SU643298A1 - Инструмент дл очистки, шлифовки и полировки поверхностей деталей - Google Patents
Инструмент дл очистки, шлифовки и полировки поверхностей деталейInfo
- Publication number
- SU643298A1 SU643298A1 SU772527045A SU2527045A SU643298A1 SU 643298 A1 SU643298 A1 SU 643298A1 SU 772527045 A SU772527045 A SU 772527045A SU 2527045 A SU2527045 A SU 2527045A SU 643298 A1 SU643298 A1 SU 643298A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- stripping
- polishing
- grinding
- tool
- parts
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU772527045A SU643298A1 (ru) | 1977-09-29 | 1977-09-29 | Инструмент дл очистки, шлифовки и полировки поверхностей деталей |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU772527045A SU643298A1 (ru) | 1977-09-29 | 1977-09-29 | Инструмент дл очистки, шлифовки и полировки поверхностей деталей |
Publications (1)
Publication Number | Publication Date |
---|---|
SU643298A1 true SU643298A1 (ru) | 1979-01-25 |
Family
ID=20725990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU772527045A SU643298A1 (ru) | 1977-09-29 | 1977-09-29 | Инструмент дл очистки, шлифовки и полировки поверхностей деталей |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU643298A1 (ru) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5876271A (en) * | 1993-08-06 | 1999-03-02 | Intel Corporation | Slurry injection and recovery method and apparatus for chemical-mechanical polishing process |
US5961378A (en) * | 1997-02-10 | 1999-10-05 | Tokyo Seimitsu Co., Ltd. | Polishing apparatus |
US6095904A (en) * | 1993-08-06 | 2000-08-01 | Intel Corporation | Orbital motion chemical-mechanical polishing method and apparatus |
-
1977
- 1977-09-29 SU SU772527045A patent/SU643298A1/ru active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5876271A (en) * | 1993-08-06 | 1999-03-02 | Intel Corporation | Slurry injection and recovery method and apparatus for chemical-mechanical polishing process |
US6095904A (en) * | 1993-08-06 | 2000-08-01 | Intel Corporation | Orbital motion chemical-mechanical polishing method and apparatus |
US5961378A (en) * | 1997-02-10 | 1999-10-05 | Tokyo Seimitsu Co., Ltd. | Polishing apparatus |
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