SU1828669A3 - Apparatus to treat peaces in vacuum - Google Patents

Apparatus to treat peaces in vacuum

Info

Publication number
SU1828669A3
SU1828669A3 SU4889375/21A SU4889375A SU1828669A3 SU 1828669 A3 SU1828669 A3 SU 1828669A3 SU 4889375/21 A SU4889375/21 A SU 4889375/21A SU 4889375 A SU4889375 A SU 4889375A SU 1828669 A3 SU1828669 A3 SU 1828669A3
Authority
SU
USSR - Soviet Union
Prior art keywords
vacuum
rotary drum
peaces
treat
pin
Prior art date
Application number
SU4889375/21A
Other languages
Russian (ru)
Inventor
Владимир Васильевич Кульпинов
Original Assignee
Владимир Васильевич Кульпинов
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Владимир Васильевич Кульпинов filed Critical Владимир Васильевич Кульпинов
Priority to SU4889375/21A priority Critical patent/SU1828669A3/en
Application granted granted Critical
Publication of SU1828669A3 publication Critical patent/SU1828669A3/en

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  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

FIELD: vacuum engineering. SUBSTANCE: rotary drum in apparatus, using roller-type bearings, is rotating relatively to central journal and pin. Driving and driven disks have equally distant holes, in which instruments, mounted with the help of row of pins, are rotating. Central pin is conjugated with trap, fixed on driving disk. Rotary drum is made vacuum-tight by pressing chamber to post by links in one step method. Apparatus is capable to use methods of rotary drum and individual treatment of pieces. EFFECT: apparatus is used in vacuum engineering. 2 dwg
SU4889375/21A 1990-11-13 1990-11-13 Apparatus to treat peaces in vacuum SU1828669A3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4889375/21A SU1828669A3 (en) 1990-11-13 1990-11-13 Apparatus to treat peaces in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4889375/21A SU1828669A3 (en) 1990-11-13 1990-11-13 Apparatus to treat peaces in vacuum

Publications (1)

Publication Number Publication Date
SU1828669A3 true SU1828669A3 (en) 1995-05-27

Family

ID=60541278

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4889375/21A SU1828669A3 (en) 1990-11-13 1990-11-13 Apparatus to treat peaces in vacuum

Country Status (1)

Country Link
SU (1) SU1828669A3 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2485211C2 (en) * 2007-10-08 2013-06-20 Эрликон Трейдинг Аг, Трюббах Processed part carrier system
RU2606363C2 (en) * 2015-05-27 2017-01-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) Carousel-type unit for multi-layered coatings magnetron sputtering and method of equal thickness nano-coating magnetron sputtering

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2485211C2 (en) * 2007-10-08 2013-06-20 Эрликон Трейдинг Аг, Трюббах Processed part carrier system
RU2606363C2 (en) * 2015-05-27 2017-01-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) Carousel-type unit for multi-layered coatings magnetron sputtering and method of equal thickness nano-coating magnetron sputtering

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