Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Институт Физики Полупроводников Ан Литовской СсрfiledCriticalИнститут Физики Полупроводников Ан Литовской Сср
Priority to SU1986477ApriorityCriticalpatent/SU464637A1/ru
Application grantedgrantedCritical
Publication of SU464637A1publicationCriticalpatent/SU464637A1/ru