SU483994A1 - Method for automatic control of cyclic adsorption gas cleaning processes - Google Patents

Method for automatic control of cyclic adsorption gas cleaning processes

Info

Publication number
SU483994A1
SU483994A1 SU1973888A SU1973888A SU483994A1 SU 483994 A1 SU483994 A1 SU 483994A1 SU 1973888 A SU1973888 A SU 1973888A SU 1973888 A SU1973888 A SU 1973888A SU 483994 A1 SU483994 A1 SU 483994A1
Authority
SU
USSR - Soviet Union
Prior art keywords
automatic control
gas cleaning
cleaning processes
adsorption gas
cyclic adsorption
Prior art date
Application number
SU1973888A
Other languages
Russian (ru)
Inventor
Игорь Сергеевич Анцыпович
Леонид Ермолаевич Алатырев
Юрий Михайлович Афанасьев
Геннадий Сергеевич Фролов
Евгений Филлипович Шкатов
Иван Демьянович Уваров
Original Assignee
Предприятие П/Я А-7113
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Предприятие П/Я А-7113 filed Critical Предприятие П/Я А-7113
Priority to SU1973888A priority Critical patent/SU483994A1/en
Application granted granted Critical
Publication of SU483994A1 publication Critical patent/SU483994A1/en

Links

SU1973888A 1973-12-03 1973-12-03 Method for automatic control of cyclic adsorption gas cleaning processes SU483994A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU1973888A SU483994A1 (en) 1973-12-03 1973-12-03 Method for automatic control of cyclic adsorption gas cleaning processes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1973888A SU483994A1 (en) 1973-12-03 1973-12-03 Method for automatic control of cyclic adsorption gas cleaning processes

Publications (1)

Publication Number Publication Date
SU483994A1 true SU483994A1 (en) 1975-09-15

Family

ID=20568733

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1973888A SU483994A1 (en) 1973-12-03 1973-12-03 Method for automatic control of cyclic adsorption gas cleaning processes

Country Status (1)

Country Link
SU (1) SU483994A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5685895A (en) * 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5685895A (en) * 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus

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