SU618872A1 - Apparatus for measuring specific resistance of resistive materials at microcircuit manufacturing - Google Patents

Apparatus for measuring specific resistance of resistive materials at microcircuit manufacturing

Info

Publication number
SU618872A1
SU618872A1 SU762194618A SU2194618A SU618872A1 SU 618872 A1 SU618872 A1 SU 618872A1 SU 762194618 A SU762194618 A SU 762194618A SU 2194618 A SU2194618 A SU 2194618A SU 618872 A1 SU618872 A1 SU 618872A1
Authority
SU
USSR - Soviet Union
Prior art keywords
specific resistance
resistive materials
measuring specific
microcircuit manufacturing
microcircuit
Prior art date
Application number
SU762194618A
Other languages
Russian (ru)
Inventor
Алексей Андреевич Арешкин
Анатолий Алексеевич Афанасьев
Original Assignee
Предприятие П/Я А-1586
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Предприятие П/Я А-1586 filed Critical Предприятие П/Я А-1586
Priority to SU762194618A priority Critical patent/SU618872A1/en
Application granted granted Critical
Publication of SU618872A1 publication Critical patent/SU618872A1/en

Links

SU762194618A 1976-12-04 1976-12-04 Apparatus for measuring specific resistance of resistive materials at microcircuit manufacturing SU618872A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU762194618A SU618872A1 (en) 1976-12-04 1976-12-04 Apparatus for measuring specific resistance of resistive materials at microcircuit manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU762194618A SU618872A1 (en) 1976-12-04 1976-12-04 Apparatus for measuring specific resistance of resistive materials at microcircuit manufacturing

Publications (1)

Publication Number Publication Date
SU618872A1 true SU618872A1 (en) 1978-08-05

Family

ID=20638941

Family Applications (1)

Application Number Title Priority Date Filing Date
SU762194618A SU618872A1 (en) 1976-12-04 1976-12-04 Apparatus for measuring specific resistance of resistive materials at microcircuit manufacturing

Country Status (1)

Country Link
SU (1) SU618872A1 (en)

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