SU173923A3 - - Google Patents
Info
- Publication number
- SU173923A3 SU173923A3 SU776587A SU776587A SU173923A3 SU 173923 A3 SU173923 A3 SU 173923A3 SU 776587 A SU776587 A SU 776587A SU 776587 A SU776587 A SU 776587A SU 173923 A3 SU173923 A3 SU 173923A3
- Authority
- SU
- USSR - Soviet Union
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
Publications (2)
| Publication Number | Publication Date |
|---|---|
| SU173923A1 SU173923A1 (en) | |
| SU173923A3 true SU173923A3 (en) | 1965-10-02 |