SU1828669A3 - Apparatus to treat peaces in vacuum - Google Patents
Apparatus to treat peaces in vacuumInfo
- Publication number
- SU1828669A3 SU1828669A3 SU4889375/21A SU4889375A SU1828669A3 SU 1828669 A3 SU1828669 A3 SU 1828669A3 SU 4889375/21 A SU4889375/21 A SU 4889375/21A SU 4889375 A SU4889375 A SU 4889375A SU 1828669 A3 SU1828669 A3 SU 1828669A3
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- vacuum
- rotary drum
- peaces
- treat
- pin
- Prior art date
Links
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
FIELD: vacuum engineering. SUBSTANCE: rotary drum in apparatus, using roller-type bearings, is rotating relatively to central journal and pin. Driving and driven disks have equally distant holes, in which instruments, mounted with the help of row of pins, are rotating. Central pin is conjugated with trap, fixed on driving disk. Rotary drum is made vacuum-tight by pressing chamber to post by links in one step method. Apparatus is capable to use methods of rotary drum and individual treatment of pieces. EFFECT: apparatus is used in vacuum engineering. 2 dwg
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4889375/21A SU1828669A3 (en) | 1990-11-13 | 1990-11-13 | Apparatus to treat peaces in vacuum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4889375/21A SU1828669A3 (en) | 1990-11-13 | 1990-11-13 | Apparatus to treat peaces in vacuum |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1828669A3 true SU1828669A3 (en) | 1995-05-27 |
Family
ID=60541278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU4889375/21A SU1828669A3 (en) | 1990-11-13 | 1990-11-13 | Apparatus to treat peaces in vacuum |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1828669A3 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2485211C2 (en) * | 2007-10-08 | 2013-06-20 | Эрликон Трейдинг Аг, Трюббах | Processed part carrier system |
RU2606363C2 (en) * | 2015-05-27 | 2017-01-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) | Carousel-type unit for multi-layered coatings magnetron sputtering and method of equal thickness nano-coating magnetron sputtering |
-
1990
- 1990-11-13 SU SU4889375/21A patent/SU1828669A3/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2485211C2 (en) * | 2007-10-08 | 2013-06-20 | Эрликон Трейдинг Аг, Трюббах | Processed part carrier system |
RU2606363C2 (en) * | 2015-05-27 | 2017-01-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э. Баумана" (МГТУ им. Н.Э. Баумана) | Carousel-type unit for multi-layered coatings magnetron sputtering and method of equal thickness nano-coating magnetron sputtering |
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