SU748148A1 - Method and apparatus for measuring temperature gradient on semiconductor material layer - Google Patents

Description

In this case, the blackbody model is an optical system, an infrared radiation detector with a filter that highlights the area of strong absorption of the material under study, and an automatic recording equipment.

The main disadvantage of the known method and device for measuring temperature differences on a layer of partially transparent material is the low measurement accuracy, due to significant errors in temperature measurement in the region of strong absorption of the material, and the need to consistently measure the temperature at both boundaries of the layer of partially transparent material followed by calculating temperature difference on the layer as the difference between the two measured temperature boundaries.

The purpose of the invention is to improve the accuracy of measuring the temperature drop across a layer of a particular transparent material, as well as to increase the efficiency of the device.

This goal is achieved by the fact that when calibrating, the ratio of the vibrations is additionally measured for a narrow spectral range in the visible spectral range, and the temperature difference on the black body model is calculated using known β-ratios, then the initial value is determined from the calibration curve of the ratio of radiation intensity to temperature. .

A device for carrying out this method, comprising a sequentially arranged black body model, an optical system, an infrared radiation detector with a filter to select a region of strong absorption of the material under investigation, and automatic recording equipment. The device further comprises a radiation receiver with a narrow-band filter, a mirror modulator equipped with a drive, and the modulator is located in a plane passing through the bisector of the angle between the axes of the radiation receivers.

FIG. 1 shows a diagram of a device for measuring temperature differences on a layer of partially transparent material alaa, FIG. 2 is a graph of curves; johorns are used in determining the temperature drop across a layer of partially transparent material.

The device includes an infrared cooled radiation receiver 1, the sensitive element of which is germanium doped with gold, such as Arch.

Differential infrared receiver 1 radiation set infrared interference filter 2, cut out

the area of strong absorption of the material under study.

Graduations are carried out on a tubular black body model 3 with three holes 4, 5 and b. .

The black-body model 3 is heated by a passing current by means of current leads 7.

The holes 4 and 6 of the blackbody model 3 are sighted either by an infrared radiation receiver 1 with filter 2 or radiation receiver 8 for the visible spectral region, for example, a PMT-79. A red interference filter 9 is installed in front of the radiation receiver, cutting out the radiation in the wavelength range from 0.65 to 0.66 µm. The alternating direction of emission of the blackbody model 3 (with graduation) or sample (with measurements) installed in place of the black body model, and the modulation of radiation at a frequency of 37 Hz with subsequent synchronous detection is performed by the optical system 10 and a mirror modulator 11, equipped with a drive 12, wherein the modulator 11 is located in a tangling angle passing through the bisector of the axes of the receivers is radiated 1 and 8. Signals from radiation receivers 1 and 8 are recorded using an automatic recording equipment 13. Measurement of the reference temperature is carried out using an optical pyrometer 14 or a thermocouple.

The device works as follows.

The tubular model of the black body 3 is heated to a stationary state. Thereafter, holes 4 and 6 are sighted using a mirror modulator 11 at the receiving apertures of the infrared radiation receiver 1 and the radiation receiver in the visible radiation region in the infrared plate. Then, the temperature of the blackbody model 3 is increased by several degrees (5-15 K) and the radiation in the visible and infrared regions of the spectrum is measured.

Successively changing the temperature of the blackbody model 3. determine T and, accordingly, DT and build a calibration dependence.

| - (. t)

where J, JP is the radiation intensity

at temperature T and i ;, respectively, dT is the temperature difference, dT is calculated by the formula

AT-- °

Claims (2)

- Toep I Where B, Un - sharply radiation of a black body mod at temperature T, Tr, respectively, C - 1438-10 m degrees; L is the wavelength corresponding to the maximum transmittance of the interference filter for the visible part of the spectrum. The reference temperature, t, is set and measured every 100 times. As a result, in the graph 4 f (dT). a set of curves is obtained, which are used in determining the temperature difference on a layer of partially transparent material (Fig. 2). A comparison of the error estimates for measuring the material drop in a manner known and proposed shows that the proposed method makes it possible to reduce the error by a factor of 10. Claim 1. A method for measuring a differential on a translucent material layer, including pre-calibration of a radiation receiver by the radiation brightness of a black body model at various temperatures, followed by photoelectric measurement of radiation efficiencies of the boundaries of a layer of translucent material that measurement accuracy, when calibrating additionally, the assignment of vibrations is measured for a narrow spectral range in the visible region of the spectrum and by known ratios the temperature difference is measured on the blackbody model, then the temperature gradient on the layer of translucent material is determined from the calibration curve of the ratio of the radiation intensity to the temperature difference. 2. The device for implementing the method according to claim 1, comprising a sequential black body model, an optical system, an infrared radiation detector with a filter for identifying a region of strong absorption of the material under investigation and an automatic recording equipment, characterized in that, in order to measure the accuracy the device further comprises a radiation receiver with a narrow-band filter, a mirror modulator equipped with a drive, the modulator being located in the plane passing through the bisector su angle between the axes of the radiation receivers. Sources of information taken into account in the examination 1. R. Anderson, Viscoita, Stephenon S. Heat transfer in translucent bodies. Heat transfer 1973, 2,. 33-42. . 2. US patent 2,912,862, l. 79-355, pub. 1959. 0 and "./ ig. 2