SU286774A1

SU286774A1 - Dryer

Info

Publication number: SU286774A1
Application number: SU6801272755A
Authority: SU
Inventors: Т.Г. Плаченов; Г.М. Белоцерковский; Е.Н. Долгова; Ю.В. Ежов; В.А. Фогель; А.П. Бенедиктов; И.Я. Авилов
Original assignee: Plachenov T G; Belotserkovskij G M; Dolgova E N; Ezhov Yu V; Fogel V A; Benediktov A P; Avilov I Ya
Priority date: 1968-10-03
Filing date: 1968-10-03
Publication date: 1978-08-30

Description

Изобретение относитс к области производства полупроводниковых приборов а именно, к влагопоглотител м, примен емым дл поддержани в корпусе прибора низкой относительной влажности в широком диапазоне температур (60-150 С), что обеспечивает надежность работы и стабильность параметров ирлборов, в частности транзисторов .The invention relates to the production of semiconductor devices, namely, moisture absorbers used to maintain low relative humidity in a device case over a wide temperature range (60-150 ° C), which ensures reliable operation and stability of the parameters of Irbord, in particular, transistors.

Известны влагопоглотители на основе цеолитов , которые примен ютс в виде зерен, спрессованных таблеток и порошков.Zeolite-based desiccants are known, which are used in the form of grains, compressed tablets and powders.

Известны также жидкие или консистентные инертные композиции, состо щие из смесей цеолита и силиконовых масел. Влагопоглотитель , состо щий из силиконовых масел и кристаллов цеолита, помещают в баллон, который герметично запаиваетс .Liquid or consistent inert compositions consisting of mixtures of zeolite and silicone oils are also known. A desiccant, consisting of silicone oils and zeolite crystals, is placed in a can, which is hermetically sealed.

Однако такие цеолитовые влагопоглотители предъ вл ют чрезвычайно высокие требовани к степени чистоты силиконовых масел . Получение же силиконовых масел высокой чистоты - задача сложна .However, such zeolitic desiccants impose extremely high demands on the purity of the silicone oils. Getting high-purity silicone oils is a difficult task.

Кро.ме того, замасливание щвов баллона при снар жении затрудн ет герметичную запайку баллонов холодной сваркой и приводит к большому проценту брака на производстве . А также в данном случае невоз.можпй регенераци приготовленной смеси, вследствие чего на производстве нельз иметь заделы полуфабрикатов.In addition, the lubrication of the gaskets of the cylinder during the cleaning process makes it difficult to seal the cylinders tightly by cold welding and results in a large percentage of rejects at work. And also in this case it is impossible to regenerate the prepared mixture, as a result of which it is impossible to have reserves of semi-finished products in production.

Цель предлагаемого изобретени - создание влагопоглотител в виде пленки на основе цеолита, обеспечивающего повышение надежности работы и стабилизации параметров прибора, а также снижение производственных затрат и улучщение качества изготовлени транзисторов.The purpose of the present invention is to create a desiccant in the form of a film based on zeolite, which provides increased reliability and stabilization of the device parameters, as well as reduced production costs and improved quality of transistors.

В состав предлагаемого влагопоглотител вход т следующие компоненты,%: цеолит 41-75, эпоксидна смола 22-51 (в качестве св зующего), полиэтиленполиамин 2-5 (в качестве отвердител ) и дибутилфталат 1-3 (в качестве пластификатора).The proposed components include the following components,%: zeolite 41-75, epoxy resin 22-51 (as a binder), polyethylene polyamine 2-5 (as a hardener) and dibutyl phthalate 1-3 (as a plasticizer).

Предлагаемый состав позвол ет получить пористую, адсорбционно-активную (Обладающую определенны.ми заданны.ми кинематическими свойствами по отношению к парам воды, механически прочную пленку, котора надежно сцепл етс с внутренней поверхностью баллона.The proposed composition allows to obtain a porous, adsorption-active (having certain predetermined kinematic properties with respect to water vapor, a mechanically strong film that reliably adheres to the inner surface of the balloon.

Claims

The kinetics of adsorption of the proposed desiccant is such that in the process of equipping the devices with desiccant cylinders; By eating, nvOCJieAHUH absorbs an insignificant amount of moisture and almost completely retains its original adsorption capacity. The ability to control the kinetics of adsorption inside the device by changing the ratio of components allows the use of a desiccant in devices of various types and sizes. In the form of a film, the moisture absorber takes a very small volume compared to tablets or consistency mixtures and has a weight. For example, the weight of the absorber film for MP25 devices is 9-10 mg, and the weight of the consistent mixture is 40 mg or more. Therefore, the composition developed is most promising for microminiature electronic devices. The desiccant in the device can be repeatedly regenerated. This allows you to have the necessary reserve of semi-finished products in production. The prepared suspension is applied by drops from a burette onto the inner surface of the bottoms of the transistors cylinders. 10-12 mg of the composition is applied to each cylinder of the transistor, which corresponds to 4.1-5.0 mg of the dehydrated zeolite. The cylinders with the applied composition are placed in a vacuum oven, turn on the vacuum and after reaching a discharge of 0.1 mm Hg. Art., include heating. In 1.5 hours the temperature is raised to 160 ° C and heat treatment is carried out n | iii 160-180 ° C and a vacuum of no more than 0.1 mm Hg. within 1 hour 3 hours Then turn off the heating when the vacuum pump is running, the cylinders are cooled to room temperature and packaged in plastic bags. The sorption capacity of the proposed zeolite absorber at P / P 0.75 for each transistor cylinder is 10–12 / o from the weight of the absorber, or 26–29 ° / o from the weight of the hydrated zeolite crystals. Thus, the sorption capacity of zeolite crystals in the composition of the film does not practically differ from the capacity of pure crystals. Below are the data characterizing the secondary porous structure of the zeolitic desiccant in the interval of equivalent radii from 291,000 to 30 A. The interval is equivalent. zeolitic moisture absorber for transistors differs from those known for their simplicity and cost effectiveness. It provides higher reliability and stability of devices in operation and storage. Claim 1. Zeolite-based desiccant, for example, for semiconductor devices, characterized in that, in order to increase its adsorption capacity, it contains epoxy resin, polyethylene polyamine and dibutyl phthalate.

2. The moisture absorber according to claim 1, characterized in that it contains the indicated components in the following ratio,%: ZeAlite NaA41-75 Epoxy resin 22-15 Polyethylene polyamine 2-5 Dibutyl phthalate 1-3