TH41449B - Laser Processing Machine - Google Patents

Abstract

DC60 laser processing machine is equipped with 31 recessed lens for optical illumination. Laser processing And a converged L2 range laser is integrated into a wafer. 1 actuator for excitation of the lens 31 Optical system does a shape 49 for increasing the aberration to L3 reflections of the laser beam. 42 square diode for receiving reflected light L3 and outputting voltage. Electricity, which corresponds to the amount of light of a quadratic diode And a controller for the actuation control and alignment of the P2 convergence point of the laser range L2 between the lens P0 focus point and the lens 31 to make it possible to form the modified area at the Very deep Up from the front surface 3, which is a deterrent for L3 glare, control is based On the calculated values that are divided by the sum of the voltage values, so the calculated values are not changed. Converted by the amount of light reflected Laser processing machine incorporates 31 diagonal lens flares for lightening. Laser processing And a converged L2 range laser is integrated into a wafer. 1 actuator for excitation of the lens 31 Optical system does a shape 49 for increasing the aberration to L3 reflections of the laser beam. 42 square diode for receiving reflected light L3 and outputting voltage. Electricity, which corresponds to the amount of light of a quadratic diode And a controller for the actuation control and alignment of the P2 convergence point of the laser range L2 between the lens P0 focus point and the lens 31 to make it possible to form the modified area at the Very deep Up from the front surface 3, which is a deterrent for L3 glare, control is based On the calculated values that are divided by the sum of the voltage values, so the calculated values are not changed. Converted by the amount of light reflected

Claims (4)

1. A laser processing machine for forming the modified area to be the starting point of the cutting. It is processed by projecting the object with one laser beam while aligning the point within the object. The machine consists of Diagonal lens for making first laser light And the second laser beam reflected by the ground The surface receives a laser beam, which is projected by a laser beam at one of the objects converging onto the object. Driving method for stimulating the diaphragm to move along the direction of the axial axis. Light The inclined-aberration path for increasing the aberration of the laser light reflected Two that are reflected by a laser irradiated surface Optical detector device for receiving reflected light through increasing aberration The second laser is reflected by the receiving surface, irradiated in a separate manner. And exporting Each value corresponds to the amount of light of the reflected light component of the received second laser light. It comes as a separate and control path for controlling the driving trajectory in such a way that the optical convergence points are aligned. The first laser is placed at a predetermined distance from the laser beamed surface. Where the second laser light is converged into the object by the lens by the diaphragm in such a way that the point converts. Is included between the focal points of the diagonal lens. And a diagonal lens, and where the control trajectory controls the driving trajectory in accordance with the calculated value obtained by taking the output. The output from the optical sensing device goes through dividing by the sum of the output values and performing the predefined calculations. 2. Laser processing machine according to claim 1, where the control route controls the drive route in The manner in which the calculated values are constant. 3.Laser processing machine for forming the modified area to be the starting point of the cutting. Up inside a flat object is processed along the cutting line by projecting the object as well. First laser light While aligning the points within the object with a diagonal lens At the same time moving the diagonal lens along the line of the cut relative to the object while the diagonal lens converts the laser beam at one inside the object. The dimmed lens causes the laser beam at one to merge within the object. A laser that is projected by a laser beam at one of the objects converges into the object in such a way that it is arranged. The second laser's convergence point is positioned between the foci of the diagonal lens. And a diagonal lens Increasing the skew aberration of the second laser light reflected by the laser receiving surface, the reflected light is obtained through increasing the bias of the second laser beam reflected by the surface. Received a separate laser beam. And export each output value corresponding to the quantity The light of the reflected light component of the second laser beam received in a separate manner and the stimulation of the diagonal lens travels along the direction of the optical axis of the diphtheria. In such a way that the alignment of the convergence points of one laser beam is preset at a predetermined distance. From the laser irradiated surface in accordance with the calculated value obtained by passing the Dividing by the sum of the output values And doing predetermined calculations 4.Laser processing machine for forming the modified area to be the starting point of the cutting. Up inside a flat object is processed along the cutting line by projecting the object as well. First laser light While aligning the points within the object with a diagonal lens It is accompanied by a movement of the diagonal lens along the line of the cut relative to the object, while making the diagonal lens a second laser beam reflected by the irradiated surface. The laser is projected by a laser at one of the convergent objects in such a way that the convergent point is aligned. Of the second laser beam between the focus of the diagonal lens And a diagonal lens The machine increases the aberration to the second laser light reflected by the surface. Get a laser beam The receiving light is reflected through the addition of the second laser beam aberration reflected by the surface. Received a separate laser beam. And export each output value corresponding to the quantity Light of the reflected light component of the second laser beam received in a separate manner. The stimulation of the diagonal lens moves along the direction of the optical axis of the diagonal lens. In such a way that the combined points of the first laser beam are aligned at a preset distance From the laser irradiated surface in accordance with the calculated value obtained by passing the Dividing by the sum of the output values And doing predetermined calculations And obtaining Excitation information related to the stimulation of the diagonal lens, and then, along with the movement of the diagonal lens along the line, performs a relative cut on the object, while causing the first laser beam to converge within the object with the diagonal. The stimulation of the diagonal lens moves along the direction of the optical axis of the diagonal lens. In such a way that the alignment of the convergence points of one laser beam is preset at a predetermined distance. From the laser receiving surface, according to the calculated value obtained by passing the output value through Dividing by the sum of the output values And doing predetermined calculations And obtaining Excitation information related to the stimulation of the diagonal lens, and then, along with the movement of the diagonal lens along the line, performs a relative cut on the object, while causing the first laser beam to converge within the object with the diagonal. The stimulation of the diagonal lens moves in harmony with the stimulation information that has been Made it before