SU592438A1 - Device for introducing gas into vertical-type reactor for layer-wise sedimentation - Google Patents

Device for introducing gas into vertical-type reactor for layer-wise sedimentation

Info

Publication number
SU592438A1
SU592438A1 SU752165116A SU2165116A SU592438A1 SU 592438 A1 SU592438 A1 SU 592438A1 SU 752165116 A SU752165116 A SU 752165116A SU 2165116 A SU2165116 A SU 2165116A SU 592438 A1 SU592438 A1 SU 592438A1
Authority
SU
USSR - Soviet Union
Prior art keywords
sedimentation
wise
vertical
layer
type reactor
Prior art date
Application number
SU752165116A
Other languages
Russian (ru)
Inventor
Эдуард Борисович Сигалов
Original Assignee
Предприятие П/Я В-8495
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Предприятие П/Я В-8495 filed Critical Предприятие П/Я В-8495
Priority to SU752165116A priority Critical patent/SU592438A1/en
Application granted granted Critical
Publication of SU592438A1 publication Critical patent/SU592438A1/en

Links

SU752165116A 1975-08-01 1975-08-01 Device for introducing gas into vertical-type reactor for layer-wise sedimentation SU592438A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU752165116A SU592438A1 (en) 1975-08-01 1975-08-01 Device for introducing gas into vertical-type reactor for layer-wise sedimentation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU752165116A SU592438A1 (en) 1975-08-01 1975-08-01 Device for introducing gas into vertical-type reactor for layer-wise sedimentation

Publications (1)

Publication Number Publication Date
SU592438A1 true SU592438A1 (en) 1978-02-15

Family

ID=20629425

Family Applications (1)

Application Number Title Priority Date Filing Date
SU752165116A SU592438A1 (en) 1975-08-01 1975-08-01 Device for introducing gas into vertical-type reactor for layer-wise sedimentation

Country Status (1)

Country Link
SU (1) SU592438A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4928626A (en) * 1989-05-19 1990-05-29 Applied Materials, Inc. Reactant gas injection for IC processing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4928626A (en) * 1989-05-19 1990-05-29 Applied Materials, Inc. Reactant gas injection for IC processing

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