SU372459A1 - PHASE DEVICE FOR MEASUREMENT OF MOVEMENT - Google Patents

Description

The invention relates to reading devices of linear or angular displacements and can be used in automation of machine tools as a feedback sensor.

Phase devices are known for measuring the movement of an object, made in the form of successively located illuminators, oscillating raster bars, a lens, raster bars associated with the lens, and a photodetector.

The disadvantage of these devices is the low resolution and the significant convergence of the transformation due to the error of applying the Hia crystals of the raster scale and the positioning error of the scales.

The purpose of the invention is the measurement accuracy measurement.

It is achieved by the fact that the proposed device is equipped with a second optical channel, in which there are two lenses installed in series between the oscillating raster scale and raster scale, and the image of the oscillating scales, the passage through the optical channels, are projected onto different parts of the same raster scales, associated with the object.

FIG. 1 is a diagram of the described device for measuring displacements; in fig. 2 shows an embodiment of a device with a perpendicular arrangement of shchkal; in fig. 3 - oscillating scale, the risks of which are performed in the upper and lower parts with the inverse curvature.

The device consists of an illuminator /, a magnet 2, an oscillating button 3, a spring 4, lenses 5, 6 and 7, prisms 8 and, 9, raster screen 10 associated with an object; and photodetectors // and} 2.

When moving the oscillating chkali 3 by means of a spring 4 and an electromagnet 2 its image in the beam of light illuminator /

passes through two optical channels to the photodetectors // and 12. The moving image of the upper part of the oscillating chassis passes through the: 5 and 7 lenses, the deflecting prism 9 and is aligned with the raster scale (disk) 10. The light beam produces on the photodetector // time-varying electrical signal whose phase is proportional to the displacement. When moving oscillating 3 chunks 3 upwards, its image moves along the school 10 from left to right (Fig. 1).

The moving image of the lower part of the scale passes through lens 6, deviation y3

The prism 8 and is combined with the raster scale 10. The beam of light, interacting with the latter. pro-proportional move. The ort of the displacement of the oscillating chips 3 upwards the image of its lower part moves. p.o raster scale 10 from right to left.

The phase of the electrical signal from the photodetector / 5 has the opposite sign with respect to the phase of the electrical signal from the photodetector //, and the relative shift of the signals is equal to the double phase (without taking into account the error of performing a raster scale).

Thus, the proposed TIBO device is a fefed: ial.noe, the design feature of which is only one raster scale (disk) rigidly fixed on the measured object. The differential device has an increased sensitivity and discreteness of reference with respect to ordinary sensors. This allows for a larger m (1 hn: Fstu transform. You can move to the phase of electrical signals.

four

Improving the accuracy of the conversion is possible due to the choice of a certain distance between the sections of the raster scale: / 0 / Nakoy / Koriy proektir, UK) image and edgkatorno scale. The criterion for determining this distance is the character of the instrumental error, raster scale 10.

Subject invention

A phase device for measuring the movement of an object, made in the form of successively placed illuminators, an oscillating raster scale, an objective lens, a raster scale associated with the object, and a photoreception, characterized in that it is equipped with a second optical channel in the form of two lenses mounted in series between an oscillating raster scale — and a raster scale, with oscillating images of the images passing through both channels; I design-tsr on various parts of raster-: sh1kal “, based on a lens.

t

1UFig. one