SU928470A1

SU928470A1 - Precise positioning device

Info

Publication number: SU928470A1
Application number: SU803005229A
Authority: SU
Inventors: Вячеслав Иванович Алексеенко; Рамутис Юозо Бансявичюс; Альфредас Витауто Бусилас; Казимерас Миколо Рагульскис
Original assignee: Каунасский Политехнический Институт Им.Антанаса Снечкуса
Priority date: 1980-11-17
Filing date: 1980-11-17
Publication date: 1982-05-15

Description

(54) УСТРОЙСТВО ПРЕЦИЗИОННОГО ПОЗИЦИРОВАНИЯ(54) DEVICE OF PRECISION POSITIONING

1one

Изобретение относитс к приборостроению а именно к устройствам точногопозицирова- . ни , и может быть испо 1ьзовано. в устройствах требующих прецизионного перемещени изделий в координатно-измерительных приборах, в оптико-механических приборах, в робототехнике и т.д.The invention relates to instrumentation, namely, to precisely positioned devices. nor can it be used. in devices requiring precision movement of products in coordinate measuring instruments, in optical-mechanical devices, in robotics, etc.

Известно устройство дл прецизионного перемещени изделий, содержащее основание, объект позицировани пьезоэлектрический привод 1 .A device for precision movement of products, comprising a base, a positioning object, a piezoelectric actuator 1, is known.

Недостатком устройства йвл етс его относительна сложность, поскольку дл перемещени по ка одой из координатных осей используетс самосто тельный пьезопривод.The disadvantage of the device was its relative complexity, since an independent piezo drive is used to move along each of the coordinate axes.

Известно также устройство прецизионного позиц ровани , содержащее основание, объект позицировани и пьезозлектрический привод 12.It is also known to have a precision positioning device comprising a base, a positioning object, and a piezoelectric actuator 12.

В известном устройстве пьезоэлектрические преобразователи привода перемещаютс вместе с объектом позицнровани и прижать к нему пружинами, установленными неподвижно относительно основани . Это приводит к ограни- че ию хода перемещени и к зависимости пара2In the known device, the piezoelectric transducers of the drive move together with the positioning object and press the springs fixed to the base against it. This leads to a limitation of the displacement cycle and to the dependence of the pair

метров позицировани от вешгшны перемещени . Кроме того, позицирование возможно толькь по трем координатам. Все это ограничивает функциональные возможности устройства.meters from the position of the displacement. In addition, positioning is possible only in three coordinates. All this limits the functionality of the device.

Цель изобретени - расщирение функциональных возможностей путем обеспечени позицировани по п ти степен м свободы.The purpose of the invention is to extend the functionality by ensuring positioning in five degrees of freedom.

Поставленна цель достигаетс тем, что в устройстве прецизионного позицировани , содержащем основание, объект позицировани и The goal is achieved by the fact that in a precision positioning device comprising a base, a positioning object and

10 пьезоэлектрический i привод, объект позицироваии вьшолнен в виде щара, снабженного каналами управлени с кубической полостью в центре, а привод вьшолнен в виде пьезокерамического вибратора в форме куба, который 10 is a piezoelectric i drive, the object is positioned in the form of a gash, provided with control channels with a cubic cavity in the center, and the drive is made in the form of a piezoceramic vibrator in the form of a cube, which

IS расположен с зазорами по трем координатам в указанной полости.IS is located with gaps in three coordinates in the specified cavity.

На фиг. 1 изображено устройство, вертикальный разрез; на фиг. 2 - разрез, А-А на фиг. 1; на фиг. 3 и 4 - положение пьезоэлектри20 ческого привода при повороте объекта.FIG. 1 shows a device, a vertical section; in fig. 2 is a section, A-A in FIG. one; in fig. 3 and 4 - the position of the piezoelectric actuator when the object is rotated.

Claims

The housing 1 contains the object of knowledge 2, elastically pressed to the base of the body 1 through the sleeve 3 and the spring 4 by the cover 5. The object of position 2 is designed as a ball with a cubic cavity in the center, in which the piezoelectric vibrator 6 cube-shaped, polarized in direction, perpendicular to the direction deposited on its two parallel faces of electrodes 7 and 8, by which it is connected to the generator of high-frequency oscillations 9, and in the body of the object 2 is symmetrical EFINITIONS distance from the faces of the cubic cavity 24 formed control channel 10. The device operates as follows. When the generator 9 is connected to the piezoelectric cubic vibrator 6, the latter begins to make high-frequency resonant oscillations with a frequency f с 2 V where c is the speed of sound in the material of the vibrator; B is the height of the cube. The vibrator 6, located in the cubic cavity of the object 2 being posed, is controlled, for example, by using a discrete inkjet technique, which has 24 control channels 10 in the object's body 10. In each corner of the cubic cavity there are 3 channels, each of which is directed along one of the coordinates X, Y, Z (Fig. 1 and 3). Thus, in planes parallel to the XY plane, there are 8 channels, and in planes, parallel to the XZ, YZ planes, also 8 channels each. By pressing the vibrator 6 of one of the planes of the cube to the corresponding plane of the cavity, pulses are generated in the appropriate direction, due to which the positioning object 2 moves in this direction (Fig. 2). By controlling the position of the vibrator 6 through channels located in planes parallel to the XY plane, the object 2 moves either along the X axis or along the Y axis, depending on the direction of the control channels 10, respectively, or along X or Y. Rotate 4 objects 2 is produced by the asymmetrical displacement of the vibrator 6 near the axis around which the rotation is performed. (Fig. 4). In this case, the excited pulses create a torque that turns the object of position 2. Controlled the position of the vibrator 6 through the control channels 10, as shown in FIG. 4 in the XY plane, a turn is obtained around the Z axis, in the ZY plane - a turn around the X axis, in the ZX plane - around the y axis. Thus, having 24 channels of joipasneifflH position of the vibrator 6, it is possible to carry out positioning by five degrees of freedom, i.e. have ten different movements (including reverse). Caching is possible only consistently for each degree of freedom. The sensitivity of the proposed device is very high, since the amplitudes of oscillations are small (several micrometers), and the frequencies are large (from 20 to 200 kHz). A precision positioning device provides positioning in five degrees of freedom with relative simplicity of design. A device for precision positioning, comprising a base, an object of positioning and a piezoelectric actuator, characterized in that, in order to extend the functionality by providing positioning in five degrees of freedom, the object is positioned in a ball, provided with control channels with a cubic the cavity in the center, and the drive is made in the form of a piezoceramic vibrator in the form of a cube, which is located with gaps in three coordinates in the specified cavity. Sources of information taken into account in the examination 1. USSR author's certificate number 674123, cl. H 01 L 41/10, 1978.

2. US patent N3808488, cl. 310-8.2, pub. 1977 (prototype).