of lines are arranged in parallel to connect J, and the comb-like common electrode with the source is connected with the switching element Connected, the plurality of electrodes of the i electrode are formed by approximately flat rods connected to the pixel; the plurality of electrodes arranged by each other are characterized in that the electric field on the day electrode and the common electrode surface are applied in approximately parallel electric fields to the liquid crystal Layer, a part of the through electrode of the substrate is overlapped with an insulating film, and it is near the central part except the celestial electrode: it is overlapped with the current-carrying wiring, and is 1 or above the celestial center. , 'And the source overlap. 1 、 A kind of liquid crystal display device that is not in phase with the source wiring, including: · a substrate, which is arranged face to face at a certain distance; a liquid crystal layer sandwiched between the substrates; 'gate wiring and source wiring , Formed on the base, cross each other; on the substrate on the side of the forged r :: where the pieces are connected to the gate wiring and the source wiring · comb-shaped pixel electrodes are approximately parallel to the switch: η line Formed by a plurality of electrodes arranged ^; the source electrode is provided with a comb-like common electrode, and the plurality of electrodes connected to the switching element are approximately parallel to each other; Page 22 2185-5550-PF (Nl); Ahddub.ptd 200305046 6. The scope of the patent application is characterized by the application of a voltage between the pixel electrode and the common electrode, which will be approximately parallel to the substrate surface. An electric field is applied to the liquid crystal layer, the source wiring, and all or part of the side surface of the semiconductor film of the switch 7G side by side on the same surface or line in the up-down direction, and will not be energized between the source wiring and the common wiring. The overlapping area. 1 3 · A method for manufacturing a liquid crystal display device, the liquid crystal display device comprising: a pair of substrates arranged face to face at a certain distance; a liquid crystal layer 'sandwiched between the substrates; /, gate wiring and source wiring, in The switching element is connected to the gate wiring and the source wiring; a comb-shaped pixel electrode is connected to the switching element, and the wires and wires are arranged approximately in parallel. It is formed by a plurality of electrodes; a common electrode with a comb-shaped source and a plurality of electrodes of the switch element electrode is approximately parallel and intersects with the plurality of electrodes, and is formed by the day element; An electric field approximately parallel to the common electrode between the common electrodes is applied to the liquid crystal layer. The characteristics of the common electrode and the substrate include: a step of forming the source electrode; dividing the source electrode into a plurality of times to form a plurality. Step 200305046 六、申請專利範圍 ‘ 驟;及 . 與該源極電極隔著該絕緣膜來重疊地在該絕緣膜上形 成該共通電極之步驟。 1 4.如申請專利範圍第1 3項所述的液晶顯示裝置的製 造方法,其中,該形成絕緣膜的步驟,最好在形成複數層 絕緣膜的的步驟間加上洗淨步驟。 1 5.如申請專利範圍第1 4項所述的液晶顯示裝置的製 造方法,其中,該洗淨步驟中包括使用刷子之洗淨步驟。200305046 6. The scope of the patent application ′ step; and. The step of forming the common electrode on the insulating film overlapping the source electrode through the insulating film. 14. The method for manufacturing a liquid crystal display device according to item 13 of the scope of patent application, wherein the step of forming an insulating film is preferably a step of adding a cleaning step between the steps of forming a plurality of insulating films. 15. The method for manufacturing a liquid crystal display device according to item 14 of the scope of patent application, wherein the washing step includes a washing step using a brush. 2185-5550-PF(Nl);Ahddub.ptd 第24頁2185-5550-PF (Nl); Ahddub.ptd Page 24
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