SU1701483A1 - Device for changing direction of travel and orientation of friable thin articles - Google Patents

Abstract

The invention relates to the manufacture of semiconductor devices, in particular, devices for transporting fragile thin plates. The purpose of the invention is to expand the technological capabilities of the device by expanding the range of parts with their reorientation during transportation. The device contains two mutually intersecting pneumatics of the track 3 and 5, two pairs of autonomous oppositely directed inclined nozzles creating a torque that are connected to the compressed air system, and a stopping device located at the intersection point of the axes of the pneumatic tracks 3 and 5. Pneumatic tracks 3 and 5 are located in the housing 1, and at the intersection of their axes there is a table-disk 2 with a U-shaped groove, in which the part to be transported is located. The center of rotation of the table disk 2 coincides with the center of position of the aspirator. The bottom plane of the table-disk 4 is made with corrugated mi-blades, increasing its speed of rotation with air jets. The disk table 2 together with the transported part is rotated by the action of compressed air jets at a predetermined angle along the stops. Depending on the direction of rotation of the table-disk 2, the orientation of the transported part changes when it passes to an intersecting pneumatic track. 1 hp f-ly, 16 ill. g / V 00 SA) Schig1

Description

The invention relates to the manufacture of semiconductor devices, in particular to devices for transporting semiconductor wafers.

The aim of the invention is to expand the technological capabilities of the device by expanding the range of parts with their reorientation during transportation.

FIG. 1 shows the device, a general view; in fig. 2 - the device housing in the first embodiment (to change the direction of movement and orientation of the transported plate); Fig. 3 is the same in the second embodiment {to change the direction of movement of the transported plate without changing the orientation); FIG. A is a section A-A in FIG. one; in fig. 5 - turntable-disk (bottom view); in fig. 6 is a view of D in FIG. five; in fig. 7 is a view of E in FIG. 6; FIGS. 8-10 show the phases of rotation of the table-disc in the first embodiment; in fig. 11-13 - the same, in the second version; in fig. 14 is a section BB in FIG. 2; in fig. 15 is a sectional view BB in FIG. 3; in fig. 16 - section G-Y in FIG. five.

The device for changing the direction of movement and orientation of fragile thin plates (Fig. 1) consists of two main parts, the body 1 and the turntable-disk 2.

The housing 1 contains two built-in perpendicularly directed linear cylindrical tracks 3 and 5. The pneumatic actuator 3 moves the transported plate 4 along the X axis, and the pneumatic track 5 moves the transported plate 4 along the U axis. Each pneumatic track (Fig. 2) is equipped with lead chamfers 6 and 7, facilitating the entrance and fixes 8 and 9, facilitating the exit of the transported plate 4.

Pneumatic 3 and 5 have a common air chamber 10 (Fig. 4), hermetically closed through the gasket 11 with a lid 12. Air into the chamber 10 is supplied through the nozzle 13.

The upper part of the housing 1 has a cylindrical recess 14, the bottom of which forms the plane Ж, which is the surface of the pneumatic tracks 3 and 5. A rotary table-disk 2 is inserted into this depression. In the center of the housing 1, below the plane J, at the intersection point of the axes 0 of the pneumatic tracks 3 and 5, a stopping device, such as an aspirator 15, is located. Through the nozzle 16, from a separate duct, the compressed air is fed into the central blind hole 17 of the aspirator 15 and exits through two mutually perpendicular holes of small section 18 and 19 coinciding with the axle shaft. windings 3 and 5, parallel to the plane J. Jet

Air flowing out at high speed from the holes 18 and 19 create under the transported plate 4 a zone of reduced (relative to atmospheric) pressure (wing effect), which forces it to press against the plane of the pneumatic tracks 3 and 5, and thereby stop.

Three concentric annular grooves are located around the aspirator 15: outside 20 and middle 21 and inside 22. Adjustable stops 23 and 24, which restrict the angle of rotation of the table-disk 2, are mounted flush with the plane (on a tight fit and on the pins).

5 Average 21 and internal 22 grooves serve as guides when the table-disk 2 rotates, while its protruding counterparts are located below the plane Z of the pneumatic tracks 3 and 5 and do not interfere with the movement

0 transported plate 4.

In the recess 14 of the upper part of the housing 1, along its diagonal, closer to the edges there are several pairs of inclined nozzles 25 and 26, to which are separate outer cross-sections

5, compressed air is supplied through fittings 27 and 28 by lying air leads (not shown). Pairs of nozzles 25 create torque to rotate the table-disk 2 clockwise, and pairs of nozzles 26 to rotate

0 in the opposite direction.

In the upper part of the housing 1, outside the cylindrical recess 14, the support plate 30 with the adjusting screw 31 is fastened with screws 29 and is located 5 in the center of the axis of rotation of the table-disk 2, which coincides with the intersection point 0 of the axes of the pneumatic tracks 3 and 5. The presence of the screw 31 allows to regulate the thickness of the airbag under the table-disk 2.

The table-disk 2 (fig. 5-7) is a light shaped washer with a U-shaped channel 32 running along its diagonal, the walls of which are guides for moving transported

5 plates 4. The diameter D of the table-disk 2 exceeds the maximum length L of the diagonal of the plate 4 (Fig. 1). On the upper plane 33 of the table-disk 2, peripheral 34 and 35 and central 36 stiffeners are located.

0 On the central edge 36, in the center of the axis of rotation of the table-disk 2, there is a conical axis 37, which abuts against the adjusting screw 31 of the housing 1. On the lower plane 38 of the table-disk 2, protruding cone-centric supporting half-rings 39 and 40 and stops 41 and 42. The width and height of the half-rings 39 and 40 correspond to the width of the grooves 21 and 22 of the housing 1, and the width and height of the stops 41 and 42 — to the width and height of the groove 20 of the housing 1, i.e. bearing half rings 39 and 40 and stops

41 and 42 are sections of concentric protrusions of the table-disk 2, slid in the corresponding concentric grooves 21, 22 and 20 of the housing 1. The upper plane of the semirings 39 and 40, provided with lead-in chamfers, respectively 43.44 and 45.46 from the entrance side of the transported plate 4, lies in the same plane W, as pneumatic tracks 3 and 5, and serves as a support for this plate. The U-shaped channel 32, provided with a lead-in chamfers 47 and 48 of the table-disk 2, has windows along the entire length for free air outflow from the holes of the pneumatic track, with the exception of places under the stiffening ribs 34-36, and the bottom is open along the entire length , with the exception of the places under the supporting half-rings 39 and 40, where it is partially closed by sections of these half-rings. Thus, the transported plate 4 is bounded above and laterally by the U-shaped channel 32, and from below by sections of semirings 39 and 40.

On the lower plane 38 of the table-disk 2, closer to the outer edge, there are corrugated flaps 49, which are open grooves of a triangular (in section) shape, diverging from the center of rotation O with a constant pitch. Air jets interact with them, created by one of the pairs of nozzles 25 (or 26) of the housing 1.

The device works as follows.

The transported plate 4 under the action of air jets enters from the pneumatic track 3 into the turntable-disk 2 (Fig. 8) and when the center of the transported plate 4 coincides with the center of rotation of the Ostol-disk (coinciding with the intersection point of the axes of the pneumatic tracks 3 and 5) stops with an aspirator 15. Then, at the command of the Turn, air is supplied to a pair of nozzles 25. Under the action of the torque 1 generated by air jets emanating from this pair of inclined nozzles, the table-disk 2 together with the transported plate 4 supported by the aspirator 15 on sections of semirings 39 and 40. podsplivaet on an air cushion above the common plane B. pneumotracks 3 and 5 and rotates (Fig. 9) at a predetermined angle until the stop 42 of the table-disk 2 comes into contact with the adjustable stop 23 of the bracket, after which the aspirator 15 and the inclined nozzles 25 are turned off (Fig. 10). The transported plate 4 floats to the pneumatic track 3 of another direction. After moving the transported plate 4 out of the table-disk 2, another pair of inclined nozzles 26 is turned on, and the table-disk returns to its original position (before the stop 41 of the disk 2 comes in contact with the adjustable stop 24 of the housing 1). Then the cycle can be repeated.

In the absence of a command to rotate, the aspirator 15 and the inclined nozzles 25 do not turn on, and the transported plate 4 passes along the pneumatic track 3 directly.

Having the same table-disk 2 and two variants of the case 1 (Fig. 2, 3), we get two variants of the device operation. .

In the first embodiment, when turning the table-disk 2 clockwise (Fig. 8-10). the transported plate 4 goes to the pneumatic track 5, turns around and changes its orientation by 180 ° in relation to its original position.

In the second variant, when the table-disk 2 is turned counterclockwise (Fig. 11-13), the transported plate 4 enters the pneumatic track 5 with preservation of the initial orientation.

Several proposed devices can be assembled into blocks, can be equipped with additional sensors (for example, monitor turning, control the passage of the transported plate through pneumatic tracks, etc.) and be built into automatic lines, for example, manufacturing, monitoring and sorting photoelectric converters.

Claims (1)

1. An apparatus for changing the direction of movement and orienting fragile fine parts, comprising a unit for orienting and changing the direction of movement of parts, located in the housing and including pneumatic tracks and two pairs of oppositely directed nozzles connected to the compressed air supply system, and a stop device located at the point of intersection of the axes of the pneumatic tracks, characterized in that, in order to expand technological capabilities, a cylindrical groove is made in the housing and it is provided with a table, a mouth new in the groove, the table being made in the form of a disk with concentric segmental projections located on it, while the disk has an U-shaped groove for positioning the part, the disk is mounted rotatable about an axis whose center coincides with the center of intersection of the axes of the pneumatic tracks, and on the body the concentrically arranged grooves are made in response to the said protrusions, wherein the disk and the housing are installed with the possibility of interaction with each other by means of the stops additionally inserted into each of them, and in the core truncated formed overall to an air pnevmotrekov 2, The device according to claim 1, about the first chamber with the possibility of communication with the system so that the device is facing 2 facing the body, The device according to claim 1, about my power is compressed air. The blades of the disk are made. cr with t about I AND $ fttff FIG. 7 9  FIG. TO 6-6 rotation Phage. sixteen 8-8 FIG. ft