SU560132A1 - Device for measuring surface deviations - Google Patents

Description

one

The invention relates to a measurement technique and can be used to control the surface shape after various types of processing.

Devices for measuring the gap in the breakdown voltage are known, comprising an increasing voltage generator, an electrode, and a recording unit.

The closest technical solution to the invention is a device for measuring surface deviations, comprising measuring electrodes forming a reference surface, an increasing voltage generator connected to the measuring electrodes, and a recording unit.

However, these devices have low accuracy, due to the fact that the breakdown voltage depends not only on the gap between the electrodes and the measured surface, but also on external conditions (temperature, humidity, etc.).

The purpose of the invention is to improve the measurement accuracy.

This is achieved by the fact that the device is equipped with key elements, the signal inputs of which are connected to the terminals of the measuring electrodes, shapers of control signals, the inputs of which are connected to the terminals of the measuring electrodes, and the outputs are connected to the control inputs of key elements, memory blocks connected to the outputs of the key elements, and the division unit, the inputs of which are connected to the outputs of the memory blocks, and the output connected to the input of the registration unit.

Ia the drawing shows the block diagram of the proposed device.

The device is an integrated-voltage generator 1 of increasing voltage, connected to the measuring electrodes 2 and 3, which form the measured and reference gaps. The terminals of the measuring electrodes are connected via the formers 4, 5 to the control inputs of the key elements 6, 7 and to the signal inputs of the same elements. The outputs of the key elements 6, 7 are connected to the inputs of the memory blocks 8, 9, the outputs of which are connected to the inputs of the division unit 10. The output of the division unit 10 is connected to the input of the registration unit 11.

The device works as follows.

An increasing voltage is supplied from the generator 1 to the measured and reference gaps. At certain voltage levels, the corresponding gaps break down. The driver 4, 5 of the control signals, when the current changes abruptly, signaling a breakdown in the corresponding gap, opens the corresponding key element 6 or 7, and the breakdown voltage is recorded in block 8 or 9 of the memory. The value of the gap is judged by the ratio of the voltage of the breakdown of the measured gap to the voltage of the breakdown of the reference gap. This operation is carried out in block 10 division.

Several measuring electrodes can form a reference surface relative to which the shape deviations of the measured surface are determined.

Claims (1)

Invention Formula A device for measuring surface deviations containing measuring electrodes forming a reference surface, an increasing voltage generator connected to the measuring electrodes, and a recording unit, characterized in that, in order to improve the measurement accuracy, it is equipped with key elements, the signal inputs of which are connected to the terminals of the measuring electrodes, signals whose inputs connected to the terminals of the measuring electrodes, and the outputs are connected to the control inputs of the key elements, memory blocks connected to the outputs of the key elements, and a dividing unit whose inputs connected to the outputs of the memory blocks, and the output is connected to the input of the registration unit.