SU592438A1 - Device for introducing gas into vertical-type reactor for layer-wise sedimentation - Google Patents
Device for introducing gas into vertical-type reactor for layer-wise sedimentationInfo
- Publication number
- SU592438A1 SU592438A1 SU752165116A SU2165116A SU592438A1 SU 592438 A1 SU592438 A1 SU 592438A1 SU 752165116 A SU752165116 A SU 752165116A SU 2165116 A SU2165116 A SU 2165116A SU 592438 A1 SU592438 A1 SU 592438A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- sedimentation
- wise
- vertical
- layer
- type reactor
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU752165116A SU592438A1 (en) | 1975-08-01 | 1975-08-01 | Device for introducing gas into vertical-type reactor for layer-wise sedimentation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU752165116A SU592438A1 (en) | 1975-08-01 | 1975-08-01 | Device for introducing gas into vertical-type reactor for layer-wise sedimentation |
Publications (1)
Publication Number | Publication Date |
---|---|
SU592438A1 true SU592438A1 (en) | 1978-02-15 |
Family
ID=20629425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU752165116A SU592438A1 (en) | 1975-08-01 | 1975-08-01 | Device for introducing gas into vertical-type reactor for layer-wise sedimentation |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU592438A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4928626A (en) * | 1989-05-19 | 1990-05-29 | Applied Materials, Inc. | Reactant gas injection for IC processing |
-
1975
- 1975-08-01 SU SU752165116A patent/SU592438A1/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4928626A (en) * | 1989-05-19 | 1990-05-29 | Applied Materials, Inc. | Reactant gas injection for IC processing |
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