TR201614871A2 - Elektrostati̇k mems rezonatörlerde kali̇te faktörünü yükselten ve kaçak akimini düşüren i̇ki̇nci̇ harmoni̇k okumaya dayali bi̇r karakteri̇zasyon/sürüş yöntemi̇ - Google Patents
Elektrostati̇k mems rezonatörlerde kali̇te faktörünü yükselten ve kaçak akimini düşüren i̇ki̇nci̇ harmoni̇k okumaya dayali bi̇r karakteri̇zasyon/sürüş yöntemi̇ Download PDFInfo
- Publication number
- TR201614871A2 TR201614871A2 TR2016/14871A TR201614871A TR201614871A2 TR 201614871 A2 TR201614871 A2 TR 201614871A2 TR 2016/14871 A TR2016/14871 A TR 2016/14871A TR 201614871 A TR201614871 A TR 201614871A TR 201614871 A2 TR201614871 A2 TR 201614871A2
- Authority
- TR
- Turkey
- Prior art keywords
- leakage current
- quality factor
- harmonic
- reading
- driving method
- Prior art date
Links
- 238000012512 characterization method Methods 0.000 title abstract 2
- 230000001965 increasing effect Effects 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 230000001603 reducing effect Effects 0.000 title 1
Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P7/00—Resonators of the waveguide type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
- H03H3/0075—Arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02433—Means for compensation or elimination of undesired effects
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/462—Microelectro-mechanical filters
- H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02433—Means for compensation or elimination of undesired effects
- H03H2009/02456—Parasitic elements or effects, e.g. parasitic capacitive coupling between input and output
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02259—Driving or detection means
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
- H03H9/02417—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor involving adjustment of the transducing gap
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2426—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators in combination with other electronic elements
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
Abstract
Başvuru konusu buluş, elektrostatik sürülen değişken boşluklu rezonatörler için yüksek kalite faktörlü ve kaçak akım etkilerinden arındırılmış yeni bir karakterizasyon yöntemi ile ilgilidir.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TR2016/14871A TR201614871A2 (tr) | 2016-10-20 | 2016-10-20 | Elektrostati̇k mems rezonatörlerde kali̇te faktörünü yükselten ve kaçak akimini düşüren i̇ki̇nci̇ harmoni̇k okumaya dayali bi̇r karakteri̇zasyon/sürüş yöntemi̇ |
PCT/TR2017/050494 WO2019013719A2 (en) | 2016-10-20 | 2017-10-12 | SECOND HARMONIC-BASED CHARACTERIZATION AND CONTROL METHOD, IMPROVING THE QUALITY FACTOR AND REDUCING THE CROSS-CURRENT CURRENT IN VARIABLE-INTERACTING ELECTROSTATIC MEMS RESONATORS |
EP17917264.8A EP3529853B1 (en) | 2016-10-20 | 2017-10-12 | A characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic mems resonators |
US16/338,696 US10763817B2 (en) | 2016-10-20 | 2017-10-12 | Characterization and driving method based on the second harmonic, which is enhancing the quality factor and reducing the feedthrough current in varying gap electrostatic MEMS resonators |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TR2016/14871A TR201614871A2 (tr) | 2016-10-20 | 2016-10-20 | Elektrostati̇k mems rezonatörlerde kali̇te faktörünü yükselten ve kaçak akimini düşüren i̇ki̇nci̇ harmoni̇k okumaya dayali bi̇r karakteri̇zasyon/sürüş yöntemi̇ |
Publications (1)
Publication Number | Publication Date |
---|---|
TR201614871A2 true TR201614871A2 (tr) | 2019-01-21 |
Family
ID=65001740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TR2016/14871A TR201614871A2 (tr) | 2016-10-20 | 2016-10-20 | Elektrostati̇k mems rezonatörlerde kali̇te faktörünü yükselten ve kaçak akimini düşüren i̇ki̇nci̇ harmoni̇k okumaya dayali bi̇r karakteri̇zasyon/sürüş yöntemi̇ |
Country Status (4)
Country | Link |
---|---|
US (1) | US10763817B2 (tr) |
EP (1) | EP3529853B1 (tr) |
TR (1) | TR201614871A2 (tr) |
WO (1) | WO2019013719A2 (tr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115605765A (zh) * | 2021-04-23 | 2023-01-13 | 深圳市韶音科技有限公司(Cn) | 加速度传感装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6624726B2 (en) * | 2001-08-31 | 2003-09-23 | Motorola, Inc. | High Q factor MEMS resonators |
EP1777816A1 (en) | 2005-10-18 | 2007-04-25 | Seiko Epson Corporation | MEMS resonator and method of enhancing an output signal current from a MEMS resonator |
US8094841B2 (en) * | 2007-01-17 | 2012-01-10 | The Regents Of The University Of California | Apparatus and method using capacitive detection with inherent self-calibration |
WO2008146244A1 (en) | 2007-06-01 | 2008-12-04 | Nxp B.V. | Mems resonators |
US8493157B2 (en) * | 2008-06-18 | 2013-07-23 | Nxp B.V. | MEMS resonator for filtering and mixing |
US7982550B1 (en) * | 2008-07-01 | 2011-07-19 | Silicon Laboratories | Highly accurate temperature stable clock based on differential frequency discrimination of oscillators |
FI123529B (fi) * | 2010-04-22 | 2013-06-28 | Aalto Korkeakoulusaeaetioe | Mikromekaaniseen oskillaattoriin perustuva lämpötilakompensoitu taajuusreferenssi |
JP2012070193A (ja) | 2010-09-22 | 2012-04-05 | Nippon Dempa Kogyo Co Ltd | 発振器 |
US8680931B1 (en) * | 2012-03-30 | 2014-03-25 | Integrated Device Technology Inc. | Periodic signal generators having microelectromechanical resonators therein that support surface wave and bulk acoustic wave modes of operation with different temperature coefficients of frequency |
US9791503B1 (en) * | 2015-09-30 | 2017-10-17 | Integrated Device Technology, Inc. | Packaged oscillators with built-in self-test circuits that support resonator testing with reduced pin count |
-
2016
- 2016-10-20 TR TR2016/14871A patent/TR201614871A2/tr unknown
-
2017
- 2017-10-12 US US16/338,696 patent/US10763817B2/en active Active
- 2017-10-12 WO PCT/TR2017/050494 patent/WO2019013719A2/en unknown
- 2017-10-12 EP EP17917264.8A patent/EP3529853B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
US10763817B2 (en) | 2020-09-01 |
WO2019013719A2 (en) | 2019-01-17 |
WO2019013719A9 (en) | 2019-04-04 |
EP3529853A2 (en) | 2019-08-28 |
WO2019013719A3 (en) | 2019-05-02 |
EP3529853B1 (en) | 2021-12-15 |
US20190296711A1 (en) | 2019-09-26 |
EP3529853A4 (en) | 2020-05-27 |
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