SU953004A1 - Electric arc metal vaporization device - Google Patents

Electric arc metal vaporization device Download PDF

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Publication number
SU953004A1
SU953004A1 SU803238016A SU3238016A SU953004A1 SU 953004 A1 SU953004 A1 SU 953004A1 SU 803238016 A SU803238016 A SU 803238016A SU 3238016 A SU3238016 A SU 3238016A SU 953004 A1 SU953004 A1 SU 953004A1
Authority
SU
USSR - Soviet Union
Prior art keywords
cathode
electric arc
evaporator
insulator
anode
Prior art date
Application number
SU803238016A
Other languages
Russian (ru)
Inventor
Игорь Борисович Анохин
Сергей Васильевич Зимин
Алексей Дмитриевич Касихин
Виктор Геннадьевич Соколов
Original Assignee
Предприятие П/Я А-1614
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Предприятие П/Я А-1614 filed Critical Предприятие П/Я А-1614
Priority to SU803238016A priority Critical patent/SU953004A1/en
Application granted granted Critical
Publication of SU953004A1 publication Critical patent/SU953004A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Description

Изобретение относитс  к вакуумной технике и может быть использовано дл  получени  различныхэлектропровод щих покрытий и тонких пленок.The invention relates to vacuum technology and can be used to produce various electrically conductive coatings and thin films.

Известен электродуговой испаритель , предназначенный дл  нанесени  покрытий, в котором поджиг дугового разр да осуществл етс  путем импульсного испарени  провод щей пленки с поверхности изол тора, раздел ющего поджигающий электрод и катод- l .A arc evaporator for coating is known in which the ignition of the arc discharge is carried out by pulsed evaporation of a conductive film from the surface of an insulator separating the ignition electrode and cathode-l.

Недостатком указанного испарител   вл етс  низкий срок службы испарител  вследствие разрушени  изол тора .The disadvantage of this evaporator is the low lifetime of the evaporator due to the destruction of the insulator.

Наиболее близким к предлагаемому  вл етс  электродуговой испаритель, содержащий катод, анод в виде спирали , охватывающей катод, поджигающий электрод с изол тором, размещенным между поджигающим электродом и катодом 2 .- .Closest to the present invention is an electric arc evaporator comprising a cathode, an anode in the form of a spiral, enclosing the cathode, igniting the electrode with an insulator placed between the igniting electrode and the cathode 2 .-.

Недостаток известного испарител  заключаетс  в том, что катодные п тна дуги возникающие на границе изол тор-катод, не увод тс  от нее, а перемещаютс  вдоль указанной границы под действием магнитного пол  тока, протекающего по спирал м анода, привод  к разрушению изол тора.A disadvantage of the known evaporator is that the cathode spots of an arc arising at the insulator-cathode boundary are not moved away from it, but move along the specified boundary under the action of a magnetic field current flowing in anode spirals, leading to destruction of the insulator.

чем сокращаетс  срок службы .испарител .than the lifetime of the vaporizer is reduced.

Цель изобретени  - увеличение срока службы испарит,ел  за счет уменьшени  степени разрушени  изол тора путем увода катодных п тен дуги от границы раздела изол тор-катод.The purpose of the invention is to increase the service life of the evaporator, ate by reducing the degree of destruction of the insulator by removing the cathode spot of the arc from the interface between the isolator and cathode.

Указанна  цель достигаетс  тем, что в электродуговом испарителе ме10 таллов, содержащем к.атод, анод в виде спирали, охватывающей катод, поджигающий электрод с изол тором, размещенным между поджигающим электродом и катодом, спираль аноДа вы15 полнена конической, больший диаметр которой расположен в плоскости размещени  поджигающего электрода ..This goal is achieved by the fact that, in an electric arc evaporator, metals containing a cathode, an anode in the form of a spiral encompassing a cathode, firing an electrode with an insulator placed between the igniting electrode and a cathode, the anode spiral is filled with a conical one with a larger diameter located in the plane placing the ignition electrode ..

На чертеже схематично показан The drawing shows schematically

20 электродуговой испаритель.20 electric arc evaporator.

Испаритель состоит из распыл е .мого катода 1, анода, выполненного в виде спирали 2, охватывающей катод, поджигающего электрода 3 с 25 лзол тором 4, размещенным междуThe evaporator consists of spraying its cathode 1, the anode, made in the form of a spiral 2, covering the cathode, of the firing electrode 3 with a 25 lzoltor 4, placed between

поджигающим электродом 3 и катодом 1. Спираль анода 2 выполнена конической , причем больший диаметр конуса расположен в плоскости разме30 щени  поджигаюгцего электрода 3.the ignition electrode 3 and the cathode 1. The spiral of the anode 2 is made conical, with a larger diameter of the cone located in the plane of the size of the ignition electrode 3.

Claims (1)

Формула изобретенияClaim Электродуговой испаритель металлов, содержащий катод,анод в виде спирали, охватывающей катод, поджигающий электрод с изолятором, размещенным между поджигающим электродом и катодом, отличающийся тем, что, с целью увеличения срока службы испарителя путем уменьшения разрушения изолятора, спираль анода выполнена конической, больший диаметр которой расположен в плоскости размещения поджигающего электрода.An electric arc metal evaporator containing a cathode, an anode in the form of a spiral covering the cathode, an ignition electrode with an insulator located between the ignition electrode and the cathode, characterized in that, in order to increase the life of the evaporator by reducing the destruction of the insulator, the anode spiral is made conical, larger diameter which is located in the plane of the ignition electrode.
SU803238016A 1980-12-12 1980-12-12 Electric arc metal vaporization device SU953004A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU803238016A SU953004A1 (en) 1980-12-12 1980-12-12 Electric arc metal vaporization device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU803238016A SU953004A1 (en) 1980-12-12 1980-12-12 Electric arc metal vaporization device

Publications (1)

Publication Number Publication Date
SU953004A1 true SU953004A1 (en) 1982-08-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
SU803238016A SU953004A1 (en) 1980-12-12 1980-12-12 Electric arc metal vaporization device

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SU (1) SU953004A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993001327A1 (en) * 1991-07-11 1993-01-21 The Regents Of The University Of California Continuous vacuum arc broad beam ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993001327A1 (en) * 1991-07-11 1993-01-21 The Regents Of The University Of California Continuous vacuum arc broad beam ion source

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