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Application filed by П. В. Богданов, И. Ф. Малышев , А. Д. АртемовfiledCriticalП. В. Богданов, И. Ф. Малышев , А. Д. Артемов
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Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance
Mechanical design of compact vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray beamline instrumentation